CN105838507A - 光罩清洗剂及清洗方法 - Google Patents
光罩清洗剂及清洗方法 Download PDFInfo
- Publication number
- CN105838507A CN105838507A CN201610324070.1A CN201610324070A CN105838507A CN 105838507 A CN105838507 A CN 105838507A CN 201610324070 A CN201610324070 A CN 201610324070A CN 105838507 A CN105838507 A CN 105838507A
- Authority
- CN
- China
- Prior art keywords
- light shield
- water
- photomask
- washing
- cleaning agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 41
- 239000012459 cleaning agent Substances 0.000 title claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 33
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005406 washing Methods 0.000 claims abstract description 21
- 239000003513 alkali Substances 0.000 claims abstract description 10
- 229940051841 polyoxyethylene ether Drugs 0.000 claims abstract description 6
- 229920000056 polyoxyethylene ether Polymers 0.000 claims abstract description 6
- 238000001035 drying Methods 0.000 claims abstract description 4
- 239000004744 fabric Substances 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 13
- 239000003518 caustics Substances 0.000 claims description 8
- OSDLLIBGSJNGJE-UHFFFAOYSA-N 4-chloro-3,5-dimethylphenol Chemical compound CC1=CC(O)=CC(C)=C1Cl OSDLLIBGSJNGJE-UHFFFAOYSA-N 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 5
- 238000007654 immersion Methods 0.000 claims description 4
- 238000007605 air drying Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 7
- 238000011109 contamination Methods 0.000 abstract 2
- 238000002360 preparation method Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 9
- 239000000047 product Substances 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000003599 detergent Substances 0.000 description 3
- 238000009991 scouring Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000003242 anti bacterial agent Substances 0.000 description 2
- 230000000844 anti-bacterial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001804 emulsifying effect Effects 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 241000233866 Fungi Species 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000005202 decontamination Methods 0.000 description 1
- 230000003588 decontaminative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- -1 polyoxyethylene Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
- C11D1/721—End blocked ethers
-
- B08B1/143—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2041—Dihydric alcohols
- C11D3/2044—Dihydric alcohols linear
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/24—Organic compounds containing halogen
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610324070.1A CN105838507B (zh) | 2016-05-16 | 2016-05-16 | 光罩清洗剂及清洗方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610324070.1A CN105838507B (zh) | 2016-05-16 | 2016-05-16 | 光罩清洗剂及清洗方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105838507A true CN105838507A (zh) | 2016-08-10 |
CN105838507B CN105838507B (zh) | 2019-02-01 |
Family
ID=56592511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610324070.1A Active CN105838507B (zh) | 2016-05-16 | 2016-05-16 | 光罩清洗剂及清洗方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105838507B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109201623A (zh) * | 2018-09-18 | 2019-01-15 | 徐婷 | 一种试管的清洗方法 |
CN112007908A (zh) * | 2020-09-07 | 2020-12-01 | 成都光明光电股份有限公司 | 光学成像非球面透镜模仁清洗方法及其装置 |
CN113009779A (zh) * | 2021-02-05 | 2021-06-22 | 深圳市路维光电股份有限公司 | 掩模版清洗液及掩模版的清洗方法 |
CN113102363A (zh) * | 2021-05-06 | 2021-07-13 | 艾斯尔光电(南通)有限公司 | 一种光罩高效率清洗工艺 |
