CN101359584A - 基板处理装置以及基板处理方法 - Google Patents
基板处理装置以及基板处理方法 Download PDFInfo
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- CN101359584A CN101359584A CNA2008101295921A CN200810129592A CN101359584A CN 101359584 A CN101359584 A CN 101359584A CN A2008101295921 A CNA2008101295921 A CN A2008101295921A CN 200810129592 A CN200810129592 A CN 200810129592A CN 101359584 A CN101359584 A CN 101359584A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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JP2007196992 | 2007-07-30 | ||
JP2007-196992 | 2007-07-30 | ||
JP2007196992 | 2007-07-30 | ||
JP2008-060514 | 2008-03-11 | ||
JP2008060514A JP5188216B2 (ja) | 2007-07-30 | 2008-03-11 | 基板処理装置および基板処理方法 |
JP2008060514 | 2008-03-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101359584A true CN101359584A (zh) | 2009-02-04 |
CN101359584B CN101359584B (zh) | 2011-06-29 |
Family
ID=40331987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008101295921A Active CN101359584B (zh) | 2007-07-30 | 2008-07-02 | 基板处理方法 |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP5188216B2 (zh) |
KR (1) | KR100935977B1 (zh) |
CN (1) | CN101359584B (zh) |
TW (1) | TWI436413B (zh) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103153490A (zh) * | 2010-10-28 | 2013-06-12 | 朗姆研究公司 | 用于干燥半导体晶片的方法和装置 |
CN103447256A (zh) * | 2012-05-31 | 2013-12-18 | 细美事有限公司 | 清洁基板的设备和方法 |
CN103676470A (zh) * | 2012-09-12 | 2014-03-26 | 中芯国际集成电路制造(上海)有限公司 | 一种形成光刻胶图案的方法及装置 |
CN104205304A (zh) * | 2012-03-30 | 2014-12-10 | 大日本网屏制造株式会社 | 基板处理装置以及基板处理方法 |
CN106783538A (zh) * | 2016-12-01 | 2017-05-31 | 北京七星华创电子股份有限公司 | 一种应用于单片清洗工艺的水痕及颗粒消除方法 |
CN106847665A (zh) * | 2012-11-08 | 2017-06-13 | 斯克林集团公司 | 基板处理方法以及基板处理装置 |
CN106920763A (zh) * | 2015-12-25 | 2017-07-04 | 株式会社斯库林集团 | 基板处理装置及基板处理方法 |
CN107393851A (zh) * | 2014-02-27 | 2017-11-24 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
CN107833847A (zh) * | 2016-09-15 | 2018-03-23 | 株式会社斯库林集团 | 蚀刻装置、基板处理装置、蚀刻方法以及基板处理方法 |
CN107871657A (zh) * | 2016-09-27 | 2018-04-03 | 株式会社斯库林集团 | 基板处理方法和基板处理装置 |
CN107887302A (zh) * | 2016-09-30 | 2018-04-06 | 芝浦机械电子株式会社 | 基板处理装置及基板处理方法 |
CN109390211A (zh) * | 2017-08-04 | 2019-02-26 | 东京毅力科创株式会社 | 基片处理方法和基片处理装置 |
CN110214365A (zh) * | 2017-02-09 | 2019-09-06 | 株式会社斯库林集团 | 基板处理方法以及基板处理装置 |
US10490426B2 (en) | 2014-08-26 | 2019-11-26 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
CN111739829A (zh) * | 2020-08-26 | 2020-10-02 | 华海清科(北京)科技有限公司 | 晶圆干燥方法和系统 |
CN111816589A (zh) * | 2015-12-24 | 2020-10-23 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |
CN111952218A (zh) * | 2019-05-14 | 2020-11-17 | 细美事有限公司 | 基板处理方法及基板处理装置 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG176708A1 (en) * | 2009-07-16 | 2012-01-30 | Lam Res Ag | Method for drying a semiconductor wafer |
JP5698487B2 (ja) | 2010-09-29 | 2015-04-08 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6379400B2 (ja) * | 2013-09-26 | 2018-08-29 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6256828B2 (ja) | 2013-10-10 | 2018-01-10 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP2015220284A (ja) * | 2014-05-15 | 2015-12-07 | 信越半導体株式会社 | ウエーハの洗浄方法 |
KR102387540B1 (ko) * | 2015-03-31 | 2022-04-19 | 주식회사 케이씨텍 | 기판 세정 장치 및 기판 세정 방법 |
JP6418554B2 (ja) * | 2015-06-10 | 2018-11-07 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6593920B2 (ja) * | 2015-08-18 | 2019-10-23 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6670674B2 (ja) * | 2016-05-18 | 2020-03-25 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6983571B2 (ja) * | 2016-09-27 | 2021-12-17 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP2019169624A (ja) * | 2018-03-23 | 2019-10-03 | 株式会社Screenホールディングス | 現像方法 |
EP3576134B1 (en) * | 2018-05-31 | 2023-06-28 | SCREEN Holdings Co., Ltd. | Substrate processing method |
JP7227758B2 (ja) | 2018-05-31 | 2023-02-22 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
KR102134261B1 (ko) * | 2018-10-25 | 2020-07-16 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003092280A (ja) * | 2001-09-19 | 2003-03-28 | Dainippon Screen Mfg Co Ltd | 基板乾燥方法 |
JP4333866B2 (ja) * | 2002-09-26 | 2009-09-16 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP2006032637A (ja) | 2004-07-15 | 2006-02-02 | Renesas Technology Corp | 基板洗浄装置及び基板洗浄方法 |
