CN102683223A - 半导体器件制造方法和半导体器件 - Google Patents
半导体器件制造方法和半导体器件 Download PDFInfo
- Publication number
- CN102683223A CN102683223A CN2012100719523A CN201210071952A CN102683223A CN 102683223 A CN102683223 A CN 102683223A CN 2012100719523 A CN2012100719523 A CN 2012100719523A CN 201210071952 A CN201210071952 A CN 201210071952A CN 102683223 A CN102683223 A CN 102683223A
- Authority
- CN
- China
- Prior art keywords
- semiconductor chip
- cap
- space
- adhesive
- front surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/127—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed characterised by arrangements for sealing or adhesion
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/80—Encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
- H10W40/77—Auxiliary members characterised by their shape
- H10W40/778—Auxiliary members characterised by their shape in encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
- H10W76/12—Containers or parts thereof characterised by their shape
- H10W76/15—Containers comprising an insulating or insulated base
- H10W76/157—Containers comprising an insulating or insulated base having interconnections parallel to the insulating or insulated base
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/60—Seals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W95/00—Packaging processes not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/60—Securing means for detachable heating or cooling arrangements, e.g. clamps
- H10W40/611—Bolts or screws
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01551—Changing the shapes of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
- H10W72/07352—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in structures or sizes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07521—Aligning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
- H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5434—Dispositions of bond wires the connected ends being on auxiliary connecting means on bond pads, e.g. on other bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
- H10W72/932—Plan-view shape, i.e. in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/941—Dispositions of bond pads
- H10W72/944—Dispositions of multiple bond pads
- H10W72/9445—Top-view layouts, e.g. mirror arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/752—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/753—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011057832A JP5732286B2 (ja) | 2011-03-16 | 2011-03-16 | 半導体装置の製造方法 |
| JP2011-057832 | 2011-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102683223A true CN102683223A (zh) | 2012-09-19 |
Family
ID=46814954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100719523A Pending CN102683223A (zh) | 2011-03-16 | 2012-03-15 | 半导体器件制造方法和半导体器件 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US8742559B2 (https=) |
| JP (1) | JP5732286B2 (https=) |
| CN (1) | CN102683223A (https=) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104671188A (zh) * | 2013-11-26 | 2015-06-03 | 英飞凌科技股份有限公司 | 具有气隙的半导体封装 |
| CN106206473A (zh) * | 2016-08-30 | 2016-12-07 | 无锡中微高科电子有限公司 | 集成电路塑料封装结构及其制备方法 |
| CN110697648A (zh) * | 2019-10-16 | 2020-01-17 | 中电国基南方集团有限公司 | 一种mems层叠器件微波端口实现的工艺方法 |
