ATE178406T1 - Verfahren und vorrichtung zur untersuchung von einem elektrisch leitfähigen film mit wirbelströmen sowie deren anwendung zur produktion von optischen glasfasern - Google Patents

Verfahren und vorrichtung zur untersuchung von einem elektrisch leitfähigen film mit wirbelströmen sowie deren anwendung zur produktion von optischen glasfasern

Info

Publication number
ATE178406T1
ATE178406T1 AT91108787T AT91108787T ATE178406T1 AT E178406 T1 ATE178406 T1 AT E178406T1 AT 91108787 T AT91108787 T AT 91108787T AT 91108787 T AT91108787 T AT 91108787T AT E178406 T1 ATE178406 T1 AT E178406T1
Authority
AT
Austria
Prior art keywords
hermetic coating
electrical resistance
coating
phase angle
eddy current
Prior art date
Application number
AT91108787T
Other languages
English (en)
Inventor
Yukio Kohmura
Yoshinori Ishida
Takashi Hibino
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2140332A external-priority patent/JP2733544B2/ja
Priority claimed from JP10873391A external-priority patent/JP2635844B2/ja
Priority claimed from JP3108734A external-priority patent/JP2566069B2/ja
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Application granted granted Critical
Publication of ATE178406T1 publication Critical patent/ATE178406T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9046—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/023—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance where the material is placed in the field of a coil
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/9026—Arrangements for scanning by moving the material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT91108787T 1990-05-30 1991-05-29 Verfahren und vorrichtung zur untersuchung von einem elektrisch leitfähigen film mit wirbelströmen sowie deren anwendung zur produktion von optischen glasfasern ATE178406T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2140332A JP2733544B2 (ja) 1990-05-30 1990-05-30 導電性薄膜検査方法
JP10873391A JP2635844B2 (ja) 1991-04-12 1991-04-12 導電膜検査方法およびその装置
JP3108734A JP2566069B2 (ja) 1991-04-12 1991-04-12 ハーメチック被覆光ファイバの製造方法とその装置

Publications (1)

Publication Number Publication Date
ATE178406T1 true ATE178406T1 (de) 1999-04-15

Family

ID=27311304

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91108787T ATE178406T1 (de) 1990-05-30 1991-05-29 Verfahren und vorrichtung zur untersuchung von einem elektrisch leitfähigen film mit wirbelströmen sowie deren anwendung zur produktion von optischen glasfasern

Country Status (6)

Country Link
US (3) US5262726A (de)
EP (1) EP0459441B1 (de)
KR (1) KR910020449A (de)
AT (1) ATE178406T1 (de)
CA (1) CA2043347A1 (de)
DE (1) DE69131059T2 (de)

Families Citing this family (22)

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CA2043347A1 (en) * 1990-05-30 1991-12-01 Yukio Kohmura Method and system for inspection of electroconductive film using eddy current and process and system for production of optical fibres using method and system
DE9206076U1 (de) * 1992-05-07 1993-09-09 Heinrich Hermann GmbH + Co, 70327 Stuttgart Etikettiermaschine
FR2692978A1 (fr) * 1992-06-30 1993-12-31 Alcatel Fibres Optiques Dispositif et procédé de contrôle de l'épaisseur et de la régularité d'un revêtement déposé sur un corps isolant allongé.
US6165542A (en) * 1998-12-23 2000-12-26 United Technologies Corporation Method for fabricating and inspecting coatings
DE10032143C2 (de) * 1999-09-30 2002-07-18 Heidenhain Gmbh Dr Johannes Ferraris-Sensor und Verfahren zum Betrieb eines Ferraris-Sensors
US6433541B1 (en) 1999-12-23 2002-08-13 Kla-Tencor Corporation In-situ metalization monitoring using eddy current measurements during the process for removing the film
US6707540B1 (en) 1999-12-23 2004-03-16 Kla-Tencor Corporation In-situ metalization monitoring using eddy current and optical measurements
US6650815B2 (en) 2000-12-27 2003-11-18 Corning Incorporated Optical fiber encoded with data signal
US6583618B2 (en) 2001-09-21 2003-06-24 Framatome, Anp Inc. Remote magnetic field material analyzer and method
US7128803B2 (en) 2002-06-28 2006-10-31 Lam Research Corporation Integration of sensor based metrology into semiconductor processing tools
US7309618B2 (en) 2002-06-28 2007-12-18 Lam Research Corporation Method and apparatus for real time metal film thickness measurement
US7205166B2 (en) 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7084621B2 (en) 2002-09-25 2006-08-01 Lam Research Corporation Enhancement of eddy current based measurement capabilities
US20050211667A1 (en) * 2004-03-26 2005-09-29 Lam Research Corporation Method and apparatus for measurement of thin films and residues on semiconductor substrates
WO2011151530A1 (fr) * 2010-05-31 2011-12-08 Arcelormittal Investigacion Y Desarrollo, S.L. Procede et dispositif de mesure de l'epaisseur d'une couche de revetement sur une bande en defilement
US20120121226A1 (en) * 2010-11-17 2012-05-17 Honeywell International Inc. Interlocking optical fiber
US8840317B2 (en) 2011-04-14 2014-09-23 Honeywell International Inc. Interlocking optical fiber
US9523729B2 (en) * 2013-09-13 2016-12-20 Infineon Technologies Ag Apparatus and method for testing electric conductors
CN108917817A (zh) * 2018-06-06 2018-11-30 东莞市开方实业有限公司 一种自动导电膜测试机
CN109270318B (zh) * 2018-10-10 2020-10-13 山东理工大学 一种宽测量范围的电流互感器信号传输系统及传输方法
CN110617878B (zh) * 2019-10-31 2024-04-19 南京林业大学 一种铁路接触网振动频率检测装置
KR102358881B1 (ko) * 2021-08-25 2022-02-08 (주)케이알바트로스 탄소섬유 필라멘트 품질검사장치

