CN102117791A - 封装结构及其制作方法以及形成引线框架结构的方法 - Google Patents
封装结构及其制作方法以及形成引线框架结构的方法 Download PDFInfo
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- CN102117791A CN102117791A CN2010105069927A CN201010506992A CN102117791A CN 102117791 A CN102117791 A CN 102117791A CN 2010105069927 A CN2010105069927 A CN 2010105069927A CN 201010506992 A CN201010506992 A CN 201010506992A CN 102117791 A CN102117791 A CN 102117791A
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Abstract
本发明公开一种封装结构及其制作方法以及形成引线框架结构的方法。在一实施例中,封装结构包括芯片、安置在芯片周围且电性耦接至芯片的多个引线以及形成于芯片以及所述多个引线上的封装体。至少一个引线包括具有上表面以及下表面的中央金属层、具有上表面且自中央金属层的上表面向上延伸的第一突出金属块、具有下表面且自中央金属层的下表面向下延伸的第二突出金属块、在第一突出金属块的上表面上的第一饰面层、以及在第二突出金属块的下表面上的第二饰面层。所述封装体实质上覆盖引线中的每一者的第一突出金属块以及第一饰面层。
Description
技术领域
本发明大体而言是涉及电子装置封装(electronic device packaging)。更特定而言,本发明是涉及引线框架结构(leadframe structure)以及使用引线框架结构的进阶四方扁平无引线(advanced quad flat no lead,aQFN)封装结构,以及其制造方法。
背景技术
在射频(radio frequency,RF)/无线、携带型应用及个人电脑(personalcomputer,PC)周边设备市场中,一般对于提高较小封装的效能以及增加的输入/输出(input/output,I/O)数目存在较高的需求。包括四方扁平无引线(QFN)封装以及增强型无引线的引线框架式封装的进阶引线框架封装已被广泛接受,且通常适用于包括高频传输(诸如经由RF频宽进行的高频传输)的芯片封装。
对于QFN封装结构而言,通常以平面引线框架基板制成管芯垫(die pad)以及周围接触端子(引线垫)。QFN封装结构通常通过表面粘着技术(surfacemounting technology;SMT)焊接至印刷电路板(printed circuit board,PCB)。因此,QFN封装结构的管芯垫及/或接触端子/接触垫应设计成诸如通过促进表面粘着而可与封装处理能力相配,以及提升长期焊点可靠性。
有鉴于此,而产生了对开发本文所述的引线框架结构、封装结构以及相关方法的需要。
发明内容
因此,本发明的目的在于提供一种针对引线框架结构、使用引线框架结构的进阶四方扁平无引线(aQFN)封装结构,以及其制造方法。
为达上述目的,本发明提供一种封装结构。在一实施例中,所述封装结构包括芯片、安置在芯片周围且电性耦接至芯片的多个引线以及形成于芯片 以及所述多个引线上的封装本体。所述多个引线中的至少一者包括:(a)具有上表面以及下表面的中央金属层;(b)自中央金属层的上表面向上延伸且具有上表面的第一突出金属块;(c)自中央金属层的下表面向下延伸且具有下表面的第二突出金属块;(d)在第一突出金属块的上表面上的第一饰面层;以及(e)在第二突出金属块的下表面上的第二饰面层。封装本体实质上覆盖所述多个引线中的每一者的第一突出金属块以及第一饰面层。
此外,第一突出金属块可自中央金属层的上表面向上延伸达中央金属层的厚度的百分之三十五与百分之百之间的距离,且第二突出金属块可自中央金属层的下表面向下延伸达中央金属层的厚度的百分之三十五与百分之百之间的距离。
此外,第一突出金属块可具有实质上垂直于第一突出金属块的上表面的侧表面。
此外,封装可包括具有上表面以及下表面的管芯垫,芯片安置在管芯垫的上表面上。封装也可包括具有上表面以及下表面的第一金属层,管芯垫安置在第一金属层的上表面上,其中第一金属层与中央金属层实质上厚度相同。封装也可包括具有上表面以及下表面的第二金属层,第一金属层安置在第二金属层的上表面上,其中第二金属层与第二突出金属块实质上厚度相同。封装也可包括安置在第二金属层的下表面上的金属饰面层。
此外,管芯垫的上表面与中央金属层的上表面可实质上在同一平面中。
此外,管芯垫可自第一金属层的上表面向上延伸达第一金属层的厚度的百分之三十五与百分之百之间的距离。
在另一态样中,本发明是关于一种形成引线框架结构的方法。在一实施例中,所述方法包括提供金属片、形成于金属片的上表面上的第一经图案化光致抗蚀剂层以及形成于金属片的下表面上的第二经图案化光致抗蚀剂层,其中上表面与下表面之间的距离对应于金属片的厚度。所述方法更包括在未由第一经图案化光致抗蚀剂层覆盖的金属片的上表面的区域上形成第一金属层、以及在未由第二经图案化光致抗蚀剂层覆盖的金属片的下表面的区域上形成第二金属层,其中第一金属层自金属片的上表面向上延伸达金属片的厚度的百分之三十五与百分之百之间的距离,且其中第二金属层自金属片的下表面向下延伸达金属片的厚度的百分之三十五与百分之百之间的距离。所述方法更包括在第一金属层上形成第一饰面层以及在第二金属层上形成第 二饰面层,以及移除第一经图案化光致抗蚀剂层以及第二经图案化光致抗蚀剂层。
此外,第一金属层可包括各自包括上表面以及侧表面的多个突出金属块。所述多个突出金属块中的每一者的侧表面可实质上垂直于金属片的上表面。
此外,第一金属层以及第二金属层可通过执行镀覆(plating)制作工艺而形成。
此外,第一饰面层以及第二饰面层可通过执行表面修饰制作工艺而形成。
此外,表面修饰制作工艺可包括电镀覆(electroplating)制作工艺、无电镀覆(electroless plating)制作工艺以及浸渍(immersion)制作工艺中的至少一者。
在另一态样中,本发明是关于一种制造封装结构的方法。在一实施例中,所述方法包括提供具有上表面以及下表面的金属片、形成于上表面上的多个第一突出金属块、形成于所述多个第一突出金属块上的第一饰面层、形成于下表面上的多个第二突出金属块以及形成于所述多个第二突出金属块上的第二饰面层。所述方法更包括将芯片电性耦接至所述多个第一突出金属块中所包括的至少一第一突出块,以及在金属片上形成封胶体(moldingcompound)以包封芯片、所述多个第一突出金属块以及形成于所述多个第一突出金属块上的第一饰面层。所述方法更包括使用第二饰面层作为蚀刻罩幕(etching mask),进行蚀刻穿透金属片的下表面上的区域直至封胶体暴露出来,以便界定多个引线。
此外,所述多个第一突出金属块可自金属片的上表面向上延伸达金属片的厚度的百分之三十五与百分之百之间的距离。所述多个第二突出金属块可自金属片的下表面向下延伸达金属片的厚度的百分之三十五与百分之百之间的距离。
此外,所述提供步骤可包括在金属片的上表面上形成第一经图案化光致抗蚀剂层以及在金属片的下表面上形成第二经图案化光致抗蚀剂层。所述提供步骤也可包括在未由第一经图案化光致抗蚀剂层覆盖的金属片的上表面的区域上形成所述多个第一突出金属块以及在未由第二经图案化光致抗蚀剂层覆盖的金属片的下表面的区域上形成所述多个第二突出金属块。所述提 供步骤也可包括在所述多个第一突出金属块上形成第一饰面层以及在所述多个第二突出金属块上形成第二饰面层,且也可包括移除第一经图案化光致抗蚀剂层以及第二经图案化光致抗蚀剂层。
此外,所述多个第一突出金属块各自可包括实质上垂直于金属片的上表面的侧表面。
此外,所述多个第一突出金属块以及所述多个第二突出金属块可通过执行镀覆制作工艺而形成。
此外,第一饰面层以及第二饰面层可通过执行表面修饰制作工艺而形成。
此外,所述提供步骤可包括在形成第一经图案化光致抗蚀剂层以及第二经图案化光致抗蚀剂层后,在金属片的上表面上形成第一中央突出块以及在金属片的下表面上形成第二中央突出块。所述提供步骤可包括将芯片附着至第一中央突出块的上表面。封胶体可囊封第一中央突出块。
此外,第一中央突出块可自金属片的上表面向上延伸达金属片的厚度的百分之三十五与百分之百之间的距离。第二中央突出块可自金属片的下表面向下延伸达金属片的厚度的百分之三十五与百分之百之间的距离。
此外,第一中央突出块的上表面与所述多个第一突出金属块中所包括的第一突出块的上表面可实质上在同一平面中。
