JP2013007830A - 透過型回折格子及び検出装置 - Google Patents

透過型回折格子及び検出装置 Download PDF

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Publication number
JP2013007830A
JP2013007830A JP2011139527A JP2011139527A JP2013007830A JP 2013007830 A JP2013007830 A JP 2013007830A JP 2011139527 A JP2011139527 A JP 2011139527A JP 2011139527 A JP2011139527 A JP 2011139527A JP 2013007830 A JP2013007830 A JP 2013007830A
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Prior art keywords
diffraction
layer
diffraction grating
polarization
refractive index
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Pending
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JP2011139527A
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English (en)
Japanese (ja)
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JP2013007830A5 (enExample
Inventor
Atsushi Amako
淳 尼子
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Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2011139527A priority Critical patent/JP2013007830A/ja
Priority to US13/530,786 priority patent/US9041924B2/en
Priority to CN201210214061.9A priority patent/CN102841395B/zh
Publication of JP2013007830A publication Critical patent/JP2013007830A/ja
Publication of JP2013007830A5 publication Critical patent/JP2013007830A5/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4261Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element with major polarization dependent properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1866Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871Transmissive phase gratings

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Polarising Elements (AREA)
JP2011139527A 2011-06-23 2011-06-23 透過型回折格子及び検出装置 Pending JP2013007830A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011139527A JP2013007830A (ja) 2011-06-23 2011-06-23 透過型回折格子及び検出装置
US13/530,786 US9041924B2 (en) 2011-06-23 2012-06-22 Transmissive diffraction grating and detection apparatus
CN201210214061.9A CN102841395B (zh) 2011-06-23 2012-06-25 透射式衍射光栅以及检测装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011139527A JP2013007830A (ja) 2011-06-23 2011-06-23 透過型回折格子及び検出装置

Publications (2)

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JP2013007830A true JP2013007830A (ja) 2013-01-10
JP2013007830A5 JP2013007830A5 (enExample) 2014-07-31

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JP2011139527A Pending JP2013007830A (ja) 2011-06-23 2011-06-23 透過型回折格子及び検出装置

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US (1) US9041924B2 (enExample)
JP (1) JP2013007830A (enExample)
CN (1) CN102841395B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017104661A1 (ja) * 2015-12-15 2017-06-22 株式会社堀場製作所 分光器、光学検査装置、及び、oct装置
KR20170117171A (ko) * 2015-03-16 2017-10-20 미쓰이금속광업주식회사 다공질체, 다공질 접합체, 금속 용탕용 여과 필터, 소성용 지그 및 다공질체의 제조 방법
JP2019212654A (ja) * 2018-05-31 2019-12-12 日亜化学工業株式会社 光源装置
JP2022163081A (ja) * 2017-11-21 2022-10-25 アプライド マテリアルズ インコーポレイテッド 導波結合器の製造方法

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US10539813B2 (en) * 2004-01-28 2020-01-21 Pamela Saha Deformable photoelastic device
CN104835998B (zh) * 2015-05-13 2017-08-29 北京理工大学 基于分布式布拉格反射镜的多通道电磁波极化滤波器
US10035473B2 (en) * 2016-11-04 2018-07-31 Ford Global Technologies, Llc Vehicle trim components
CN107046222B (zh) * 2017-02-22 2020-12-15 天津大学 一种实现相近双波长输出的内腔光学参量振荡器
CN107942427B (zh) * 2017-12-29 2021-02-19 明基材料有限公司 光学膜
JP7319106B2 (ja) * 2019-06-28 2023-08-01 株式会社ミツトヨ 格子部品およびその製造方法
CN111596399B (zh) * 2020-05-28 2021-07-06 武汉理工大学 蓝光波段非对称超材料偏振调控器及其制造方法
CN111765973B (zh) * 2020-05-28 2021-09-14 昆明理工大学 一种基于石墨烯纳米带阵列光栅的激光偏振方向检测装置及检测方法
CN113695267B (zh) * 2021-08-30 2023-05-26 深圳市洲明科技股份有限公司 一种墨色分选装置及其分选方法
CN113866858B (zh) * 2021-09-13 2024-04-09 中国人民解放军战略支援部队航天工程大学 一种近红外圆偏振光成像衍射光学器件
CN115031838B (zh) * 2022-05-05 2024-10-22 西安应用光学研究所 扫描式双层二次衍射线阵光谱仪波长标定方法
US20230384494A1 (en) * 2022-07-11 2023-11-30 Wasatch Photonics, Inc. Diffraction grating systems
CN117406320B (zh) * 2023-12-13 2024-02-13 长春理工大学 具有宽谱段宽角度衍射抑制效果的双层二维光栅结构
CN118210092B (zh) * 2024-05-22 2024-11-12 苏州大学 一种宽波段复合超表面光栅及其设计方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04257801A (ja) * 1991-02-13 1992-09-14 Sharp Corp 偏光回折素子の製造方法
JPH0989775A (ja) * 1995-07-19 1997-04-04 Kdk Corp 分光測定装置及び自動分析装置
JP2002022963A (ja) * 2000-07-12 2002-01-23 Dainippon Printing Co Ltd ホログラム偏光分離素子とそのホログラム偏光分離素子を用いた偏光分離色分離光学系
US6583873B1 (en) * 2000-09-25 2003-06-24 The Carnegie Institution Of Washington Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating
JP2004145255A (ja) * 2002-04-19 2004-05-20 Ricoh Co Ltd 偏光光学素子、光学素子ユニット、光ヘッド装置及び光ディスクドライブ装置
JP2004170853A (ja) * 2002-11-22 2004-06-17 Toyo Commun Equip Co Ltd 積層波長板
JP2007206225A (ja) * 2006-01-31 2007-08-16 Citizen Fine Tech Co Ltd 偏光変換素子
JP2008197664A (ja) * 1996-02-08 2008-08-28 Fujitsu Ltd 表示装置
JP2008216424A (ja) * 2007-03-01 2008-09-18 Epson Toyocom Corp 回折素子およびそれを用いた光ヘッド装置
JP2009204953A (ja) * 2008-02-28 2009-09-10 Nec Corp 波長分波器

