ATE464569T1 - Sheet-form-verbinder und herstellungsverfahren und anwendung dafür - Google Patents

Sheet-form-verbinder und herstellungsverfahren und anwendung dafür

Info

Publication number
ATE464569T1
ATE464569T1 AT03758872T AT03758872T ATE464569T1 AT E464569 T1 ATE464569 T1 AT E464569T1 AT 03758872 T AT03758872 T AT 03758872T AT 03758872 T AT03758872 T AT 03758872T AT E464569 T1 ATE464569 T1 AT E464569T1
Authority
AT
Austria
Prior art keywords
insulating sheet
sheet
electrode part
surface electrode
electrode structures
Prior art date
Application number
AT03758872T
Other languages
English (en)
Inventor
Katsumi Sato
Kazuo Inoue
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Application granted granted Critical
Publication of ATE464569T1 publication Critical patent/ATE464569T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H10W70/635—Through-vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50—Fixed connections
    • H01R12/51—Fixed connections for rigid printed circuits or like structures
    • H01R12/52—Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures
    • H01R12/523—Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures by an interconnection through aligned holes in the boards or multilayer board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/115—Via connections; Lands around holes or via connections
    • H05K1/116—Lands, clearance holes or other lay-out details concerning the surrounding of a via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0364—Conductor shape
    • H05K2201/0367—Metallic bump or raised conductor not used as solder bump
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0388—Other aspects of conductors
    • H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/09436—Pads or lands on permanent coating which covers the other conductors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/09481—Via in pad; Pad over filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703—Plating
    • H05K2203/0733—Method for plating stud vias, i.e. massive vias formed by plating the bottom of a hole without plating on the walls
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Connecting Device With Holders (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Non-Insulated Conductors (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Saccharide Compounds (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Multi-Conductor Connections (AREA)
  • Adhesive Tapes (AREA)
  • Medicinal Preparation (AREA)
  • Professional, Industrial, Or Sporting Protective Garments (AREA)
AT03758872T 2002-10-28 2003-10-24 Sheet-form-verbinder und herstellungsverfahren und anwendung dafür ATE464569T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002313457 2002-10-28
PCT/JP2003/013618 WO2004038433A1 (ja) 2002-10-28 2003-10-24 シート状コネクターおよびその製造方法並びにその応用

Publications (1)

Publication Number Publication Date
ATE464569T1 true ATE464569T1 (de) 2010-04-15

Family

ID=32171165

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03758872T ATE464569T1 (de) 2002-10-28 2003-10-24 Sheet-form-verbinder und herstellungsverfahren und anwendung dafür

Country Status (10)

