CN102395643B - 基于铈的颗粒组合物及其制备方法 - Google Patents
基于铈的颗粒组合物及其制备方法 Download PDFInfo
- Publication number
- CN102395643B CN102395643B CN2009801587570A CN200980158757A CN102395643B CN 102395643 B CN102395643 B CN 102395643B CN 2009801587570 A CN2009801587570 A CN 2009801587570A CN 200980158757 A CN200980158757 A CN 200980158757A CN 102395643 B CN102395643 B CN 102395643B
- Authority
- CN
- China
- Prior art keywords
- cerium
- weight
- abrasive
- oxide
- additive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 34
- 229910052684 Cerium Inorganic materials 0.000 title claims abstract description 31
- 239000002245 particle Substances 0.000 title claims abstract description 29
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 title abstract description 28
- 238000002360 preparation method Methods 0.000 title description 5
- 239000000654 additive Substances 0.000 claims abstract description 26
- 230000000996 additive effect Effects 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 14
- 229910000420 cerium oxide Inorganic materials 0.000 claims abstract description 12
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims abstract description 12
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims description 9
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 claims 2
- 238000005498 polishing Methods 0.000 abstract description 24
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 11
- 239000000243 solution Substances 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 abstract description 6
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 229910052723 transition metal Inorganic materials 0.000 abstract description 4
- -1 rare earth carbonate Chemical class 0.000 abstract description 2
- 150000003839 salts Chemical class 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 abstract 1
- 239000011259 mixed solution Substances 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 26
- 239000000047 product Substances 0.000 description 22
- 229910052742 iron Inorganic materials 0.000 description 11
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 10
- 229910052746 lanthanum Inorganic materials 0.000 description 8
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 238000002156 mixing Methods 0.000 description 7
- 238000000975 co-precipitation Methods 0.000 description 6
- 239000011572 manganese Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000000227 grinding Methods 0.000 description 5
- 150000002910 rare earth metals Chemical class 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 229940044631 ferric chloride hexahydrate Drugs 0.000 description 4
- NQXWGWZJXJUMQB-UHFFFAOYSA-K iron trichloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].Cl[Fe+]Cl NQXWGWZJXJUMQB-UHFFFAOYSA-K 0.000 description 4
- ICAKDTKJOYSXGC-UHFFFAOYSA-K lanthanum(iii) chloride Chemical compound Cl[La](Cl)Cl ICAKDTKJOYSXGC-UHFFFAOYSA-K 0.000 description 4
- 238000010298 pulverizing process Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 239000012065 filter cake Substances 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910052728 basic metal Inorganic materials 0.000 description 2
- 150000003818 basic metals Chemical class 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 150000000703 Cerium Chemical class 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- AJZSAVZGHCEIQX-UHFFFAOYSA-N O.[Cl].[Zr] Chemical compound O.[Cl].[Zr] AJZSAVZGHCEIQX-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- CNFDGXZLMLFIJV-UHFFFAOYSA-L manganese(II) chloride tetrahydrate Chemical compound O.O.O.O.[Cl-].[Cl-].[Mn+2] CNFDGXZLMLFIJV-UHFFFAOYSA-L 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F17/00—Compounds of rare earth metals
