WO2022014509A1 - 真空圧供給システム - Google Patents

真空圧供給システム Download PDF

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Publication number
WO2022014509A1
WO2022014509A1 PCT/JP2021/026061 JP2021026061W WO2022014509A1 WO 2022014509 A1 WO2022014509 A1 WO 2022014509A1 JP 2021026061 W JP2021026061 W JP 2021026061W WO 2022014509 A1 WO2022014509 A1 WO 2022014509A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pressure
pressure supply
supply system
holding force
notification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/026061
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English (en)
French (fr)
Japanese (ja)
Inventor
中村牧人
室田真弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Priority to US18/005,539 priority Critical patent/US20230278173A1/en
Priority to JP2022536335A priority patent/JPWO2022014509A1/ja
Priority to CN202180060308.3A priority patent/CN116157230A/zh
Priority to DE112021003831.1T priority patent/DE112021003831T5/de
Publication of WO2022014509A1 publication Critical patent/WO2022014509A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Program control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
    • G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means

Definitions

  • the present invention relates to a vacuum pressure supply system.
  • an object holding device for example, a vacuum chuck device
  • a vacuum chuck device that holds an object using vacuum pressure
  • a work object is held by using a vacuum chuck device.
  • a plurality of magnitudes of the holding force for holding the object can be set according to the weight or strength of the object to be held.
  • Japanese Patent Application Laid-Open No. 2006-229027 discloses a wafer transfer device having a flow rate adjusting valve for adjusting a vacuum pressure for holding a wafer.
  • a plurality of vacuum pressure supply paths for supplying the vacuum pressure from the vacuum source to a holding portion that holds the object using the vacuum pressure and a holding force for holding the object are mutually present.
  • the connection state between the vacuum source and the plurality of vacuum pressure supply paths is switched in order to change the holding force of the holding portion and the pressure adjusting mechanism that adjusts the pressure in the plurality of vacuum pressure supply paths so as to be different. It is equipped with a switching mechanism.
  • the switching mechanism switches the connection state by selecting one of the vacuum pressure supply paths and connecting the vacuum pressure source to the vacuum source.
  • FIG. 1 is a diagram showing a configuration of a vacuum pressure supply system according to an embodiment.
  • FIG. 2 is a diagram showing an example of an operation procedure of the vacuum pressure supply system according to the embodiment.
  • FIG. 3 is a diagram showing the configuration of the vacuum pressure supply system according to the first modification.
  • FIG. 4 is a diagram showing an example of an operation procedure of the vacuum pressure supply system according to the first modification.
  • FIG. 1 is a diagram showing a configuration of a vacuum pressure supply system 10 according to an embodiment.
  • the vacuum pressure supply system 10 includes a vacuum source 12, a switching mechanism 14, a plurality of vacuum pressure supply paths 16, a pressure adjusting mechanism 18, a holding unit 20, an operating unit 30, a notification unit 32, and a control unit 34.
  • An example of the vacuum pressure supply system 10 is a vacuum chuck device.
  • a plurality of vacuum pressure supply paths 16 are connected to the holding portion 20.
  • the plurality of vacuum pressure supply paths 16 are connected to the vacuum source 12 via the switching mechanism 14.
  • the number of vacuum pressure supply paths 16 is set to 5 for convenience.
  • the switching mechanism 14 switches the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 in order to change the holding force of the holding portion 20.
  • the switching mechanism 14 switches the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 by, for example, selecting one of the five vacuum pressure supply paths 16 and connecting the switching mechanism 14 to the vacuum source 12. be able to.
  • the vacuum pressure generated by the vacuum source 12 is supplied to any one of the vacuum pressure supply paths 16, and the vacuum pressure supply path 16 to which the vacuum pressure is supplied can be switched.
  • the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 may be simply referred to as a “connection state”.
  • the pressure adjusting mechanism 18 adjusts the pressure in the vacuum pressure supply path 16 so that the holding portion 20 has a different force for holding the object.
  • the pressure adjusting mechanism 18 adjusts the pressure in the five vacuum pressure supply paths 16 to make them different from each other.
  • the pressure adjusting mechanism 18 sets the respective pressures (differential pressure from the atmospheric pressure) in the five vacuum pressure supply paths 16 at ⁇ 75 kPa (G), ⁇ 60 kPa (G), ⁇ 45 kPa (G), and ⁇ 30 kPa. Adjust to (G) and -15 kPa (G).
  • This differential pressure corresponds to the holding force of the holding portion 20. That is, the smaller the differential pressure (the larger the absolute value of the differential pressure), the stronger the holding force of the holding portion 20. Since there is a correlation between the holding force and the differential pressure, the holding force may be expressed by this differential pressure below.
  • the pressure adjusting mechanism 18 has five throttle valves 22 provided in the five vacuum pressure supply paths 16.
  • the throttle valve 22 does not have to be provided in the vacuum pressure supply path 16.
