CN106471151B - 溅镀靶 - Google Patents

溅镀靶 Download PDF

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Publication number
CN106471151B
CN106471151B CN201580034987.1A CN201580034987A CN106471151B CN 106471151 B CN106471151 B CN 106471151B CN 201580034987 A CN201580034987 A CN 201580034987A CN 106471151 B CN106471151 B CN 106471151B
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CN
China
Prior art keywords
target
plate
target plate
sputtering
backboard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580034987.1A
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English (en)
Chinese (zh)
Other versions
CN106471151A (zh
Inventor
彼得·波尔奇克
扎比内·沃利
西格弗里德·克拉斯尼策尔
于尔格·哈格曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ou Ruikang Surface Solutions Inc
Plansee Composite Materials GmbH
Original Assignee
Ou Ruikang Surface Solutions Inc
Plansee Composite Materials GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ou Ruikang Surface Solutions Inc, Plansee Composite Materials GmbH filed Critical Ou Ruikang Surface Solutions Inc
Publication of CN106471151A publication Critical patent/CN106471151A/zh
Application granted granted Critical
Publication of CN106471151B publication Critical patent/CN106471151B/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/067—Borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
CN201580034987.1A 2014-06-27 2015-06-26 溅镀靶 Active CN106471151B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462017909P 2014-06-27 2014-06-27
US62/017,909 2014-06-27
PCT/EP2015/001298 WO2015197196A1 (de) 2014-06-27 2015-06-26 Sputtering target

Publications (2)

Publication Number Publication Date
CN106471151A CN106471151A (zh) 2017-03-01
CN106471151B true CN106471151B (zh) 2019-06-18

Family

ID=53717965

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580034987.1A Active CN106471151B (zh) 2014-06-27 2015-06-26 溅镀靶

Country Status (10)

Country Link
US (1) US10109468B2 (enExample)
EP (1) EP3161180B1 (enExample)
JP (1) JP6567048B2 (enExample)
KR (2) KR20180135120A (enExample)
CN (1) CN106471151B (enExample)
BR (1) BR112016029142A2 (enExample)
MX (1) MX380827B (enExample)
RU (1) RU2696910C2 (enExample)
TW (1) TWI713457B (enExample)
WO (1) WO2015197196A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT15050U1 (de) * 2015-12-18 2016-11-15 Plansee Composite Mat Gmbh Beschichtungsquelle mit Strukturierung
CN110670030A (zh) * 2019-09-29 2020-01-10 洛阳丰联科绑定技术有限公司 一种ito拼接型靶材的粘结方法
CN111118459A (zh) * 2019-12-30 2020-05-08 有研亿金新材料有限公司 一种高性能铁磁性靶材的制备方法
KR102707659B1 (ko) * 2021-11-17 2024-09-19 바짐테크놀로지 주식회사 스퍼터링 타겟 접합체
CN114434107A (zh) * 2022-02-15 2022-05-06 株洲火炬安泰新材料有限公司 一种提高ito靶材焊合率的生产加工方法

Citations (5)

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Publication number Priority date Publication date Assignee Title
CN101518851A (zh) * 2009-02-19 2009-09-02 宁波江丰电子材料有限公司 靶材与背板的焊接结构及方法
CN101745710A (zh) * 2010-01-07 2010-06-23 宁波江丰电子材料有限公司 靶材组件的焊接方法
CN101879640A (zh) * 2009-05-06 2010-11-10 光洋应用材料科技股份有限公司 陶瓷溅镀靶材组件及其焊合方法
CN102039459A (zh) * 2010-11-18 2011-05-04 宁波江丰电子材料有限公司 一种靶材焊接方法
CN102285791A (zh) * 2010-06-04 2011-12-21 三井金属矿业株式会社 Ito溅射靶及其制造方法

