CN101542635B - 闪烁器板和射线检测器 - Google Patents
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Abstract
在透射射线的支承基片(12)的一个面粘合树脂反射片(13)，在支承基片(12)的另一个面粘合材质与树脂反射片(13)相同的树脂片(14)。支承基片(12)的一个面的树脂反射片(13)上形成将射线变换成可见光的荧光体层(15)。利用覆盖荧光体层(15)的防湿层(17)和树脂反射片(13)包围荧光体层(15)。通过将树脂反射片(13)配置在支承基片(12)与荧光体层(15)之间，取得灵敏度特性良好、获得稳定的质量且能改善成本的闪烁器板(11)。
Description
技术领域
本发明涉及将射线变换成可见光的闪烁器板和使用此闪烁器板的射线检测器。
背景技术
以往用于医疗用或工业用非破坏检查等，最近数字化的射线检测器的主流方式为计算机放射仪(下文称为CR)或平面检测器(下文称为FPD)那样的在闪烁器层将入射X射线变换成可见光。
部分CR装置使用的添加铕的溴化铯(CsBr:Eu)和大部分FPD使用的添加铊的碘化铯(CsI:Tl)均由于用真空蒸镀法容易形成柱状结晶，而多被使用作为荧光体层的材料。
例如，使用CsI:Tl的闪烁器板的基本组成在射线透视性的例如玻璃等支承基片上涂覆反射膜，并在其上使CsI成膜。还往往在反射膜与CsI之间涂覆保护膜，以达到保护反射膜的目的。
从X射线源通过被拍摄体对形成这种结构的闪烁器板入射的X射线由闪烁器变换成可见光。使用X射线光子作为典型进行说明，在荧光体层内的发光点将光子变换成可见光。来自发光点的光往各方发散，与入射光子的光谱完全无关。另一方面，荧光体层形成柱状结构，所以柱间的间隙与CsI(CsI的折射率＝1.8)的折射率差异造成某种比率的发光光子在柱内通过并在闪烁器板的表面出射。向相邻柱远处发散的光横切许多柱间的光学界面，发散到荧光体层的面的方向的概率应该低，并且来到某界面时，仍然关在该柱内，在闪烁器板的表面出射。由于上述作用，具有柱结构的荧光体层具有不那么使光渗透而使发光传到后续器件(例如，FPD则为光电二极管)的功能，获得分辨率较高的闪烁器层。
反射膜具有使发射至支承基片方向的光返回CsI表面一次的功能，所以具有使闪烁器板的灵敏度提高的功能。
使用荧光体层的FPD将闪烁器板粘合于把多个受光元件配置成1维或2维状的图像传感器的形态为一个例子。形成这种结构的FPD的分辨率与灵敏度特性受闪烁器板的特性影响。即，上述CsI的柱结构和反射膜的功能左右FPD的特性(例如参考日本专利公开2006-58099号公报的第4页～第5页和图3)。
发明内容
如上所述，作为影响闪烁器板的灵敏度特性的构件有反射膜。该膜是提高灵敏度的关键点。调查此基于反射膜的灵敏度的结果判明存在以树脂类材料为母体的反射膜比一般使用的金属类材料的反射膜灵敏度高的趋势。例如，在以碳纤维强化塑料(下文称为CFRP)为材料的支承基片上分别对Al反射膜、银合金反射膜+MgO保护膜、涂覆散布氧化钛的树脂糊而形成的反射膜进行成膜，并在这些膜上将CsI形成500微米(μm)的膜时的灵敏度特性在增光屏的灵敏度为1时的相对值分别为1.8、2.2、2.4。
然而，银反射膜即使镀上保护膜也因吸湿而容易黑化，所以质量不稳定。涂覆散布氧化钛的树脂糊而形成的反射膜容易得到高灵敏度，但由于树脂糊涂覆不均，存在产生灵敏度不均的问题。还因为树脂的耐热性低，CsI蒸镀工序时的加热使灵敏度不均的趋势进一步强化。
又，闪烁器板中，以提高X射线透射率为目的而使用碳材料的支承基片正在成为主流。碳材料中，CFRP成本低且刚性高，所以是有希望的材料。然而，在CFRP的支承基片涂覆树脂糊时，支承基片表面的湿润性低，所以难以将树脂糊均匀涂覆，存在容易产生涂覆不均的问题。又，许多情况将树脂糊涂覆一次后，使其热固化；这时，由于与支承基片的热膨胀率有差异，存在支承基片会产生翘曲的问题。
本发明是鉴于上述诸点而完成的，其目的为：提供一种灵敏度特性良好、获得稳定的质量且能改善成本的闪烁器板和使用此闪烁器板的射线检测器。
本发明的闪烁器板具备透射射线的支承基片、设在此支承基片的一个面的树脂反射片、以及设在所述支承基片的一个面的树脂反射片上以将射线变换成可见光的荧光体层。
本发明的射线检测器具备排列多个受光元件的图像传感器、以及与此图像传感器组合的闪烁器板。
附图说明
图1是示出本发明一实施方式的闪烁器板的截面图。
图2是示出测量并比较该闪烁器板的分辨率特性的结果的表。
图3是使用该闪烁器板的射线检测器的截面图。
具体实施方式
下面，参照附图说明本发明一实施方式。
