CN102841395B - 透射式衍射光栅以及检测装置 - Google Patents

透射式衍射光栅以及检测装置 Download PDF

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Publication number
CN102841395B
CN102841395B CN201210214061.9A CN201210214061A CN102841395B CN 102841395 B CN102841395 B CN 102841395B CN 201210214061 A CN201210214061 A CN 201210214061A CN 102841395 B CN102841395 B CN 102841395B
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CN
China
Prior art keywords
diffraction grating
layer
diffraction
angle
refractive index
Prior art date
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Expired - Fee Related
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CN201210214061.9A
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English (en)
Chinese (zh)
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CN102841395A (zh
Inventor
尼子淳
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Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN102841395A publication Critical patent/CN102841395A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4261—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element with major polarization dependent properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Polarising Elements (AREA)
CN201210214061.9A 2011-06-23 2012-06-25 透射式衍射光栅以及检测装置 Expired - Fee Related CN102841395B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011139527A JP2013007830A (ja) 2011-06-23 2011-06-23 透過型回折格子及び検出装置
JP2011-139527 2011-06-23

Publications (2)

Publication Number Publication Date
CN102841395A CN102841395A (zh) 2012-12-26
CN102841395B true CN102841395B (zh) 2017-03-01

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CN201210214061.9A Expired - Fee Related CN102841395B (zh) 2011-06-23 2012-06-25 透射式衍射光栅以及检测装置

Country Status (3)

Country Link
US (1) US9041924B2 (enExample)
JP (1) JP2013007830A (enExample)
CN (1) CN102841395B (enExample)

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US10539813B2 (en) * 2004-01-28 2020-01-21 Pamela Saha Deformable photoelastic device
JP6117431B2 (ja) * 2015-03-16 2017-04-19 三井金属鉱業株式会社 多孔質体、多孔質接合体、金属溶湯用濾過フィルタ、焼成用治具および多孔質体の製造方法
CN104835998B (zh) * 2015-05-13 2017-08-29 北京理工大学 基于分布式布拉格反射镜的多通道电磁波极化滤波器
JP6694896B2 (ja) * 2015-12-15 2020-05-20 株式会社堀場製作所 分光器、光学検査装置、及び、ｏｃｔ装置
US10035473B2 (en) * 2016-11-04 2018-07-31 Ford Global Technologies, Llc Vehicle trim components
CN107046222B (zh) * 2017-02-22 2020-12-15 天津大学 一种实现相近双波长输出的内腔光学参量振荡器
JP2021504736A (ja) * 2017-11-21 2021-02-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 導波結合器の製造方法
CN107942427B (zh) * 2017-12-29 2021-02-19 明基材料有限公司 光学膜
JP7060799B2 (ja) * 2018-05-31 2022-04-27 日亜化学工業株式会社 光源装置
JP7319106B2 (ja) * 2019-06-28 2023-08-01 株式会社ミツトヨ 格子部品およびその製造方法
CN111596399B (zh) * 2020-05-28 2021-07-06 武汉理工大学 蓝光波段非对称超材料偏振调控器及其制造方法
CN111765973B (zh) * 2020-05-28 2021-09-14 昆明理工大学 一种基于石墨烯纳米带阵列光栅的激光偏振方向检测装置及检测方法
CN113695267B (zh) * 2021-08-30 2023-05-26 深圳市洲明科技股份有限公司 一种墨色分选装置及其分选方法
CN113866858B (zh) * 2021-09-13 2024-04-09 中国人民解放军战略支援部队航天工程大学 一种近红外圆偏振光成像衍射光学器件
CN115031838B (zh) * 2022-05-05 2024-10-22 西安应用光学研究所 扫描式双层二次衍射线阵光谱仪波长标定方法
US20230384494A1 (en) * 2022-07-11 2023-11-30 Wasatch Photonics, Inc. Diffraction grating systems
CN117406320B (zh) * 2023-12-13 2024-02-13 长春理工大学 具有宽谱段宽角度衍射抑制效果的双层二维光栅结构
CN118210092B (zh) * 2024-05-22 2024-11-12 苏州大学 一种宽波段复合超表面光栅及其设计方法

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JPH0989775A (ja) * 1995-07-19 1997-04-04 Kdk Corp 分光測定装置及び自動分析装置
US5959704A (en) * 1996-02-08 1999-09-28 Fujitsu Limited Display device having diffraction grating
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US6583873B1 (en) * 2000-09-25 2003-06-24 The Carnegie Institution Of Washington Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating
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JP5724213B2 (ja) 2010-05-13 2015-05-27 セイコーエプソン株式会社 検出装置

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US5392116A (en) * 1992-03-17 1995-02-21 International Business Machines Corporation Interferometric phase measurement
CN101738663A (zh) * 2009-12-25 2010-06-16 中国科学院上海光学精密机械研究所 波长无关熔融石英透射偏振分束光栅

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Publication number Publication date
US9041924B2 (en) 2015-05-26
CN102841395A (zh) 2012-12-26
US20120327412A1 (en) 2012-12-27
JP2013007830A (ja) 2013-01-10

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Granted publication date: 20170301