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DE2933835C2 (de) * 1979-08-21 1987-02-19 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Befestigen von in Scheiben- oder Plattenform vorliegenden Targetmaterialien auf Kühlteller für Aufstäubanlagen
US4740429A (en) * 1985-07-22 1988-04-26 Ngk Insulators, Ltd. Metal-ceramic joined articles
JPS62278261A (ja) * 1986-05-26 1987-12-03 Seiko Epson Corp スパツタ用タ−ゲツトの製造方法
JPS63216969A (ja) * 1987-03-05 1988-09-09 Daido Steel Co Ltd 加工方法
JPS63241167A (ja) * 1987-03-30 1988-10-06 Seiko Epson Corp スパツタリング用タ−ゲツト
RU2091501C1 (ru) * 1991-04-22 1997-09-27 Акционерное общество открытого типа "Всероссийский алюминиево-магниевый институт" Способ изготовления мишени для магнетронного распыления из алюминия особой чистоты
RU2068459C1 (ru) * 1991-06-03 1996-10-27 Центральный научно-исследовательский институт технологии судостроения Способ обработки поверхности изделий из стали и сплавов на основе меди
JPH05214518A (ja) * 1992-02-04 1993-08-24 Hitachi Metals Ltd スパッタリングターゲットとバッキングプレートの接合体の矯正方法およびスパッタリングターゲット材
EP1322796B1 (en) * 2000-08-17 2010-06-02 Tosoh Smd, Inc. High purity sputter targets with target end-of-life indication and method of manufacture
AT4240U1 (de) 2000-11-20 2001-04-25 Plansee Ag Verfahren zur herstellung einer verdampfungsquelle
MY138584A (en) * 2003-10-06 2009-07-31 Heraeus Inc Sputter target having modified surface texture
US20050072668A1 (en) * 2003-10-06 2005-04-07 Heraeus, Inc. Sputter target having modified surface texture
JP4562400B2 (ja) * 2004-01-28 2010-10-13 京セラ株式会社 活性金属を含むロウ材を用いた接合体及びその製造方法
RU2305717C2 (ru) * 2005-11-14 2007-09-10 Государственное образовательное учреждение высшего профессионального образования "Московский государственный институт стали и сплавов" (технологический университет) Мишень для получения функциональных покрытий и способ ее изготовления
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Publication number Priority date Publication date Assignee Title
CN101518851A (zh) * 2009-02-19 2009-09-02 宁波江丰电子材料有限公司 靶材与背板的焊接结构及方法
CN101879640A (zh) * 2009-05-06 2010-11-10 光洋应用材料科技股份有限公司 陶瓷溅镀靶材组件及其焊合方法
CN101745710A (zh) * 2010-01-07 2010-06-23 宁波江丰电子材料有限公司 靶材组件的焊接方法
CN102285791A (zh) * 2010-06-04 2011-12-21 三井金属矿业株式会社 Ito溅射靶及其制造方法
CN102039459A (zh) * 2010-11-18 2011-05-04 宁波江丰电子材料有限公司 一种靶材焊接方法

Also Published As

Publication number Publication date
US10109468B2 (en) 2018-10-23
US20170133209A1 (en) 2017-05-11
MX2016016573A (es) 2017-08-18
TW201615875A (zh) 2016-05-01
BR112016029142A2 (pt) 2017-08-22
EP3161180A1 (de) 2017-05-03
RU2016147509A3 (enExample) 2018-11-15
CN106471151A (zh) 2017-03-01
JP6567048B2 (ja) 2019-08-28
TWI713457B (zh) 2020-12-21
JP2017524831A (ja) 2017-08-31
KR20180135120A (ko) 2018-12-19
KR20170017936A (ko) 2017-02-15
MX380827B (es) 2025-03-12
WO2015197196A1 (de) 2015-12-30
EP3161180B1 (de) 2019-02-06
RU2696910C2 (ru) 2019-08-07
KR102111833B1 (ko) 2020-05-18
RU2016147509A (ru) 2018-07-27

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