- C01F17/30—Compounds containing rare earth metals and at least one element other than a rare earth metal, oxygen or hydrogen, e.g. La4S3Br6
- C01F17/32—Compounds containing rare earth metals and at least one element other than a rare earth metal, oxygen or hydrogen, e.g. La4S3Br6 oxide or hydroxide being the only anion, e.g. NaCeO2 or MgxCayEuO
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/50—Solid solutions
- C01P2002/52—Solid solutions containing elements as dopants
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Glass Compositions (AREA)
Abstract
Description
商标 | 型号 | |
SEM | JEOL | JSM-5610LV |
XRD | Regaku | D/max-2200PC |
Claims (4)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2009/000401 WO2010118553A1 (en) | 2009-04-15 | 2009-04-15 | A cerium-based particle composition and the preparation thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102395643A CN102395643A (zh) | 2012-03-28 |
CN102395643B true CN102395643B (zh) | 2013-12-18 |
Family
ID=42982101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801587570A Expired - Fee Related CN102395643B (zh) | 2009-04-15 | 2009-04-15 | 基于铈的颗粒组合物及其制备方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8727833B2 (zh) |
EP (1) | EP2419486A4 (zh) |
JP (1) | JP5519772B2 (zh) |
KR (1) | KR101376057B1 (zh) |
CN (1) | CN102395643B (zh) |
CA (1) | CA2758315C (zh) |
WO (1) | WO2010118553A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104148116B (zh) * | 2014-08-12 | 2016-05-18 | 淄博加华新材料资源有限公司 | 低成本大比表面积氧化铈的制备方法 |
CN109096922A (zh) * | 2018-08-24 | 2018-12-28 | 甘肃稀土新材料股份有限公司 | 一种含钇的稀土抛光液及其制备方法 |
CN108821324B (zh) * | 2018-09-17 | 2020-05-19 | 珠海琴晟新材料有限公司 | 一种纳米氧化铈及其制备方法和应用 |
WO2024014425A1 (ja) * | 2022-07-12 | 2024-01-18 | 株式会社レゾナック | セリウム系研磨材、研磨液、研磨液の製造方法、及びガラス研磨方法 |
Family Cites Families (38)
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US3097083A (en) * | 1959-07-02 | 1963-07-09 | American Potash & Chem Corp | Polishing composition and process of forming same |
GB1501570A (en) * | 1975-11-11 | 1978-02-15 | Showa Denko Kk | Abrader for mirror polishing of glass and method for mirror polishing |
FR2472601A1 (fr) | 1979-12-27 | 1981-07-03 | Rhone Poulenc Ind | Procede de fabrication de compositions de polissage a base de cerium |
FR2549846B1 (fr) * | 1983-07-29 | 1986-12-26 | Rhone Poulenc Spec Chim | Nouvelle composition de polissage a base de cerium et son procede de fabrication |
CN85106015A (zh) * | 1985-07-23 | 1987-01-21 | 上海跃龙化工厂 | 镧铈混合稀土 |
BR9307675A (pt) * | 1992-12-23 | 1999-09-08 | Minnesota Mining & Mfg | Grão abrasivo, artigo abrasivo, processo para a produção de grão abrasivo e precursor de grão abrasivo |
JPH09183966A (ja) * | 1995-12-29 | 1997-07-15 | Seimi Chem Co Ltd | セリウム研摩材の製造方法 |
KR19980019046A (ko) | 1996-08-29 | 1998-06-05 | 고사이 아키오 | 연마용 조성물 및 이의 용도(Abrasive composition and use of the same) |
US6602439B1 (en) * | 1997-02-24 | 2003-08-05 | Superior Micropowders, Llc | Chemical-mechanical planarization slurries and powders and methods for using same |
US6607570B1 (en) * | 2000-02-02 | 2003-08-19 | 3M Innovative Properties Company | Fused Al2O3-rare earth oxide eutectic abrasive particles, abrasive articles, and methods of making and using the same |
US6454821B1 (en) * | 2000-06-21 | 2002-09-24 | Praxair S. T. Technology, Inc. | Polishing composition and method |
US6666750B1 (en) * | 2000-07-19 | 2003-12-23 | 3M Innovative Properties Company | Fused AL2O3-rare earth oxide-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same |
EP1346003B1 (en) * | 2000-11-30 | 2009-11-25 | Showa Denko K.K. | Cerium-based abrasive, production process thereof |