在另一态样中,本发明是关于引线框架结构。在一实施例中,所述引线框架结构包括具有上表面以及下表面的金属片以及形成于上表面上的第一中央突出块。所述引线框架结构更包括形成于上表面上且围绕第一中央突出块的多个第一突出金属块以及形成于所述多个第一突出金属块上的第一饰面层。所述引线框架结构更包括形成于下表面上的多个第二突出金属块以及形成于所述多个第二突出金属块上的第二饰面层。
此外,所述多个第一突出金属块可自金属片的上表面向上延伸达金属片的厚度的百分之三十五与百分之百之间的距离,且所述多个第二突出金属块可自金属片的下表面向下延伸达金属片的厚度的百分之三十五与百分之百之间的距离。
此外,所述多个第一突出金属块的位置可对应于所述多个第二突出金属块的位置。
此外,所述多个第一突出金属块以及所述多个第二突出金属块可包括铜 以及铜合金中的至少一者。
此外,所述多个第一突出金属块与所述多个第二突出金属块可具有不同材料组成。
此外,第一饰面层以及第二饰面层可包括镍、金、钯、锡以及银中的至少一者。
此外,第一饰面层与第二饰面层可具有不同材料组成。
此外,引线框架结构也可包括形成于金属片的下表面上的第二中央突出块,且第二中央突出块的位置可对应于第一中央突出块的位置。此外,所述多个第一突出金属块中的每一者的上表面可实质上共面且可界定第一平面。所述多个第一突出金属块中的每一者的侧表面可实质上垂直于第一平面。
在另一态样中,本发明是关于一种制造封装结构的方法。在一实施例中,所述方法包括提供引线框架,此引线框架具有金属片、形成于所述金属片的上表面上的多个第一突出金属块、形成于所述多个第一突出金属块上的第一饰面层、形成于所述金属片的下表面上的多个第二突出金属块以及形成于所述多个第二突出金属块上的第二饰面层。所述多个第一突出金属块各自包括实质上垂直于所述金属片的所述上表面的侧表面。所述方法更包括将芯片与至少一所述多个第一突出金属块电性耦接。所述方法更包括于所述金属片上形成封装胶体,以包封所述芯片、所述多个第一突出金属块以及所述第一饰面层。所述方法更包括使用所述第二饰面层作为蚀刻罩幕,进行蚀刻穿透所述金属片的所述下表面上的区域直至所述封胶体暴露出来,以便界定多个引线。
附图说明
本文包含附图以提供对本发明的一些实施例的进一步理解,且附图并入本说明书中并构成本说明书的一部分。诸图说明本发明的实施例,且与本说明书一起用以解释本发明的一些实施例的原理。
图1A至图1I为展示根据本发明的实施例的形成引线框架结构以及制造进阶四方扁平无引线(aQFN)封装结构的方法的示意图。
图2展示根据本发明的实施例的封装结构的一实例的示意性横截面图。
图3A展示根据本发明的另一实施例的引线框架结构的例示性横截面图。
图3B为图3A的引线框架结构的例示性俯视图。
图4展示根据本发明的另一实施例的引线框架结构的例示性横截面图。
主要元件符号说明
10:aQFN封装结构
100:引线框架结构
110:金属片
110a:上表面
110b:下表面
114a:第一经图案化光致抗蚀剂层
114b:第二经图案化光致抗蚀剂层
116a:第一金属层
116b:第二金属层
118a:第一突出金属块/内部引线部分
118b:第二突出金属块/外部引线部分
118c:第一中央突出块/管芯垫部分
118d:第二中央突出块/散热片
120a:第一饰面层/内部引线部分
120b:第二饰面层/外部引线部分/散热片部分
123:管芯垫
125:引线
125a:内部引线
125b:外部引线
127:散热片
130:芯片
140:导线
150:封胶体
200:载体
210:金属片部分
218a:第一金属块
218b:第二金属块
220a:饰面层
220b:饰面层
223:管芯垫
225:接触端子/引线
225a:内部引线
225b:外部引线
227:散热片
230:芯片
240:导线
250:封胶体
300:引线框架结构
310:金属片
318a:内部引线部分
318b:外部引线部分
320a:内部引线部分
320b:外部引线部分
400:引线框架结构
410:金属片
418a:内部引线部分
418b:外部引线部分
418c:管芯垫部分
418d:散热片部分
420a:内部引线部分
420b:散热片部分/外部引线部分
P:中央空间
S1:开口
S2:开口
Sa:中央空腔
Sb:中央空腔
具体实施方式
现将详细参考本发明的一些实施例,其实例说明于附图中。相同参考数字将在诸图及本说明书中尽可能用以指代相同或类似部件。
定义
以下定义适用于关于本发明的一些实施例描述的态样中的一些。此等定义也在本文中加以详述。
如本文中所使用,单数形式「一」以及「该」可包括多个指示物,除非上下文另有明确表示。因此,举例而言,对「一突出金属块」的引用可包括多个突出金属块,除非上下文另有明确表示。
如本文中所使用,术语「集合」指含一或多个组件的集体总称。因此,举例而言,层集合可包括单一层或多个层。集合的组件可被称为集合的成员。集合的组件可为相同或不同的。在某些情况,集合的组件可共同具有一或多种共同特性。
如本文中所使用,术语「邻近」指接近或邻接。邻近组件可彼此间隔开或可彼此实际或直接接触。在一些例项中,邻近组件可彼此连接或可彼此整体形成。
如本文中所使用,诸如「内部」、「顶部」、「底部」、「在......上」、「在......下」、「向上」、「向下」、「侧」以及「横向」的术语指诸如根据诸图所示的组件集合的相对关系,但并不必须为此等组件在制造或使用期间的特定定向。
如本文中所使用,术语「连接」指操作性耦接或连结。所连接组件可直接彼此耦接或可诸如经由另一组件集合间接地彼此连接。
如本文中所使用,术语「实质上」以及「实质」指相当可观的程度或范围。当结合事件或情形使用时,所述术语可指事件或情形精确地发生的例项以及事件或情形非常近似地发生的例项(诸如考量本文所述的制造操作的典型容忍度水准)。
如本文中所使用,术语「导电」指输送电流的能力。导电材料通常对应于不展现对电流的流动的抵抗或展现极少抵抗的材料。导电率的一量度是以西门子/公尺(「S·m-1」)为单位。通常,导电材料为具有大于约104S·m-1(诸如,至少约105S·m-1或至少约106S·m-1)的导电率的材料。材料的导电率可有时随温度而变。除非另有规定,否则,材料的导电率是在室温下界定。
本发明的态样可用于制造各种封装结构,诸如,堆叠型封装、多芯片封 装或高频装置封装。
图1A至图1I为展示根据本发明的实施例的形成引线框架结构以及制造进阶四方扁平无引线(aQFN)封装结构的方法的示意图。图1A至图1D以及图1G至图1I是以横截面图展示,而图1E至图1F是以俯视图展示。
如图1A所示,提供具有上表面110a以及下表面110b的金属片110。金属片110可包括(例如)铜、铜合金或其他适用金属材料。上表面110a与下表面110b之间的距离对应于金属片110的厚度。接着,仍参看图1A,在金属片110的上表面110a上形成第一经图案化光致抗蚀剂层114a,且在金属片110的下表面110b上形成第二经图案化光致抗蚀剂层114b。可通过分别在金属片110的上表面110a以及下表面110b上层压干膜抗蚀剂层、进行曝光且接着显影以在干膜抗蚀剂层中形成图案来形成第一以及第二光致抗蚀剂层114a/114b。虽然图1A中的第一以及第二光致抗蚀剂层114a/114b的图案被展示为相同的,但第一光致抗蚀剂层114a的图案可取决于产品设计而不同于第二光致抗蚀剂层114b的图案。
接着,参看图1B,使用第一经图案化光致抗蚀剂层114a以及第二经图案化光致抗蚀剂层114b作为罩幕,执行镀覆制作工艺,以分别在没有被第一光致抗蚀剂层114a覆盖的金属片110的上表面110a的区域上形成第一金属层116a,且在没有被第二光致抗蚀剂层114b覆盖的金属片110的下表面110b的区域上形成第二金属层116b。第一金属层116a自上表面110a向上延伸,且第二金属层116b自下表面110b向下延伸。第一以及第二金属层116a/116b可包括(例如)铜、铜合金或其他适用金属材料。第一金属层116a可具有相同于或不同于第二金属层116b的材料组成的材料组成。举例而言,第一以及第二金属层116a/116b的厚度可为约5至25微米,且第一与第二金属层116a/116b的厚度与金属片110的厚度的比例范围可为0.1至1、0.25至1、0.35至1、0.4至1、0.5至1、0.75至1以及0.9至1。换言之,第一金属层116a可自上表面110a向上延伸且第二金属层可自下表面110b向下延伸达(例如)金属片110的厚度的10%至100%、25%至100%、35%至100%、40%至100%、50%至100%、75%至100%以及90%至100%的范围。第一以及第二金属层116a/116b的厚度也可实质上等于金属片110的厚度。
