CN101412463B - 带保管库搬运系统 - Google Patents
带保管库搬运系统 Download PDFInfo
- Publication number
- CN101412463B CN101412463B CN2008101690494A CN200810169049A CN101412463B CN 101412463 B CN101412463 B CN 101412463B CN 2008101690494 A CN2008101690494 A CN 2008101690494A CN 200810169049 A CN200810169049 A CN 200810169049A CN 101412463 B CN101412463 B CN 101412463B
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- China
- Prior art keywords
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012546 transfer Methods 0.000 claims description 68
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 230000009184 walking Effects 0.000 claims description 9
- 238000003860 storage Methods 0.000 abstract description 34
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 2
- 230000009471 action Effects 0.000 description 14
- 238000009434 installation Methods 0.000 description 6
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- 239000012467 final product Substances 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007271382A JP5369419B2 (ja) | 2007-10-18 | 2007-10-18 | 保管庫、保管庫セット及び保管庫付き搬送システム |
JP2007271382 | 2007-10-18 | ||
JP2007-271382 | 2007-10-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101412463A CN101412463A (zh) | 2009-04-22 |
CN101412463B true CN101412463B (zh) | 2012-08-22 |
Family
ID=40563657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008101690494A Expired - Fee Related CN101412463B (zh) | 2007-10-18 | 2008-10-20 | 带保管库搬运系统 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8622682B2 (zh) |
JP (1) | JP5369419B2 (zh) |
KR (1) | KR101472988B1 (zh) |
CN (1) | CN101412463B (zh) |
TW (1) | TWI450850B (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090026099A (ko) * | 2007-09-06 | 2009-03-11 | 아시스트 테크놀로지스 재팬 가부시키가이샤 | 보관고, 반송 시스템 및 보관고 세트 |
US8882433B2 (en) | 2009-05-18 | 2014-11-11 | Brooks Automation, Inc. | Integrated systems for interfacing with substrate container storage systems |
KR101927363B1 (ko) | 2009-05-18 | 2018-12-11 | 브룩스 오토메이션 인코퍼레이티드 | 기판 컨테이너 보관 시스템과 연결하기 위한 일체형 시스템 |
JP5721701B2 (ja) * | 2009-05-18 | 2015-05-20 | ブルックス オートメーション インコーポレイテッド | 基板用容器貯蔵システム |
KR101126160B1 (ko) | 2009-09-11 | 2012-03-22 | 세메스 주식회사 | 기판 처리 장치 |
JP5450562B2 (ja) * | 2011-10-20 | 2014-03-26 | 株式会社日本製鋼所 | 薄膜を有する成形品の製造方法および製造装置 |
CN103280420B (zh) * | 2013-06-04 | 2015-11-25 | 上海华力微电子有限公司 | 晶圆承载装置及晶圆倒片的方法 |
CN106743024B (zh) * | 2017-01-23 | 2023-03-14 | 厦门积硕科技有限公司 | 一种多发多收工作站 |
JP7018779B2 (ja) * | 2018-02-13 | 2022-02-14 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
US11551959B2 (en) * | 2019-10-29 | 2023-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for automated wafer carrier handling |
EP4052962B1 (de) * | 2021-03-03 | 2023-07-26 | Jungheinrich Aktiengesellschaft | Lageranordnung |
KR20230033188A (ko) | 2021-08-30 | 2023-03-08 | 삼성전자주식회사 | 웨이퍼 보관 시스템 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1134641A1 (en) * | 2000-03-16 | 2001-09-19 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
CN1599954A (zh) * | 2001-12-04 | 2005-03-23 | 日商乐华股份有限公司 | 容器的暂时搬入、留置和搬出装置 |
JP2006049454A (ja) * | 2004-08-03 | 2006-02-16 | Asyst Shinko Inc | ストッカ |
US7134826B2 (en) * | 2001-11-28 | 2006-11-14 | Dainippon Screen Mfg. Co., Ltd. | Substrate transfer apparatus, substrate processing apparatus and holding table |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0547896A (ja) * | 1991-08-12 | 1993-02-26 | Mitsubishi Electric Corp | ウエハカセツトストツカ |
JPH06239422A (ja) * | 1992-12-24 | 1994-08-30 | Toshiba Corp | 自動倉庫管理装置 |
JP3258748B2 (ja) * | 1993-02-08 | 2002-02-18 | 東京エレクトロン株式会社 | 熱処理装置 |
JPH07196108A (ja) * | 1994-01-10 | 1995-08-01 | Kawasaki Steel Corp | 入出庫制御方法 |
JP3669057B2 (ja) * | 1996-06-03 | 2005-07-06 | アシスト シンコー株式会社 | ストッカへの搬送システム |
JP3622101B2 (ja) | 1997-03-13 | 2005-02-23 | 村田機械株式会社 | 天井走行車システム |
US5980183A (en) * | 1997-04-14 | 1999-11-09 | Asyst Technologies, Inc. | Integrated intrabay buffer, delivery, and stocker system |
JPH1159829A (ja) * | 1997-08-08 | 1999-03-02 | Mitsubishi Electric Corp | 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法 |
JPH11310306A (ja) | 1998-04-27 | 1999-11-09 | Murata Mach Ltd | 自動倉庫 |
JPH11330197A (ja) * | 1998-05-15 | 1999-11-30 | Hitachi Ltd | 搬送制御方法とその装置 |
JP3682170B2 (ja) | 1998-09-09 | 2005-08-10 | 株式会社東芝 | カセット搬送システム、半導体露光装置、及びレチクル運搬方法 |
