AR099253A1 - Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd) - Google Patents
Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd)Info
- Publication number
- AR099253A1 AR099253A1 ARP140101499A ARP140101499A AR099253A1 AR 099253 A1 AR099253 A1 AR 099253A1 AR P140101499 A ARP140101499 A AR P140101499A AR P140101499 A ARP140101499 A AR P140101499A AR 099253 A1 AR099253 A1 AR 099253A1
- Authority
- AR
- Argentina
- Prior art keywords
- plate
- coating
- support
- source
- blank
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 7
- 238000000576 coating method Methods 0.000 title abstract 7
- 238000005240 physical vapour deposition Methods 0.000 title abstract 7
- 239000000463 material Substances 0.000 title abstract 5
- 238000001816 cooling Methods 0.000 abstract 4
- 239000012528 membrane Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3497—Temperature of target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Telescopes (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
- Packaging For Recording Disks (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Nozzles (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361809524P | 2013-04-08 | 2013-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AR099253A1 true AR099253A1 (es) | 2016-07-13 |
Family
ID=50486885
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ARP140101500A AR096021A1 (es) | 2013-04-08 | 2014-04-07 | Placa de forma de disco con soporte que forman un sistema de placa-soporte |
| ARP140101499A AR099253A1 (es) | 2013-04-08 | 2014-04-07 | Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd) |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ARP140101500A AR096021A1 (es) | 2013-04-08 | 2014-04-07 | Placa de forma de disco con soporte que forman un sistema de placa-soporte |
Country Status (21)
| Country | Link |
|---|---|
| US (2) | US9564300B2 (enExample) |
| EP (2) | EP2984673B1 (enExample) |
| JP (2) | JP6655531B2 (enExample) |
| KR (2) | KR102190319B1 (enExample) |
| CN (2) | CN105210169B (enExample) |
| AR (2) | AR096021A1 (enExample) |
| BR (2) | BR112015025749A2 (enExample) |
| CA (2) | CA2908892C (enExample) |
| ES (1) | ES2675332T3 (enExample) |
| HK (1) | HK1214403A1 (enExample) |
| HU (1) | HUE038784T2 (enExample) |
| IL (2) | IL241979B (enExample) |
| MX (2) | MX350172B (enExample) |
| MY (2) | MY185549A (enExample) |
| PH (2) | PH12015502328B1 (enExample) |
| PL (1) | PL2984674T3 (enExample) |
| RU (2) | RU2665059C2 (enExample) |
| SG (3) | SG11201508324VA (enExample) |
| TR (1) | TR201809526T4 (enExample) |
| TW (2) | TW201443258A (enExample) |
| WO (2) | WO2014166620A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10435784B2 (en) | 2016-08-10 | 2019-10-08 | Applied Materials, Inc. | Thermally optimized rings |
| CN110892502B (zh) | 2017-06-01 | 2022-10-04 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 用于脆性材料的安全经济蒸发的靶组件 |
| CN108130516A (zh) * | 2018-01-03 | 2018-06-08 | 梧州三和新材料科技有限公司 | 一种使用泡沫金属增强冷却的真空镀阴极靶 |
| CN110838458B (zh) | 2018-08-17 | 2022-08-09 | 台湾积体电路制造股份有限公司 | 半导体制程系统以及方法 |
| US11600517B2 (en) * | 2018-08-17 | 2023-03-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Screwless semiconductor processing chambers |
| MX2021007531A (es) * | 2018-12-20 | 2021-08-05 | Oerlikon Surface Solutions Ag Pfaeffikon | Dispositivo de ignicion de arco catodico. |
| CN110066980A (zh) * | 2019-05-31 | 2019-07-30 | 德淮半导体有限公司 | 环状靶材部件、半导体工艺设备及其工作方法 |
| CN115088053A (zh) * | 2019-12-13 | 2022-09-20 | 瑞士艾发科技 | 用于pvd源的气环 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5724890Y2 (enExample) * | 1979-10-31 | 1982-05-29 | ||
| EP0393344A1 (de) | 1989-04-20 | 1990-10-24 | Balzers Aktiengesellschaft | Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung |
| DE4015388C2 (de) * | 1990-05-14 | 1997-07-17 | Leybold Ag | Kathodenzerstäubungsvorrichtung |