第一金属层116a包括形成于第一经图案化光致抗蚀剂层114a的开口S1内的多个第一突出金属块118a。第一金属层116a更包括第一经图案化光致 抗蚀剂层114a的中央空腔Sa内的第一中央突出块118c。第二金属层116b包括形成于第二经图案化光致抗蚀剂层114b的开口S2内的多个第二突出金属块118b。第二金属层116b更包括第二经图案化光致抗蚀剂层114b的中央空腔Sb内的第二中央突出块118d。第一突出金属块118a以及第一中央突出块118c可自上表面110a向上延伸达金属片110的厚度的10%至100%、25%至100%、35%至100%、40%至100%、50%至100%、75%至100%以及90%至100%的范围。在一实施例中,第一突出金属块118a以及第一中央突出块118c可自上表面110a向上延伸出实质上相同的量。第二突出金属块118b以及第二中央突出块118d可自下表面110b向下延伸达金属片110的厚度的10%至100%、25%至100%、35%至100%、40%至100%、50%至100%、75%至100%以及90%至100%的范围。在一实施例中,第二突出金属块118b以及第二中央突出块118d可自下表面110b向下延伸出实质上相同的量。
第一/第二金属块118a/118b安置成围绕第一/第二中央块118c/118d。第一金属块118a的位置对应于第二金属块118b的位置,且第一/第二金属块118a/118b为待形成的内部/外部引线。第一/第二金属块118a/118b可配置成列、行或阵列。自俯视图观之,举例而言,第一/第二金属块118a/118b的形状可为正方形(如图1E所示)、圆形或多边形。第一中央块118c可充当管芯垫,而第二中央块118d可充当散热片(heat sink)。第一中央块118c以及第二中央块118d可包括金属、金属合金或某一其他导电材料。
如图1C所示,对第一金属层116a以及第二金属层116b执行表面修饰制作工艺,以分别在第一金属层116a上形成第一饰面层120a且在第二金属层116b上形成第二饰面层120b。举例而言,第一以及第二饰面层120a/120b可包括镍、金、钯、锡、以及银中的至少一者。第一以及第二饰面层120a/120b可取决于产品要求而具有相同或不同的材料组成。举例而言,表面修饰制作工艺可包括(例如)电镀覆制作工艺、无电镀覆制作工艺及/或浸渍制作工艺。举例而言,第一及/或第二饰面层120a/120b可为通过无电镍无电钯浸金(electroless nickel electroless palladium immersion gold,ENEPIG)技术而形成的镍/钯/金堆叠层。较佳地,第一饰面层120a并非形成于第一中央块118c上。因为第一中央块118c充当管芯垫,所以较佳并不在上面形成第一饰面层,以避免管芯与管芯垫之间的分层。
在图1D中,移除第一以及第二经图案化光致抗蚀剂层114a/114b。在此 阶段,获得引线框架结构100。引线框架结构100包括多个内部引线部分118a/120a、多个外部引线部分118b/120b、管芯垫部分118c以及散热片部分118d/120b。因为已在未使用蚀刻制作工艺的情况下形成引线框架结构100,所以突出块118a/118c中的每一者的侧表面可为实质上平面的且实质上垂直于金属片110的上表面110a。每一突出块118a及/或118c的侧表面也可为实质上平面的且实质上分别垂直于每一突出块118a及/或118c的上表面。所称「实质上平面的」,是指适用表面可展现小于平均值的30%(诸如,小于25%或小于10%)的横向范围标准差。突出块118a/118c的上表面以及突出块118b/118d的下表面可各自分别实质上共面。图1E为图1D的引线框架结构100的例示性俯视图。内部引线部分118a/120a安置成围绕管芯垫部分118c。
因为在未使用蚀刻制作工艺的情况下形成引线框架结构100,所以引线框架结构100上的饰面层120a/120b及/或形成于引线框架结构100上的突出块118a/118b/118c/118d无蚀刻损坏且提供较好产品可靠性。此外,因为突出块118a/118b/118c/118d以及其上所形成的饰面层120a/120b自金属片110的上表面110a以及下表面110b两者突出,所以突出块118a/118b/118c/118d在电路板级温度循环测试、循环弯曲测试、掉落测试等测试下具有较大接触面积且提供较佳焊点可靠性。
参看图1F,在图1D后,将芯片130附着于管芯垫部分118c上,且在芯片130与内部引线部分118a/120a之间提供多根导线140。因此,芯片130经由导线140电连接至内部引线部分118a/120a。
接着,参看图1G,形成封胶体150以包封住芯片130、导线140、内部引线部分118a/120a以及管芯垫部分118c。封胶体150可包括(例如)环氧树脂或其他适用聚合物材料。
接着,参看图1H,使用第二饰面层120b作为蚀刻罩幕,对金属片110的下表面110b执行蚀刻制作工艺以移除在移除第二经图案化光致抗蚀剂层114b后所暴露的金属片110部分。此蚀刻制作工艺并暴露出封胶体150。在蚀刻制作工艺后,形成多个引线(或接触端子)125且每一个别引线125与其他引线125实体隔离且电性隔离。每一引线125包括内部引线125a以及外部引线125b。且,因为蚀刻掉所暴露金属片110,所以蚀刻制作工艺进一步界定管芯垫123。管芯垫123以及散热片127与引线125分开。较佳地,举例而言,蚀刻制作工艺可为湿式蚀刻制作工艺。
如图1H所示,外部引线125b自封胶体150向下突出,且包括未由蚀刻制作工艺移除的金属片110的部分。外部引线125b可因此自封胶体150向下突出达包括金属片110的厚度以及突出金属块118b的厚度两者的距离。此举增加外部引线125b的接触面积,且提供较好焊点可靠性。此外,散热片127的厚度可包括金属片110的厚度以及中央突出块118d的厚度,这会增加散热片127的暴露表面积且增加可由散热片127耗散的热量。
最终,参看图1I,执行单分制作工艺(singulation process)以获得个别aQFN封装结构10。
图2展示根据本发明的实施例的封装结构的一项实例的示意性横截面图。参看图2,aQFN封装结构20包括载体200、芯片230以及多根导线240。可使用图1A至图1I中所说明的方法来形成封装结构20。
载体200(例如,金属引线框架)包括管芯垫223以及多个接触端子(引线)225。引线225包括多个内部引线225a以及多个外部引线225b。内部引线225a以及外部引线225b是由封胶体250界定;亦即,由封胶体250囊封的引线225的部分被界定为内部引线225a,而外部引线225b为引线225的暴露部分。引线225安置在管芯垫223周围,且仅示意性描绘三行/列接触端子225。然而,引线(接触端子)的配置不应受例示性附图限制,而是可根据产品要求进行修改。具体言之,如图2的右侧的部分放大图所示,内部引线225a包括饰面层220a以及第一金属块218a,而外部引线225b包括饰面层220b、第二金属块218b以及金属片部分(金属片的部分)210。归因于回蚀制作工艺,金属片部分210及/或第二金属块218b的侧壁可为弯曲的。封胶体250囊封芯片230、导线240、管芯垫223以及内部引线225a,而外部引线225b以及散热片227被暴露。
如图2所示,外部引线225b可因此自封胶体250向下突出达包括金属片210的厚度以及突出金属块218b的厚度两者的距离。此举增加外部引线225b的接触面积且提供较好焊点可靠性,这会促进此封装结构20与待粘着的下一级电路板的电连接。
或者,根据另一实施例,第一以及第二经图案化光致抗蚀剂层的图案被设计成不具有管芯垫的球栅阵列型(ball grid array type),而非如上所述的具有管芯垫的岸面栅阵列型(1and grid array type)。图3A展示引线框架结构300的例示性横截面图,引线框架结构300是根据类似于图1A至图1D所说 明的处理步骤的处理步骤获得。引线框架结构300包括金属片310、多个内部引线部分318a/320a以及多个外部引线部分318b/320b。图3B为图3A的引线框架结构300的例示性俯视图。内部引线部分118a/120a安置成围绕中央空间P,中央空间P对应于芯片置放位置(虚线)。
另一方面,根据另一实施例,第一光致抗蚀剂层的图案可设计成不同于第二光致抗蚀剂层的图案。图4展示引线框架结构400的例示性横截面图,引线框架结构400是根据类似于图1A至图1D所说明的处理步骤的处理步骤获得。引线框架结构400包括金属片410、管芯垫部分418c、多个内部引线部分418a/420a、散热片部分418d/420b以及多个外部引线部分418b/420b。因为图案不同,所以对于位于较远离管芯垫部分的某些内部引线部分418a/420a而言,内部引线部分418a/420a的大小可设计成大于对应外部引线部分418b/420b的大小。较大内部引线部分418a/420a可帮助缩短打线接合长度(例如,在较接近管芯垫部分的位置处打线接合),而对应外部引线部分418b/420b可在较远离散热片部分418d/420b的位置处接合至电路板。以此方式,内部引线部分的打线接合位置并不准确对应于对应外部引线部分的接合位置,此举可提供较好设计灵活性。
