JPS6489388A - Board cleaning device - Google Patents
Board cleaning deviceInfo
- Publication number
- JPS6489388A JPS6489388A JP62245157A JP24515787A JPS6489388A JP S6489388 A JPS6489388 A JP S6489388A JP 62245157 A JP62245157 A JP 62245157A JP 24515787 A JP24515787 A JP 24515787A JP S6489388 A JPS6489388 A JP S6489388A
- Authority
- JP
- Japan
- Prior art keywords
- board
- foreign matter
- cleaning
- brushes
- reverse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title abstract 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 3
- 230000005484 gravity Effects 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
Abstract
PURPOSE:To perfectly clean a board without allowing foreign matter to re- deposit by rotating a brush in reverse to the forwarding direction of the board, tangentially supplying cleaning water in reverse to the rotating direction of the brush, and cleaning both surfaces of the board simultaneously for rough and final cleaning. CONSTITUTION:A board 1 is forwarded between rough cleaning brushes 6, 7 by being placed on a belt 2, facing a film layer 18 such as an electrode atop. The board 1, supported by a buffer bar 4 of a pressure board 3, has foreign matter present on both surfaces thereof eliminated by the brushes 6, 7 which rotate in reverse to the forwarding direction. The foreign matter whose mass is light and which has remained on the brushes is eliminated by injection of cleaning water from nozzles 8, 9, whereby the foreign matter is prevented from being deposited again on the board 1. Then by cleaning the board 1, which is held in a chuck base by being rotated in reverse, from the bottom using a finishing brush 14, the dropping of foreign matter due to specific gravity and contaminated cleaning water is prevented. The brushes 7, 6, one being hard and the other soft, are effective.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245157A JP2512015B2 (en) | 1987-09-29 | 1987-09-29 | Substrate cleaning equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245157A JP2512015B2 (en) | 1987-09-29 | 1987-09-29 | Substrate cleaning equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6489388A true JPS6489388A (en) | 1989-04-03 |
JP2512015B2 JP2512015B2 (en) | 1996-07-03 |
Family
ID=17129462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62245157A Expired - Fee Related JP2512015B2 (en) | 1987-09-29 | 1987-09-29 | Substrate cleaning equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2512015B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100398894B1 (en) * | 2001-01-02 | 2003-09-19 | 주식회사 주연엔지니어링 | The driving gear of front machine which is used for surface process in the manufacturing process of smallest size of pcb |
JP2005302831A (en) * | 2004-04-07 | 2005-10-27 | Disco Abrasive Syst Ltd | Grinder |
WO2011148559A1 (en) * | 2010-05-28 | 2011-12-01 | イーティーシステムエンジニアリング株式会社 | Apparatus for separating semiconductor wafers |
CN109225979A (en) * | 2018-10-11 | 2019-01-18 | 德清誉丰装饰材料有限公司 | A kind of thick china production sawdust cleaning plant |
JP2019147129A (en) * | 2018-02-28 | 2019-09-05 | 紀伊産業株式会社 | Article cleaning device |
-
1987
- 1987-09-29 JP JP62245157A patent/JP2512015B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100398894B1 (en) * | 2001-01-02 | 2003-09-19 | 주식회사 주연엔지니어링 | The driving gear of front machine which is used for surface process in the manufacturing process of smallest size of pcb |
JP2005302831A (en) * | 2004-04-07 | 2005-10-27 | Disco Abrasive Syst Ltd | Grinder |
WO2011148559A1 (en) * | 2010-05-28 | 2011-12-01 | イーティーシステムエンジニアリング株式会社 | Apparatus for separating semiconductor wafers |
JP2011249640A (en) * | 2010-05-28 | 2011-12-08 | Et System Engineering Co Ltd | Semiconductor wafer separation unit |
JP2019147129A (en) * | 2018-02-28 | 2019-09-05 | 紀伊産業株式会社 | Article cleaning device |
CN109225979A (en) * | 2018-10-11 | 2019-01-18 | 德清誉丰装饰材料有限公司 | A kind of thick china production sawdust cleaning plant |
Also Published As
Publication number | Publication date |
---|---|
JP2512015B2 (en) | 1996-07-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |