CN101680080B - 涂布基体的方法以及金属合金的真空沉积装置 - Google Patents

涂布基体的方法以及金属合金的真空沉积装置 Download PDF

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Publication number
CN101680080B
CN101680080B CN2008800135887A CN200880013588A CN101680080B CN 101680080 B CN101680080 B CN 101680080B CN 2008800135887 A CN2008800135887 A CN 2008800135887A CN 200880013588 A CN200880013588 A CN 200880013588A CN 101680080 B CN101680080 B CN 101680080B
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metal alloy
matrix
weight
magnesium
equipment
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CN101680080A (zh
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P·乔奎特
E·希尔伯伯格
B·施米茨
D·查雷克斯
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ArcelorMittal France SA
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
CN2008800135887A 2007-03-20 2008-03-19 涂布基体的方法以及金属合金的真空沉积装置 Active CN101680080B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07290342.0 2007-03-20
EP07290342A EP1972699A1 (fr) 2007-03-20 2007-03-20 Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
PCT/FR2008/000347 WO2008142222A1 (fr) 2007-03-20 2008-03-19 Procédé de revêtement d'un substrat et installation de dépôt sous vide d'alliage métallique

Publications (2)

Publication Number Publication Date
CN101680080A CN101680080A (zh) 2010-03-24
CN101680080B true CN101680080B (zh) 2012-07-11

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CN2008800135887A Active CN101680080B (zh) 2007-03-20 2008-03-19 涂布基体的方法以及金属合金的真空沉积装置

Country Status (16)

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US (3) US8481120B2 (es)
EP (2) EP1972699A1 (es)
JP (1) JP5873621B2 (es)
KR (1) KR101453583B1 (es)
CN (1) CN101680080B (es)
BR (1) BRPI0809194B1 (es)
CA (1) CA2681329C (es)
ES (1) ES2599364T3 (es)
HU (1) HUE031482T2 (es)
MA (1) MA31417B1 (es)
MX (1) MX2009009914A (es)
PL (1) PL2129810T3 (es)
RU (1) RU2456372C2 (es)
UA (1) UA99280C2 (es)
WO (1) WO2008142222A1 (es)
ZA (1) ZA200906306B (es)