对于根据上述实施例的封装结构而言,仅需要一个背侧蚀刻制作工艺,且前侧在蚀刻制作工艺期间受封胶体保护。此外,封装结构的外部引线(端子)突出且具有独立特征,独立特征能促进电连接性并改良产品可靠性。
虽然结合以上较佳实施例揭露了本发明,然而其并非用以限定本发明,任何熟悉此技术者,在不脱离本发明的精神和范围内,可作些许的更动与润饰,因此本发明的保护范围应应附上的权利要求所界定的为准。
Claims (21)
1.一种封装结构,包含:
芯片;
多个引线,安置在所述芯片周围且电性耦接至所述芯片,其中所述多个引线中的至少一者包括:
中央金属层,具有上表面以及下表面;
第一突出金属块,自所述中央金属层的所述上表面向上延伸且具有第一上表面;
第二突出金属块,自所述中央金属层的所述下表面向下延伸且具有第一下表面;
第一饰面层,位于所述第一突出金属块的所述第一上表面上;以及
第二饰面层,位于所述第二突出金属块的所述第一下表面上;
封装本体,形成于所述芯片以及所述多个引线上,以使得所述封装本体实质上覆盖所述多个引线中的每一者的所述第一突出金属块以及所述第一饰面层。
2.如权利要求1所述的封装结构,其中:
所述第一突出金属块自所述中央金属层的所述上表面向上延伸达所述中央金属层的厚度的百分之三十五与百分之百之间的距离;且
所述第二突出金属块自所述中央金属层的所述下表面向下延伸达所述中央金属层的所述厚度的百分之三十五与百分之百之间的距离。
3.如权利要求2所述的封装结构,其中所述第一突出金属块具有实质上垂直于所述第一突出金属块的所述第一上表面的侧表面。
4.如权利要求2所述的封装结构,还包含:
管芯垫,具有第二上表面以及第二下表面,所述芯片安置在所述管芯垫的所述第二上表面上;
第一金属层,具有第三上表面以及第三下表面,所述管芯垫安置在所述第一金属层的所述第三上表面上,其中所述第一金属层与所述中央金属层实质上厚度相同;
第二金属层,具有第四上表面以及第四下表面,所述第一金属层安置在所述第二金属层的所述第四上表面上,其中所述第二金属层与所述第二突出金属块实质上厚度相同;以及
金属饰面层,安置在所述第二金属层的所述第四下表面上。
5.如权利要求4所述的封装结构,其中所述管芯垫的所述第二上表面与所述中央金属层的所述上表面实质上在同一平面中。
6.如权利要求4所述的封装结构,其中所述管芯垫自所述第一金属层的所述第三上表面向上延伸达所述第一金属层的厚度的百分之三十五与百分之百之间的距离。
7.一种形成引线框架结构的方法,包含:
提供金属片、形成于所述金属片的上表面上的第一经图案化光致抗蚀剂层以及形成于所述金属片的下表面上的第二经图案化光致抗蚀剂层,其中所述上表面与所述下表面之间的距离对应于所述金属片的厚度;
在未由所述第一经图案化光致抗蚀剂层覆盖的所述金属片的所述上表面的区域上形成第一金属层以及在未由所述第二经图案化光致抗蚀剂层覆盖的所述金属片的所述下表面的区域上形成第二金属层,其中所述第一金属层自所述金属片的所述上表面向上延伸达所述金属片的所述厚度的百分之三十五与百分之百之间的距离,且其中所述第二金属层自所述金属片的所述下表面向下延伸达所述金属片的所述厚度的百分之三十五与百分之百之间的距离;
在所述第一金属层上形成第一饰面层以及在所述第二金属层上形成第二饰面层;以及
移除所述第一经图案化光致抗蚀剂层以及所述第二经图案化光致抗蚀剂层。
8.如权利要求7所述的方法,其中:
所述第一金属层包括多个突出金属块,而所述多个突出金属块各自包括上表面以及侧表面;且
所述多个突出金属块中的每一者的所述侧表面实质上垂直于所述金属片的所述上表面。
9.如权利要求8所述的方法,其中所述第一金属层以及所述第二金属层是通过执行镀覆制作工艺而形成。
10.如权利要求8所述的方法,其中所述第一饰面层以及所述第二饰面层是通过执行表面修饰制作工艺而形成。
11.如权利要求10所述的方法,其中所述表面修饰制作工艺包括有电镀覆制作工艺、无电镀覆制作工艺以及浸渍制作工艺中的至少一者。
12.一种制造封装结构的方法,包含:
提供具有上表面以及下表面的金属片、形成于所述上表面上的多个第一突出金属块、形成于所述多个第一突出金属块上的第一饰面层、形成于所述下表面上的多个第二突出金属块以及形成于所述多个第二突出金属块上的第二饰面层;
将芯片电性耦接至所述多个第一突出金属块中所包括的至少一第一突出块;
在所述金属片上形成封胶体,以包封所述芯片、所述多个第一突出金属块以及形成于所述多个第一突出金属块上的所述第一饰面层;以及
使用所述第二饰面层作为蚀刻罩幕,进行蚀刻穿透所述金属片的所述下表面上的区域直至所述封胶体暴露出来,以便界定多个引线。
13.如权利要求12所述的方法,其中:
所述多个第一突出金属块自所述金属片的所述上表面向上延伸达所述金属片的厚度的百分之三十五与百分之百之间的距离;且
所述多个第二突出金属块自所述金属片的所述下表面向下延伸达所述金属片的所述厚度的百分之三十五与百分之百之间的距离。
14.如权利要求12所述的方法,其中所述提供步骤包含:
在所述金属片的所述上表面上形成第一经图案化光致抗蚀剂层,以及在所述金属片的所述下表面上形成第二经图案化光致抗蚀剂层;
在未由所述第一经图案化光致抗蚀剂层覆盖的所述金属片的所述上表面的区域上形成所述多个第一突出金属块,以及在未由所述第二经图案化光致抗蚀剂层覆盖的所述金属片的所述下表面的区域上形成所述多个第二突出金属块;
在所述多个第一突出金属块上形成所述第一饰面层,以及在所述多个第二突出金属块上形成所述第二饰面层;以及
移除所述第一经图案化光致抗蚀剂层以及所述第二经图案化光致抗蚀剂层。
15.如权利要求14所述的方法,其中所述多个第一突出金属块各自包括实质上垂直于所述金属片的所述上表面的侧表面。
16.如权利要求14所述的方法,其中所述多个第一突出金属块以及所述多个第二突出金属块是通过执行镀覆制作工艺而形成。
17.如权利要求14所述的方法,其中所述第一饰面层以及所述第二饰面层是通过执行表面修饰制作工艺而形成。
18.如权利要求14所述的方法,其中所述提供步骤还包含:
在形成所述第一经图案化光致抗蚀剂层以及所述第二经图案化光致抗蚀剂层后,在所述金属片的所述上表面上形成第一中央突出块以及在所述金属片的所述下表面上形成第二中央突出块;以及
将所述芯片附着至所述第一中央突出块的上表面;
其中所述封胶体包封所述第一中央突出块。
19.如权利要求18所述的方法,其中:
所述第一中央突出块自所述金属片的所述上表面向上延伸达所述金属片的所述厚度的百分之三十五与百分之百之间的距离;且
所述第二中央突出块自所述金属片的所述下表面向下延伸达所述金属片的所述厚度的百分之三十五与百分之百之间的距离。
20.如权利要求19所述的方法,其中所述第一中央突出块的所述上表面与所述多个第一突出金属块中所包括的所述第一突出块的上表面实质上在同一平面中。
21.一种制造封装结构的方法,包含:
提供引线框架,该引线框架具有金属片、形成于所述金属片的上表面上的多个第一突出金属块、形成于所述多个第一突出金属块上的第一饰面层、形成于所述金属片的下表面上的多个第二突出金属块以及形成于所述多个第二突出金属块上的第二饰面层,其中所述多个第一突出金属块各自包括实质上垂直于所述金属片的所述上表面的侧表面;
将芯片与至少一所述多个第一突出金属块电性耦接;
在所述金属片上形成封胶体,以包封所述芯片、所述多个第一突出金属块以及所述第一饰面层;以及
使用所述第二饰面层作为蚀刻罩幕,进行蚀刻穿透所述金属片的所述下表面上的区域直至所述封胶体暴露出来,以便界定多个引线。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102983114A (zh) * | 2011-08-22 | 2013-03-20 | 德克萨斯仪器股份有限公司 | 具有超薄封装的高性能功率晶体管 |
CN103489791A (zh) * | 2012-06-07 | 2014-01-01 | 旭德科技股份有限公司 | 封装载板及其制作方法 |
CN104851866A (zh) * | 2015-04-24 | 2015-08-19 | 郭秋卫 | 一种利用金属硬度差优化管脚排布的封装件及其制造方法 |
CN110610919A (zh) * | 2019-09-23 | 2019-12-24 | 日月光半导体(上海)有限公司 | 一种引线框架、制作方法及封装结构 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090230524A1 (en) * | 2008-03-14 | 2009-09-17 | Pao-Huei Chang Chien | Semiconductor chip package having ground and power regions and manufacturing methods thereof |
