CN107063335B - 物理量传感器、电子设备以及移动体 - Google Patents

物理量传感器、电子设备以及移动体 Download PDF

Info

Publication number
CN107063335B
CN107063335B CN201610913280.4A CN201610913280A CN107063335B CN 107063335 B CN107063335 B CN 107063335B CN 201610913280 A CN201610913280 A CN 201610913280A CN 107063335 B CN107063335 B CN 107063335B
Authority
CN
China
Prior art keywords
physical quantity
quantity sensor
sensor element
stress relaxation
relaxation layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201610913280.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN107063335A (zh
Inventor
井出次男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN107063335A publication Critical patent/CN107063335A/zh
Application granted granted Critical
Publication of CN107063335B publication Critical patent/CN107063335B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5635—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating wires or strings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
CN201610913280.4A 2015-10-21 2016-10-19 物理量传感器、电子设备以及移动体 Expired - Fee Related CN107063335B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-207520 2015-10-21
JP2015207520A JP6641878B2 (ja) 2015-10-21 2015-10-21 物理量センサー、電子機器および移動体

Publications (2)

Publication Number Publication Date
CN107063335A CN107063335A (zh) 2017-08-18
CN107063335B true CN107063335B (zh) 2021-05-18

Family

ID=58561988

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610913280.4A Expired - Fee Related CN107063335B (zh) 2015-10-21 2016-10-19 物理量传感器、电子设备以及移动体

Country Status (3)

Country Link
US (1) US10634498B2 (enExample)
JP (1) JP6641878B2 (enExample)
CN (1) CN107063335B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6372361B2 (ja) * 2015-01-16 2018-08-15 株式会社デンソー 複合センサ
JP7024349B2 (ja) * 2017-11-24 2022-02-24 セイコーエプソン株式会社 センサーユニット、センサーユニットの製造方法、慣性計測装置、電子機器、および移動体
JP2020101484A (ja) * 2018-12-25 2020-07-02 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
DE112021003405T5 (de) * 2020-06-24 2023-04-06 Panasonic Intellectual Property Management Co., Ltd. Trägheitskraftsensor
JP2023050517A (ja) * 2021-09-30 2023-04-11 セイコーエプソン株式会社 慣性センサーデバイス及びセンサーモジュール
JP7779093B2 (ja) * 2021-11-10 2025-12-03 セイコーエプソン株式会社 慣性計測装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283424A (ja) * 2004-03-30 2005-10-13 Denso Corp 力学量センサ装置
CN104882469A (zh) * 2014-02-28 2015-09-02 精工爱普生株式会社 电子装置、电子设备以及移动体

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003004450A (ja) * 2001-06-25 2003-01-08 Matsushita Electric Ind Co Ltd 角速度および加速度検出用複合センサ
JP4831949B2 (ja) * 2004-09-08 2011-12-07 株式会社デンソー 物理量センサ装置
JP4492432B2 (ja) * 2005-05-13 2010-06-30 株式会社デンソー 物理量センサ装置の製造方法
JP2007248328A (ja) * 2006-03-17 2007-09-27 Matsushita Electric Ind Co Ltd 複合センサ
JP2008076264A (ja) 2006-09-22 2008-04-03 Matsushita Electric Ind Co Ltd 複合センサ
CN101796374A (zh) 2007-09-03 2010-08-04 松下电器产业株式会社 惯性力传感器
JP5319122B2 (ja) 2008-01-21 2013-10-16 日立オートモティブシステムズ株式会社 慣性センサ
JP4784641B2 (ja) * 2008-12-23 2011-10-05 株式会社デンソー 半導体装置およびその製造方法
JP2012049825A (ja) * 2010-08-26 2012-03-08 Canon Inc 通信装置
JP5838543B2 (ja) * 2010-09-30 2016-01-06 セイコーエプソン株式会社 センサーデバイス、モーションセンサー、および電子機器
WO2012049825A1 (ja) 2010-10-15 2012-04-19 日立オートモティブシステムズ株式会社 物理量検出装置
JP5425824B2 (ja) 2011-02-16 2014-02-26 日立オートモティブシステムズ株式会社 複合センサ
JP2013030850A (ja) * 2011-07-26 2013-02-07 Seiko Epson Corp 振動デバイスおよび電子機器
JP2014013207A (ja) 2012-07-05 2014-01-23 Panasonic Corp 複合センサ
US9638524B2 (en) * 2012-11-30 2017-05-02 Robert Bosch Gmbh Chip level sensor with multiple degrees of freedom
JP5978170B2 (ja) 2013-06-28 2016-08-24 日立オートモティブシステムズ株式会社 トランスファーモールド型センサ装置
JP2015034755A (ja) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
JP6311469B2 (ja) * 2014-06-12 2018-04-18 株式会社デンソー 物理量センサ
JP5999143B2 (ja) * 2014-06-24 2016-09-28 セイコーエプソン株式会社 センサーデバイス及びセンサー
JP6507565B2 (ja) * 2014-10-28 2019-05-08 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
JP6572603B2 (ja) 2015-04-13 2019-09-11 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283424A (ja) * 2004-03-30 2005-10-13 Denso Corp 力学量センサ装置
CN104882469A (zh) * 2014-02-28 2015-09-02 精工爱普生株式会社 电子装置、电子设备以及移动体

Also Published As

Publication number Publication date
JP6641878B2 (ja) 2020-02-05
US20170115116A1 (en) 2017-04-27
US10634498B2 (en) 2020-04-28
JP2017078669A (ja) 2017-04-27
CN107063335A (zh) 2017-08-18

Similar Documents

Publication Publication Date Title
CN107063335B (zh) 物理量传感器、电子设备以及移动体
CN107010588B (zh) 物理量传感器以及物理量传感器的制造方法
CN105758395B (zh) 物理量传感器、电子设备以及移动体
CN106970243A (zh) 电子装置、电子装置的制造方法以及物理量传感器
CN106053883B (zh) 物理量传感器、电子设备以及移动体
US10295346B2 (en) Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
CN111669127B (zh) 振动器件、电子设备以及移动体
US20220236058A1 (en) Vibrator Device, Electronic Apparatus, And Vehicle
CN105424018A (zh) 物理量检测装置、电子设备、移动体
CN103308040A (zh) 传感器元件、传感器器件以及电子设备
JP2021032831A (ja) 振動デバイス、電子機器および移動体
JP6922325B2 (ja) 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP2016170002A (ja) ジャイロモジュール、電子機器及び移動体
JP6443058B2 (ja) 物理量センサー、電子機器および移動体
US10393524B2 (en) Electronic device, electronic apparatus, and moving object
JP6442984B2 (ja) 物理量検出振動素子、物理量センサー、電子機器および移動体
CN107063225A (zh) 电子装置、电子装置的制造方法、电子设备以及移动体
JP6398730B2 (ja) 物理量センサー、物理量センサーの製造方法、電子機器および移動体
JP6939007B2 (ja) センサー、電子機器および移動体
JP6488640B2 (ja) 電子デバイス、電子機器および移動体
JP6488639B2 (ja) 電子デバイス、電子機器および移動体
JP2021021687A (ja) 振動デバイス、電子機器および移動体
JP6492535B2 (ja) 物理量センサー、電子機器および移動体
JP6911446B2 (ja) センサー素子、センサー、電子機器および移動体
JP2021032832A (ja) 振動デバイス、電子機器および移動体

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20210518

CF01 Termination of patent right due to non-payment of annual fee