ATE464569T1 - Sheet-form-verbinder und herstellungsverfahren und anwendung dafür - Google Patents

Sheet-form-verbinder und herstellungsverfahren und anwendung dafür

Info

Publication number
ATE464569T1
ATE464569T1 AT03758872T AT03758872T ATE464569T1 AT E464569 T1 ATE464569 T1 AT E464569T1 AT 03758872 T AT03758872 T AT 03758872T AT 03758872 T AT03758872 T AT 03758872T AT E464569 T1 ATE464569 T1 AT E464569T1
Authority
AT
Austria
Prior art keywords
insulating sheet
sheet
electrode part
surface electrode
electrode structures
Prior art date
Application number
AT03758872T
Other languages
German (de)
English (en)
Inventor
Katsumi Sato
Kazuo Inoue
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Application granted granted Critical
Publication of ATE464569T1 publication Critical patent/ATE464569T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/51Fixed connections for rigid printed circuits or like structures
    • H01R12/52Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures
    • H01R12/523Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures by an interconnection through aligned holes in the boards or multilayer board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/115Via connections; Lands around holes or via connections
    • H05K1/116Lands, clearance holes or other lay-out details concerning the surrounding of a via
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0364Conductor shape
    • H05K2201/0367Metallic bump or raised conductor not used as solder bump
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0388Other aspects of conductors
    • H05K2201/0394Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09372Pads and lands
    • H05K2201/09436Pads or lands on permanent coating which covers the other conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09372Pads and lands
    • H05K2201/09481Via in pad; Pad over filled via
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0733Method for plating stud vias, i.e. massive vias formed by plating the bottom of a hole without plating on the walls
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/423Plated through-holes or plated via connections characterised by electroplating method

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Non-Insulated Conductors (AREA)
  • Connecting Device With Holders (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Adhesive Tapes (AREA)
  • Professional, Industrial, Or Sporting Protective Garments (AREA)
  • Medicinal Preparation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Multi-Conductor Connections (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Saccharide Compounds (AREA)
AT03758872T 2002-10-28 2003-10-24 Sheet-form-verbinder und herstellungsverfahren und anwendung dafür ATE464569T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002313457 2002-10-28
PCT/JP2003/013618 WO2004038433A1 (ja) 2002-10-28 2003-10-24 シート状コネクターおよびその製造方法並びにその応用

Publications (1)

Publication Number Publication Date
ATE464569T1 true ATE464569T1 (de) 2010-04-15

Family

ID=32171165

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03758872T ATE464569T1 (de) 2002-10-28 2003-10-24 Sheet-form-verbinder und herstellungsverfahren und anwendung dafür

Country Status (10)

Country Link
US (1) US7318729B2 (enExample)
EP (1) EP1503216B1 (enExample)
JP (3) JP3649239B2 (enExample)
KR (1) KR100595787B1 (enExample)
CN (1) CN1692283A (enExample)
AT (1) ATE464569T1 (enExample)
AU (1) AU2003275649A1 (enExample)
DE (1) DE60332106D1 (enExample)
TW (1) TWI250600B (enExample)
WO (1) WO2004038433A1 (enExample)