US20100044850A1 (en) * | 2008-08-21 | 2010-02-25 | Advanced Semiconductor Engineering, Inc. | Advanced quad flat non-leaded package structure and manufacturing method thereof |
US8124447B2 (en) | 2009-04-10 | 2012-02-28 | Advanced Semiconductor Engineering, Inc. | Manufacturing method of advanced quad flat non-leaded package |
US8203201B2 (en) * | 2010-03-26 | 2012-06-19 | Stats Chippac Ltd. | Integrated circuit packaging system with leads and method of manufacture thereof |
US8669654B2 (en) * | 2010-08-03 | 2014-03-11 | Stats Chippac Ltd. | Integrated circuit packaging system with die paddle and method of manufacture thereof |
CN102832139B (zh) | 2012-08-10 | 2015-05-06 | 华为技术有限公司 | 四侧无引脚扁平封装体的封装方法及封装体 |
KR101440339B1 (ko) * | 2012-11-27 | 2014-09-15 | 앰코 테크놀로지 코리아 주식회사 | 원레이어 리드프레임 기판을 이용한 반도체 패키지 및 이의 제조 방법 |
US9324584B2 (en) * | 2012-12-14 | 2016-04-26 | Stats Chippac Ltd. | Integrated circuit packaging system with transferable trace lead frame |
GB2525585B (en) * | 2014-03-20 | 2018-10-03 | Micross Components Ltd | Leadless chip carrier |
JP6230520B2 (ja) * | 2014-10-29 | 2017-11-15 | キヤノン株式会社 | プリント回路板及び電子機器 |
TWI730499B (zh) * | 2019-11-12 | 2021-06-11 | 健策精密工業股份有限公司 | 散熱片 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101361181A (zh) * | 2005-11-30 | 2009-02-04 | 德克萨斯仪器股份有限公司 | 用于半导体器件的改良湿度可靠性和增强可焊性的引线框架 |
US20090034225A1 (en) * | 2007-07-31 | 2009-02-05 | Seiko Epson Corporation | Substrate and manufacturing method of the same, and semiconductor device and manufacturing method of the same |
US20090283884A1 (en) * | 2008-05-16 | 2009-11-19 | Samsung Techwin Co., Ltd. | Lead frame, semiconductor package including the same, and method of manufacturing the lead frame and the semiconductor package |
Family Cites Families (95)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0476664B1 (en) * | 1990-09-20 | 1995-07-05 | Dainippon Screen Mfg. Co., Ltd. | Method of forming small through-holes in thin metal plate |
US5389739A (en) * | 1992-12-15 | 1995-02-14 | Hewlett-Packard Company | Electronic device packaging assembly |
JPH08115989A (ja) * | 1994-08-24 | 1996-05-07 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US7166495B2 (en) * | 1996-02-20 | 2007-01-23 | Micron Technology, Inc. | Method of fabricating a multi-die semiconductor package assembly |
US6001671A (en) * | 1996-04-18 | 1999-12-14 | Tessera, Inc. | Methods for manufacturing a semiconductor package having a sacrificial layer |
US6201292B1 (en) * | 1997-04-02 | 2001-03-13 | Dai Nippon Insatsu Kabushiki Kaisha | Resin-sealed semiconductor device, circuit member used therefor |
KR100235308B1 (ko) * | 1997-06-30 | 1999-12-15 | 윤종용 | 2중 굴곡된 타이바와 소형 다이패드를 갖는 반도체 칩 패키지 |
JP3097653B2 (ja) * | 1998-04-17 | 2000-10-10 | 日本電気株式会社 | 半導体装置用パッケージおよびその製造方法 |
US7247526B1 (en) * | 1998-06-10 | 2007-07-24 | Asat Ltd. | Process for fabricating an integrated circuit package |
US6933594B2 (en) * | 1998-06-10 | 2005-08-23 | Asat Ltd. | Leadless plastic chip carrier with etch back pad singulation |
US7226811B1 (en) * | 1998-06-10 | 2007-06-05 | Asat Ltd. | Process for fabricating a leadless plastic chip carrier |
US7049177B1 (en) * | 2004-01-28 | 2006-05-23 | Asat Ltd. | Leadless plastic chip carrier with standoff contacts and die attach pad |
US6498099B1 (en) * | 1998-06-10 | 2002-12-24 | Asat Ltd. | Leadless plastic chip carrier with etch back pad singulation |
US6585905B1 (en) * | 1998-06-10 | 2003-07-01 | Asat Ltd. | Leadless plastic chip carrier with partial etch die attach pad |
US6989294B1 (en) * | 1998-06-10 | 2006-01-24 | Asat, Ltd. | Leadless plastic chip carrier with etch back pad singulation |
JP3764587B2 (ja) * | 1998-06-30 | 2006-04-12 | 富士通株式会社 | 半導体装置の製造方法 |
JP4030200B2 (ja) * | 1998-09-17 | 2008-01-09 | 株式会社ルネサステクノロジ | 半導体パッケージおよびその製造方法 |