Country Link
US (1) US7318729B2 (de)
EP (1) EP1503216B1 (de)
JP (3) JP2004172588A (de)
KR (1) KR100595787B1 (de)
CN (1) CN1692283A (de)
AT (1) ATE464569T1 (de)
AU (1) AU2003275649A1 (de)
DE (1) DE60332106D1 (de)
TW (1) TWI250600B (de)
WO (1) WO2004038433A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005048407A1 (ja) * 2003-11-17 2005-05-26 Jsr Corporation 異方導電性シートおよびその製造方法並びにその応用製品
CN100451659C (zh) * 2004-04-27 2009-01-14 Jsr株式会社 片状探测器及其制造方法和应用
EP1750136A1 (de) * 2004-05-19 2007-02-07 JSR Corporation Blattartige sonde, verfahren zur herstellung der sonde und anwendung der sonde
JP4618633B2 (ja) * 2004-09-01 2011-01-26 Ｈｏｙａ株式会社 プローブ部材及びその製造方法
JP4852236B2 (ja) * 2004-10-08 2012-01-11 パナソニック株式会社 バンプ付きメンブレンおよびその製造方法およびウエハの検査方法
TW200619635A (en) * 2004-11-11 2006-06-16 Jsr Corp Sheet-like probe, its manufacturing method, and its application
TW200624817A (en) * 2004-11-11 2006-07-16 Jsr Corp Sheet-form probe, probe card, and wafer inspection method
FI20041525A7 (fi) * 2004-11-26 2006-03-17 Imbera Electronics Oy Elektroniikkamoduuli ja menetelmä sen valmistamiseksi
JP2006194620A (ja) * 2005-01-11 2006-07-27 Tokyo Electron Ltd プローブカード及び検査用接触構造体
WO2006123772A1 (ja) * 2005-05-19 2006-11-23 Jsr Corporation ウエハ検査用シート状プローブおよびその応用
US7052290B1 (en) * 2005-08-10 2006-05-30 Sony Ericsson Mobile Communications Ab Low profile connector for electronic interface modules
KR101195734B1 (ko) 2005-10-11 2012-10-29 제이에스알 가부시끼가이샤 이방 도전성 커넥터 장치 및 회로 장치의 검사 장치
JP4383487B2 (ja) * 2007-03-19 2009-12-16 古河電気工業株式会社 金属張積層体及び金属張積層体の製造方法
WO2008156162A1 (ja) * 2007-06-20 2008-12-24 Jsr Corporation ウエハ検査用プローブ部材およびプローブカード
US8097946B2 (en) * 2007-10-31 2012-01-17 Sanyo Electric Co., Ltd. Device mounting board, semiconductor module, and mobile device
JP5253972B2 (ja) * 2008-04-28 2013-07-31 富士フイルム株式会社 構造体およびその製造方法
US8215965B2 (en) 2008-10-21 2012-07-10 Asahi Denka Kenkyusho Co., Ltd. Female connector, male connector assembled to the same, and electric/electronic apparatus using them
JP2010153263A (ja) * 2008-12-25 2010-07-08 Sumitomo Electric Ind Ltd 異方性導電シート、その製造方法、基板体、検査装置、部品モジュール、および電子製品
EP2388861B2 (de) * 2009-01-15 2019-09-25 Sekisui Polymatech Co., Ltd. Verbinder
JP5435484B2 (ja) * 2010-03-24 2014-03-05 富士フイルム株式会社 金属充填微細構造体の製造方法
KR101688006B1 (ko) * 2010-11-26 2016-12-20 삼성전자주식회사 반도체 장치
CN104022378B (zh) * 2014-04-24 2016-04-27 东莞市宙辉电子科技有限公司 一种灯具连接装置的改良结构
KR102361639B1 (ko) 2017-07-10 2022-02-10 삼성전자주식회사 유니버설 테스트 소켓, 반도체 테스트 장비, 및 반도체 장치의 테스트 방법
IT201700100522A1 (it) * 2017-09-07 2019-03-07 Technoprobe Spa Elemento di interfaccia per un’apparecchiatura di test di dispositivi elettronici e relativo metodo di fabbricazione
JP2020027725A (ja) * 2018-08-10 2020-02-20 信越ポリマー株式会社 電気コネクター及びその製造方法
JP7257415B2 (ja) * 2018-11-21 2023-04-13 三井化学株式会社 異方導電性シート、異方導電性複合シート、異方導電性シートセット、電気検査装置および電気検査方法
KR102280651B1 (ko) * 2018-12-26 2021-07-23 주식회사 아이에스시 전기접속용 커넥터 및 그 제조 방법
US11450626B2 (en) * 2020-08-25 2022-09-20 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor package
US11714105B2 (en) * 2021-03-30 2023-08-01 Enplas Corporation Socket and inspection socket
JP7829399B2 (ja) * 2022-05-13 2026-03-13 信越ポリマー株式会社 電気コネクター
TW202413665A (zh) * 2022-06-02 2024-04-01 約翰奧瑟尼爾 麥克唐納 於維持多層半導體封裝高頻性能之同時減少銅熱膨脹之方法及裝置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5207585A (en) * 1990-10-31 1993-05-04 International Business Machines Corporation Thin interface pellicle for dense arrays of electrical interconnects
KR0140034B1 (ko) * 1993-12-16 1998-07-15 모리시다 요이치 반도체 웨이퍼 수납기, 반도체 웨이퍼의 검사용 집적회로 단자와 프로브 단자와의 접속방법 및 그 장치, 반도체 집적회로의 검사방법, 프로브카드 및 그 제조방법
US6064217A (en) 1993-12-23 2000-05-16 Epi Technologies, Inc. Fine pitch contact device employing a compliant conductive polymer bump
JPH07288271A (ja) * 1994-04-19 1995-10-31 Aging Tesuta Kaihatsu Kyodo Kumiai 集積回路用測定電極
US5531021A (en) * 1994-12-30 1996-07-02 Intel Corporation Method of making solder shape array package
JP2984205B2 (ja) 1996-01-10 1999-11-29 日東電工株式会社 異方導電フィルム
JPH1123615A (ja) * 1997-05-09 1999-01-29 Hitachi Ltd 接続装置および検査システム
EP1105942B1 (de) * 1998-08-17 2002-06-05 Infineon Technologies AG Kontaktiervorrichtung, insbesondere zum ankontaktieren von elektrischen bauelementen und schaltungsträgern, sowie verfahren zu deren herstellung
IL128997A (en) * 1999-03-15 2002-12-01 Aprion Digital Ltd Install electrical connection
EP1061608A3 (de) * 1999-05-10 2002-10-02 Hirose Electric Co., Ltd. Elektrische Zwischenverbinder für zwei Leiterplatten
JP4288814B2 (ja) 2000-01-28 2009-07-01 凸版印刷株式会社 半導体検査治具及びその製造方法
US6970005B2 (en) * 2000-08-24 2005-11-29 Texas Instruments Incorporated Multiple-chip probe and universal tester contact assemblage
ATE494645T1 (de) * 2001-02-09 2011-01-15 Jsr Corp ßANISOTROPER LEITFÄHIGER VERBINDER, HERSTELLUNGSVERFAHREN DAFÜR UND SONDENGLIEDß
JP3788258B2 (ja) 2001-03-27 2006-06-21 Ｊｓｒ株式会社 異方導電性コネクターおよびその応用製品
US6551112B1 (en) * 2002-03-18 2003-04-22 High Connection Density, Inc. Test and burn-in connector
JP2004031203A (ja) * 2002-06-27 2004-01-29 Shin Etsu Polymer Co Ltd 導電接点素子及び電気コネクタ
JP2004259530A (ja) * 2003-02-25 2004-09-16 Shinko Electric Ind Co Ltd 外部接触端子を有する半導体装置及びその使用方法

Also Published As

Publication number Publication date
JP2005108861A (ja) 2005-04-21
JP3649239B2 (ja) 2005-05-18
EP1503216A1 (de) 2005-02-02
JP3800235B2 (ja) 2006-07-26
JP2004172588A (ja) 2004-06-17
EP1503216A4 (de) 2008-03-26
DE60332106D1 (de) 2010-05-27
KR20050040863A (ko) 2005-05-03
TW200423275A (en) 2004-11-01
US20050215086A1 (en) 2005-09-29
US7318729B2 (en) 2008-01-15
TWI250600B (en) 2006-03-01
JP2004172589A (ja) 2004-06-17
WO2004038433A1 (ja) 2004-05-06
EP1503216B1 (de) 2010-04-14
AU2003275649A1 (en) 2004-05-13
KR100595787B1 (ko) 2006-06-30
CN1692283A (zh) 2005-11-02

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties