CN100347835C - 激光退火方法及激光退火装置 - Google Patents
激光退火方法及激光退火装置 Download PDFInfo
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- CN100347835C CN100347835C CNB200410091294XA CN200410091294A CN100347835C CN 100347835 C CN100347835 C CN 100347835C CN B200410091294X A CNB200410091294X A CN B200410091294XA CN 200410091294 A CN200410091294 A CN 200410091294A CN 100347835 C CN100347835 C CN 100347835C
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/22—Heating of the molten zone by irradiation or electric discharge
- C30B13/24—Heating of the molten zone by irradiation or electric discharge using electromagnetic waves
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78675—Polycrystalline or microcrystalline silicon transistor with normal-type structure, e.g. with top gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004022433A JP2005217209A (ja) | 2004-01-30 | 2004-01-30 | レーザアニール方法およびレーザアニール装置 |
JP2004022433 | 2004-01-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1649109A CN1649109A (zh) | 2005-08-03 |
CN100347835C true CN100347835C (zh) | 2007-11-07 |
Family
ID=34805659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200410091294XA Expired - Fee Related CN100347835C (zh) | 2004-01-30 | 2004-12-01 | 激光退火方法及激光退火装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050169330A1 (zh) |
JP (1) | JP2005217209A (zh) |
KR (1) | KR100703111B1 (zh) |
CN (1) | CN100347835C (zh) |
TW (1) | TWI271805B (zh) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3977038B2 (ja) * | 2001-08-27 | 2007-09-19 | 株式会社半導体エネルギー研究所 | レーザ照射装置およびレーザ照射方法 |
JP4474108B2 (ja) * | 2002-09-02 | 2010-06-02 | 株式会社 日立ディスプレイズ | 表示装置とその製造方法および製造装置 |
JP4838982B2 (ja) * | 2004-01-30 | 2011-12-14 | 株式会社 日立ディスプレイズ | レーザアニール方法およびレーザアニール装置 |
JP4567984B2 (ja) * | 2004-01-30 | 2010-10-27 | 株式会社 日立ディスプレイズ | 平面表示装置の製造装置 |
JP5250181B2 (ja) * | 2004-05-06 | 2013-07-31 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US8525075B2 (en) | 2004-05-06 | 2013-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
WO2006062212A1 (en) | 2004-12-06 | 2006-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic apparatus using the same |
KR101299604B1 (ko) * | 2005-10-18 | 2013-08-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
JP2007142167A (ja) * | 2005-11-18 | 2007-06-07 | Hitachi Displays Ltd | 表示装置およびその製造方法 |
US8598588B2 (en) * | 2005-12-05 | 2013-12-03 | The Trustees Of Columbia University In The City Of New York | Systems and methods for processing a film, and thin films |
JP2007214527A (ja) | 2006-01-13 | 2007-08-23 | Ihi Corp | レーザアニール方法およびレーザアニール装置 |
JP5133548B2 (ja) * | 2006-09-29 | 2013-01-30 | 富士フイルム株式会社 | レーザアニール方法およびそれを用いたレーザアニール装置 |
JP5068975B2 (ja) * | 2006-09-29 | 2012-11-07 | 富士フイルム株式会社 | レーザアニール技術、半導体膜、半導体装置、及び電気光学装置 |
JP5053609B2 (ja) * | 2006-09-29 | 2012-10-17 | 富士フイルム株式会社 | レーザアニール技術、半導体膜、半導体装置、及び電気光学装置 |
JP5064750B2 (ja) * | 2006-09-29 | 2012-10-31 | 富士フイルム株式会社 | レーザアニール技術、半導体膜、半導体装置、及び電気光学装置 |
JP5053610B2 (ja) * | 2006-09-29 | 2012-10-17 | 富士フイルム株式会社 | レーザアニール方法、半導体膜、半導体装置、及び電気光学装置 |
KR101397567B1 (ko) | 2007-01-24 | 2014-05-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체막의 결정화 방법 및 반도체장치의 제작방법 |
US9177811B2 (en) | 2007-03-23 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP4946689B2 (ja) * | 2007-07-19 | 2012-06-06 | 株式会社ニコン | 形状測定装置 |