AU6000699A (en) * | 1998-12-02 | 2000-06-19 | Hitachi Limited | Semiconductor device, method of manufacture thereof, and electronic device |
DE19905055A1 (de) * | 1999-02-08 | 2000-08-17 | Siemens Ag | Halbleiterbauelement mit einem Chipträger mit Öffnungen zur Kontaktierung |
SG75154A1 (en) * | 1999-02-23 | 2000-09-19 | Inst Of Microelectronics | Plastic ball grid array package |
JP3062192B1 (ja) * | 1999-09-01 | 2000-07-10 | 松下電子工業株式会社 | リ―ドフレ―ムとそれを用いた樹脂封止型半導体装置の製造方法 |
US6451627B1 (en) * | 1999-09-07 | 2002-09-17 | Motorola, Inc. | Semiconductor device and process for manufacturing and packaging a semiconductor device |
US6580159B1 (en) * | 1999-11-05 | 2003-06-17 | Amkor Technology, Inc. | Integrated circuit device packages and substrates for making the packages |
JP2001185651A (ja) * | 1999-12-27 | 2001-07-06 | Matsushita Electronics Industry Corp | 半導体装置およびその製造方法 |
US6342730B1 (en) * | 2000-01-28 | 2002-01-29 | Advanced Semiconductor Engineering, Inc. | Low-pin-count chip package and manufacturing method thereof |
US6261864B1 (en) * | 2000-01-28 | 2001-07-17 | Advanced Semiconductor Engineering, Inc. | Low-pin-count chip package and manufacturing method thereof |
EP1122778A3 (en) * | 2000-01-31 | 2004-04-07 | Sanyo Electric Co., Ltd. | Circuit device and manufacturing method of circuit device |
US7173336B2 (en) * | 2000-01-31 | 2007-02-06 | Sanyo Electric Co., Ltd. | Hybrid integrated circuit device |
JP3706533B2 (ja) * | 2000-09-20 | 2005-10-12 | 三洋電機株式会社 | 半導体装置および半導体モジュール |
US6306685B1 (en) * | 2000-02-01 | 2001-10-23 | Advanced Semiconductor Engineering, Inc. | Method of molding a bump chip carrier and structure made thereby |
US6238952B1 (en) * | 2000-02-29 | 2001-05-29 | Advanced Semiconductor Engineering, Inc. | Low-pin-count chip package and manufacturing method thereof |
EP1143509A3 (en) * | 2000-03-08 | 2004-04-07 | Sanyo Electric Co., Ltd. | Method of manufacturing the circuit device and circuit device |
US6242284B1 (en) * | 2000-05-05 | 2001-06-05 | Advanced Semiconductor Engineering, Inc. | Method for packaging a semiconductor chip |
JP2001338947A (ja) * | 2000-05-26 | 2001-12-07 | Nec Corp | フリップチップ型半導体装置及びその製造方法 |
US6683368B1 (en) * | 2000-06-09 | 2004-01-27 | National Semiconductor Corporation | Lead frame design for chip scale package |
JP3650001B2 (ja) * | 2000-07-05 | 2005-05-18 | 三洋電機株式会社 | 半導体装置およびその製造方法 |
US6762118B2 (en) * | 2000-10-10 | 2004-07-13 | Walsin Advanced Electronics Ltd. | Package having array of metal pegs linked by printed circuit lines |
JP4417541B2 (ja) * | 2000-10-23 | 2010-02-17 | ローム株式会社 | 半導体装置およびその製造方法 |
US6689640B1 (en) * | 2000-10-26 | 2004-02-10 | National Semiconductor Corporation | Chip scale pin array |
US6906414B2 (en) * | 2000-12-22 | 2005-06-14 | Broadcom Corporation | Ball grid array package with patterned stiffener layer |
JP3895570B2 (ja) * | 2000-12-28 | 2007-03-22 | 株式会社ルネサステクノロジ | 半導体装置 |
US6720207B2 (en) * | 2001-02-14 | 2004-04-13 | Matsushita Electric Industrial Co., Ltd. | Leadframe, resin-molded semiconductor device including the leadframe, method of making the leadframe and method for manufacturing the device |
US6551859B1 (en) * | 2001-02-22 | 2003-04-22 | National Semiconductor Corporation | Chip scale and land grid array semiconductor packages |
US6545347B2 (en) * | 2001-03-06 | 2003-04-08 | Asat, Limited | Enhanced leadless chip carrier |
JP3609737B2 (ja) * | 2001-03-22 | 2005-01-12 | 三洋電機株式会社 | 回路装置の製造方法 |
KR100393448B1 (ko) * | 2001-03-27 | 2003-08-02 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 및 그 제조 방법 |
CN1317762C (zh) * | 2001-07-09 | 2007-05-23 | 住友金属矿山株式会社 | 引线框架及其制造方法 |
KR20030019082A (ko) * | 2001-08-27 | 2003-03-06 | 산요 덴키 가부시키가이샤 | 회로 장치의 제조 방법 |
JP2003124421A (ja) * | 2001-10-15 | 2003-04-25 | Shinko Electric Ind Co Ltd | リードフレーム及びその製造方法並びに該リードフレームを用いた半導体装置の製造方法 |
