CN103958379B - 基板处理装置及基板处理方法 - Google Patents

基板处理装置及基板处理方法 Download PDF

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Publication number
CN103958379B
CN103958379B CN201280053802.8A CN201280053802A CN103958379B CN 103958379 B CN103958379 B CN 103958379B CN 201280053802 A CN201280053802 A CN 201280053802A CN 103958379 B CN103958379 B CN 103958379B
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CN
China
Prior art keywords
substrate
roller
tension force
pattern
guiding elements
Prior art date
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CN201280053802.8A
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English (en)
Chinese (zh)
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CN103958379A (zh
Inventor
堀正和
奈良圭
横田宗泰
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Nikon Corp
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Nikon Corp
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Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN201611176699.2A priority Critical patent/CN106919003B/zh
Publication of CN103958379A publication Critical patent/CN103958379A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
    • B65H23/1882—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling longitudinal register of web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/11—Means using fluid made only for exhausting gaseous medium producing fluidised bed
    • B65H2406/111—Means using fluid made only for exhausting gaseous medium producing fluidised bed for handling material along a curved path, e.g. fluidised turning bar
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/12—Width
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B65H2511/512—Marks, e.g. invisible to the human eye; Patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/42—Cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material
    • B65H2601/254—Permanent deformation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/03—Image reproduction devices
    • B65H2801/15—Digital printing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Liquid Crystal (AREA)
  • Advancing Webs (AREA)
  • Electroluminescent Light Sources (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
CN201280053802.8A 2011-11-04 2012-09-27 基板处理装置及基板处理方法 Active CN103958379B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611176699.2A CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-242788 2011-11-04
JP2011242788 2011-11-04
PCT/JP2012/074830 WO2013065429A1 (ja) 2011-11-04 2012-09-27 基板処理装置、及び基板処理方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201611176699.2A Division CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Publications (2)

Publication Number Publication Date
CN103958379A CN103958379A (zh) 2014-07-30
CN103958379B true CN103958379B (zh) 2016-12-28

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201280053802.8A Active CN103958379B (zh) 2011-11-04 2012-09-27 基板处理装置及基板处理方法
CN201611176699.2A Active CN106919003B (zh) 2011-11-04 2012-09-27 图案形成方法及装置、图案曝光方法、以及元件制造方法

Family Applications After (1)

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Country Status (5)

Country Link
JP (5) JP5842925B2 (ko)
KR (2) KR101623695B1 (ko)
CN (2) CN103958379B (ko)
TW (1) TWI541932B (ko)
WO (1) WO2013065429A1 (ko)

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US10246287B2 (en) * 2014-09-04 2019-04-02 Nikon Corporation Processing system and device manufacturing method
JP5799181B1 (ja) * 2015-01-07 2015-10-21 住友化学株式会社 有機電子素子の製造方法
JP6447151B2 (ja) * 2015-01-14 2019-01-09 株式会社Ihi テンション制御装置及び搬送装置
WO2016136974A1 (ja) * 2015-02-27 2016-09-01 株式会社ニコン 基板処理装置、デバイス製造システム及びデバイス製造方法
JP2019079594A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の発光パターン形成方法
JP2019079595A (ja) * 2016-03-18 2019-05-23 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子のパターニング方法及びパターニング装置
KR102379193B1 (ko) * 2016-05-19 2022-03-28 가부시키가이샤 니콘 기판 지지 장치, 노광 장치, 및 패터닝 장치
CN106226968B (zh) * 2016-09-30 2018-11-09 成都捷翼电子科技有限公司 一种卷对卷柔性电子纸贴合装置及贴合方法
JP6824713B2 (ja) * 2016-11-30 2021-02-03 キヤノン株式会社 インプリント方法、インプリント装置、型、および物品の製造方法
JP6818395B2 (ja) * 2016-12-22 2021-01-20 株式会社オーク製作所 露光装置
JP6461235B2 (ja) * 2017-05-22 2019-01-30 キヤノントッキ株式会社 基板載置装置、成膜装置、基板載置方法、成膜方法、および電子デバイスの製造方法
TWI813592B (zh) 2017-10-30 2023-09-01 美商康寧公司 用於處理薄玻璃帶的系統及方法
KR102100550B1 (ko) * 2018-01-29 2020-04-13 충북대학교 산학협력단 구리 전극 제작 방법 및 구리 전극 제작 시스템
JP7058385B2 (ja) * 2018-03-23 2022-04-22 株式会社浅野研究所 差圧成形装置、及び、差圧成形方法
BR112021004355A2 (pt) * 2018-09-10 2021-05-25 Ball Corporation método e aparelho para controlar uma operação realizada em uma folha contínua de material
TW202100832A (zh) * 2019-03-11 2021-01-01 以色列商核心流有限公司 用於卷對卷製程之流體流腹板張力裝置
CN109850657B (zh) * 2019-04-15 2022-09-06 厦门前润科技有限公司 一种高延展柔性材料的分切机及其恒定宽度的控制方法
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AU2020417363B2 (en) 2019-12-31 2023-03-16 Zhejiang Shaoxing Supor Domestic Electrical Appliance Co., Ltd. Cooking appliance
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Also Published As

Publication number Publication date
JP5962831B2 (ja) 2016-08-03
KR101623666B1 (ko) 2016-05-31
JP2018109786A (ja) 2018-07-12
CN103958379A (zh) 2014-07-30
JP5822016B2 (ja) 2015-11-24
WO2013065429A1 (ja) 2013-05-10
JPWO2013065429A1 (ja) 2015-04-02
JP5842925B2 (ja) 2016-01-13
JP2015034989A (ja) 2015-02-19
JP2016029484A (ja) 2016-03-03
TWI541932B (zh) 2016-07-11
CN106919003B (zh) 2018-10-16
KR101623695B1 (ko) 2016-05-23
TW201322361A (zh) 2013-06-01
JP2016197241A (ja) 2016-11-24
KR20160006242A (ko) 2016-01-18
JP6308247B2 (ja) 2018-04-11
CN106919003A (zh) 2017-07-04
KR20140087024A (ko) 2014-07-08

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