AU2001271800A1 - Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework - Google Patents

Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework

Info

Publication number
AU2001271800A1
AU2001271800A1 AU2001271800A AU7180001A AU2001271800A1 AU 2001271800 A1 AU2001271800 A1 AU 2001271800A1 AU 2001271800 A AU2001271800 A AU 2001271800A AU 7180001 A AU7180001 A AU 7180001A AU 2001271800 A1 AU2001271800 A1 AU 2001271800A1
Authority
AU
Australia
Prior art keywords
control
apc
framework
fault detection
processing tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001271800A
Other languages
English (en)
Inventor
Elfido Coss Jr.
Terrence J. Riley
Qingsu Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24521470&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AU2001271800(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of AU2001271800A1 publication Critical patent/AU2001271800A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32209—Stop production line
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32221—Correlation between defect and measured parameters to find origin of defect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Measuring Fluid Pressure (AREA)
  • Devices For Checking Fares Or Tickets At Control Points (AREA)
AU2001271800A 2000-07-31 2001-07-03 Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework Abandoned AU2001271800A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/629,073 2000-07-31
US09/629,073 US6725402B1 (en) 2000-07-31 2000-07-31 Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
PCT/US2001/021159 WO2002010873A2 (en) 2000-07-31 2001-07-03 Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework

Publications (1)

Publication Number Publication Date
AU2001271800A1 true AU2001271800A1 (en) 2002-02-13

Family

ID=24521470

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001271800A Abandoned AU2001271800A1 (en) 2000-07-31 2001-07-03 Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework

Country Status (9)

Country Link
US (1) US6725402B1 (de)
EP (1) EP1305681B1 (de)
JP (1) JP4977303B2 (de)
KR (1) KR100819190B1 (de)
CN (1) CN100520651C (de)
AU (1) AU2001271800A1 (de)
DE (1) DE60127267T2 (de)
TW (1) TW589691B (de)
WO (1) WO2002010873A2 (de)

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US7160739B2 (en) * 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
US7698012B2 (en) * 2001-06-19 2010-04-13 Applied Materials, Inc. Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
US6910947B2 (en) * 2001-06-19 2005-06-28 Applied Materials, Inc. Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life
US20020192966A1 (en) * 2001-06-19 2002-12-19 Shanmugasundram Arulkumar P. In situ sensor based control of semiconductor processing procedure
US7082345B2 (en) * 2001-06-19 2006-07-25 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
US7337019B2 (en) * 2001-07-16 2008-02-26 Applied Materials, Inc. Integration of fault detection with run-to-run control
US6950716B2 (en) * 2001-08-13 2005-09-27 Applied Materials, Inc. Dynamic control of wafer processing paths in semiconductor manufacturing processes
US20030037090A1 (en) * 2001-08-14 2003-02-20 Koh Horne L. Tool services layer for providing tool service functions in conjunction with tool functions
US6984198B2 (en) * 2001-08-14 2006-01-10 Applied Materials, Inc. Experiment management system, method and medium
US8180587B2 (en) 2002-03-08 2012-05-15 Globalfoundries Inc. System for brokering fault detection data
TWI328164B (en) * 2002-05-29 2010-08-01 Tokyo Electron Ltd Method and apparatus for monitoring tool performance
US7668702B2 (en) * 2002-07-19 2010-02-23 Applied Materials, Inc. Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
WO2004013715A1 (en) * 2002-08-01 2004-02-12 Applied Materials, Inc. Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
US20040063224A1 (en) * 2002-09-18 2004-04-01 Applied Materials, Inc. Feedback control of a chemical mechanical polishing process for multi-layered films
KR101025527B1 (ko) 2002-09-30 2011-04-04 도쿄엘렉트론가부시키가이샤 반도체 제조 프로세스의 모니터링 및 제어를 위한 방법 및장치
AU2003290932A1 (en) * 2002-11-15 2004-06-15 Applied Materials, Inc. Method, system and medium for controlling manufacture process having multivariate input parameters
US6912433B1 (en) * 2002-12-18 2005-06-28 Advanced Mirco Devices, Inc. Determining a next tool state based on fault detection information
US8359494B2 (en) 2002-12-18 2013-01-22 Globalfoundries Inc. Parallel fault detection
US7205228B2 (en) * 2003-06-03 2007-04-17 Applied Materials, Inc. Selective metal encapsulation schemes
WO2005013016A2 (en) * 2003-08-05 2005-02-10 Arie Melul Method and system for real time diagnosis of machine operation
US7437404B2 (en) * 2004-05-20 2008-10-14 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving equipment communication in semiconductor manufacturing equipment
US7363195B2 (en) * 2004-07-07 2008-04-22 Sensarray Corporation Methods of configuring a sensor network
US7680556B2 (en) * 2004-11-15 2010-03-16 Tech Semiconductor Singapore Pte. Ltd. Method for data collection during manufacturing processes
US7277824B1 (en) * 2005-07-13 2007-10-02 Advanced Micro Devices, Inc. Method and apparatus for classifying faults based on wafer state data and sensor tool trace data
US8397173B2 (en) * 2006-01-31 2013-03-12 Advantest (Singapore) Pte Ltd Methods and apparatus using a service to launch and/or monitor data formatting processes
JP4942756B2 (ja) * 2006-09-28 2012-05-30 三菱電機株式会社 故障検出装置、故障検出方法、および故障検出プログラム
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JP4975605B2 (ja) * 2007-12-26 2012-07-11 東京エレクトロン株式会社 処理システム、処理システムの制御方法およびソフトウェアのバージョンアップ方法
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US9720393B2 (en) * 2012-08-31 2017-08-01 P.C. Automax Inc. Automation system and method of manufacturing product using automated equipment
US10140849B2 (en) * 2013-10-07 2018-11-27 Google Llc Status indication triggering and user interfacing in a smart-home hazard detector

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Also Published As

Publication number Publication date
CN100520651C (zh) 2009-07-29
JP2004505366A (ja) 2004-02-19
US6725402B1 (en) 2004-04-20
EP1305681A2 (de) 2003-05-02
DE60127267T2 (de) 2007-12-20
KR100819190B1 (ko) 2008-04-04
JP4977303B2 (ja) 2012-07-18
WO2002010873A3 (en) 2002-08-29
CN1447933A (zh) 2003-10-08
TW589691B (en) 2004-06-01
KR20030019635A (ko) 2003-03-06
DE60127267D1 (de) 2007-04-26
EP1305681B1 (de) 2007-03-14
WO2002010873A2 (en) 2002-02-07

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