TW523887B (en) * | 2001-11-15 | 2003-03-11 | Siliconware Precision Industries Co Ltd | Semiconductor packaged device and its manufacturing method |
JP2003204027A (ja) * | 2002-01-09 | 2003-07-18 | Matsushita Electric Ind Co Ltd | リードフレーム及びその製造方法、樹脂封止型半導体装置及びその製造方法 |
US6812552B2 (en) * | 2002-04-29 | 2004-11-02 | Advanced Interconnect Technologies Limited | Partially patterned lead frames and methods of making and using the same in semiconductor packaging |
US7799611B2 (en) * | 2002-04-29 | 2010-09-21 | Unisem (Mauritius) Holdings Limited | Partially patterned lead frames and methods of making and using the same in semiconductor packaging |
JP2004063615A (ja) * | 2002-07-26 | 2004-02-26 | Nitto Denko Corp | 半導体装置の製造方法、半導体装置製造用接着シートおよび半導体装置 |
KR20040030283A (ko) * | 2002-09-05 | 2004-04-09 | 신꼬오덴기 고교 가부시키가이샤 | 리드 프레임 및 그 제조 방법 |
US6818973B1 (en) * | 2002-09-09 | 2004-11-16 | Amkor Technology, Inc. | Exposed lead QFP package fabricated through the use of a partial saw process |
US7196416B2 (en) * | 2002-12-20 | 2007-03-27 | Nxp B.V. | Electronic device and method of manufacturing same |
US20040124505A1 (en) * | 2002-12-27 | 2004-07-01 | Mahle Richard L. | Semiconductor device package with leadframe-to-plastic lock |
US20040262781A1 (en) * | 2003-06-27 | 2004-12-30 | Semiconductor Components Industries, Llc | Method for forming an encapsulated device and structure |
TWI233674B (en) * | 2003-07-29 | 2005-06-01 | Advanced Semiconductor Eng | Multi-chip semiconductor package and manufacturing method thereof |
US7060535B1 (en) * | 2003-10-29 | 2006-06-13 | Ns Electronics Bangkok (1993) Ltd. | Flat no-lead semiconductor die package including stud terminals |
JP2005191342A (ja) * | 2003-12-26 | 2005-07-14 | Renesas Technology Corp | 半導体装置およびその製造方法 |
US7122406B1 (en) * | 2004-01-02 | 2006-10-17 | Gem Services, Inc. | Semiconductor device package diepad having features formed by electroplating |
JP2005203390A (ja) * | 2004-01-13 | 2005-07-28 | Seiko Instruments Inc | 樹脂封止型半導体装置の製造方法 |
US7009286B1 (en) * | 2004-01-15 | 2006-03-07 | Asat Ltd. | Thin leadless plastic chip carrier |
US7494557B1 (en) * | 2004-01-30 | 2009-02-24 | Sandia Corporation | Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures |
US7215009B1 (en) * | 2004-02-23 | 2007-05-08 | Altera Corporation | Expansion plane for PQFP/TQFP IR—package design |
US7008820B2 (en) * | 2004-06-10 | 2006-03-07 | St Assembly Test Services Ltd. | Chip scale package with open substrate |
ATE445232T1 (de) * | 2004-07-13 | 2009-10-15 | Nxp Bv | Elektronische vorrichtung mit integrierter schaltung |
US7087461B2 (en) * | 2004-08-11 | 2006-08-08 | Advanced Semiconductor Engineering, Inc. | Process and lead frame for making leadless semiconductor packages |
TWI256096B (en) * | 2004-10-15 | 2006-06-01 | Advanced Semiconductor Eng | Method for fabricating quad flat non-leaded package |
US7087462B1 (en) * | 2005-06-07 | 2006-08-08 | Advanced Semiconductor Engineering, Inc. | Method for forming leadless semiconductor packages |
US7348663B1 (en) * | 2005-07-15 | 2008-03-25 | Asat Ltd. | Integrated circuit package and method for fabricating same |
TWI287275B (en) * | 2005-07-19 | 2007-09-21 | Siliconware Precision Industries Co Ltd | Semiconductor package without chip carrier and fabrication method thereof |
US7262491B2 (en) * | 2005-09-06 | 2007-08-28 | Advanced Interconnect Technologies Limited | Die pad for semiconductor packages and methods of making and using same |
TWI264091B (en) * | 2005-09-15 | 2006-10-11 | Siliconware Precision Industries Co Ltd | Method of manufacturing quad flat non-leaded semiconductor package |
US8536689B2 (en) * | 2005-10-03 | 2013-09-17 | Stats Chippac Ltd. | Integrated circuit package system with multi-surface die attach pad |
