CN105431778A - 感光性树脂组合物 - Google Patents

感光性树脂组合物 Download PDF

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Publication number
CN105431778A
CN105431778A CN201480042096.6A CN201480042096A CN105431778A CN 105431778 A CN105431778 A CN 105431778A CN 201480042096 A CN201480042096 A CN 201480042096A CN 105431778 A CN105431778 A CN 105431778A
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CN
China
Prior art keywords
epoxy resin
photosensitive polymer
polymer combination
mass parts
phenyl
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Pending
Application number
CN201480042096.6A
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English (en)
Chinese (zh)
Inventor
布施好章
吉野利纯
小岛正幸
大崎真也
佐藤邦明
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Showa Denko Materials Co ltd
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Hitachi Chemical Co Ltd
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Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of CN105431778A publication Critical patent/CN105431778A/zh
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14Polymers provided for in subclass C08G
    • C08F290/144Polymers containing more than one epoxy group per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • C08G59/1433Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds
    • C08G59/1438Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds containing oxygen
    • C08G59/1455Monocarboxylic acids, anhydrides, halides, or low-molecular-weight esters thereof
    • C08G59/1461Unsaturated monoacids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • C08L63/10Epoxy resins modified by unsaturated compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/0275Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with dithiol or polysulfide compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Emergency Medicine (AREA)
  • Materials For Photolithography (AREA)
  • Epoxy Resins (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
CN201480042096.6A 2013-08-02 2014-08-01 感光性树脂组合物 Pending CN105431778A (zh)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP2013-161893 2013-08-02
JP2013161893 2013-08-02
JP2013-161888 2013-08-02
JP2013161885 2013-08-02
JP2013161886 2013-08-02
JP2013-161886 2013-08-02
JP2013-161890 2013-08-02
JP2013161890 2013-08-02
JP2013-161885 2013-08-02
JP2013161888 2013-08-02
PCT/JP2014/070400 WO2015016362A1 (ja) 2013-08-02 2014-08-01 感光性樹脂組成物

Publications (1)

Publication Number Publication Date
CN105431778A true CN105431778A (zh) 2016-03-23

Family

ID=52431885

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480042096.6A Pending CN105431778A (zh) 2013-08-02 2014-08-01 感光性树脂组合物

Country Status (5)

Country Link
JP (1) JP6455433B2 (ja)
KR (4) KR20160039579A (ja)
CN (1) CN105431778A (ja)
TW (2) TWI691792B (ja)
WO (1) WO2015016362A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108957954A (zh) * 2018-08-03 2018-12-07 广东泰亚达光电有限公司 一种新型激光直描成像干膜及其制备方法
WO2019173967A1 (en) * 2018-03-13 2019-09-19 Hitachi Chemical Company, Ltd. Photosensitizer, photosensitive resin composition, photosensitive element, and method of producing wiring board
WO2019173966A1 (en) * 2018-03-13 2019-09-19 Hitachi Chemical Company, Ltd. Photosensitizer, photosensitive resin composition, photosensitive element, and method of producing wiring board
CN111406233A (zh) * 2017-12-06 2020-07-10 日本化药株式会社 感光性树脂组合物、干膜抗蚀剂及树脂组合物与干膜抗蚀剂的硬化物
CN111624852A (zh) * 2019-02-28 2020-09-04 东京应化工业株式会社 感光性树脂组合物及玻璃基板的蚀刻方法
CN112485968A (zh) * 2019-09-11 2021-03-12 株式会社田村制作所 感光性树脂组合物、干膜及具有感光性树脂组合物的光固化物的印制电路板