US6283692B1 (en) * | 1998-12-01 | 2001-09-04 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
JP4008134B2 (ja) * | 1998-12-25 | 2007-11-14 | シャープ株式会社 | 搬送装置、搬送方法及び搬送システム |
US6379096B1 (en) * | 1999-02-22 | 2002-04-30 | Scp Global Technologies, Inc. | Buffer storage system |
JP3914353B2 (ja) * | 1999-06-21 | 2007-05-16 | シャープ株式会社 | 自動倉庫の入出庫制御システム |
JP3971601B2 (ja) * | 2000-11-28 | 2007-09-05 | 大日本スクリーン製造株式会社 | 基板受渡装置および基板処理装置 |
US6739820B2 (en) * | 2001-01-16 | 2004-05-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Stocker apparatus with increased input/output capacity |
JP2003150247A (ja) | 2001-11-19 | 2003-05-23 | Murata Mach Ltd | 有軌道台車システム |
JP3900923B2 (ja) | 2001-12-21 | 2007-04-04 | アシスト シンコー株式会社 | ストッカ |
JP2004095626A (ja) * | 2002-08-29 | 2004-03-25 | Trecenti Technologies Inc | 搬送方法 |
US7243003B2 (en) * | 2002-08-31 | 2007-07-10 | Applied Materials, Inc. | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor |
JP3832745B2 (ja) | 2003-02-10 | 2006-10-11 | 村田機械株式会社 | 天井走行車システム |
TWI246501B (en) * | 2003-02-03 | 2006-01-01 | Murata Machinery Ltd | Overhead traveling carriage system |
CN1669892B (zh) * | 2003-11-13 | 2011-11-16 | 应用材料股份有限公司 | 高速载入器相对于基片传送系统的校准 |
US20050191162A1 (en) * | 2004-02-26 | 2005-09-01 | Simon Chang | Method for integrating interbay and intrabay material transportation systems within an integrated circuit factory |
KR20060043293A (ko) | 2004-02-28 | 2006-05-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 캐리어 핸들러의 작동을 강화하기 위한 방법 및 장치 |
US7578650B2 (en) * | 2004-07-29 | 2009-08-25 | Kla-Tencor Technologies Corporation | Quick swap load port |
JP4123383B2 (ja) * | 2004-08-12 | 2008-07-23 | 村田機械株式会社 | 天井走行車システム |
JP2007022677A (ja) * | 2005-07-12 | 2007-02-01 | Asyst Shinko Inc | ストッカ装置 |
JP2007096140A (ja) | 2005-09-30 | 2007-04-12 | Asyst Shinko Inc | 懸垂式昇降搬送台車における物品の授受方法並びに装置 |
JP2007161386A (ja) * | 2005-12-12 | 2007-06-28 | Sharp Corp | 自動倉庫搬送制御システムおよび自動倉庫搬送制御方法 |
JP4407833B2 (ja) * | 2006-01-16 | 2010-02-03 | 村田機械株式会社 | 自動倉庫 |
JP2007254131A (ja) * | 2006-03-24 | 2007-10-04 | Sharp Corp | 自動倉庫搬送制御システム、搬送車制御方法および搬送車制御プログラム |
US7356378B1 (en) * | 2007-04-03 | 2008-04-08 | Taiwan Semiconductor Manufacturing Company | Method and system for smart vehicle route selection |
-
2007
- 2007-10-18 JP JP2007271382A patent/JP5369419B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-17 TW TW097140069A patent/TWI450850B/zh not_active IP Right Cessation
- 2008-10-17 US US12/253,291 patent/US8622682B2/en not_active Expired - Fee Related
- 2008-10-17 KR KR1020080101851A patent/KR101472988B1/ko not_active IP Right Cessation
- 2008-10-20 CN CN2008101690494A patent/CN101412463B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1134641A1 (en) * | 2000-03-16 | 2001-09-19 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7134826B2 (en) * | 2001-11-28 | 2006-11-14 | Dainippon Screen Mfg. Co., Ltd. | Substrate transfer apparatus, substrate processing apparatus and holding table |
CN1599954A (zh) * | 2001-12-04 | 2005-03-23 | 日商乐华股份有限公司 | 容器的暂时搬入、留置和搬出装置 |
JP2006049454A (ja) * | 2004-08-03 | 2006-02-16 | Asyst Shinko Inc | ストッカ |
Also Published As
Publication number | Publication date |
---|---|
US20090104006A1 (en) | 2009-04-23 |
JP5369419B2 (ja) | 2013-12-18 |
TW200918437A (en) | 2009-05-01 |
TWI450850B (zh) | 2014-09-01 |
US8622682B2 (en) | 2014-01-07 |
KR20090039640A (ko) | 2009-04-22 |
CN101412463A (zh) | 2009-04-22 |
JP2009096611A (ja) | 2009-05-07 |
KR101472988B1 (ko) | 2014-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA AUTOMATIC MACHINERY CO., LTD. Free format text: FORMER OWNER: JAPAN AXIST TECHNOLOGY CO., LTD. Effective date: 20091225 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091225 Address after: Kyoto Japan Applicant after: Asyst Technologies Address before: Mie, Japan Applicant before: Asyst Technologies Japan Inc. |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130515 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130515 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Patentee before: Asyst Technologies |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120822 Termination date: 20171020 |
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CF01 | Termination of patent right due to non-payment of annual fee |