CN104703734B - 硬质皮膜被覆工具及其制造方法 - Google Patents

硬质皮膜被覆工具及其制造方法 Download PDF

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Publication number
CN104703734B
CN104703734B CN201380051064.8A CN201380051064A CN104703734B CN 104703734 B CN104703734 B CN 104703734B CN 201380051064 A CN201380051064 A CN 201380051064A CN 104703734 B CN104703734 B CN 104703734B
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China
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gas
layer
titanium carbonitride
film
mass
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Chinese (zh)
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CN104703734A (zh
Inventor
福永有三
小关秀峰
久保田和幸
井上谦
井上谦一
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Koki Holdings Co Ltd
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Hitachi Koki Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CN201380051064.8A 2012-10-01 2013-09-30 硬质皮膜被覆工具及其制造方法 Active CN104703734B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012219650 2012-10-01
JP2012-219650 2012-10-01
PCT/JP2013/076583 WO2014054591A1 (ja) 2012-10-01 2013-09-30 硬質皮膜被覆工具及びその製造方法

Publications (2)

Publication Number Publication Date
CN104703734A CN104703734A (zh) 2015-06-10
CN104703734B true CN104703734B (zh) 2016-08-24

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CN201380051064.8A Active CN104703734B (zh) 2012-10-01 2013-09-30 硬质皮膜被覆工具及其制造方法

Country Status (7)

Country Link
US (1) US9534292B2 (https=)
EP (1) EP2905098B1 (https=)
JP (1) JP6011631B2 (https=)
KR (1) KR102056206B1 (https=)
CN (1) CN104703734B (https=)
IN (1) IN2015DN01831A (https=)
WO (1) WO2014054591A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6728551B2 (ja) * 2016-08-25 2020-07-22 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
CN121380952A (zh) 2017-04-07 2026-01-23 山特维克知识产权股份有限公司 涂层切削工具
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device
CN108559957B (zh) * 2018-04-23 2019-09-20 广东工业大学 一种具有pvd涂层的钛合金切削刀具材料及其制备方法
WO2020174756A1 (ja) * 2019-02-26 2020-09-03 住友電工ハードメタル株式会社 切削工具
JP7247452B2 (ja) * 2019-03-25 2023-03-29 株式会社Moldino 被覆工具
JP7511583B2 (ja) * 2019-05-27 2024-07-05 エービー サンドビック コロマント 被覆切削工具
JP6992230B1 (ja) * 2020-06-04 2022-01-13 住友電工ハードメタル株式会社 切削工具
JP7566153B2 (ja) * 2021-07-02 2024-10-11 京セラ株式会社 被覆工具
CN117203010B (zh) * 2022-01-25 2024-06-07 住友电气工业株式会社 切削工具及其制造方法
CN119465075B (zh) * 2025-01-13 2025-04-11 赣州澳克泰工具技术有限公司 一种化学气相沉积硼化铪多层涂层刀具及其制备方法
CN121183307B (zh) * 2025-11-26 2026-03-17 赣州澳克泰工具技术有限公司 一种多层涂层刀具及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1112863A (zh) * 1994-03-22 1995-12-06 桑德维克公司 涂层刀具
JP2000355777A (ja) * 1999-06-14 2000-12-26 Toshiba Tungaloy Co Ltd 密着性に優れた表面被覆焼結合金およびその製法
CN1857836A (zh) * 2005-05-06 2006-11-08 山高刀具公司 耐磨的薄涂层

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2733809B2 (ja) * 1992-02-26 1998-03-30 日立ツール株式会社 被覆工具
JPH05263252A (ja) * 1992-03-19 1993-10-12 Sumitomo Electric Ind Ltd 被覆超硬合金部材
JP3503658B2 (ja) 1994-05-27 2004-03-08 三菱マテリアル株式会社 表面被覆ｗｃ基超硬合金製切削工具
JP2861832B2 (ja) * 1994-10-20 1999-02-24 三菱マテリアル株式会社 硬質被覆層がすぐれた層間密着性を有する表面被覆炭化タングステン基超硬合金製切削工具
US5652045A (en) * 1994-10-20 1997-07-29 Mitsubishi Materials Corporation Coated tungsten carbide-based cemented carbide blade member
JPH09262705A (ja) 1996-03-28 1997-10-07 Mitsubishi Materials Corp 硬質被覆層がすぐれた靭性を有する表面被覆炭化タングステン基超硬合金製切削工具
US6221469B1 (en) * 1998-12-09 2001-04-24 Seco Tools Ab Grade for steel
JP4461407B2 (ja) * 2000-05-18 2010-05-12 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆超硬合金製切削工具
JP4022865B2 (ja) * 2002-09-27 2007-12-19 住友電工ハードメタル株式会社 被覆切削工具
SE527346C2 (sv) * 2003-04-24 2006-02-14 Seco Tools Ab Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret
JP4351521B2 (ja) * 2003-11-27 2009-10-28 京セラ株式会社 表面被覆切削工具
JP4534790B2 (ja) * 2005-02-23 2010-09-01 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具
US7597970B2 (en) * 2005-03-22 2009-10-06 Kyocera Corporation Surface coated member and cutting tool
JP4720283B2 (ja) 2005-05-16 2011-07-13 三菱マテリアル株式会社 厚膜化α型酸化アルミニウム層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具
ES2426582T5 (es) 2006-09-05 2016-11-22 Tungaloy Corporation Herramienta de corte recubierta y método para producirla
JP5217305B2 (ja) * 2006-09-05 2013-06-19 株式会社タンガロイ 被覆切削工具およびその製造方法
US8449992B2 (en) 2008-02-27 2013-05-28 Kyocera Corporation Surface-coated member and cutting tool
JP5046196B2 (ja) 2009-08-06 2012-10-10 日立ツール株式会社 被覆超硬合金工具
WO2012133461A1 (ja) * 2011-03-31 2012-10-04 日立ツール株式会社 硬質皮膜被覆部材及びその製造方法、並びにそれを具備する刃先交換式回転工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1112863A (zh) * 1994-03-22 1995-12-06 桑德维克公司 涂层刀具
JP2000355777A (ja) * 1999-06-14 2000-12-26 Toshiba Tungaloy Co Ltd 密着性に優れた表面被覆焼結合金およびその製法
CN1857836A (zh) * 2005-05-06 2006-11-08 山高刀具公司 耐磨的薄涂层

Also Published As

Publication number Publication date
IN2015DN01831A (https=) 2015-05-29
US20150240353A1 (en) 2015-08-27
CN104703734A (zh) 2015-06-10
JPWO2014054591A1 (ja) 2016-08-25
KR20150064187A (ko) 2015-06-10
KR102056206B1 (ko) 2019-12-16
EP2905098A4 (en) 2016-03-30
US9534292B2 (en) 2017-01-03
JP6011631B2 (ja) 2016-10-19
EP2905098A1 (en) 2015-08-12
WO2014054591A1 (ja) 2014-04-10
EP2905098B1 (en) 2017-02-01

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