AU2001283404A1 - Method and apparatus for embedded process control framework in tool systems - Google Patents

Method and apparatus for embedded process control framework in tool systems

Info

Publication number
AU2001283404A1
AU2001283404A1 AU2001283404A AU8340401A AU2001283404A1 AU 2001283404 A1 AU2001283404 A1 AU 2001283404A1 AU 2001283404 A AU2001283404 A AU 2001283404A AU 8340401 A AU8340401 A AU 8340401A AU 2001283404 A1 AU2001283404 A1 AU 2001283404A1
Authority
AU
Australia
Prior art keywords
process control
control framework
tool systems
embedded process
embedded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283404A
Inventor
Elfido Coss Jr.
Anthony J. Toprac
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of AU2001283404A1 publication Critical patent/AU2001283404A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • General Factory Administration (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Multi-Process Working Machines And Systems (AREA)
AU2001283404A 2000-10-23 2001-08-16 Method and apparatus for embedded process control framework in tool systems Abandoned AU2001283404A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/694,139 2000-10-23
US09/694,139 US6304999B1 (en) 2000-10-23 2000-10-23 Method and apparatus for embedded process control framework in tool systems
PCT/US2001/025655 WO2002035300A2 (en) 2000-10-23 2001-08-16 Method and apparatus for embedded process control framework in tool systems

Publications (1)

Publication Number Publication Date
AU2001283404A1 true AU2001283404A1 (en) 2002-05-06

Family

ID=24787558

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283404A Abandoned AU2001283404A1 (en) 2000-10-23 2001-08-16 Method and apparatus for embedded process control framework in tool systems

Country Status (9)

Country Link
US (1) US6304999B1 (en)
EP (1) EP1330684B1 (en)
JP (1) JP2004512691A (en)
KR (1) KR100836946B1 (en)
CN (1) CN1630840B (en)
AU (1) AU2001283404A1 (en)
DE (1) DE60111411T2 (en)
TW (1) TWI281722B (en)
WO (1) WO2002035300A2 (en)

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Also Published As

Publication number Publication date
EP1330684B1 (en) 2005-06-08
JP2004512691A (en) 2004-04-22
EP1330684A2 (en) 2003-07-30
US6304999B1 (en) 2001-10-16
WO2002035300A2 (en) 2002-05-02
TWI281722B (en) 2007-05-21
DE60111411T2 (en) 2006-05-11
KR100836946B1 (en) 2008-06-11
WO2002035300A3 (en) 2003-01-16
CN1630840B (en) 2010-04-28
DE60111411D1 (en) 2005-07-14
CN1630840A (en) 2005-06-22
KR20040005846A (en) 2004-01-16

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