| CN112750804A (zh) * | 2019-10-31 | 2021-05-04 | 日月光半导体制造股份有限公司 | 半导体设备封装和其制造方法 |
| US20220041436A1 (en) * | 2019-01-31 | 2022-02-10 | Robert Bosch Gmbh | Method for producing a plurality of sensor devices, and sensor device |
| CN114166196A (zh) * | 2020-09-11 | 2022-03-11 | 精工爱普生株式会社 | 电子器件的制造方法 |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9178093B2 (en) * | 2011-07-06 | 2015-11-03 | Flextronics Ap, Llc | Solar cell module on molded lead-frame and method of manufacture |
| JP2013044524A (ja) * | 2011-08-21 | 2013-03-04 | Denso Corp | 角速度センサ装置 |
| DE102013100388B4 (de) * | 2013-01-15 | 2014-07-24 | Epcos Ag | Bauelement mit einer MEMS Komponente und Verfahren zur Herstellung |
| US9082883B2 (en) * | 2013-03-04 | 2015-07-14 | Unisem (M) Berhad | Top port MEMS cavity package and method of manufacture thereof |
| US8999757B2 (en) * | 2013-03-04 | 2015-04-07 | Unisem (M) Berhad | Top port MEMS cavity package and method of manufacture thereof |
| US9099391B2 (en) * | 2013-03-14 | 2015-08-04 | Infineon Technologies Austria Ag | Semiconductor package with top-side insulation layer |
| US9296607B2 (en) * | 2013-07-22 | 2016-03-29 | Invensense, Inc. | Apparatus and method for reduced strain on MEMS devices |
| US9257370B2 (en) | 2013-08-27 | 2016-02-09 | Ubotic Company Limited | Cavity package with pre-molded cavity leadframe |
| EP2843698A3 (en) | 2013-08-27 | 2015-04-01 | Ubotic Company Limited | Cavity package with pre-molded substrate |
| DE102014105861B4 (de) * | 2014-04-25 | 2015-11-05 | Infineon Technologies Ag | Sensorvorrichtung und Verfahren zum Herstellen einer Sensorvorrichtung |
| CA2956867C (en) * | 2014-08-01 | 2020-07-28 | Carl Freudenberg Kg | Sensor, filter element comprising a sensor and use of said type of filter element |
| US9472904B2 (en) * | 2014-08-18 | 2016-10-18 | Amphenol Corporation | Discrete packaging adapter for connector |
| JP6384239B2 (ja) * | 2014-09-29 | 2018-09-05 | セイコーエプソン株式会社 | 光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP6256301B2 (ja) * | 2014-10-31 | 2018-01-10 | 株式会社デンソー | 電子回路部品 |
| CN108141976B (zh) * | 2016-03-22 | 2020-05-05 | 富士电机株式会社 | 外壳、半导体装置和外壳的制造方法 |
| JP6654116B2 (ja) * | 2016-08-12 | 2020-02-26 | 浜松ホトニクス株式会社 | リニアイメージセンサおよびその製造方法 |
| US9960197B1 (en) * | 2017-01-13 | 2018-05-01 | Semiconductor Components Industries, Llc | Molded image sensor chip scale packages and related methods |
| DE102018204772B3 (de) | 2018-03-28 | 2019-04-25 | Infineon Technologies Ag | Chip-Stapelanordnung und Verfahren zum Herstellen derselben |
| US12074182B2 (en) | 2018-08-21 | 2024-08-27 | Sony Semiconductor Solutions Corporation | Semiconductor device, electronic apparatus, and method for manufacturing semiconductor device |
| JP7362280B2 (ja) | 2019-03-22 | 2023-10-17 | キヤノン株式会社 | パッケージユニットの製造方法、パッケージユニット、電子モジュール、および機器 |
| KR102796813B1 (ko) * | 2020-06-24 | 2025-04-16 | 삼성전자주식회사 | 반도체 패키지 및 반도체 패키지의 제조 방법 |
| DE102020126857A1 (de) * | 2020-10-13 | 2022-04-14 | Infineon Technologies Ag | Leistungshalbleitergehäuse und verfahren zur herstellung eines leistungshalbleitergehäuses |
| JP7754415B2 (ja) * | 2021-11-05 | 2025-10-15 | ミネベアミツミ株式会社 | 流体センサおよび流体センサの製造方法 |
