CN101848987A - 电子材料用清洁剂 - Google Patents

电子材料用清洁剂 Download PDF

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Publication number
CN101848987A
CN101848987A CN200880106471A CN200880106471A CN101848987A CN 101848987 A CN101848987 A CN 101848987A CN 200880106471 A CN200880106471 A CN 200880106471A CN 200880106471 A CN200880106471 A CN 200880106471A CN 101848987 A CN101848987 A CN 101848987A
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CN
China
Prior art keywords
cleaning
acid
agent
electronic
salt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200880106471A
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English (en)
Inventor
铃木一充
杉山彩代
胜川吉隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Chemical Industries Ltd
Original Assignee
Sanyo Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007239356 priority Critical
Priority to JP2007-239474 priority
Priority to JP2007-239356 priority
Priority to JP2007239474 priority
Application filed by Sanyo Chemical Industries Ltd filed Critical Sanyo Chemical Industries Ltd
Priority to PCT/JP2008/066558 priority patent/WO2009035089A1/ja
Publication of CN101848987A publication Critical patent/CN101848987A/zh
Pending legal-status Critical Current

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