CN101389440B - 利用碳氮化物的涂覆以及碳氮化物涂覆的产品 - Google Patents

利用碳氮化物的涂覆以及碳氮化物涂覆的产品 Download PDF

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Publication number
CN101389440B
CN101389440B CN200780006479.8A CN200780006479A CN101389440B CN 101389440 B CN101389440 B CN 101389440B CN 200780006479 A CN200780006479 A CN 200780006479A CN 101389440 B CN101389440 B CN 101389440B
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CN
China
Prior art keywords
coating
surface area
uniform surface
product
less
Prior art date
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Expired - Fee Related
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CN200780006479.8A
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English (en)
Chinese (zh)
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CN101389440A (zh
Inventor
雷约·拉帕莱宁
韦莎·米吕迈基
拉塞·普利
亚里·鲁图
尤哈·梅基塔洛
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Picodeon Ltd Oy
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Picodeon Ltd Oy
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Filing date
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Priority claimed from FI20060178A external-priority patent/FI20060178A7/fi
Priority claimed from FI20060182A external-priority patent/FI20060182L/fi
Priority claimed from FI20060181A external-priority patent/FI20060181A7/fi
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Priority claimed from PCT/FI2007/050105 external-priority patent/WO2007096484A2/en
Publication of CN101389440A publication Critical patent/CN101389440A/zh
Application granted granted Critical
Publication of CN101389440B publication Critical patent/CN101389440B/zh
Expired - Fee Related legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Laser Beam Processing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Photovoltaic Devices (AREA)
CN200780006479.8A 2006-02-23 2007-02-23 利用碳氮化物的涂覆以及碳氮化物涂覆的产品 Expired - Fee Related CN101389440B (zh)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
FI20060177 2006-02-23
FI20060181 2006-02-23
FI20060178A FI20060178A7 (fi) 2006-02-23 2006-02-23 Pinnoitusmenetelmä
FI20060182 2006-02-23
FI20060182A FI20060182L (fi) 2005-07-13 2006-02-23 Ablaatiotekniikkaan liittyvä pinnankäsittelytekniikka ja pinnankäsittelylaitteisto
FI20060177A FI20060177A7 (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote
FI20060181A FI20060181A7 (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla
FI20060178 2006-02-23
PCT/FI2007/050105 WO2007096484A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product

Publications (2)

Publication Number Publication Date
CN101389440A CN101389440A (zh) 2009-03-18
CN101389440B true CN101389440B (zh) 2014-10-15

Family

ID=35953641

Family Applications (4)

Application Number Title Priority Date Filing Date
CN200780006479.8A Expired - Fee Related CN101389440B (zh) 2006-02-23 2007-02-23 利用碳氮化物的涂覆以及碳氮化物涂覆的产品
CNA2007800063615A Pending CN101389439A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
CN200780006700.XA Expired - Fee Related CN101389441B (zh) 2006-02-23 2007-02-23 塑料基底上的涂层方法和涂覆的塑料产品
CNA2007800103487A Pending CN101421071A (zh) 2006-02-23 2007-02-23 制造高质量表面的方法和具有高质量表面的产品

Family Applications After (3)

Application Number Title Priority Date Filing Date
CNA2007800063615A Pending CN101389439A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
CN200780006700.XA Expired - Fee Related CN101389441B (zh) 2006-02-23 2007-02-23 塑料基底上的涂层方法和涂覆的塑料产品
CNA2007800103487A Pending CN101421071A (zh) 2006-02-23 2007-02-23 制造高质量表面的方法和具有高质量表面的产品

Country Status (9)

Country Link
US (1) US20090169871A1 (enExample)
EP (1) EP1991386A2 (enExample)
JP (1) JP5437640B2 (enExample)
KR (1) KR101367839B1 (enExample)
CN (4) CN101389440B (enExample)
FI (1) FI20060177A7 (enExample)
IL (1) IL193646A0 (enExample)
RU (1) RU2435871C2 (enExample)
WO (1) WO2007096461A2 (enExample)

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RU2614330C1 (ru) * 2015-11-09 2017-03-24 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Алтайский государственный университет" Способ получения тонкой наноалмазной пленки на стеклянной подложке
US10946579B2 (en) 2015-12-14 2021-03-16 The Board Of Trustees Of The Leland Stanford Junior University Device fabrication using 3D printing
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KR20190025721A (ko) * 2016-07-28 2019-03-11 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 작업물을 레이저 가공하는 레이저 가공 장치 및 방법
TWI637805B (zh) * 2016-10-25 2018-10-11 財團法人工業技術研究院 金屬表面之雷射加工系統及其方法
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RU2675194C1 (ru) * 2017-07-18 2018-12-17 Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук Способ упрочнения поверхности вольфрамовой пластины
CN109848569A (zh) * 2017-11-29 2019-06-07 北京自动化控制设备研究所 一种mems硅结构的激光刻蚀方法
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CN109954966A (zh) * 2019-03-28 2019-07-02 大族激光科技产业集团股份有限公司 通过飞秒激光进行金属表面处理的方法
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RU2751608C1 (ru) * 2020-10-06 2021-07-15 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВО "МГТУ "СТАНКИН") Способ модификации поверхностного слоя режущих пластин из инструментальной керамики, предназначенной для точения никелевых сплавов
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CN114763259B (zh) * 2021-02-02 2023-07-25 天津大学 利用激光烧蚀法在衬底表面制备氮化碳薄膜涂层的方法及其应用
CN113523577A (zh) * 2021-07-09 2021-10-22 济南森峰激光科技股份有限公司 基于转镜的perc电池片高速激光开槽方法、装置及perc电池片
RU2766421C1 (ru) * 2021-11-29 2022-03-15 Дмитрий Юрьевич Старцев Способ нанесения оксидированной нержавеющей стали на стеклянные изделия
CN114843543A (zh) * 2022-06-01 2022-08-02 冠驰新能科技(南京)有限公司 一种超疏冷凝水表面及其制备方法、电池极板和燃料电池
CN116559145B (zh) * 2023-06-15 2025-10-28 山东大学 一种基于拉曼光谱的激光烧蚀阈值测试装置及测试方法
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US20090169871A1 (en) 2009-07-02
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CN101421071A (zh) 2009-04-29
CN101389439A (zh) 2009-03-18
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