CN108627149B - 振动器件、角速度传感器、电子设备和移动体 - Google Patents

振动器件、角速度传感器、电子设备和移动体 Download PDF

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Publication number
CN108627149B
CN108627149B CN201810178563.8A CN201810178563A CN108627149B CN 108627149 B CN108627149 B CN 108627149B CN 201810178563 A CN201810178563 A CN 201810178563A CN 108627149 B CN108627149 B CN 108627149B
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China
Prior art keywords
vibration
relay substrate
vibrating
wiring
axis
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CN201810178563.8A
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English (en)
Chinese (zh)
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CN108627149A (zh
Inventor
西泽龙太
村上资郎
山口启一
中川启史
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Seiko Epson Corp
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Seiko Epson Corp
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01933—Velocity, e.g. relative velocity-displacement sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01941—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof characterised by the use of piezoelectric elements, e.g. sensors or actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2401/00—Indexing codes relating to the type of sensors based on the principle of their operation
    • B60G2401/10—Piezoelectric elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Gyroscopes (AREA)
CN201810178563.8A 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体 Active CN108627149B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311069620.6A CN117109549A (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017058170A JP6957921B2 (ja) 2017-03-23 2017-03-23 振動デバイス、角速度センサー、電子機器および移動体
JP2017-058170 2017-03-23

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CN108627149B true CN108627149B (zh) 2023-09-08

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CN202311069620.6A Pending CN117109549A (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

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US (1) US10760908B2 (enExample)
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US11656078B2 (en) * 2017-08-29 2023-05-23 Kyocera Corporation Sensor element and angular velocity sensor
JP2019118073A (ja) * 2017-12-27 2019-07-18 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器および移動体
JP6720959B2 (ja) * 2017-12-27 2020-07-08 Tdk株式会社 振動デバイス
EP3872878B1 (en) * 2018-11-30 2023-04-19 Kyocera Corporation Multi-axial angular velocity sensor
JP2020101484A (ja) * 2018-12-25 2020-07-02 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2020144062A (ja) * 2019-03-08 2020-09-10 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7283140B2 (ja) * 2019-03-11 2023-05-30 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7183902B2 (ja) 2019-03-25 2022-12-06 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251383B2 (ja) 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251385B2 (ja) 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2021032831A (ja) 2019-08-29 2021-03-01 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7276008B2 (ja) 2019-08-29 2023-05-18 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7415444B2 (ja) 2019-10-30 2024-01-17 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7424065B2 (ja) 2020-01-20 2024-01-30 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2021117070A (ja) 2020-01-24 2021-08-10 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2023080593A (ja) * 2021-11-30 2023-06-09 セイコーエプソン株式会社 発振器
CN119309558B (zh) * 2024-12-10 2025-03-25 北京晨晶电子有限公司 一种角速度传感器

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JP2011117858A (ja) * 2009-12-04 2011-06-16 Seiko Epson Corp 物理量検出装置
JP2011137654A (ja) * 2009-12-25 2011-07-14 Tdk Corp 圧電振動デバイス
CN102142827A (zh) * 2010-02-02 2011-08-03 精工爱普生株式会社 振动体、振动装置以及电子设备
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JP2006234463A (ja) * 2005-02-23 2006-09-07 Matsushita Electric Ind Co Ltd 慣性センサ
JP2010223774A (ja) * 2009-03-24 2010-10-07 Seiko Epson Corp 物理量検出装置
JP2011117858A (ja) * 2009-12-04 2011-06-16 Seiko Epson Corp 物理量検出装置
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Also Published As

Publication number Publication date
JP2023040031A (ja) 2023-03-22
CN117109549A (zh) 2023-11-24
JP7205570B2 (ja) 2023-01-17
JP2021152546A (ja) 2021-09-30
JP2018159674A (ja) 2018-10-11
CN108627149A (zh) 2018-10-09
JP6957921B2 (ja) 2021-11-02
US20180274922A1 (en) 2018-09-27
JP2024107114A (ja) 2024-08-08
US10760908B2 (en) 2020-09-01
JP7501607B2 (ja) 2024-06-18

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