图1中示出闪烁器板的截面图，此闪烁器板11具有以碳纤维强化塑料(下文称为CFRP)为材料的支承基片12，此支承基片12的一个面整个粘贴由厚190微米的发泡二甲酯(发泡PET)构成的树脂反射片13，作为反射膜；还在支承基片12的另一个面整个粘贴材质与由厚190微米的发泡二甲酯(发泡PET)构成的树脂反射片13相同的树脂片14。
层叠多层强化纤维基体材料，并对其浸渗热固化性树脂后使其热固化，从而制成支承基片12。
通过在支承基片12成形时同时粘合，能在支承基片12的两个面形成树脂反射片13和树脂片14。这时，支承基片12的成形工序和反射膜形成工序同时进行并完成，所以省略已有例中的反射膜形成工序。
又，支承基片12的一个面上，在树脂反射片13的表面用真空蒸镀法将作为用添加铊的碘化铯(CsI:Tl)等构成的闪烁器层的荧光体层15成膜为500微米的厚度。此荧光体层15具有从树脂反射片13的表面生长为柱状的多个柱状结晶16。
为了形成此荧光体层15，将两个面粘合各片13、14的支承基片12在真空蒸镀装置内配置成CsI容纳坑与TlI容纳坑对置，并进行真空蒸镀。真空蒸镀时，将基片温度加热到180℃，将真空蒸镀装置内的压力设定为0.4帕(Pa)，则在支承基片12的树脂反射片13的表面形成激活TlI的CsI的柱状结晶。CsI的膜厚达到500微米时，成膜结束，从真空蒸镀装置取出形成CsI膜的支承基片12。
进而，以热CVD法将用聚对二甲苯等构成的防湿层17形成膜厚15微米左右，以合为一体地覆盖树脂反射片13的表面至端面、支承基片12的端面和树脂片14的端面，包括压电体层15的表面。
然后，图2示出测量并比较这样构成的闪烁器板11的分辨率特性得到的结果。
已有例1在CFRP基片上形成Al反射膜、CsI、聚对二甲苯。
已有例2在CFRP基片上形成涂覆散布氧化钛的树脂糊而形成的反射膜、氧化镁保护膜、CsI、聚对二甲苯。
本实施方式的实施例在CFRP基片上形成发泡PET反射片、CsI、聚对二甲苯。
于是，本实施方式的实施例中，闪烁器板11的灵敏度特性在增光屏的的灵敏度为1时的相对值为2.4，能取得不亚于已有例2的涂覆分布氧化钛的树脂糊而形成的反射膜的灵敏度特性。而且，2Lp/mm的CTF(图像分解率)也能维持与已有例2相同的值。
这样，通过将树脂反射片13配置在支承基片12与荧光体层15之间，与选择金属类反射膜作为反射膜时相比，可以使灵敏度特性高而且省略高价的金属类反射膜的成膜装置；与选择涂覆散布粒状物的树脂糊而形成的涂覆膜相比，能省略涂覆工序；结果，与以往相比，可以使灵敏度特性良好，获得稳定的质量，并且改善成本。
又，通过在支承基片12的粘合树脂反射片13的一个面相反方的另一个面粘合树脂片14，能防止仅用树脂反射片13时产生的支承基片12与树脂反射片13的热膨胀率差异造成的支承基片12的翘曲。使树脂片14的材质与树脂反射片13相同，则其效果显著。
通过用树脂反射片13和防湿膜17包围荧光体层15，能提高荧光体层15的抗湿性。
此情况下，由聚对二甲苯组成的防湿膜17与树脂反射片13的粘结力大，所以防湿膜17不剥落，使抗湿性不受损。
即，使用CsI作为荧光体层15的情况下，不可不考虑湿气对策。此材料的抗湿性低，需要涂覆防湿膜17以覆盖荧光体层15。作为防湿膜17，最一般的是聚对二甲苯的热CVD膜。
但是，聚对二甲苯膜对金属和无机材料不怎么有粘结力，所以尤其在CsI蒸镀部的外周部容易产生剥离。为了解决此问题，可考虑例如国际专利申请号WO99/66350所记载那样，将支承基片12与防湿膜17的接触部做成凹凸状，但此方法工序增多，尤其是保持CsI的粗糙度原样对防湿膜17最容易剥落的CsI蒸镀部的外周部进行凹凸处理，需要增加掩模设置操作，更加麻烦。又，由于研磨、喷砂的表面改性加工，存在碳纤维形成毛刺的问题，难以用于上述CFRP基片。因此，通过用树脂反射片13和防湿膜17包围荧光体层15，提高聚对二甲苯组成的防湿膜17与树脂反射片13的粘结力，所以防湿膜不剥落，能提高荧光体层15的抗湿性。
具体而言，将WO99/66350中揭示的结构的CsI膜(层叠结构：非晶型碳基片(周边凹凸结构)/Al反射膜/CsI/聚对二甲苯)和本实施方式的CsI膜在温度℃，湿度90％的环境下放置24小时后的CTF值降低率在支承基片中心部分别为11％、0％，本实施方式的闪烁器板结构优良一些，但支承基片的最周边部分别为44％、0％，可见差异显著。本实施方式的CsI膜即使在温度℃，湿度90％的环境下放置176小时(累计200小时)，支承基片的中心至周边的整个范围也看不到CTF值减小。
图3示出使用闪烁器板11的射线检测器的截面图。
此射线检测器31是将闪烁器板11粘合在图像传感器32的粘合式平面检测器。图像传感器32在玻璃基片33上形成配置成矩阵状的光电二极管等多个受光元件34、有选择地取出来自这些受光元件34的电信号的开关元件等。图像传感器32的表面形成平坦化层35。
