CN101320181B - 显示装置及其制造方法 - Google Patents
显示装置及其制造方法 Download PDFInfo
- Publication number
- CN101320181B CN101320181B CN2008100986443A CN200810098644A CN101320181B CN 101320181 B CN101320181 B CN 101320181B CN 2008100986443 A CN2008100986443 A CN 2008100986443A CN 200810098644 A CN200810098644 A CN 200810098644A CN 101320181 B CN101320181 B CN 101320181B
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- China
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- active layer
- tft element
- drain electrode
- source electrode
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
- H10D30/0316—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral bottom-gate TFTs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6732—Bottom-gate only TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
- H10D30/6745—Polycrystalline or microcrystalline silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007149249A JP5303119B2 (ja) | 2007-06-05 | 2007-06-05 | 半導体装置 |
JP2007-149249 | 2007-06-05 | ||
JP2007149249 | 2007-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101320181A CN101320181A (zh) | 2008-12-10 |
CN101320181B true CN101320181B (zh) | 2012-10-31 |
Family
ID=39791331
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100986443A Active CN101320181B (zh) | 2007-06-05 | 2008-06-03 | 显示装置及其制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8049255B2 (enrdf_load_stackoverflow) |
EP (1) | EP2001046A3 (enrdf_load_stackoverflow) |
JP (1) | JP5303119B2 (enrdf_load_stackoverflow) |
KR (1) | KR100973361B1 (enrdf_load_stackoverflow) |
CN (1) | CN101320181B (enrdf_load_stackoverflow) |
TW (1) | TWI381529B (enrdf_load_stackoverflow) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5363009B2 (ja) * | 2008-02-29 | 2013-12-11 | 株式会社ジャパンディスプレイ | 表示装置およびその製造方法 |
WO2011058865A1 (en) | 2009-11-13 | 2011-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor devi ce |
WO2011065243A1 (en) | 2009-11-28 | 2011-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN102725841B (zh) * | 2010-01-15 | 2016-10-05 | 株式会社半导体能源研究所 | 半导体器件 |
KR20110090408A (ko) * | 2010-02-03 | 2011-08-10 | 삼성전자주식회사 | 박막 형성 방법, 표시판용 금속 배선 및 이를 포함하는 박막 트랜지스터 표시판 및 그 제조 방법 |
TWI500161B (zh) * | 2011-06-02 | 2015-09-11 | Au Optronics Corp | 混合式薄膜電晶體及其製造方法以及顯示面板 |
CN102709327B (zh) * | 2012-05-16 | 2015-06-10 | 京东方科技集团股份有限公司 | 氧化物薄膜晶体管及其制作方法、阵列基板和显示装置 |
JP5991668B2 (ja) * | 2012-08-23 | 2016-09-14 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
KR102038633B1 (ko) | 2012-11-13 | 2019-10-30 | 삼성전자주식회사 | 디스플레이 장치의 구동 소자 및 그 제조 방법 |
JP6227396B2 (ja) * | 2013-12-20 | 2017-11-08 | 株式会社ジャパンディスプレイ | 薄膜トランジスタ及びそれを用いた表示装置 |
CN103715096A (zh) * | 2013-12-27 | 2014-04-09 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制作方法、阵列基板及其制作方法 |
WO2015137337A1 (ja) * | 2014-03-11 | 2015-09-17 | シャープ株式会社 | 半導体装置およびその製造方法 |
US10386684B2 (en) * | 2014-12-26 | 2019-08-20 | Sharp Kabushiki Kaisha | Semiconductor device, display apparatus, and method of manufacturing semiconductor device |
CN106663697B (zh) * | 2015-03-27 | 2019-11-12 | 堺显示器制品株式会社 | 薄膜晶体管及显示面板 |
CN105633076A (zh) * | 2016-01-04 | 2016-06-01 | 京东方科技集团股份有限公司 | 一种显示基板及其制作方法和显示装置 |
CN105932066A (zh) | 2016-06-07 | 2016-09-07 | 深圳市华星光电技术有限公司 | 金属氧化物薄膜晶体管及其制备方法 |
CN105895706A (zh) | 2016-07-01 | 2016-08-24 | 深圳市华星光电技术有限公司 | 薄膜晶体管及显示装置 |
CN107364248B (zh) * | 2017-06-29 | 2019-04-09 | 华南理工大学 | 一种喷墨打印薄膜与基板界面观测与调控的方法 |
US10431691B2 (en) * | 2017-08-07 | 2019-10-01 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Thin film transistor and method for manufacturing thin film transistor, and liquid crystal display panel |