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GB1013348A (en) * 1962-05-04 1965-12-15 Ilford Ltd Monitoring apparatus and method
SU468204A1 (ru) * 1973-06-18 1975-04-25 Предприятие П/Я В-8543 Устройство дл измерени параметров тонких магнитных пленок
DE2335853A1 (de) * 1973-07-14 1975-01-30 Fischer Gmbh & Co Helmut Wirbelstromsystem zur zerstoerungsfreien pruefung von werkstoffen
US4530750A (en) * 1981-03-20 1985-07-23 A. S. Laboratories, Inc. Apparatus for coating optical fibers
US4556845A (en) * 1982-05-17 1985-12-03 International Business Machines Corporation Method for monitoring deposition rate using an eddy current detector
FR2572175A1 (fr) * 1984-10-24 1986-04-25 Stein Heurtey Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur
DE3612470A1 (de) * 1985-09-25 1987-04-02 Univ Magdeburg Tech Wirbelstrom-defektoskop
DE3542159A1 (de) * 1985-11-28 1987-06-04 Nukem Gmbh Verfahren zur werkstoffpruefung nach dem wirbelstromprinzip und vorrichtung zur durchfuehrung des verfahrens
US4755753A (en) * 1986-07-23 1988-07-05 General Electric Company Eddy current surface mapping system for flaw detection
FR2626372B3 (fr) * 1988-01-25 1990-01-19 Unimetall Sa Dispositif de detection par courants de foucault des defauts superficiels de produits longs a section circulaire
DE3824948A1 (de) * 1988-07-22 1990-01-25 Fiz Energet I An Latvssr Wirbelstrom-einrichtung zur zerstoerungsfreien pruefung
US4893079A (en) * 1988-08-29 1990-01-09 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for correcting eddy current signal voltage for temperature effects
US5142228A (en) * 1989-04-24 1992-08-25 Corning Incorporated Method for statically or dynamically monitoring the thickness of electrically-conductive coatings on optical fibers
FR2648236B1 (fr) * 1989-06-12 1991-12-20 Onera (Off Nat Aerospatiale) Appareil de mesure d'impedance surfacique
US5062298A (en) * 1989-12-05 1991-11-05 E. I. Du Pont De Nemours And Company Non-contact wet or dry film thickness measuring device using eddy current and ultrasonic sensors
US5017869A (en) * 1989-12-14 1991-05-21 General Electric Company Swept frequency eddy current system for measuring coating thickness
US5021072A (en) * 1990-01-16 1991-06-04 At&T Bell Laboratories Method for making a carbon-coated and polymer-coated optical fiber
CA2043347A1 (en) * 1990-05-30 1991-12-01 Yukio Kohmura Method and system for inspection of electroconductive film using eddy current and process and system for production of optical fibres using method and system
US5237271A (en) * 1991-05-06 1993-08-17 General Electric Company Apparatus and method for non-destructive testing using multi-frequency eddy currents
DE4119903C5 (de) * 1991-06-17 2005-06-30 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Verfahren und Vorrichtung zur Messung dünner Schichten
US5180978A (en) * 1991-12-02 1993-01-19 Honeywell Inc. Proximity sensor with reduced temperature sensitivity using A.C. and D.C. energy

Also Published As

Publication number Publication date
DE69131059T2 (de) 1999-09-30
KR910020449A (ko) 1991-12-20
EP0459441A3 (en) 1993-02-10
EP0459441B1 (de) 1999-03-31
CA2043347A1 (en) 1991-12-01
US5672193A (en) 1997-09-30
EP0459441A2 (de) 1991-12-04
US5262726A (en) 1993-11-16
DE69131059D1 (de) 1999-05-06
US5548213A (en) 1996-08-20

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