CA2581856C - Low micropipe 100 mm silicon carbide wafer - Google Patents
Low micropipe 100 mm silicon carbide wafer Download PDFInfo
- Publication number
- CA2581856C CA2581856C CA2581856A CA2581856A CA2581856C CA 2581856 C CA2581856 C CA 2581856C CA 2581856 A CA2581856 A CA 2581856A CA 2581856 A CA2581856 A CA 2581856A CA 2581856 C CA2581856 C CA 2581856C
- Authority
- CA
- Canada
- Prior art keywords
- sic
- silicon carbide
- crystal
- seed
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 211
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 198
- 239000013078 crystal Substances 0.000 claims abstract description 132
- 235000012431 wafers Nutrition 0.000 claims description 111
- 238000000034 method Methods 0.000 claims description 58
- 239000000463 material Substances 0.000 claims description 41
- 238000005130 seeded sublimation method Methods 0.000 claims description 27
- 230000007547 defect Effects 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 24
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 21
- 239000002019 doping agent Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000000137 annealing Methods 0.000 claims description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 10
- 239000002243 precursor Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 238000009833 condensation Methods 0.000 claims description 8
- 230000005494 condensation Effects 0.000 claims description 8
- 230000005669 field effect Effects 0.000 claims description 8
- 239000012808 vapor phase Substances 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 4
- 239000012080 ambient air Substances 0.000 claims 1
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 150000002835 noble gases Chemical class 0.000 claims 1
- 238000000859 sublimation Methods 0.000 description 10
- 230000008022 sublimation Effects 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 101000767534 Arabidopsis thaliana Chorismate mutase 2 Proteins 0.000 description 4
- 101000986989 Naja kaouthia Acidic phospholipase A2 CM-II Proteins 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 2
- 241000894007 species Species 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/40—Crystalline structures
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/957,807 US7314521B2 (en) | 2004-10-04 | 2004-10-04 | Low micropipe 100 mm silicon carbide wafer |
| US10/957,807 | 2004-10-04 | ||
| PCT/US2005/034352 WO2006041660A2 (en) | 2004-10-04 | 2005-09-27 | 100 mm silicon carbide wafer with low micropipe density |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2581856A1 CA2581856A1 (en) | 2006-04-20 |
| CA2581856C true CA2581856C (en) | 2011-11-29 |
Family
ID=35892362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2581856A Active CA2581856C (en) | 2004-10-04 | 2005-09-27 | Low micropipe 100 mm silicon carbide wafer |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US7314521B2 (enExample) |
| EP (2) | EP2487280A1 (enExample) |
| JP (3) | JP2008515749A (enExample) |
| KR (1) | KR100854004B1 (enExample) |
| CN (2) | CN103422174A (enExample) |
| CA (1) | CA2581856C (enExample) |
| TW (1) | TWI294925B (enExample) |
| WO (1) | WO2006041660A2 (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7294324B2 (en) | 2004-09-21 | 2007-11-13 | Cree, Inc. | Low basal plane dislocation bulk grown SiC wafers |
| US7563321B2 (en) * | 2004-12-08 | 2009-07-21 | Cree, Inc. | Process for producing high quality large size silicon carbide crystals |
| US8980445B2 (en) * | 2006-07-06 | 2015-03-17 | Cree, Inc. | One hundred millimeter SiC crystal grown on off-axis seed |