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5031993A (en) * 1989-11-16 1991-07-16 International Business Machines Corporation Detecting polarization state of an optical wavefront
EP0561015A1 (de) * 1992-03-17 1993-09-22 International Business Machines Corporation Interferometrische Phasenmessung
JP3125688B2 (ja) 1996-10-04 2001-01-22 日本電気株式会社 回折格子分光計
JPH10148707A (ja) 1996-11-18 1998-06-02 Nikon Corp 回折格子及び分光装置
TW432228B (en) * 2000-04-18 2001-05-01 Ind Tech Res Inst Polarization dependent diffraction optical component
US6507685B1 (en) * 2001-09-20 2003-01-14 Capella Photonics, Inc. Method and apparatus for servo-based spectral array alignment in optical systems
US7164532B2 (en) * 2002-04-19 2007-01-16 Ricoh Company, Ltd. Diffraction grating, light source unit applying the same therein, and optical head device employing the same
JP2004127339A (ja) 2002-09-30 2004-04-22 Asahi Glass Co Ltd 光ヘッド装置
JP4409860B2 (ja) 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
JP2005084266A (ja) * 2003-09-05 2005-03-31 Kawasaki Heavy Ind Ltd 光制御装置および光制御方法
JP4369256B2 (ja) 2004-01-22 2009-11-18 日本板硝子株式会社 分光光学素子
US7138631B2 (en) * 2004-06-30 2006-11-21 Lockheed Martin Corporation Photodetector employing slab waveguide modes
JP2007101926A (ja) 2005-10-05 2007-04-19 Nippon Sheet Glass Co Ltd 透過型回折格子、ならびにそれを用いた分光素子および分光器
JP2007310052A (ja) 2006-05-17 2007-11-29 Epson Toyocom Corp 波長板
JP5280654B2 (ja) 2006-09-21 2013-09-04 日本板硝子株式会社 透過型回折格子、並びに、それを用いた分光素子及び分光器
CA2600900A1 (en) 2006-09-21 2008-03-21 Nippon Sheet Glass Company, Limited Transmissive diffraction grating, and spectral separation element and spectroscope using the same
CN101738663A (zh) * 2009-12-25 2010-06-16 中国科学院上海光学精密机械研究所 波长无关熔融石英透射偏振分束光栅
JP5724213B2 (ja) 2010-05-13 2015-05-27 セイコーエプソン株式会社 検出装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04257801A (ja) * 1991-02-13 1992-09-14 Sharp Corp 偏光回折素子の製造方法
JPH0989775A (ja) * 1995-07-19 1997-04-04 Kdk Corp 分光測定装置及び自動分析装置
JP2008197664A (ja) * 1996-02-08 2008-08-28 Fujitsu Ltd 表示装置
JP2002022963A (ja) * 2000-07-12 2002-01-23 Dainippon Printing Co Ltd ホログラム偏光分離素子とそのホログラム偏光分離素子を用いた偏光分離色分離光学系
US6583873B1 (en) * 2000-09-25 2003-06-24 The Carnegie Institution Of Washington Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating
JP2004145255A (ja) * 2002-04-19 2004-05-20 Ricoh Co Ltd 偏光光学素子、光学素子ユニット、光ヘッド装置及び光ディスクドライブ装置
JP2004170853A (ja) * 2002-11-22 2004-06-17 Toyo Commun Equip Co Ltd 積層波長板
JP2007206225A (ja) * 2006-01-31 2007-08-16 Citizen Fine Tech Co Ltd 偏光変換素子
JP2008216424A (ja) * 2007-03-01 2008-09-18 Epson Toyocom Corp 回折素子およびそれを用いた光ヘッド装置
JP2009204953A (ja) * 2008-02-28 2009-09-10 Nec Corp 波長分波器

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170117171A (ko) * 2015-03-16 2017-10-20 미쓰이금속광업주식회사 다공질체, 다공질 접합체, 금속 용탕용 여과 필터, 소성용 지그 및 다공질체의 제조 방법
WO2017104661A1 (ja) * 2015-12-15 2017-06-22 株式会社堀場製作所 分光器、光学検査装置、及び、oct装置
JPWO2017104661A1 (ja) * 2015-12-15 2018-11-01 株式会社堀場製作所 分光器、光学検査装置、及び、oct装置
US10945607B2 (en) 2015-12-15 2021-03-16 Horiba, Ltd. Spectroscope, optical inspection device and OCT device
JP2022163081A (ja) * 2017-11-21 2022-10-25 アプライド マテリアルズ インコーポレイテッド 導波結合器の製造方法
JP7542033B2 (ja) 2017-11-21 2024-08-29 アプライド マテリアルズ インコーポレイテッド 導波結合器の製造方法
JP2019212654A (ja) * 2018-05-31 2019-12-12 日亜化学工業株式会社 光源装置
JP7060799B2 (ja) 2018-05-31 2022-04-27 日亜化学工業株式会社 光源装置

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CN102841395B (zh) 2017-03-01
US9041924B2 (en) 2015-05-26
CN102841395A (zh) 2012-12-26
US20120327412A1 (en) 2012-12-27

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