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TW200540430A (en) 2004-04-27 2005-12-16 Jsr Corp Sheet-like probe, method of producing the probe, and application of the probe
WO2005111632A1 (ja) * 2004-05-19 2005-11-24 Jsr Corporation シート状プローブおよびその製造方法並びにその応用
JP4618633B2 (ja) * 2004-09-01 2011-01-26 Hoya株式会社 プローブ部材及びその製造方法
JP4852236B2 (ja) * 2004-10-08 2012-01-11 パナソニック株式会社 バンプ付きメンブレンおよびその製造方法およびウエハの検査方法
WO2006051880A1 (ja) * 2004-11-11 2006-05-18 Jsr Corporation シート状プローブおよびプローブカードならびにウエハの検査方法
WO2006051878A1 (ja) * 2004-11-11 2006-05-18 Jsr Corporation シート状プローブおよびプローブカードならびにウエハの検査方法
FI20041525A7 (fi) * 2004-11-26 2006-03-17 Imbera Electronics Oy Elektroniikkamoduuli ja menetelmä sen valmistamiseksi
JP2006194620A (ja) * 2005-01-11 2006-07-27 Tokyo Electron Ltd プローブカード及び検査用接触構造体
WO2006123772A1 (ja) * 2005-05-19 2006-11-23 Jsr Corporation ウエハ検査用シート状プローブおよびその応用
US7052290B1 (en) * 2005-08-10 2006-05-30 Sony Ericsson Mobile Communications Ab Low profile connector for electronic interface modules
US7922497B2 (en) 2005-10-11 2011-04-12 Jsr Corporation Anisotropic conductive connector and inspection equipment of circuit device
JP4383487B2 (ja) * 2007-03-19 2009-12-16 古河電気工業株式会社 金属張積層体及び金属張積層体の製造方法
WO2008156162A1 (ja) * 2007-06-20 2008-12-24 Jsr Corporation ウエハ検査用プローブ部材およびプローブカード
US8097946B2 (en) * 2007-10-31 2012-01-17 Sanyo Electric Co., Ltd. Device mounting board, semiconductor module, and mobile device
JP5253972B2 (ja) * 2008-04-28 2013-07-31 富士フイルム株式会社 構造体およびその製造方法
JP5373809B2 (ja) 2008-10-21 2013-12-18 株式会社旭電化研究所 メスコネクタ、それに組付けるオスコネクタ、それらを用いた電気・電子機器
JP2010153263A (ja) * 2008-12-25 2010-07-08 Sumitomo Electric Ind Ltd 異方性導電シート、その製造方法、基板体、検査装置、部品モジュール、および電子製品
EP2388861B2 (en) * 2009-01-15 2019-09-25 Sekisui Polymatech Co., Ltd. Connector
JP5435484B2 (ja) * 2010-03-24 2014-03-05 富士フイルム株式会社 金属充填微細構造体の製造方法
KR101688006B1 (ko) * 2010-11-26 2016-12-20 삼성전자주식회사 반도체 장치
CN104022378B (zh) * 2014-04-24 2016-04-27 东莞市宙辉电子科技有限公司 一种灯具连接装置的改良结构
KR102361639B1 (ko) 2017-07-10 2022-02-10 삼성전자주식회사 유니버설 테스트 소켓, 반도체 테스트 장비, 및 반도체 장치의 테스트 방법
IT201700100522A1 (it) * 2017-09-07 2019-03-07 Technoprobe Spa Elemento di interfaccia per un’apparecchiatura di test di dispositivi elettronici e relativo metodo di fabbricazione
JP2020027725A (ja) * 2018-08-10 2020-02-20 信越ポリマー株式会社 電気コネクター及びその製造方法
KR102587764B1 (ko) * 2018-11-21 2023-10-10 미쓰이 가가쿠 가부시키가이샤 이방 도전성 시트, 이방 도전성 복합 시트, 이방 도전성 시트 세트, 전기 검사 장치 및 전기 검사 방법
KR102280651B1 (ko) * 2018-12-26 2021-07-23 주식회사 아이에스시 전기접속용 커넥터 및 그 제조 방법
US11450626B2 (en) * 2020-08-25 2022-09-20 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor package
US11714105B2 (en) * 2021-03-30 2023-08-01 Enplas Corporation Socket and inspection socket
JP2023167905A (ja) * 2022-05-13 2023-11-24 信越ポリマー株式会社 電気コネクター
TW202413665A (zh) * 2022-06-02 2024-04-01 約翰奧瑟尼爾 麥克唐納 於維持多層半導體封裝高頻性能之同時減少銅熱膨脹之方法及裝置

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Also Published As

Publication number Publication date
AU2003275649A1 (en) 2004-05-13
TWI250600B (en) 2006-03-01
WO2004038433A1 (ja) 2004-05-06
JP3649239B2 (ja) 2005-05-18
KR20050040863A (ko) 2005-05-03
CN1692283A (zh) 2005-11-02
KR100595787B1 (ko) 2006-06-30
JP2004172589A (ja) 2004-06-17
JP2004172588A (ja) 2004-06-17
DE60332106D1 (de) 2010-05-27
US7318729B2 (en) 2008-01-15
EP1503216A4 (en) 2008-03-26
JP2005108861A (ja) 2005-04-21
JP3800235B2 (ja) 2006-07-26
US20050215086A1 (en) 2005-09-29
EP1503216B1 (en) 2010-04-14
TW200423275A (en) 2004-11-01
EP1503216A1 (en) 2005-02-02

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