| EP2264223A3 (en) * | 2006-09-14 | 2011-10-26 | Cree, Inc. | Micropipe-free silicon carbide and related method of manufacture |
| JP4388538B2 (ja) * | 2006-09-21 | 2009-12-24 | 新日本製鐵株式会社 | 炭化珪素単結晶製造装置 |
| JP2009137777A (ja) * | 2007-12-04 | 2009-06-25 | Sumitomo Electric Ind Ltd | ＡｌＮ結晶およびその成長方法 |
| JP5135545B2 (ja) * | 2008-04-18 | 2013-02-06 | 新日鐵住金株式会社 | 炭化珪素単結晶インゴット育成用種結晶及びその製造方法 |
| JP5250321B2 (ja) * | 2008-07-04 | 2013-07-31 | 昭和電工株式会社 | 炭化珪素単結晶成長用種結晶の製造方法並びに炭化珪素単結晶の製造方法 |
| JP2010095397A (ja) * | 2008-10-15 | 2010-04-30 | Nippon Steel Corp | 炭化珪素単結晶及び炭化珪素単結晶ウェハ |
| DE112009003667B4 (de) * | 2008-12-08 | 2024-04-25 | Ii-Vi Inc. | Verbessertes axial-gradient-transport- (agt-) züchtungsverfahren und -apparat unter anwendung von resistivem erhitzen |
| US8044408B2 (en) * | 2009-05-20 | 2011-10-25 | Nippon Steel Corporation | SiC single-crystal substrate and method of producing SiC single-crystal substrate |
| DE102009048868B4 (de) * | 2009-10-09 | 2013-01-03 | Sicrystal Ag | Herstellungsverfahren für einen SiC-Volumeneinkristall mittels einer thermischen Behandlung und niederohmiges einkristallines SiC-Substrat |
| JPWO2011046021A1 (ja) * | 2009-10-13 | 2013-03-07 | 住友電気工業株式会社 | 炭化珪素基板の製造方法および炭化珪素基板 |
| KR20120023817A (ko) | 2009-10-30 | 2012-03-13 | 스미토모덴키고교가부시키가이샤 | 탄화규소 기판의 제조 방법 및 탄화규소 기판 |
| CA2759852A1 (en) | 2009-10-30 | 2011-05-05 | Sumitomo Electric Industries, Ltd. | Method for manufacturing silicon carbide substrate and silicon carbide substrate |
| KR20130006442A (ko) | 2010-03-23 | 2013-01-16 | 스미토모덴키고교가부시키가이샤 | 반도체 장치 및 그 제조 방법 |
| US8609513B2 (en) | 2010-09-16 | 2013-12-17 | Sumitomo Electric Industries, Ltd. | Method for manufacturing semiconductor device |
| WO2012090572A1 (ja) * | 2010-12-27 | 2012-07-05 | 住友電気工業株式会社 | 炭化珪素基板、半導体装置、炭化珪素基板の製造方法、および半導体装置の製造方法 |
| WO2013005347A1 (ja) | 2011-07-04 | 2013-01-10 | トヨタ自動車株式会社 | SiC単結晶及びその製造方法 |
| JP5803934B2 (ja) | 2011-07-20 | 2015-11-04 | 住友電気工業株式会社 | 炭化珪素基板、半導体装置およびこれらの製造方法 |
| JP2013060328A (ja) * | 2011-09-14 | 2013-04-04 | Sumitomo Electric Ind Ltd | 炭化珪素結晶の製造方法 |
| JP5696630B2 (ja) | 2011-09-21 | 2015-04-08 | 住友電気工業株式会社 | 炭化珪素基板およびその製造方法 |
| JP5803786B2 (ja) | 2012-04-02 | 2015-11-04 | 住友電気工業株式会社 | 炭化珪素基板、半導体装置およびこれらの製造方法 |
| EP2852699B1 (en) | 2012-04-20 | 2025-01-29 | II-VI Incorporated | Method and apparatus for preapring large diameter, high quality sic single crystals |
| US8860040B2 (en) | 2012-09-11 | 2014-10-14 | Dow Corning Corporation | High voltage power semiconductor devices on SiC |
| US9018639B2 (en) | 2012-10-26 | 2015-04-28 | Dow Corning Corporation | Flat SiC semiconductor substrate |
| US9738991B2 (en) | 2013-02-05 | 2017-08-22 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion |
| US9797064B2 (en) | 2013-02-05 | 2017-10-24 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion |
| US9017804B2 (en) | 2013-02-05 | 2015-04-28 | Dow Corning Corporation | Method to reduce dislocations in SiC crystal growth |
| US8940614B2 (en) | 2013-03-15 | 2015-01-27 | Dow Corning Corporation | SiC substrate with SiC epitaxial film |
| US10322936B2 (en) | 2013-05-02 | 2019-06-18 | Pallidus, Inc. | High purity polysilocarb materials, applications and processes |
| US9657409B2 (en) * | 2013-05-02 | 2017-05-23 | Melior Innovations, Inc. | High purity SiOC and SiC, methods compositions and applications |
| US9919972B2 (en) | 2013-05-02 | 2018-03-20 | Melior Innovations, Inc. | Pressed and self sintered polymer derived SiC materials, applications and devices |
| US11091370B2 (en) | 2013-05-02 | 2021-08-17 | Pallidus, Inc. | Polysilocarb based silicon carbide materials, applications and devices |