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JP6710059B2 (ja) * 2015-02-26 2020-06-17 マクセルホールディングス株式会社 配列用マスク及びその製造方法、半田バンプの形成方法
JP7018168B2 (ja) 2015-12-22 2022-02-10 昭和電工マテリアルズ株式会社 感光性樹脂組成物、それを用いたドライフィルム、プリント配線板、及びプリント配線板の製造方法
US20190031790A1 (en) * 2016-01-12 2019-01-31 Hitachi Chemical Company, Ltd. Photosensitive resin composition, dry film using same, printed wiring board, and method for manufacturing printed wiring board
CN105428245B (zh) * 2016-01-26 2019-03-01 京东方科技集团股份有限公司 像素结构及其制备方法、阵列基板和显示装置
JPWO2018179259A1 (ja) * 2017-03-30 2020-06-18 日立化成株式会社 感光性樹脂組成物、それを用いたドライフィルム、プリント配線板、及び、プリント配線板の製造方法
JP6601634B2 (ja) * 2017-03-31 2019-11-06 協立化学産業株式会社 変性樹脂及びそれを含む硬化性樹脂組成物
US11022880B2 (en) * 2017-10-25 2021-06-01 Tokyo Ohka Kogyo Co., Ltd. Chemically amplified positive-type photosensitive resin composition, photosensitive dry film, method of manufacturing photosensitive dry film, method of manufacturing patterned resist film, method of manufacturing substrate with template, method of manufacturing plated article, and mercapto compound
CN112424289A (zh) * 2018-08-01 2021-02-26 东丽株式会社 树脂组合物、树脂片、固化膜、固化膜的制造方法、半导体装置及显示装置
JP7216506B2 (ja) * 2018-09-11 2023-02-01 太陽インキ製造株式会社 めっきレジスト用感光性樹脂組成物、ドライフィルムおよびプリント配線板の製造方法
JP7270204B2 (ja) * 2018-11-09 2023-05-10 互応化学工業株式会社 皮膜の製造方法及びプリント配線板
CN113929624A (zh) * 2020-07-13 2022-01-14 常州强力电子新材料股份有限公司 一种吡唑啉类化合物、感光性树脂组合物及图形化方法
CN114437406B (zh) * 2020-11-06 2024-06-04 中国石油化工股份有限公司 复配型抗氧剂和丁二烯橡胶组合物及其应用
CN115128901A (zh) 2021-03-26 2022-09-30 太阳油墨制造株式会社 感光性树脂组合物、固化物、印刷布线板、及印刷布线板的制造方法
WO2023073799A1 (ja) * 2021-10-26 2023-05-04 株式会社レゾナック 感光性樹脂組成物、感光性エレメント、及び、積層体の製造方法

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CN1945429A (zh) * 2005-10-05 2007-04-11 旭化成电子材料元件株式会社 感光性树脂组合物及层压体
CN101681107A (zh) * 2007-05-11 2010-03-24 日立化成工业株式会社 感光性树脂组合物、感光性元件、抗蚀剂图形的形成方法以及印刷电路板的制造方法
CN102138104A (zh) * 2008-09-04 2011-07-27 日立化成工业株式会社 半导体封装用印刷电路板的保护膜用感光性树脂组合物
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111406233A (zh) * 2017-12-06 2020-07-10 日本化药株式会社 感光性树脂组合物、干膜抗蚀剂及树脂组合物与干膜抗蚀剂的硬化物
CN111406233B (zh) * 2017-12-06 2023-12-26 日本化药株式会社 感光性树脂组合物、干膜抗蚀剂及其硬化物
WO2019173967A1 (en) * 2018-03-13 2019-09-19 Hitachi Chemical Company, Ltd. Photosensitizer, photosensitive resin composition, photosensitive element, and method of producing wiring board
WO2019173966A1 (en) * 2018-03-13 2019-09-19 Hitachi Chemical Company, Ltd. Photosensitizer, photosensitive resin composition, photosensitive element, and method of producing wiring board
CN108957954A (zh) * 2018-08-03 2018-12-07 广东泰亚达光电有限公司 一种新型激光直描成像干膜及其制备方法
CN111624852A (zh) * 2019-02-28 2020-09-04 东京应化工业株式会社 感光性树脂组合物及玻璃基板的蚀刻方法
CN112485968A (zh) * 2019-09-11 2021-03-12 株式会社田村制作所 感光性树脂组合物、干膜及具有感光性树脂组合物的光固化物的印制电路板

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JP6455433B2 (ja) 2019-01-23
TWI683186B (zh) 2020-01-21
KR20210046830A (ko) 2021-04-28
KR20230124105A (ko) 2023-08-24
KR20210150619A (ko) 2021-12-10
TWI691792B (zh) 2020-04-21
JPWO2015016362A1 (ja) 2017-03-02
TW201937290A (zh) 2019-09-16
KR20160039579A (ko) 2016-04-11
KR102570738B1 (ko) 2023-08-25
WO2015016362A1 (ja) 2015-02-05
TW201523150A (zh) 2015-06-16

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