CN103707285B - 搬入搬出机器人 - Google Patents

搬入搬出机器人 Download PDF

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Publication number
CN103707285B
CN103707285B CN201310455928.4A CN201310455928A CN103707285B CN 103707285 B CN103707285 B CN 103707285B CN 201310455928 A CN201310455928 A CN 201310455928A CN 103707285 B CN103707285 B CN 103707285B
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CN
China
Prior art keywords
loading
unloading
head
arm
base
Prior art date
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Active
Application number
CN201310455928.4A
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English (en)
Chinese (zh)
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CN103707285A (zh
Inventor
安藤宽晃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
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Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of CN103707285A publication Critical patent/CN103707285A/zh
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Publication of CN103707285B publication Critical patent/CN103707285B/zh
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201310455928.4A 2012-10-04 2013-09-29 搬入搬出机器人 Active CN103707285B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012222551A JP5990359B2 (ja) 2012-10-04 2012-10-04 搬入出ロボット
JP2012-222551 2012-10-04

Publications (2)

Publication Number Publication Date
CN103707285A CN103707285A (zh) 2014-04-09
CN103707285B true CN103707285B (zh) 2016-06-29

Family

ID=49354445

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310455928.4A Active CN103707285B (zh) 2012-10-04 2013-09-29 搬入搬出机器人

Country Status (6)

Country Link
US (1) US9174346B2 (https=)
EP (2) EP3056321B1 (https=)
JP (1) JP5990359B2 (https=)
KR (1) KR101580718B1 (https=)
CN (1) CN103707285B (https=)
TW (1) TWI529045B (https=)

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JP6411852B2 (ja) * 2014-10-07 2018-10-24 平田機工株式会社 搬送装置、搬送システム及び搬送方法
JP6453353B2 (ja) * 2014-10-10 2019-01-16 川崎重工業株式会社 基板搬送ロボットおよびその運転方法
WO2016172003A1 (en) * 2015-04-20 2016-10-27 Applied Materials, Inc. Buffer chamber wafer heating mechanism and supporting robot
JP6487266B2 (ja) * 2015-04-27 2019-03-20 日本電産サンキョー株式会社 製造システム
JP6487267B2 (ja) * 2015-04-27 2019-03-20 日本電産サンキョー株式会社 製造システム
JP6594177B2 (ja) * 2015-11-24 2019-10-23 平田機工株式会社 ハンド部材およびハンド
CN107378982A (zh) * 2017-09-12 2017-11-24 李从宾 一种智能机器人抓取装置
TWI758595B (zh) * 2018-03-31 2022-03-21 日商平田機工股份有限公司 腔室構造
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
JP7225613B2 (ja) 2018-09-03 2023-02-21 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
JP7409800B2 (ja) * 2019-08-09 2024-01-09 川崎重工業株式会社 ロボット制御装置、ロボット、及びロボット制御方法
TWI703079B (zh) * 2019-11-21 2020-09-01 辛耘企業股份有限公司 輸送裝置
KR102272535B1 (ko) * 2020-12-14 2021-07-05 (주)볼타오토메이션 반송로봇용 듀얼타입의 반송암모듈
KR102348261B1 (ko) * 2021-05-31 2022-01-10 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
KR102307690B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
KR102307687B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 기판 이송 로봇을 진공 챔버 내에서 주행하기 위한 주행 로봇
KR102396650B1 (ko) * 2021-07-21 2022-05-12 주식회사 싸이맥스 3절 링크 대기형 로봇
CN114043464B (zh) * 2021-11-26 2023-11-03 四川建安工业有限责任公司 可伸缩式机械手
WO2023188177A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット制御装置
WO2023188181A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット

Citations (2)

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CN1405839A (zh) * 2001-08-08 2003-03-26 东京毅力科创株式会社 基板搬运装置、基板处理系统及基板搬运方法
CN101318325A (zh) * 2007-06-05 2008-12-10 日本电产三协株式会社 工业用机器人

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US4585387A (en) * 1983-10-11 1986-04-29 William Jayne Robot arm
JPH03154736A (ja) * 1989-11-10 1991-07-02 Hitachi Ltd 移動体のストツパ機構
JPH0549293U (ja) * 1991-11-29 1993-06-29 ぺんてる株式会社 ロボットア−ムのストッパ装置
JPH0650778U (ja) * 1992-12-24 1994-07-12 株式会社ダイフク アーム回動式作業装置
JPH08172121A (ja) 1994-12-20 1996-07-02 Hitachi Ltd 基板搬送装置
US5993142A (en) * 1997-07-10 1999-11-30 Genmark Automation, Inc. Robot having multiple degrees of freedom in an isolated environment
JPH11188671A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JPH11300659A (ja) * 1998-04-24 1999-11-02 Mecs Corp 薄型基板搬送多関節ロボット
JP2000000786A (ja) * 1998-06-16 2000-01-07 Komatsu Ltd 同期制御装置
JP2000077499A (ja) 1998-09-03 2000-03-14 Dainippon Screen Mfg Co Ltd 基板処理装置
US6297611B1 (en) * 2000-07-06 2001-10-02 Genmark Automation Robot having independent end effector linkage motion
JP4411025B2 (ja) * 2003-07-11 2010-02-10 株式会社ダイヘン ２アーム式搬送ロボット
JP5059729B2 (ja) * 2008-09-30 2012-10-31 株式会社日立ハイテクコントロールシステムズ ウェーハ搬送ロボット及びウェーハ搬送装置
US8757345B2 (en) * 2009-04-29 2014-06-24 Novellus Systems, Inc. Magnetic rotational hardstop for robot
JP2011119556A (ja) * 2009-12-07 2011-06-16 Yaskawa Electric Corp 水平多関節ロボットおよびそれを備えた搬送装置
JP5071514B2 (ja) * 2010-04-21 2012-11-14 株式会社安川電機 水平多関節ロボットおよびそれを備えた基板搬送システム
JP5578973B2 (ja) * 2010-07-16 2014-08-27 日本電産サンキョー株式会社 産業用ロボット
JP5565345B2 (ja) * 2011-03-07 2014-08-06 株式会社安川電機 搬送ロボット

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1405839A (zh) * 2001-08-08 2003-03-26 东京毅力科创株式会社 基板搬运装置、基板处理系统及基板搬运方法
CN101318325A (zh) * 2007-06-05 2008-12-10 日本电产三协株式会社 工业用机器人

Also Published As

Publication number Publication date
TWI529045B (zh) 2016-04-11
US9174346B2 (en) 2015-11-03
EP2716416A3 (en) 2014-11-12
EP2716416A2 (en) 2014-04-09
KR101580718B1 (ko) 2015-12-28
JP5990359B2 (ja) 2016-09-14
KR20140044278A (ko) 2014-04-14
CN103707285A (zh) 2014-04-09
EP3056321A2 (en) 2016-08-17
EP3056321A3 (en) 2017-03-01
JP2014073558A (ja) 2014-04-24
US20140099180A1 (en) 2014-04-10
TW201424961A (zh) 2014-07-01
EP3056321B1 (en) 2019-07-03
EP2716416B1 (en) 2016-04-27

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