于是，利用粘合闪烁器板11与图像传感器32而构成的射线检测器31，能提高灵敏度特性。
再者，作为支承基片12的材料，除CFRP外，还可选择非晶型碳、石墨、玻璃、铍、钛、铝和它们的合金、陶瓷(氧化铝、氧化铍、氧化锆、氮化硅)、工程塑料等。
又，荧光体层15不仅为CsI时，而且为CsBr时也得到同样的效果。
所述实施方式的射线检测器31可从带光电二极管的TFT、CCD、CMOS中选择，作为其图像传感器32。
又，将树脂反射片13粘合在支承基片12的2个面，或仅粘合在支承基片12的1个面而支承基片12的另一个面不粘合，都能得到希望的效果。将树脂反射片13仅粘合在支承基片12的1个面时，最好在支承基片12的形成荧光体层15的1个面相反方的另一个面粘合另一树脂片14等树脂层。
再者，作为树脂反射片13的材质，也可用散布氧化钛(TiO2)粒的二甲酯。使用这种材质时得到与使用上述发泡PET构成的树脂反射片13时同样的效果，并得到灵敏度提高的效果。
产业上的实用性
根据本发明，通过将树脂反射片配置在支承基片与荧光体层之间，与选择金属类反射膜作为反射膜时相比，可以使灵敏度特性提高而且省略高价的金属类反射膜成膜装置；与选择涂覆上部粒状物的树脂糊而形成的涂覆膜时相比，能省略涂覆工序而且能省略对涂覆不匀进行管理；结果，与以往相比，可以使灵敏度特性良好，获得稳定的质量，并且改善成本。
Claims (4)
1.一种闪烁器板，其特征在于，具备：
树脂反射片，该树脂反射片在透射射线的支承基片成形的同时粘贴到所述支承基片的一个面上；
设在所述支承基片的一个面的树脂反射片上，将射线变换成可见光的荧光体层；以及
覆盖荧光体层的防湿层，该防湿层由聚对二甲苯构成且通过热CVD法形成，
所述树脂反射片的材质是发泡PET、或者将TiO2粒分散后的PET，
利用所述防湿层和树脂反射片包围荧光体层，且树脂反射片与防湿层相粘结。
2.如权利要求1中所述的闪烁器板，其特征在于，在支承基片的与形成荧光体层的一个面相反方的另一个面，设置树脂片，该树脂片在所述支承基片成形的同时粘贴到所述支承基片的另一个面上。
3.如权利要求2中所述的闪烁器板，其特征在于，将相同材质的所述树脂反射片和所述树脂片在所述支承基片成形的同时分别粘贴到所述支承基片的两个面上。
4.一种射线检测器，其特征在于，具备：
排列多个受光元件的图像传感器；以及
与此图像传感器组合的权利要求1至3中任一项所述的闪烁器板。
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- 2008-03-26 EP EP08722861.5A patent/EP2141708B1/en active Active
- 2008-03-26 KR KR1020087028689A patent/KR101393776B1/ko active IP Right Grant
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- 2008-03-26 JP JP2008546625A patent/JP5597354B2/ja active Active
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| CN1530667A (zh) * | 2003-03-12 | 2004-09-22 | ������������ʽ���� | 放射线检测装置及其制造方法 |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5597354B2 (ja) | 2014-10-01 |
| EP2141708B1 (en) | 2017-04-19 |
| EP2141708A1 (en) | 2010-01-06 |
| US9158009B2 (en) | 2015-10-13 |
| CN101542635A (zh) | 2009-09-23 |
| US20100006762A1 (en) | 2010-01-14 |
| WO2008117821A1 (ja) | 2008-10-02 |
| KR101393776B1 (ko) | 2014-05-12 |
| JPWO2008117821A1 (ja) | 2010-07-15 |
| KR20090010216A (ko) | 2009-01-29 |
| EP2141708A4 (en) | 2013-05-01 |
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