US10510899B2 (en) | 2017-08-07 | 2019-12-17 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Thin film transistor, thin film transistor manufacturing method and liquid crystal display panel |
CN107369718A (zh) * | 2017-08-07 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | 薄膜晶体管及其制造方法、液晶显示面板 |
US10651257B2 (en) * | 2017-12-18 | 2020-05-12 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Array substrate and manufacturing method thereof |
CN110581177A (zh) * | 2019-08-13 | 2019-12-17 | 武汉华星光电半导体显示技术有限公司 | 阵列基板及其制备方法 |
Citations (5)
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US5294811A (en) * | 1990-11-30 | 1994-03-15 | Hitachi, Ltd. | Thin film semiconductor device having inverted stagger structure, and device having such semiconductor device |
US5909615A (en) * | 1996-02-28 | 1999-06-01 | International Business Machines Corporation | Method for making a vertically redundant dual thin film transistor |
CN1499643A (zh) * | 2002-11-11 | 2004-05-26 | 友达光电股份有限公司 | 主动式有机发光显示器及其制造方法 |
CN1619392A (zh) * | 2003-11-11 | 2005-05-25 | Lg.菲利浦Lcd株式会社 | 包括多晶硅薄膜晶体管的液晶显示器件及其制造方法 |
CN1858911A (zh) * | 2005-05-02 | 2006-11-08 | 三星电子株式会社 | Tft阵列面板、包含它的液晶显示器及tft阵列面板制造方法 |
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JPH01117068A (ja) * | 1987-10-29 | 1989-05-09 | Toshiba Corp | 薄膜半導体素子 |
JP2647100B2 (ja) * | 1987-11-10 | 1997-08-27 | 株式会社東芝 | 薄膜トランジスタ |
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DE69125260T2 (de) * | 1990-12-28 | 1997-10-02 | Sharp Kk | Ein Verfahren zum Herstellen eines Dünnfilm-Transistors und eines Aktive-Matrix-Substrates für Flüssig-Kristall-Anzeige-Anordnungen |
JPH05283427A (ja) * | 1991-02-18 | 1993-10-29 | Hitachi Ltd | 薄膜トランジスタの製造方法及びそれを用いたアクテブマトリックス型液晶表示装置 |
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KR100229676B1 (ko) * | 1996-08-30 | 1999-11-15 | 구자홍 | 셀프얼라인 박막트랜지스터 제조방법 |
JPH1140814A (ja) * | 1997-07-18 | 1999-02-12 | Furontetsuku:Kk | 薄膜トランジスタ基板と液晶表示装置および薄膜トランジスタ基板の製造方法 |
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JP4049422B2 (ja) * | 1997-11-18 | 2008-02-20 | 三洋電機株式会社 | 液晶表示装置の製造方法 |
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JP2001282139A (ja) * | 2000-01-27 | 2001-10-12 | Sharp Corp | アクティブマトリックス基板およびその製造方法、並びに、液晶表示装置 |
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JP2005108930A (ja) * | 2003-09-29 | 2005-04-21 | Sony Corp | 薄膜トランジスタの製造方法および薄膜トランジスタ |
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KR20070019457A (ko) * | 2005-08-12 | 2007-02-15 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정표시장치 |
JP2007121788A (ja) * | 2005-10-31 | 2007-05-17 | Hitachi Displays Ltd | アクティブマトリクス基板およびそれを用いた液晶表示装置 |
KR100671824B1 (ko) | 2005-12-14 | 2007-01-19 | 진 장 | 역 스태거드 박막 트랜지스터 제조 방법 |
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-
2007
- 2007-06-05 JP JP2007149249A patent/JP5303119B2/ja active Active
-
2008
- 2008-05-22 TW TW097118918A patent/TWI381529B/zh active
- 2008-06-03 CN CN2008100986443A patent/CN101320181B/zh active Active
- 2008-06-03 KR KR1020080052221A patent/KR100973361B1/ko active Active
- 2008-06-05 EP EP08010269A patent/EP2001046A3/en not_active Withdrawn
- 2008-06-05 US US12/155,504 patent/US8049255B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5294811A (en) * | 1990-11-30 | 1994-03-15 | Hitachi, Ltd. | Thin film semiconductor device having inverted stagger structure, and device having such semiconductor device |
US5909615A (en) * | 1996-02-28 | 1999-06-01 | International Business Machines Corporation | Method for making a vertically redundant dual thin film transistor |
CN1499643A (zh) * | 2002-11-11 | 2004-05-26 | 友达光电股份有限公司 | 主动式有机发光显示器及其制造方法 |
CN1619392A (zh) * | 2003-11-11 | 2005-05-25 | Lg.菲利浦Lcd株式会社 | 包括多晶硅薄膜晶体管的液晶显示器件及其制造方法 |