| TWI840132B (zh) * | 2023-02-23 | 2024-04-21 | 同欣電子工業股份有限公司 | 感測器封裝結構 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4831212A (en) * | 1986-05-09 | 1989-05-16 | Nissin Electric Company, Limited | Package for packing semiconductor devices and process for producing the same |
| US5317107A (en) * | 1992-09-24 | 1994-05-31 | Motorola, Inc. | Shielded stripline configuration semiconductor device and method for making the same |
| JPH0766331A (ja) * | 1993-08-02 | 1995-03-10 | Motorola Inc | 半導体デバイス・パッケージの製造方法 |
| US5594282A (en) * | 1993-12-16 | 1997-01-14 | Seiko Epson Corporation | Resin sealing type semiconductor device and method of making the same |
| US20050062067A1 (en) * | 2003-09-24 | 2005-03-24 | Tomohito Kunda | Method for manufacturing electronic device including package |
| CN1893035A (zh) * | 2005-06-30 | 2007-01-10 | 三洋电机株式会社 | 电路装置及其制造方法 |
| US20080017940A1 (en) * | 2006-07-18 | 2008-01-24 | Cheng-Chieh Yang | Image sensing module |
| JP2009081289A (ja) * | 2007-09-26 | 2009-04-16 | Denso Corp | 半導体装置、その固定構造、及びその異物除去方法 |
| US20100164082A1 (en) * | 2008-12-26 | 2010-07-01 | Renesas Technology Corp. | Manufacturing method for semiconductor devices and semiconductor device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5436407A (en) * | 1994-06-13 | 1995-07-25 | Integrated Packaging Assembly Corporation | Metal semiconductor package with an external plastic seal |
| TWI245966B (en) | 2004-07-05 | 2005-12-21 | Prodisc Technology Inc | Display device and image processing method therefor |
| JP4742706B2 (ja) | 2005-07-06 | 2011-08-10 | ヤマハ株式会社 | 半導体装置及びその製造方法 |
| EP1860694A1 (en) | 2005-03-16 | 2007-11-28 | Yamaha Corporation | Semiconductor device, semiconductor device manufacturing method and cover frame |
| EP3257809A1 (en) * | 2005-11-25 | 2017-12-20 | Panasonic Intellectual Property Management Co., Ltd. | Wafer level package structure and production method therefor |
| JP2008135688A (ja) * | 2006-10-30 | 2008-06-12 | Matsushita Electric Ind Co Ltd | 半導体装置および半導体装置の製造方法 |
| JP5045769B2 (ja) * | 2009-03-04 | 2012-10-10 | 株式会社デンソー | センサ装置の製造方法 |
| JP5535570B2 (ja) * | 2009-10-13 | 2014-07-02 | ルネサスエレクトロニクス株式会社 | 固体撮像装置の製造方法 |
| TW201121001A (en) * | 2009-12-14 | 2011-06-16 | Domintech Co Ltd | Packaging of micro-electromechanical sensor device |
-
2011
- 2011-03-16 JP JP2011057832A patent/JP5732286B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-14 US US13/419,899 patent/US8742559B2/en active Active
- 2012-03-15 CN CN2012100719523A patent/CN102683223A/zh active Pending
-
2014
- 2014-04-18 US US14/256,431 patent/US20140225240A1/en not_active Abandoned
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4831212A (en) * | 1986-05-09 | 1989-05-16 | Nissin Electric Company, Limited | Package for packing semiconductor devices and process for producing the same |
| US5317107A (en) * | 1992-09-24 | 1994-05-31 | Motorola, Inc. | Shielded stripline configuration semiconductor device and method for making the same |
| JPH0766331A (ja) * | 1993-08-02 | 1995-03-10 | Motorola Inc | 半導体デバイス・パッケージの製造方法 |
| US5594282A (en) * | 1993-12-16 | 1997-01-14 | Seiko Epson Corporation | Resin sealing type semiconductor device and method of making the same |
| US20050062067A1 (en) * | 2003-09-24 | 2005-03-24 | Tomohito Kunda | Method for manufacturing electronic device including package |