  • the flow rate of the vacuum pressure supply path 16 pressure in the vacuum pressure supply path 16
  • the holding unit 20 sucks and holds an object using the vacuum pressure supplied from the vacuum source 12 via the vacuum pressure supply path 16.
  • An example of the holding portion 20 is a vacuum chuck mechanism.
  • the switching mechanism 14 can change the holding force of the holding unit 20 by switching the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16. As a result, the holding force can be switched by using a single vacuum source 12. That is, since a plurality of vacuum sources 12 corresponding to a plurality of holding force set values are not required, the installation space can be reduced and the device can be miniaturized.
  • the holding force (suction pressure) of the holding portion 20 begins to change (start of changing the holding force). After that, the holding force of the holding portion 20 reaches the holding force (suction pressure) corresponding to the vacuum pressure supply path 16 after switching (completion of change).
  • the operation unit 30 is an input device for the operator to perform an operation for changing the holding force of the holding unit 20, and is, for example, a switch, a keyboard, or a touch panel.
  • the operator uses the operation unit 30 to select the holding force of the holding unit 20.
  • the number and magnitude of holding forces that this operator can select depends on the five vacuum pressure supply paths 16. In this embodiment, the number of selectable holding forces is six. Therefore, in the present embodiment, the operator has [holding force: ⁇ 75 kPa (G)], [holding force: ⁇ 60 kPa (G)], [holding force: ⁇ 45 kPa (G)], and [holding force: ⁇ 30 kPa]. (G)], [Holding power: -15 kPa (G)], and [Holding power: 0 kPa (G)] are selected.
  • the table 36a correlates each of the plurality of holding forces that can be selected by the operator with the vacuum pressure supply path 16 that should be selected in order to realize each of the plurality of holding forces.
  • the switching control unit 36 controls the switching mechanism 14 with reference to the table 36a.
  • the notification control unit 38 notifies the notification unit 32 that the holding force of the holding unit 20 will be changed before the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 is switched (holding force change). Notice). If the holding force of the holding portion 20 is weakened, it may be difficult for the holding portion 20 to properly hold the object. Therefore, the operator can be alerted by notifying that the holding force will be changed before the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 is switched.
  • the notification control unit 38 notifies the notification unit 32 that the holding force of the holding unit 20 has changed due to the switching of the connection state (notification of the holding force change). By receiving the notification of the change in the holding force, the operator can grasp that the holding force has changed.
  • the change in the holding force of the holding portion 20 means that the holding force is being changed or that the change in the holding force is completed.
  • the notification control unit 38 may classify this notification sound into a first notification sound and a second notification sound and output the notification sound from the notification unit 32. That is, the notification control unit 38 outputs a first notification sound notifying that the holding force is being changed after the first predetermined time has elapsed from the operation by the operator. After that, the notification control unit 38 outputs a second notification sound notifying that the change to the holding force selected (designated) by the operator is completed. Thereby, the operator can grasp the change state of the holding force in more detail by the first notification sound and the second notification sound.
  • the notification control unit 38 outputs the notification sound and the notification sound in different modes from the notification unit 32. Further, the notification control unit 38 outputs the first notification sound and the second notification sound in different modes.
  • This aspect of sound means any of loudness (volume), pitch (pitch), sound pattern, sound spacing, or a combination thereof. For example, an intermittent sound (for example, “pip-pip, pip-pip, pip-pip, ##) Can be used for the warning sound, and a continuous sound (for example, "pip”) can be used for the notification sound. Further, by making the volume or pitch of the notification sound "pee" different in the middle, the notification sound can be divided into a first notification sound (changing) and a second notification sound (change completed).
  • the notification control unit 38 performs volume processing for increasing the volume of the warning sound with the passage of time, pitch processing for increasing the pitch of the warning sound with the passage of time, and interval processing for shortening the notification interval of the warning sound with the passage of time. Of these, at least one may be performed. As a result, the operator can recognize that the timing of switching the connection state (start of change in holding force) is approaching.
  • the notification control unit 38 can determine that the change in the holding force has been completed as follows. That is, when the first predetermined time has elapsed from the operation by the operator and then the second predetermined time has elapsed, the notification control unit 38 determines that the change of the holding force has been completed.
  • the second predetermined time corresponds to the time required from the switching of the connection state to the completion of the change of the holding force. Generally, once the size of the vacuum pressure supply system 10 is determined, the required time is also determined. That is, the second predetermined time can be a constant value.
  • FIG. 2 is a diagram showing an example of an operation procedure of the vacuum pressure supply system 10 according to the embodiment.
  • the notification control unit 38 announces that the holding force of the holding unit 20 will be changed.
  • the warning sound is output from the notification unit 32 (here, the speaker) (step S2).
  • the switching control unit 36 controls the switching mechanism 14 to switch the connection state between the vacuum source 12 and the five vacuum pressure supply paths 16 (step). S4).