| DE69127636T2 (de) * | 1991-01-28 | 1998-01-22 | Materials Research Corp | Target für kathodenzerstäubung |
| DE9102052U1 (de) * | 1991-02-21 | 1991-06-13 | Hauzer Holding B.V., Venlo | Indirekt gekühlter Verdampfer mit Schnellwechselsystem |
| JP3030921B2 (ja) * | 1991-05-01 | 2000-04-10 | 日新電機株式会社 | イオン源の引出し電極装置 |
| US5269894A (en) * | 1991-05-08 | 1993-12-14 | Balzers Aktiengesellschaft | Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber |
| DE4133564C2 (de) * | 1991-10-10 | 1999-11-18 | Leybold Ag | Vorrichtung zur lösbaren Befestigung eines Targets oder Targetgrundkörpers auf der Kathodenhalterung |
| RU2037559C1 (ru) * | 1992-08-10 | 1995-06-19 | Волин Эрнст Михайлович | Способ нанесения покрытий на изделия методом ионного распыления и устройство для его осуществления |
| US5876573A (en) * | 1995-07-10 | 1999-03-02 | Cvc, Inc. | High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition |
| DE19535894A1 (de) | 1995-09-27 | 1997-04-03 | Leybold Materials Gmbh | Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung |
| US6217832B1 (en) * | 1998-04-30 | 2001-04-17 | Catalytica, Inc. | Support structures for a catalyst |
| JP4251713B2 (ja) * | 1999-05-21 | 2009-04-08 | 株式会社アルバック | スパッタ装置 |
| US6589352B1 (en) | 1999-12-10 | 2003-07-08 | Applied Materials, Inc. | Self aligning non contact shadow ring process kit |
| JP4101524B2 (ja) * | 2002-02-05 | 2008-06-18 | 芝浦メカトロニクス株式会社 | 成膜装置 |
| JP2010116605A (ja) | 2008-11-13 | 2010-05-27 | Fujikura Ltd | ターゲット保持装置、ならびにこれを用いた成膜装置および成膜方法 |
| JP2011165964A (ja) * | 2010-02-10 | 2011-08-25 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法 |
| DE102012006717A1 (de) | 2012-04-04 | 2013-10-10 | Oerlikon Trading Ag, Trübbach | An eine indirekte Kühlvorrichtung angepasstes Target |
-
2014
- 2014-04-07 CA CA2908892A patent/CA2908892C/en active Active
- 2014-04-07 MY MYPI2015703579A patent/MY185549A/en unknown
- 2014-04-07 CA CA2908897A patent/CA2908897C/en active Active
- 2014-04-07 SG SG11201508324VA patent/SG11201508324VA/en unknown
- 2014-04-07 CN CN201480026375.3A patent/CN105210169B/zh active Active
- 2014-04-07 WO PCT/EP2014/000927 patent/WO2014166620A1/de not_active Ceased
- 2014-04-07 EP EP14717412.2A patent/EP2984673B1/de active Active
- 2014-04-07 JP JP2016506806A patent/JP6655531B2/ja active Active
- 2014-04-07 HK HK16102413.7A patent/HK1214403A1/zh unknown
- 2014-04-07 MY MYPI2015703578A patent/MY178843A/en unknown
- 2014-04-07 CN CN201480031545.7A patent/CN105324830B/zh not_active Expired - Fee Related
- 2014-04-07 JP JP2016506805A patent/JP6360884B2/ja active Active
- 2014-04-07 HU HUE14718509A patent/HUE038784T2/hu unknown
- 2014-04-07 KR KR1020157031127A patent/KR102190319B1/ko active Active
- 2014-04-07 MX MX2015014209A patent/MX350172B/es active IP Right Grant
- 2014-04-07 MX MX2015014210A patent/MX350171B/es active IP Right Grant
- 2014-04-07 US US14/783,383 patent/US9564300B2/en active Active
- 2014-04-07 EP EP14718509.4A patent/EP2984674B1/de active Active
- 2014-04-07 SG SG10201708186QA patent/SG10201708186QA/en unknown
- 2014-04-07 BR BR112015025749A patent/BR112015025749A2/pt not_active IP Right Cessation
- 2014-04-07 KR KR1020157031126A patent/KR102234454B1/ko active Active
- 2014-04-07 AR ARP140101500A patent/AR096021A1/es unknown
- 2014-04-07 RU RU2015147496A patent/RU2665059C2/ru not_active IP Right Cessation
- 2014-04-07 SG SG11201508311VA patent/SG11201508311VA/en unknown
- 2014-04-07 PL PL14718509T patent/PL2984674T3/pl unknown
- 2014-04-07 WO PCT/EP2014/000928 patent/WO2014166621A1/de not_active Ceased
- 2014-04-07 BR BR112015025747A patent/BR112015025747A2/pt not_active IP Right Cessation
- 2014-04-07 TR TR2018/09526T patent/TR201809526T4/tr unknown
- 2014-04-07 ES ES14718509.4T patent/ES2675332T3/es active Active
- 2014-04-07 US US14/783,168 patent/US9536714B2/en active Active - Reinstated
- 2014-04-07 RU RU2015147497A patent/RU2665058C2/ru not_active IP Right Cessation