JP4334452B2 (ja) | 2004-10-05 | 2009-09-30 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP4498893B2 (ja) * | 2004-11-11 | 2010-07-07 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP4732918B2 (ja) * | 2006-02-21 | 2011-07-27 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
-
2008
- 2008-03-11 JP JP2008060514A patent/JP5188216B2/ja active Active
- 2008-05-05 TW TW097116513A patent/TWI436413B/zh active
- 2008-05-09 KR KR1020080043291A patent/KR100935977B1/ko active IP Right Grant
- 2008-07-02 CN CN2008101295921A patent/CN101359584B/zh active Active
-
2013
- 2013-01-22 JP JP2013008951A patent/JP5567702B2/ja active Active
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103153490A (zh) * | 2010-10-28 | 2013-06-12 | 朗姆研究公司 | 用于干燥半导体晶片的方法和装置 |
CN104205304B (zh) * | 2012-03-30 | 2017-08-22 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
CN104205304A (zh) * | 2012-03-30 | 2014-12-10 | 大日本网屏制造株式会社 | 基板处理装置以及基板处理方法 |
CN103447256A (zh) * | 2012-05-31 | 2013-12-18 | 细美事有限公司 | 清洁基板的设备和方法 |
CN103447256B (zh) * | 2012-05-31 | 2016-03-30 | 细美事有限公司 | 清洁基板的设备和方法 |
US9406501B2 (en) | 2012-05-31 | 2016-08-02 | Semes Co., Ltd. | Apparatus and method for cleaning substrate |
CN103676470A (zh) * | 2012-09-12 | 2014-03-26 | 中芯国际集成电路制造(上海)有限公司 | 一种形成光刻胶图案的方法及装置 |
CN106847665B (zh) * | 2012-11-08 | 2019-07-26 | 斯克林集团公司 | 基板处理方法以及基板处理装置 |
CN106847665A (zh) * | 2012-11-08 | 2017-06-13 | 斯克林集团公司 | 基板处理方法以及基板处理装置 |
CN107393851B (zh) * | 2014-02-27 | 2021-02-05 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
CN107393851A (zh) * | 2014-02-27 | 2017-11-24 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
US10825713B2 (en) | 2014-02-27 | 2020-11-03 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus and substrate processing method |
US10490426B2 (en) | 2014-08-26 | 2019-11-26 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
US11195730B2 (en) | 2014-08-26 | 2021-12-07 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
CN111816589B (zh) * | 2015-12-24 | 2024-04-12 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |
CN111816589A (zh) * | 2015-12-24 | 2020-10-23 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |
CN106920763A (zh) * | 2015-12-25 | 2017-07-04 | 株式会社斯库林集团 | 基板处理装置及基板处理方法 |
US10910213B2 (en) | 2015-12-25 | 2021-02-02 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus and substrate processing method |
CN106920763B (zh) * | 2015-12-25 | 2019-12-13 | 株式会社斯库林集团 | 基板处理装置及基板处理方法 |
CN107833847A (zh) * | 2016-09-15 | 2018-03-23 | 株式会社斯库林集团 | 蚀刻装置、基板处理装置、蚀刻方法以及基板处理方法 |
CN107833847B (zh) * | 2016-09-15 | 2022-02-18 | 株式会社斯库林集团 | 蚀刻装置、基板处理装置、蚀刻方法以及基板处理方法 |
CN107871657A (zh) * | 2016-09-27 | 2018-04-03 | 株式会社斯库林集团 | 基板处理方法和基板处理装置 |
CN107887302A (zh) * | 2016-09-30 | 2018-04-06 | 芝浦机械电子株式会社 | 基板处理装置及基板处理方法 |
CN106783538B (zh) * | 2016-12-01 | 2020-04-03 | 北京七星华创电子股份有限公司 | 一种应用于单片清洗工艺的水痕及颗粒消除方法 |
CN106783538A (zh) * | 2016-12-01 | 2017-05-31 | 北京七星华创电子股份有限公司 | 一种应用于单片清洗工艺的水痕及颗粒消除方法 |
CN110214365A (zh) * | 2017-02-09 | 2019-09-06 | 株式会社斯库林集团 | 基板处理方法以及基板处理装置 |
CN110214365B (zh) * | 2017-02-09 | 2023-06-06 | 株式会社斯库林集团 | 基板处理方法以及基板处理装置 |
CN109390211B (zh) * | 2017-08-04 | 2023-09-15 | 东京毅力科创株式会社 | 基片处理方法和基片处理装置 |
CN109390211A (zh) * | 2017-08-04 | 2019-02-26 | 东京毅力科创株式会社 | 基片处理方法和基片处理装置 |
CN111952218A (zh) * | 2019-05-14 | 2020-11-17 | 细美事有限公司 | 基板处理方法及基板处理装置 |
CN111739829B (zh) * | 2020-08-26 | 2020-11-17 | 华海清科(北京)科技有限公司 | 晶圆干燥方法和系统 |
CN111739829A (zh) * | 2020-08-26 | 2020-10-02 | 华海清科(北京)科技有限公司 | 晶圆干燥方法和系统 |
Also Published As
Publication number | Publication date |
---|---|
JP2013070103A (ja) | 2013-04-18 |
KR20090013013A (ko) | 2009-02-04 |
TW200908108A (en) | 2009-02-16 |
CN101359584B (zh) | 2011-06-29 |
JP5188216B2 (ja) | 2013-04-24 |
JP2009054985A (ja) | 2009-03-12 |
JP5567702B2 (ja) | 2014-08-06 |
KR100935977B1 (ko) | 2010-01-08 |
TWI436413B (zh) | 2014-05-01 |
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Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
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Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |