RU93032451A - TRAVELER FOR CHEMICAL POLISHING OF SUBSTACLES OF TELLURIDE CADMIUM - Google Patents

TRAVELER FOR CHEMICAL POLISHING OF SUBSTACLES OF TELLURIDE CADMIUM

Info

Publication number
RU93032451A
RU93032451A RU93032451/25A RU93032451A RU93032451A RU 93032451 A RU93032451 A RU 93032451A RU 93032451/25 A RU93032451/25 A RU 93032451/25A RU 93032451 A RU93032451 A RU 93032451A RU 93032451 A RU93032451 A RU 93032451A
Authority
RU
Russia
Prior art keywords
chemical polishing
substacles
traveler
telluride cadmium
cadmium
Prior art date
Application number
RU93032451/25A
Other languages
Russian (ru)
Other versions
RU2033658C1 (en
Inventor
В.И. Дронов
Original Assignee
Научно-исследовательский институт материалов электронной техники
Filing date
Publication date
Application filed by Научно-исследовательский институт материалов электронной техники filed Critical Научно-исследовательский институт материалов электронной техники
Priority to RU93032451A priority Critical patent/RU2033658C1/en
Priority claimed from RU93032451A external-priority patent/RU2033658C1/en
Application granted granted Critical
Publication of RU2033658C1 publication Critical patent/RU2033658C1/en
Publication of RU93032451A publication Critical patent/RU93032451A/en

Links

Claims (1)

Изобретение относится к обработке полупроводниковых приборов или их деталей, в частности к химическому полированию полупроводниковых подложек теллурида кадмия различной ориентации. Для получения бездефектной поверхности подложек теллурида кадмия травитель содержит следующие компоненты, мас.%: оксид хрома - 2 oC 15; сульфаминовая кислота - 10 oC 20; вода - остальное.The invention relates to the processing of semiconductor devices or their parts, in particular to the chemical polishing of semiconductor substrates of cadmium telluride of various orientations. To obtain a defect-free surface of cadmium telluride substrates, the etchant contains the following components, wt%: chromium oxide - 2 o C 15; sulfamic acid - 10 o C 20; water - the rest.
RU93032451A 1993-06-21 1993-06-21 Etching agent for chemical smoothing of substrates of cadmium telluride RU2033658C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU93032451A RU2033658C1 (en) 1993-06-21 1993-06-21 Etching agent for chemical smoothing of substrates of cadmium telluride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU93032451A RU2033658C1 (en) 1993-06-21 1993-06-21 Etching agent for chemical smoothing of substrates of cadmium telluride

Publications (2)

Publication Number Publication Date
RU2033658C1 RU2033658C1 (en) 1995-04-20
RU93032451A true RU93032451A (en) 1995-10-20

Family

ID=20143680

Family Applications (1)

Application Number Title Priority Date Filing Date
RU93032451A RU2033658C1 (en) 1993-06-21 1993-06-21 Etching agent for chemical smoothing of substrates of cadmium telluride

Country Status (1)

Country Link
RU (1) RU2033658C1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2619423C1 (en) * 2016-06-06 2017-05-15 Акционерное общество "НПО "Орион" Composition of selective thinner for tellurid of cadmium-mercury
RU2627711C1 (en) * 2016-11-02 2017-08-10 Акционерное общество "НПО "Орион" Polishing etchant composition for chemical-mechanical polishing of cadmium-zinc telluride

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