US7887714B2 (en) | 2000-12-25 | 2011-02-15 | Nissan Chemical Industries, Ltd. | Cerium oxide sol and abrasive |
DE60233180D1 (de) * | 2001-02-20 | 2009-09-17 | Nat Inst For Materials Science | Verfahren zur Herstellung von Rutheniumperovskit |
ATE399740T1 (de) * | 2001-03-24 | 2008-07-15 | Evonik Degussa Gmbh | Mit einer hülle umgebene, dotierte oxidpartikeln |
US6749653B2 (en) * | 2002-02-21 | 2004-06-15 | 3M Innovative Properties Company | Abrasive particles containing sintered, polycrystalline zirconia |
JP4236857B2 (ja) * | 2002-03-22 | 2009-03-11 | 三井金属鉱業株式会社 | セリウム系研摩材およびその製造方法 |
JP3463999B1 (ja) * | 2002-05-16 | 2003-11-05 | 三井金属鉱業株式会社 | セリウム系研摩材の製造方法 |
US7010939B2 (en) * | 2002-06-05 | 2006-03-14 | Hoya Corporation | Glass substrate for data recording medium and manufacturing method thereof |
US6942554B1 (en) * | 2002-07-22 | 2005-09-13 | Optimax Systems, Inc. | Apparatus and process for polishing a substrate |
CN1206026C (zh) * | 2002-10-15 | 2005-06-15 | 清华大学 | 一种以铈为基的四元纳米级稀土复合氧化物及其制备方法 |
CN1206027C (zh) * | 2002-10-15 | 2005-06-15 | 清华大学 | 一种以铈为基的三元纳米级稀土复合氧化物及其制备方法 |
JP4795614B2 (ja) * | 2002-10-23 | 2011-10-19 | Hoya株式会社 | 情報記録媒体用ガラス基板及びその製造方法 |
US7229600B2 (en) * | 2003-01-31 | 2007-06-12 | Nanoproducts Corporation | Nanoparticles of rare earth oxides |
TWI313707B (en) | 2003-04-17 | 2009-08-21 | Mitsui Mining & Smelting Co | Cerium-based abrasive |
US7300478B2 (en) * | 2003-05-22 | 2007-11-27 | Ferro Corporation | Slurry composition and method of use |
KR100647103B1 (ko) | 2003-06-30 | 2006-11-23 | 미쓰이 긴조꾸 고교 가부시키가이샤 | 세륨계 연마재 및 그 원료 |
CN100410176C (zh) | 2004-01-21 | 2008-08-13 | 三井金属鉱业株式会社 | 氧化物固溶体粉末 |
AT502308B1 (de) | 2005-07-20 | 2010-03-15 | Treibacher Ind Ag | Glasschleifmittel auf ceroxidbasis und verfahren zu dessen herstellung |
JP4756996B2 (ja) | 2005-11-02 | 2011-08-24 | 三井金属鉱業株式会社 | セリウム系研摩材 |
CN101400607B (zh) | 2006-03-13 | 2012-03-21 | 昭和电工株式会社 | 从含有稀土类氟化物的组合物中回收稀土类元素的方法 |
JP4585991B2 (ja) | 2006-07-04 | 2010-11-24 | 三井金属鉱業株式会社 | セリウム系研摩材 |
JP5448824B2 (ja) * | 2006-10-16 | 2014-03-19 | キャボット マイクロエレクトロニクス コーポレイション | ガラス研磨組成物および方法 |
JP5248096B2 (ja) | 2006-12-28 | 2013-07-31 | 花王株式会社 | 研磨液組成物 |
DE102007020067B4 (de) * | 2007-04-27 | 2013-07-18 | Osram Gmbh | Verfahren zur Herstellung einer Molybdänfolie für den Lampenbau und Molybdänfolie sowie Lampe mit Molybdänfolie |
CN101481130B (zh) * | 2009-02-20 | 2010-10-27 | 包头市金蒙稀土有限责任公司 | 一种低铁高比表面积氧化镧铈的制备方法 |
US9368367B2 (en) * | 2009-04-13 | 2016-06-14 | Sinmat, Inc. | Chemical mechanical polishing of silicon carbide comprising surfaces |
-
2009
- 2009-04-15 WO PCT/CN2009/000401 patent/WO2010118553A1/en active Application Filing
- 2009-04-15 CA CA2758315A patent/CA2758315C/en not_active Expired - Fee Related
- 2009-04-15 CN CN2009801587570A patent/CN102395643B/zh not_active Expired - Fee Related
- 2009-04-15 EP EP09843187.7A patent/EP2419486A4/en not_active Withdrawn
- 2009-04-15 KR KR1020117027098A patent/KR101376057B1/ko active IP Right Grant
- 2009-04-15 JP JP2012505022A patent/JP5519772B2/ja active Active
- 2009-04-15 US US13/264,237 patent/US8727833B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20120012972A (ko) | 2012-02-13 |
US8727833B2 (en) | 2014-05-20 |
CA2758315C (en) | 2014-06-03 |
JP2012524129A (ja) | 2012-10-11 |
KR101376057B1 (ko) | 2014-03-19 |
CN102395643A (zh) | 2012-03-28 |
JP5519772B2 (ja) | 2014-06-11 |
EP2419486A4 (en) | 2013-07-10 |
CA2758315A1 (en) | 2010-10-21 |
EP2419486A1 (en) | 2012-02-22 |
WO2010118553A1 (en) | 2010-10-21 |
US20120045972A1 (en) | 2012-02-23 |
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