CN101121466B - 薄板状材料输送用气动工作台以及薄板状材料输送装置 - Google Patents

薄板状材料输送用气动工作台以及薄板状材料输送装置 Download PDF

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Publication number
CN101121466B
CN101121466B CN2007101008176A CN200710100817A CN101121466B CN 101121466 B CN101121466 B CN 101121466B CN 2007101008176 A CN2007101008176 A CN 2007101008176A CN 200710100817 A CN200710100817 A CN 200710100817A CN 101121466 B CN101121466 B CN 101121466B
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CN
China
Prior art keywords
air
upper panel
porous membrane
conveying
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101008176A
Other languages
English (en)
Chinese (zh)
Other versions
CN101121466A (zh
Inventor
名仓成之
滨中亮明
弓场说治
鸟山典之
小栗勤
牧野勉
福田丈二
广濑治道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON DESIGN INDUSTRIES Co Ltd
Original Assignee
NIPPON DESIGN INDUSTRIES Co Ltd
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON DESIGN INDUSTRIES Co Ltd, Shibaura Engineering Works Co Ltd filed Critical NIPPON DESIGN INDUSTRIES Co Ltd
Publication of CN101121466A publication Critical patent/CN101121466A/zh
Application granted granted Critical
Publication of CN101121466B publication Critical patent/CN101121466B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN2007101008176A 2006-08-08 2007-04-18 薄板状材料输送用气动工作台以及薄板状材料输送装置 Expired - Fee Related CN101121466B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP215557/2006 2006-08-08
JP2006215557A JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Publications (2)

Publication Number Publication Date
CN101121466A CN101121466A (zh) 2008-02-13
CN101121466B true CN101121466B (zh) 2012-01-04

Family

ID=39084012

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101008176A Expired - Fee Related CN101121466B (zh) 2006-08-08 2007-04-18 薄板状材料输送用气动工作台以及薄板状材料输送装置

Country Status (4)

Country Link
JP (1) JP4629007B2 (https=)
KR (1) KR100831135B1 (https=)
CN (1) CN101121466B (https=)
TW (1) TW200811021A (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8047354B2 (en) 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
JP5123842B2 (ja) * 2008-12-26 2013-01-23 Ｃｋｄ株式会社 非接触支持装置
TWI472467B (zh) * 2009-04-23 2015-02-11 Corning Inc 玻璃片運送之液體射出軸承
JP6043123B2 (ja) * 2012-08-22 2016-12-14 オイレス工業株式会社 非接触支持装置及び塗布装置
JP6173173B2 (ja) * 2013-11-11 2017-08-02 株式会社ディスコ 切削装置
WO2021133436A1 (en) * 2019-12-26 2021-07-01 Zeng An Andrew Tool architecture for wafer geometry measurement in semiconductor industry

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1810608A (zh) * 2005-01-26 2006-08-02 三发机电有限公司 基底传送设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02158152A (ja) * 1988-12-09 1990-06-18 Rohm Co Ltd ペレット収納整列用治具
JPH0680227A (ja) * 1992-08-31 1994-03-22 Taiyo Yuden Co Ltd 物品搬送ベルト
JP3718014B2 (ja) * 1996-11-01 2005-11-16 東レエンジニアリング株式会社 板状物搬送装置及び非接触搬送ライン
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JPH11268831A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
JP2003321119A (ja) 2002-05-07 2003-11-11 Mineya Mori プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
JP4313080B2 (ja) 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP2004307152A (ja) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk 起倒可能な非接触搬送装置
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP4217963B2 (ja) * 2003-07-08 2009-02-04 株式会社ダイフク 板状体搬送装置
KR200346820Y1 (ko) 2004-01-06 2004-04-06 김태원 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP2006049493A (ja) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法
JP4414856B2 (ja) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 基板保管装置
JP2006179653A (ja) * 2004-12-22 2006-07-06 Murata Mach Ltd 枚葉搬送用トレイおよび搬送システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1810608A (zh) * 2005-01-26 2006-08-02 三发机电有限公司 基底传送设备

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2001-196438A 2001.07.19
JP特开2004-345744A 2004.12.09

Also Published As

Publication number Publication date
JP2008041989A (ja) 2008-02-21
CN101121466A (zh) 2008-02-13
KR20080013693A (ko) 2008-02-13
JP4629007B2 (ja) 2011-02-09
TW200811021A (en) 2008-03-01
TWI352056B (https=) 2011-11-11
KR100831135B1 (ko) 2008-05-20

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Free format text: FORMER OWNER: SHIBAURA ENGINEERING WORKS CO., LTD.

Effective date: 20140508

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20140508

Address after: Shizuoka

Patentee after: Nippon Design Industries Co., Ltd.

Address before: Shizuoka

Patentee before: Nippon Design Industries Co., Ltd.

Patentee before: Shibaura Engineering Works Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120104

Termination date: 20160418

CF01 Termination of patent right due to non-payment of annual fee