| US9512542B2 (en) | 2013-09-06 | 2016-12-06 | Gtat Corporation | Bulk silicon carbide having low defect density |
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| WO2015104992A1 (ja) * | 2014-01-09 | 2015-07-16 | 株式会社オートネットワーク技術研究所 | コネクタ付電線及びその製造方法 |
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| EP3253909B1 (en) * | 2015-02-05 | 2018-12-19 | Dow Silicones Corporation | Furnace for seeded sublimation of wide band gap crystals |
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| KR20190135504A (ko) | 2017-03-29 | 2019-12-06 | 팔리두스, 인크. | SiC 용적측정 형태 및 보올을 형성하는 방법 |
| KR101998138B1 (ko) * | 2017-04-20 | 2019-07-09 | 한국세라믹기술원 | 자외선 포토루미네선스를 이용한 결정의 폴리타입 분석방법 |
| CN114174567B (zh) * | 2019-03-05 | 2023-12-15 | 学校法人关西学院 | SiC衬底的制造方法及其制造装置 |
| JP7393900B2 (ja) * | 2019-09-24 | 2023-12-07 | 一般財団法人電力中央研究所 | 炭化珪素単結晶ウェハ及び炭化珪素単結晶インゴットの製造方法 |
| JP2023508691A (ja) | 2019-12-27 | 2023-03-03 | ウルフスピード インコーポレイテッド | 大口径炭化ケイ素ウェハ |
| US12125701B2 (en) | 2020-12-15 | 2024-10-22 | Wolfspeed, Inc. | Large dimension silicon carbide single crystalline materials with reduced crystallographic stress |
| US12024794B2 (en) | 2021-06-17 | 2024-07-02 | Wolfspeed, Inc. | Reduced optical absorption for silicon carbide crystalline materials |
| CN113445128A (zh) * | 2021-09-01 | 2021-09-28 | 浙江大学杭州国际科创中心 | 低微管密度碳化硅单晶制备方法及碳化硅单晶 |
| US11827997B2 (en) | 2021-11-15 | 2023-11-28 | Zju-hangzhou Global Scientific And Technological Innovation Center | Stripping method and stripping device for silicon carbide single crystal wafers |
| JP7710614B2 (ja) * | 2022-06-30 | 2025-07-18 | 日本碍子株式会社 | 複合基板および１３族元素窒化物エピタキシャル成長用基板 |
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-
2004
- 2004-10-04 US US10/957,807 patent/US7314521B2/en not_active Expired - Lifetime
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2005
- 2005-09-27 KR KR1020077007642A patent/KR100854004B1/ko not_active Expired - Lifetime
- 2005-09-27 EP EP12165837A patent/EP2487280A1/en not_active Ceased
- 2005-09-27 CN CN2013100811717A patent/CN103422174A/zh active Pending
- 2005-09-27 CA CA2581856A patent/CA2581856C/en active Active
- 2005-09-27 CN CNA2005800338394A patent/CN101084330A/zh active Pending
- 2005-09-27 EP EP05810073.6A patent/EP1807558B1/en not_active Expired - Lifetime
- 2005-09-27 WO PCT/US2005/034352 patent/WO2006041660A2/en not_active Ceased
- 2005-09-27 JP JP2007534682A patent/JP2008515749A/ja active Pending
- 2005-10-03 TW TW094134554A patent/TWI294925B/zh not_active IP Right Cessation
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- 2007-11-15 US US11/940,423 patent/US8618552B2/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| CA2581856A1 (en) | 2006-04-20 |
| JP2013018704A (ja) | 2013-01-31 |
| TW200628643A (en) | 2006-08-16 |
| JP2009078966A (ja) | 2009-04-16 |
| EP1807558B1 (en) | 2014-05-14 |
| EP2487280A1 (en) | 2012-08-15 |
| US8618552B2 (en) | 2013-12-31 |
| WO2006041660A3 (en) | 2007-01-11 |
| WO2006041660A8 (en) | 2007-09-07 |
| US20140291698A1 (en) | 2014-10-02 |
| EP1807558A2 (en) | 2007-07-18 |
| JP2008515749A (ja) | 2008-05-15 |
| JP5680269B2 (ja) | 2015-03-04 |
| CN103422174A (zh) | 2013-12-04 |
| US20080237609A1 (en) | 2008-10-02 |
| US8866159B1 (en) | 2014-10-21 |
| US7314521B2 (en) | 2008-01-01 |
| KR20070088561A (ko) | 2007-08-29 |
| WO2006041660A2 (en) | 2006-04-20 |
| JP6141609B2 (ja) | 2017-06-07 |
| KR100854004B1 (ko) | 2008-08-26 |
| CN101084330A (zh) | 2007-12-05 |
| TWI294925B (en) | 2008-03-21 |
| US20070209577A1 (en) | 2007-09-13 |
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