- 2014-04-07 AR ARP140101499A patent/AR099253A1/es unknown
- 2014-04-08 TW TW103112844A patent/TW201443258A/zh unknown
- 2014-04-08 TW TW103112846A patent/TW201443263A/zh unknown
-
2015
- 2015-10-07 PH PH12015502328A patent/PH12015502328B1/en unknown
- 2015-10-08 PH PH12015502338A patent/PH12015502338B1/en unknown
- 2015-10-08 IL IL241979A patent/IL241979B/en active IP Right Grant
- 2015-10-08 IL IL241980A patent/IL241980B/en active IP Right Grant
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AR099253A1 (es) | Fuente de recubrimiento o blanco para proveer material para recubrimiento por deposición física de vapor (pvd) | |
| AR089603A1 (es) | Metodo y aparato para usar un elemento de calentamiento de un dispositivo generador de aerosoles | |
| EP3166113A4 (en) | Small load-following nuclear power generation system using heat deformation of reflector caused by thermal expansion phenomenon | |
| WO2015197852A3 (en) | Apparatus for heating or cooling a material contained therein | |
| BR112013030106A2 (pt) | sistema de energia para aplicações de alta temperatura com armazenamento de energia recarregável | |
| AR086629A1 (es) | Pala de rotor de instalaciones de energia eolica y procedimiento para el montaje de una pala de rotor de instalaciones de energia eolica | |
| AR094333A1 (es) | Dispositivo generador de aerosol que comprende múltiples materiales de cambio de fase sólida-líquida | |
| AR093302A1 (es) | Metodo para operar una disposicion para almacenar energia termica | |
| MX2016011768A (es) | Un metodo para formar partes a partir de aleacion de metal en lamina. | |
| MY184959A (en) | Cold-water generating tank, and water cooler equipped with same | |
| CO7030949A2 (es) | Sistema de enfriamiento de una turbina de viento | |
| MX2021005342A (es) | Nuevo liquido de transferencia de calor para enfriar baterias de almacenamiento de litio. | |
| BR112013005989A2 (pt) | fonte de alta potência de radiação eletromagnética | |
| CL2014002284A1 (es) | Receptor solar de placas para central termosolar de torre que comprende: una placa delantera cuya superficie externa recepciona la radiación solar proveniente del campo de helióstatos, una placa trasera, elementos de cierre entre las placas, colocados en los extremos laterales de ambas, al menos un colector de admisión, situado en la parte superior de las placas, por donde entra el fluido caloportador al receptor y al menos un colector de evacuación, situado en la parte inferior; torre solar. | |
| AR101260A1 (es) | Segmento de borde posterior de pala de rotor para instalación de energía eólica | |
| CL2008000177A1 (es) | Estructura de refrigeracion por agua de un horno flash para enfriar el techo triangular de un tanque sedimentador situado adyacente a una cavidad interior del horno que tiene una camisa de refrigeracion por agua hecha de cobre que comprende la camisa | |
| AR088314A1 (es) | Instalacion para enfriamiento de emergencia de una planta para procesos exotermicos | |
| RU2009144785A (ru) | Газостат | |
| ES2395511R1 (es) | Aparato refrigerador | |
| BR112017007299A2 (pt) | sistema e processo para fornecer uma injeção | |
| ES2571414T3 (es) | Dispositivo de campo de cocción | |
| CL2011003068A1 (es) | Central helio-termica con gestion exergetica del calor, en una configuracion de central termica con captadores solares de concentracion, que se estructura en un conjunto de sectores por los que circula el fluido de trabajo, identificandose los sectores necesarios por aplicacion del criterio de especificidades de calentamiento. | |
| BR112016002471A2 (pt) | módulo coletor solar | |
| TH160725A (th) | เป้าหมายในการพ่นที่มีความเข้ากันได้ของพลังงานเพิ่มขึ้น | |
| CL2019000862A1 (es) | Nanomaterial compuesto de transferencia de calor. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FB | Suspension of granting procedure |