CN1858911A (zh) * | 2005-05-02 | 2006-11-08 | 三星电子株式会社 | Tft阵列面板、包含它的液晶显示器及tft阵列面板制造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200915575A (en) | 2009-04-01 |
JP2008305843A (ja) | 2008-12-18 |
US20080303030A1 (en) | 2008-12-11 |
EP2001046A3 (en) | 2011-01-05 |
JP5303119B2 (ja) | 2013-10-02 |
CN101320181A (zh) | 2008-12-10 |
TWI381529B (zh) | 2013-01-01 |
EP2001046A2 (en) | 2008-12-10 |
KR100973361B1 (ko) | 2010-07-30 |
KR20080107281A (ko) | 2008-12-10 |
US8049255B2 (en) | 2011-11-01 |
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C06 | Publication | ||
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ASS | Succession or assignment of patent right |
Owner name: PANASONIC LCD CO., LTD. Free format text: FORMER OWNER: IPS ALPHA SUPPORT CO., LTD. Owner name: IPS ALPHA SUPPORT CO., LTD. |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20111018 Address after: Chiba County, Japan Applicant after: Hitachi Displays, Ltd. Co-applicant after: Panasonic Liquid Crystal Display Co.,Ltd. Address before: Chiba County, Japan Applicant before: Hitachi Displays, Ltd. Co-applicant before: IPS pioneer support society Effective date of registration: 20111018 Address after: Chiba County, Japan Applicant after: Hitachi Displays, Ltd. Co-applicant after: IPS Pioneer Support Society Address before: Chiba County, Japan Applicant before: Hitachi Displays, Ltd. |
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Owner name: APAN DISPLAY EAST, INC. Free format text: FORMER NAME: HITACHI DISPLAY CO., LTD. Owner name: JAPAN DISPLAY, INC. Free format text: FORMER NAME: APAN DISPLAY EAST, INC. |
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CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: Japan Display East Inc. Patentee after: Panasonic Liquid Crystal Display Co.,Ltd. Address before: Chiba County, Japan Patentee before: Hitachi Displays, Ltd. Patentee before: Panasonic Liquid Crystal Display Co.,Ltd. |
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Address after: Tokyo port xixinqiao Japan three chome 7 No. 1 Patentee after: JAPAN DISPLAY Inc. Patentee after: Panasonic Liquid Crystal Display Co.,Ltd. Address before: Chiba County, Japan Patentee before: Japan Display East Inc. Patentee before: Panasonic Liquid Crystal Display Co.,Ltd. |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20081210 Assignee: BOE TECHNOLOGY GROUP Co.,Ltd. Assignor: JAPAN DISPLAY Inc.|Panasonic Liquid Crystal Display Co.,Ltd. Contract record no.: 2013990000688 Denomination of invention: Ion illuminating display device and mfg. method Granted publication date: 20121031 License type: Common License Record date: 20131016 |
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Effective date of registration: 20231201 Address after: Tokyo, Japan Patentee after: JAPAN DISPLAY Inc. Patentee after: PANASONIC INTELLECTUAL PROPERTY CORPORATION OF AMERICA Address before: Tokyo port xixinqiao Japan three chome 7 No. 1 Patentee before: JAPAN DISPLAY Inc. Patentee before: Panasonic Liquid Crystal Display Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right | ||
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Effective date of registration: 20250724 Address after: Tokyo, Japan Patentee after: MAGNO SEISHIN Co., Ltd. Country or region after: Japan Patentee after: PANASONIC INTELLECTUAL PROPERTY CORPORATION OF AMERICA Country or region after: U.S.A. Address before: Tokyo, Japan Patentee before: JAPAN DISPLAY Inc. Country or region before: Japan Patentee before: PANASONIC INTELLECTUAL PROPERTY CORPORATION OF AMERICA Country or region before: U.S.A. |