CN113231387A (zh) * | 2021-05-11 | 2021-08-10 | 云南北方驰宏光电有限公司 | 一种无损回收纤维光学元件的化学方法 |
CN115055433A (zh) * | 2022-06-30 | 2022-09-16 | 东风汽车有限公司东风日产乘用车公司 | 一种喷涂保护罩循环使用方法、脱膜装置及喷涂保护罩 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194264A (en) * | 1981-05-15 | 1982-11-29 | Amchem Prod | Aqueous detergent compositon and aluminum surface cleaning method |
CN1248616A (zh) * | 1999-09-27 | 2000-03-29 | 上海家化联合股份有限公司 | 一种空调器杀菌清洗剂 |
US6161557A (en) * | 1998-12-22 | 2000-12-19 | Showa Tansan Co., Ltd. | Method and apparatus for washing manufacturing line of drink or the like |
CN101339879A (zh) * | 2008-08-11 | 2009-01-07 | 南京凯燕电子有限公司 | 荫罩清洗回收方法 |
CN101612621A (zh) * | 2008-06-25 | 2009-12-30 | 中国蓝星(集团)股份有限公司 | 一种多晶硅装置的清洗方法 |
CN101848987A (zh) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | 电子材料用清洁剂 |
CN102078869A (zh) * | 2009-11-26 | 2011-06-01 | 中芯国际集成电路制造(上海)有限公司 | 光罩清洗方法 |
CN102260609A (zh) * | 2011-06-24 | 2011-11-30 | 东莞爱屋氏日用品有限公司 | 一种微波炉清洁剂 |
WO2014172280A1 (en) * | 2013-04-15 | 2014-10-23 | Ecolab Usa Inc. | Peroxycarboxylic acid based sanitizing rinse additives for use in ware washing |
CN104409328A (zh) * | 2014-11-21 | 2015-03-11 | 深圳市华星光电技术有限公司 | 掩膜板的清洗方法及清洗装置 |
-
2016
- 2016-05-16 CN CN201610324070.1A patent/CN105838507B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194264A (en) * | 1981-05-15 | 1982-11-29 | Amchem Prod | Aqueous detergent compositon and aluminum surface cleaning method |
US6161557A (en) * | 1998-12-22 | 2000-12-19 | Showa Tansan Co., Ltd. | Method and apparatus for washing manufacturing line of drink or the like |
CN1248616A (zh) * | 1999-09-27 | 2000-03-29 | 上海家化联合股份有限公司 | 一种空调器杀菌清洗剂 |
CN101848987A (zh) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | 电子材料用清洁剂 |
CN101612621A (zh) * | 2008-06-25 | 2009-12-30 | 中国蓝星(集团)股份有限公司 | 一种多晶硅装置的清洗方法 |
CN101339879A (zh) * | 2008-08-11 | 2009-01-07 | 南京凯燕电子有限公司 | 荫罩清洗回收方法 |
CN102078869A (zh) * | 2009-11-26 | 2011-06-01 | 中芯国际集成电路制造(上海)有限公司 | 光罩清洗方法 |
CN102260609A (zh) * | 2011-06-24 | 2011-11-30 | 东莞爱屋氏日用品有限公司 | 一种微波炉清洁剂 |
WO2014172280A1 (en) * | 2013-04-15 | 2014-10-23 | Ecolab Usa Inc. | Peroxycarboxylic acid based sanitizing rinse additives for use in ware washing |
CN104409328A (zh) * | 2014-11-21 | 2015-03-11 | 深圳市华星光电技术有限公司 | 掩膜板的清洗方法及清洗装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109201623A (zh) * | 2018-09-18 | 2019-01-15 | 徐婷 | 一种试管的清洗方法 |
CN112007908A (zh) * | 2020-09-07 | 2020-12-01 | 成都光明光电股份有限公司 | 光学成像非球面透镜模仁清洗方法及其装置 |
CN113009779A (zh) * | 2021-02-05 | 2021-06-22 | 深圳市路维光电股份有限公司 | 掩模版清洗液及掩模版的清洗方法 |
CN113102363A (zh) * | 2021-05-06 | 2021-07-13 | 艾斯尔光电(南通)有限公司 | 一种光罩高效率清洗工艺 |
CN113231387A (zh) * | 2021-05-11 | 2021-08-10 | 云南北方驰宏光电有限公司 | 一种无损回收纤维光学元件的化学方法 |
CN115055433A (zh) * | 2022-06-30 | 2022-09-16 | 东风汽车有限公司东风日产乘用车公司 | 一种喷涂保护罩循环使用方法、脱膜装置及喷涂保护罩 |
CN115055433B (zh) * | 2022-06-30 | 2023-12-26 | 东风汽车有限公司东风日产乘用车公司 | 一种喷涂保护罩循环使用方法、脱膜装置及喷涂保护罩 |
Also Published As
Publication number | Publication date |
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CN105838507B (zh) | 2019-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Photomask cleaning agent and method Effective date of registration: 20200709 Granted publication date: 20190201 Pledgee: Shenzhen hi tech investment small loan Co.,Ltd. Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING Co.,Ltd. Registration number: Y2020980003928 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210926 Granted publication date: 20190201 Pledgee: Shenzhen hi tech investment small loan Co.,Ltd. Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING Co.,Ltd. Registration number: Y2020980003928 |