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EP2199425A1 (fr) * 2008-12-18 2010-06-23 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (II)
KR101639811B1 (ko) * 2009-09-28 2016-07-15 주식회사 포스코 용융금속 공급장치
KR101639813B1 (ko) * 2009-10-08 2016-07-15 주식회사 포스코 연속 코팅 장치
WO2012081738A1 (en) * 2010-12-13 2012-06-21 Posco Continuous coating apparatus
CN103328680B (zh) * 2011-01-14 2015-05-20 安赛乐米塔尔研究与发展有限责任公司 工业金属蒸汽发生器的自动供给装置
ES2717459T3 (es) 2011-12-23 2019-06-21 Tata Steel Nederland Tech Bv Sustrato con un recubrimiento de doble capa
US8778081B2 (en) * 2012-01-04 2014-07-15 Colorado State University Research Foundation Process and hardware for deposition of complex thin-film alloys over large areas
JP6313746B2 (ja) * 2012-03-30 2018-04-18 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップＴａｔａ Ｓｔｅｅｌ Ｎｅｄｅｒｌａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｂｖ 液体金属を蒸発器に供給する方法および装置
KR101439694B1 (ko) 2012-12-26 2014-09-12 주식회사 포스코 Zn-Mg 합금도금강판 및 그의 제조방법
KR102111020B1 (ko) * 2013-05-02 2020-05-15 삼성디스플레이 주식회사 증착 장치
UA117592C2 (uk) * 2013-08-01 2018-08-27 Арселорміттал Пофарбований оцинкований сталевий лист та спосіб його виготовлення
UA116262C2 (uk) * 2013-08-01 2018-02-26 Арселорміттал Сталевий лист з цинковим покриттям
KR102242070B1 (ko) * 2013-11-05 2021-04-20 타타 스틸 네덜란드 테크날러지 베.뷔. 증발기 디바이스 내의 액상 금속의 조성을 제어하는 방법 및 장치
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WO2017191081A1 (en) * 2016-05-03 2017-11-09 Tata Steel Nederland Technology B.V. Method to control the temperature of an electromagnetic pump
WO2018020296A1 (en) * 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
US11208716B2 (en) 2016-12-26 2021-12-28 Posco Multi-layered zinc alloy plated steel having excellent spot weldability and corrosion resistance
KR101940885B1 (ko) 2016-12-26 2019-01-21 주식회사 포스코 점용접성 및 내식성이 우수한 단층 아연합금도금강재 및 그 제조방법
WO2019043424A1 (en) * 2017-08-30 2019-03-07 Arcelormittal COATED METALLIC SUBSTRATE
WO2019043422A1 (en) * 2017-08-30 2019-03-07 Arcelormittal COATED METALLIC SUBSTRATE
WO2019116082A1 (en) * 2017-12-14 2019-06-20 Arcelormittal Vacuum deposition facility and method for coating a substrate
KR102109242B1 (ko) 2017-12-26 2020-05-11 주식회사 포스코 점용접성 및 내식성이 우수한 다층 아연합금도금강재
WO2019239186A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239185A1 (en) 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239184A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
RU185096U1 (ru) * 2018-08-09 2018-11-21 Акционерное общество "Новосибирский приборостроительный завод" Устройство для измерения спектров отражения слоев многослойного покрытия в процессе их напыления
JP2019060021A (ja) * 2018-11-09 2019-04-18 アルセロルミタル・インベステイガシオン・イ・デサロジヨ・エセ・エレ 亜鉛コーティングを備えた塗装鋼板
WO2020109849A1 (en) 2018-11-30 2020-06-04 Arcelormittal Wire injection
CN112575294B (zh) * 2019-09-29 2023-02-10 宝山钢铁股份有限公司 一种具有双隔板的真空镀膜装置
CN113564534B (zh) * 2020-04-28 2023-05-09 宝山钢铁股份有限公司 一种真空镀机组镀液连续供给装置及其供给方法
CN113368522B (zh) * 2021-07-02 2022-12-23 上海大学 一种铟的真空蒸馏装置和蒸馏方法
KR102559972B1 (ko) 2021-07-21 2023-07-27 한국생산기술연구원 바나듐이 첨가된 고온 저마찰 특성 다성분계 박막 및 이의 제조방법
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Publication number Publication date
JP2010522272A (ja) 2010-07-01
HUE031482T2 (en) 2017-07-28
ES2599364T3 (es) 2017-02-01
US20100104752A1 (en) 2010-04-29
CN101680080A (zh) 2010-03-24
KR101453583B1 (ko) 2014-11-03
CA2681329C (fr) 2012-05-22
UA99280C2 (ru) 2012-08-10
ZA200906306B (en) 2010-05-26
CA2681329A1 (fr) 2008-11-27
MX2009009914A (es) 2009-10-20
RU2009138469A (ru) 2011-04-27
EP2129810B1 (fr) 2016-07-20
BRPI0809194B1 (pt) 2018-12-04
KR20090122247A (ko) 2009-11-26
US20130239890A1 (en) 2013-09-19
BRPI0809194A2 (pt) 2014-09-23
MA31417B1 (fr) 2010-06-01
EP2129810A1 (fr) 2009-12-09
US8481120B2 (en) 2013-07-09
PL2129810T3 (pl) 2017-08-31
US20180112305A1 (en) 2018-04-26
EP1972699A1 (fr) 2008-09-24
JP5873621B2 (ja) 2016-03-01
RU2456372C2 (ru) 2012-07-20
WO2008142222A1 (fr) 2008-11-27

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