CN102646698B (zh) * | 2007-09-14 | 2015-09-16 | 株式会社半导体能源研究所 | 半导体装置及电子设备 |
JP2009081383A (ja) * | 2007-09-27 | 2009-04-16 | Hitachi Displays Ltd | 薄膜半導体素子を備えた表示装置及び薄膜半導体素子の製造方法 |
JP5376707B2 (ja) | 2008-01-24 | 2013-12-25 | 株式会社半導体エネルギー研究所 | レーザアニール装置 |
JP5181396B2 (ja) * | 2010-01-15 | 2013-04-10 | 独立行政法人産業技術総合研究所 | 単結晶育成装置および単結晶育成方法 |
KR101135537B1 (ko) * | 2010-07-16 | 2012-04-13 | 삼성모바일디스플레이주식회사 | 레이저 조사 장치 |
CN102157344B (zh) * | 2010-11-25 | 2013-01-30 | 清华大学 | 一种用于深紫外激光退火的加热片台扫描装置及退火工艺 |
KR101865222B1 (ko) | 2011-10-18 | 2018-06-08 | 삼성디스플레이 주식회사 | 레이저 결정화 장치 및 레이저 결정화 방법 |
US8946594B2 (en) * | 2011-11-04 | 2015-02-03 | Applied Materials, Inc. | Optical design for line generation using microlens array |
FR2990957B1 (fr) * | 2012-05-25 | 2014-06-13 | Commissariat Energie Atomique | Procede de formation d'une couche de silicium epitaxiee. |
JP5717146B2 (ja) * | 2012-10-23 | 2015-05-13 | 株式会社日本製鋼所 | レーザラインビーム改善装置およびレーザ処理装置 |
CN103915318A (zh) | 2014-03-17 | 2014-07-09 | 京东方科技集团股份有限公司 | 激光退火设备、多晶硅薄膜及其制作方法 |
US10016843B2 (en) | 2015-03-20 | 2018-07-10 | Ultratech, Inc. | Systems and methods for reducing pulsed laser beam profile non-uniformities for laser annealing |
CN104821278B (zh) * | 2015-05-11 | 2017-09-01 | 京东方科技集团股份有限公司 | 低温多晶硅的制造方法及装置、多晶硅 |
KR101936120B1 (ko) * | 2016-11-30 | 2019-01-08 | 부경대학교 산학협력단 | 광음향 단층촬영을 위한 프로브 및 실시간 광음향 단층촬영 장치 |
CN107104112A (zh) * | 2017-06-20 | 2017-08-29 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示面板、显示装置 |
EP3642384A4 (en) * | 2017-07-31 | 2021-03-31 | IPG Photonics Corporation | LASER DEVICE AND METHOD FOR PROCESSING THIN FILMS |
US20190151993A1 (en) * | 2017-11-22 | 2019-05-23 | Asm Technology Singapore Pte Ltd | Laser-cutting using selective polarization |
KR20210094835A (ko) | 2020-01-22 | 2021-07-30 | 삼성전자주식회사 | 레이저 빔을 이용하여 반사형 포토마스크를 어닐링하는 방법 |
KR102582749B1 (ko) * | 2022-06-08 | 2023-09-25 | 신원디앤티 주식회사 | Mct용 공작물 열처리를 위한 사각빔 형상의 레이저를 조사하는 레이저빔 쉐이핑 장치 |
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JP2002222959A (ja) * | 2001-01-29 | 2002-08-09 | Hitachi Ltd | 薄膜半導体装置、多結晶半導体薄膜製造方法及び製造装置 |
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CN1414616A (zh) * | 2001-10-10 | 2003-04-30 | 株式会社日立制作所 | 激光退火设备,tft装置和相应的退火方法 |
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US4807991A (en) * | 1986-04-07 | 1989-02-28 | Electro-Organic Company | Method of inspecting and repairing a structural defect in the surface of an object |
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- 2004-10-21 TW TW093132023A patent/TWI271805B/zh not_active IP Right Cessation
- 2004-11-12 KR KR1020040092185A patent/KR100703111B1/ko not_active IP Right Cessation
- 2004-11-15 US US10/987,003 patent/US20050169330A1/en not_active Abandoned
- 2004-12-01 CN CNB200410091294XA patent/CN100347835C/zh not_active Expired - Fee Related
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TW200527544A (en) | 2005-08-16 |
KR20050078186A (ko) | 2005-08-04 |
CN1649109A (zh) | 2005-08-03 |
JP2005217209A (ja) | 2005-08-11 |
KR100703111B1 (ko) | 2007-04-05 |
US20050169330A1 (en) | 2005-08-04 |
TWI271805B (en) | 2007-01-21 |
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