| CN1893035A (zh) * | 2005-06-30 | 2007-01-10 | 三洋电机株式会社 | 电路装置及其制造方法 |
| US20080017940A1 (en) * | 2006-07-18 | 2008-01-24 | Cheng-Chieh Yang | Image sensing module |
| JP2009081289A (ja) * | 2007-09-26 | 2009-04-16 | Denso Corp | 半導体装置、その固定構造、及びその異物除去方法 |
| US20100164082A1 (en) * | 2008-12-26 | 2010-07-01 | Renesas Technology Corp. | Manufacturing method for semiconductor devices and semiconductor device |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104671188A (zh) * | 2013-11-26 | 2015-06-03 | 英飞凌科技股份有限公司 | 具有气隙的半导体封装 |
| US10224260B2 (en) | 2013-11-26 | 2019-03-05 | Infineon Technologies Ag | Semiconductor package with air gap |
| CN106206473A (zh) * | 2016-08-30 | 2016-12-07 | 无锡中微高科电子有限公司 | 集成电路塑料封装结构及其制备方法 |
| US20220041436A1 (en) * | 2019-01-31 | 2022-02-10 | Robert Bosch Gmbh | Method for producing a plurality of sensor devices, and sensor device |
| US12195330B2 (en) * | 2019-01-31 | 2025-01-14 | Robert Bosch Gmbh | Method for producing a plurality of sensor devices, and sensor device |
| CN110697648A (zh) * | 2019-10-16 | 2020-01-17 | 中电国基南方集团有限公司 | 一种mems层叠器件微波端口实现的工艺方法 |
| CN110697648B (zh) * | 2019-10-16 | 2022-03-04 | 中电国基南方集团有限公司 | 一种mems层叠器件微波端口实现的工艺方法 |
| CN112750804A (zh) * | 2019-10-31 | 2021-05-04 | 日月光半导体制造股份有限公司 | 半导体设备封装和其制造方法 |
| CN114166196A (zh) * | 2020-09-11 | 2022-03-11 | 精工爱普生株式会社 | 电子器件的制造方法 |
| CN114166196B (zh) * | 2020-09-11 | 2024-01-09 | 精工爱普生株式会社 | 电子器件的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012195417A (ja) | 2012-10-11 |
| US8742559B2 (en) | 2014-06-03 |
| US20120235308A1 (en) | 2012-09-20 |
| US20140225240A1 (en) | 2014-08-14 |
| JP5732286B2 (ja) | 2015-06-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102683223A (zh) | 半导体器件制造方法和半导体器件 | |
| KR101645771B1 (ko) | 반도체 장치 및 그 제조 방법 | |
| US7923826B2 (en) | Semiconductor device mounted on heat sink having protruded periphery | |
| CN101546718B (zh) | 半导体装置封装和制造半导体装置封装的方法 | |
| JP3526731B2 (ja) | 半導体装置およびその製造方法 | |
| KR102287698B1 (ko) | 반도체 장치 및 그 제조 방법 | |
| TWI469233B (zh) | 具有中空封裝件之封裝系統 | |
| US9087794B2 (en) | Manufacturing method of molded package | |
| CN101218673A (zh) | 半导体装置 | |
| JP6394634B2 (ja) | リードフレーム、パッケージ及び発光装置、並びにこれらの製造方法 | |
| CN102347424A (zh) | 半导体装置、引线架集合体及其制造方法 | |
| JP5673423B2 (ja) | 半導体装置および半導体装置の製造方法 | |
| CN105390469A (zh) | 引线框架和制造引线框架的方法 | |
| CN102931105A (zh) | 半导体器件管芯键合 | |
| US20130320527A1 (en) | Semiconductor device and semiconductor device manufacturing method | |
| JP5795411B2 (ja) | 半導体装置 | |
| JP2018046289A (ja) | 半導体装置およびその製造方法 | |
| US6331738B1 (en) | Semiconductor device having a BGA structure | |
| JP5214356B2 (ja) | 半導体装置の製造方法 | |
| JP4485210B2 (ja) | 半導体デバイス、電子機器、半導体デバイスの製造方法及び電子機器の製造方法 | |
| JP5058144B2 (ja) | 半導体素子の樹脂封止方法 | |
| JP5857883B2 (ja) | モールドパッケージの製造方法 | |
| JP2010050491A (ja) | 半導体装置の製造方法 | |
| JP4840305B2 (ja) | 半導体装置の製造方法 | |
| JPH08125051A (ja) | 半導体装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: Tokyo, Japan, Japan Applicant after: Renesas Electronics Corporation Address before: Kanagawa Applicant before: Renesas Electronics Corporation |
|
| COR | Change of bibliographic data | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120919 |