CN101800231B - 光电转换器件的制造方法 - Google Patents

光电转换器件的制造方法 Download PDF

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Publication number
CN101800231B
CN101800231B CN2010100015456A CN201010001545A CN101800231B CN 101800231 B CN101800231 B CN 101800231B CN 2010100015456 A CN2010100015456 A CN 2010100015456A CN 201010001545 A CN201010001545 A CN 201010001545A CN 101800231 B CN101800231 B CN 101800231B
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photoelectric conversion
transfer electrode
transfer
holding portion
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Expired - Fee Related
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CN2010100015456A
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Chinese (zh)
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CN101800231A (zh
Inventor
板桥政次
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/151—Geometry or disposition of pixel elements, address lines or gate electrodes
    • H10F39/1515—Optical shielding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8057—Optical shielding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements

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  • Solid State Image Pick-Up Elements (AREA)
CN2010100015456A 2009-01-13 2010-01-08 光电转换器件的制造方法 Expired - Fee Related CN101800231B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009005135A JP5406537B2 (ja) 2009-01-13 2009-01-13 光電変換装置、撮像システム、及び光電変換装置の製造方法
JP2009-005135 2009-01-13

Publications (2)

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CN101800231A CN101800231A (zh) 2010-08-11
CN101800231B true CN101800231B (zh) 2013-10-16

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CN2010100015456A Expired - Fee Related CN101800231B (zh) 2009-01-13 2010-01-08 光电转换器件的制造方法

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US (2) US8426794B2 (enExample)
JP (1) JP5406537B2 (enExample)
CN (1) CN101800231B (enExample)

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* Cited by examiner, † Cited by third party
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JP5564874B2 (ja) * 2009-09-25 2014-08-06 ソニー株式会社 固体撮像装置、及び電子機器
JP2011204878A (ja) 2010-03-25 2011-10-13 Sony Corp 固体撮像デバイスおよび電子機器
JP5717357B2 (ja) 2010-05-18 2015-05-13 キヤノン株式会社 光電変換装置およびカメラ
JP6081694B2 (ja) * 2010-10-07 2017-02-15 株式会社半導体エネルギー研究所 光検出装置
JP5814625B2 (ja) 2011-05-27 2015-11-17 キヤノン株式会社 固体撮像装置、それを用いた撮像システム及び固体撮像装置の製造方法
JP6095258B2 (ja) 2011-05-27 2017-03-15 キヤノン株式会社 固体撮像装置、及び固体撮像装置を用いた撮像システム
JP2013093553A (ja) 2011-10-04 2013-05-16 Canon Inc 光電変換装置及びその製造方法、並びに光電変換システム
JP2013110285A (ja) 2011-11-22 2013-06-06 Sony Corp 固体撮像素子および製造方法、並びに、電子機器
JP5885634B2 (ja) 2012-10-02 2016-03-15 キヤノン株式会社 固体撮像装置、および撮像システム
JP6055270B2 (ja) 2012-10-26 2016-12-27 キヤノン株式会社 固体撮像装置、その製造方法、およびカメラ
JP5971106B2 (ja) 2012-12-17 2016-08-17 株式会社デンソー 光センサ
JP6162999B2 (ja) * 2013-04-15 2017-07-12 キヤノン株式会社 固体撮像装置およびカメラ
JP6274567B2 (ja) 2014-03-14 2018-02-07 キヤノン株式会社 固体撮像装置及び撮像システム
JP6457755B2 (ja) * 2014-07-10 2019-01-23 キヤノン株式会社 固体撮像装置
JP6711692B2 (ja) * 2016-05-24 2020-06-17 キヤノン株式会社 光電変換装置及び画像読み取り装置
JP6407227B2 (ja) * 2016-10-05 2018-10-17 キヤノン株式会社 固体撮像装置、及び固体撮像装置を用いた撮像システム
JP6664353B2 (ja) * 2017-07-11 2020-03-13 キヤノン株式会社 光電変換装置、光電変換装置を備えた機器、光電変換装置の製造方法
TWI837140B (zh) * 2018-07-18 2024-04-01 日商索尼半導體解決方案公司 受光元件及測距模組
TWI675467B (zh) 2018-08-29 2019-10-21 力晶積成電子製造股份有限公司 影像感測器及其製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1327269A (zh) * 2000-03-28 2001-12-19 株式会社东芝 固体摄像器件及其制造方法
CN1624929A (zh) * 2003-12-01 2005-06-08 三洋电机株式会社 固体摄像元件
CN101009296A (zh) * 2006-01-24 2007-08-01 松下电器产业株式会社 固体摄像器件、信号电荷检测器件以及摄像机

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Publication number Priority date Publication date Assignee Title
JP3180748B2 (ja) 1997-12-11 2001-06-25 日本電気株式会社 固体撮像装置
JP4470364B2 (ja) 2002-10-17 2010-06-02 ソニー株式会社 固体撮像素子及びカメラ装置
JP2006237315A (ja) * 2005-02-25 2006-09-07 Matsushita Electric Ind Co Ltd 固体撮像装置
JP2006261532A (ja) 2005-03-18 2006-09-28 Seiko Epson Corp 固体撮像装置及びその駆動方法
JP4785433B2 (ja) * 2005-06-10 2011-10-05 キヤノン株式会社 固体撮像装置
WO2007037294A1 (en) 2005-09-27 2007-04-05 Canon Kabushiki Kaisha Photoelectric conversion device and fabrication method therefor
JP4935046B2 (ja) * 2005-10-19 2012-05-23 セイコーエプソン株式会社 固体撮像素子
JP2007157912A (ja) * 2005-12-02 2007-06-21 Nikon Corp 固体撮像装置
JP2008004692A (ja) * 2006-06-21 2008-01-10 Nikon Corp 固体撮像装置
JP5110820B2 (ja) 2006-08-02 2012-12-26 キヤノン株式会社 光電変換装置、光電変換装置の製造方法及び撮像システム
US8184191B2 (en) * 2006-08-09 2012-05-22 Tohoku University Optical sensor and solid-state imaging device
JP4929981B2 (ja) 2006-10-30 2012-05-09 株式会社Ｊｖｃケンウッド 固体撮像素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1327269A (zh) * 2000-03-28 2001-12-19 株式会社东芝 固体摄像器件及其制造方法
CN1624929A (zh) * 2003-12-01 2005-06-08 三洋电机株式会社 固体摄像元件
CN101009296A (zh) * 2006-01-24 2007-08-01 松下电器产业株式会社 固体摄像器件、信号电荷检测器件以及摄像机

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2006-261532A 2006.09.28
JP特开2007-115803A 2007.05.10

Also Published As

Publication number Publication date
US20130208158A1 (en) 2013-08-15
US20100176272A1 (en) 2010-07-15
JP2010165753A (ja) 2010-07-29
CN101800231A (zh) 2010-08-11
JP5406537B2 (ja) 2014-02-05
US8803062B2 (en) 2014-08-12
US8426794B2 (en) 2013-04-23

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