US8163604B2 (en) * | 2005-10-13 | 2012-04-24 | Stats Chippac Ltd. | Integrated circuit package system using etched leadframe |
US7372133B2 (en) * | 2005-12-01 | 2008-05-13 | Intel Corporation | Microelectronic package having a stiffening element and method of making same |
TW200729429A (en) * | 2006-01-16 | 2007-08-01 | Siliconware Precision Industries Co Ltd | Semiconductor package structure and fabrication method thereof |
TW200729444A (en) * | 2006-01-16 | 2007-08-01 | Siliconware Precision Industries Co Ltd | Semiconductor package structure and fabrication method thereof |
US7683461B2 (en) * | 2006-07-21 | 2010-03-23 | Stats Chippac Ltd. | Integrated circuit leadless package system |
US20080029855A1 (en) * | 2006-08-04 | 2008-02-07 | Yi-Ling Chang | Lead Frame and Fabrication Method thereof |
TW200810044A (en) * | 2006-08-04 | 2008-02-16 | Advanced Semiconductor Eng | Non-lead leadframe and package therewith |
SG140574A1 (en) * | 2006-08-30 | 2008-03-28 | United Test & Assembly Ct Ltd | Method of producing a semiconductor package |
JP4533875B2 (ja) * | 2006-09-12 | 2010-09-01 | 株式会社三井ハイテック | 半導体装置およびこの半導体装置に使用するリードフレーム製品並びにこの半導体装置の製造方法 |
US20080079127A1 (en) * | 2006-10-03 | 2008-04-03 | Texas Instruments Incorporated | Pin Array No Lead Package and Assembly Method Thereof |
US20080079124A1 (en) * | 2006-10-03 | 2008-04-03 | Chris Edward Haga | Interdigitated leadfingers |
US7741704B2 (en) * | 2006-10-18 | 2010-06-22 | Texas Instruments Incorporated | Leadframe and mold compound interlock in packaged semiconductor device |
US7608484B2 (en) * | 2006-10-31 | 2009-10-27 | Texas Instruments Incorporated | Non-pull back pad package with an additional solder standoff |
US7800211B2 (en) * | 2007-06-29 | 2010-09-21 | Stats Chippac, Ltd. | Stackable package by using internal stacking modules |
US7675146B2 (en) * | 2007-09-07 | 2010-03-09 | Infineon Technologies Ag | Semiconductor device with leadframe including a diffusion barrier |
US20090127682A1 (en) * | 2007-11-16 | 2009-05-21 | Advanced Semiconductor Engineering, Inc. | Chip package structure and method of fabricating the same |
US7808089B2 (en) * | 2007-12-18 | 2010-10-05 | National Semiconductor Corporation | Leadframe having die attach pad with delamination and crack-arresting features |
US20100044850A1 (en) * | 2008-08-21 | 2010-02-25 | Advanced Semiconductor Engineering, Inc. | Advanced quad flat non-leaded package structure and manufacturing method thereof |
-
2010
- 2010-01-06 US US12/683,426 patent/US20110163430A1/en not_active Abandoned
- 2010-10-13 CN CN2010105069927A patent/CN102117791A/zh active Pending
- 2010-11-08 TW TW099138364A patent/TWI419291B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101361181A (zh) * | 2005-11-30 | 2009-02-04 | 德克萨斯仪器股份有限公司 | 用于半导体器件的改良湿度可靠性和增强可焊性的引线框架 |
US20090034225A1 (en) * | 2007-07-31 | 2009-02-05 | Seiko Epson Corporation | Substrate and manufacturing method of the same, and semiconductor device and manufacturing method of the same |
US20090283884A1 (en) * | 2008-05-16 | 2009-11-19 | Samsung Techwin Co., Ltd. | Lead frame, semiconductor package including the same, and method of manufacturing the lead frame and the semiconductor package |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102983114A (zh) * | 2011-08-22 | 2013-03-20 | 德克萨斯仪器股份有限公司 | 具有超薄封装的高性能功率晶体管 |
CN103489791A (zh) * | 2012-06-07 | 2014-01-01 | 旭德科技股份有限公司 | 封装载板及其制作方法 |
CN103489791B (zh) * | 2012-06-07 | 2016-04-13 | 旭德科技股份有限公司 | 封装载板及其制作方法 |
CN104851866A (zh) * | 2015-04-24 | 2015-08-19 | 郭秋卫 | 一种利用金属硬度差优化管脚排布的封装件及其制造方法 |
CN110610919A (zh) * | 2019-09-23 | 2019-12-24 | 日月光半导体(上海)有限公司 | 一种引线框架、制作方法及封装结构 |
Also Published As
Publication number | Publication date |
---|---|
TWI419291B (zh) | 2013-12-11 |
US20110163430A1 (en) | 2011-07-07 |
TW201125094A (en) | 2011-07-16 |
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