  • the notification control unit 38 stays in step S3 until the first predetermined time elapses. The passage of this time can be measured, for example, by starting timekeeping by a timer when the operator operates. If the notification control unit 38 determines NO in step S3, the notification control unit 38 may return to step S2. As a result, the warning sound is continuously notified until the first predetermined time elapses.
  • the notification control unit 38 outputs a first notification sound from the notification unit 32 to notify that the holding force of the holding unit 20 is being changed after the first predetermined time has elapsed from the operation by the operator. (Step S5). It is preferable that the first notification sound is output from the notification unit 32 at the time of switching the vacuum pressure supply path 16 or immediately after that. Further, after the first predetermined time has elapsed and the second predetermined time has elapsed (YES in step S6), the notification control unit 38 notifies that the change of the holding force of the holding unit 20 is completed. The notification sound of 2 is output from the notification unit 32 (step S7).
  • the notification control unit 38 determines NO in step S6, the notification control unit 38 may return to step S5. As a result, the first notification sound is continuously notified until the second predetermined time elapses.
  • the switching mechanism 14 by switching the connection state between the vacuum source 12 and the plurality of vacuum pressure supply paths 16, the switching mechanism 14 does not use a plurality of vacuum sources, and the holding force of the holding unit 20 is held. Can be changed. Further, the notification control unit 38 outputs a warning sound before this switching, and the notification control unit 38 outputs a first notification sound and a second notification sound during the change of the holding force due to the switching and after the change is completed. Let me. This allows the operator to grasp the change status of the holding force.
  • the notification control unit 38 determines the completion of the change of the holding force based on the lapse of the second predetermined time, but may determine the completion of the change of the holding force by another method. ..
  • FIG. 3 is a diagram showing the configuration of the vacuum pressure supply system 10 according to the modified example 1.
  • the vacuum pressure supply system 10 includes a pressure detection unit 40.
  • the pressure detecting unit 40 is provided in the holding unit 20 and detects the suction pressure of the holding unit 20.
  • the notification control unit 38 determines whether or not the change of the holding force is completed based on the detection signal from the pressure detection unit 40. As described above, the suction pressure of the holding portion 20 indicated by the detection signal corresponds to the holding force and changes with the holding force. It is possible to determine the completion of the change of the holding force based on whether or not the detected suction pressure (holding force) reaches the selected suction pressure (holding force).
  • the notification control unit 38 determines that the change of the holding force is completed, the notification control unit 38 outputs a second notification sound notifying that the change of the holding force is completed from the notification unit 32.
  • FIG. 4 is a diagram showing an example of the operation procedure of the vacuum pressure supply system 10 according to the modified example 1.
  • steps S1 to S5 are the same as steps S1 to S5 of the embodiment, steps S5 and subsequent steps will be described.
  • the notification control unit 38 After the notification control unit 38 outputs the first notification sound from the notification unit 32 (step S5), the notification control unit 38 determines whether or not the change of the holding force is completed (step S16). When the notification control unit 38 determines that the change of the holding force is completed (YES in step S16), the notification control unit 38 outputs the second notification sound from the notification unit 32 (step S7).
  • step S16 the notification control unit 38 determines that the change in the holding force has not been completed (NO in step S16)
  • the notification control unit 38 goes to step S16 until it determines that the change in the holding force has been completed. stay. Thereby, the operator can grasp the change state of the holding force by the first notification sound and the second notification sound. If the notification control unit 38 determines NO in step S16, the notification control unit 38 may return to step S5. As a result, the first notification sound is continuously notified until the change of the holding force is completed.
  • the notification control unit 38 notifies the notification unit 32 that the holding force is changed before the connection state is switched.
  • the notification may be performed only when the holding force of the holding unit 20 decreases due to the switching of the connection state, and the notification may not be performed when the holding force increases.
  • the operator can be alerted only when the holding force is reduced (for example, only when the holding force becomes zero).
  • the notification control unit 38 may not output all of the warning sound, the first notification sound, and the second notification sound. However, even when the holding power increases due to the switching of the connection state, the notification control unit 38 has at least one of the warning sound, the first notification sound, and the second notification sound (for example, the holding power). Only the second notification sound indicating the completion of the change) may be output.
  • the switching control unit 36 controls the switching mechanism 14 immediately after the operation by the operator without waiting for the lapse of the first predetermined time from the operation by the operator.
  • the holding force of the holding portion 20 may be changed.
  • the operation of the vacuum pressure supply system 10 becomes quick. In this case, the warning sound is not notified.
  • step S3 is excluded in the operation procedure shown in FIGS. 2 and 4. That is, the notification control unit 38 outputs a warning sound before this switching (step S4) (step S2).
  • the switching control unit 36 switches the connection state between the vacuum source 12 and the plurality of vacuum pressure supply paths 16 after the lapse of the first predetermined time from the start of the output of the warning sound (YES in step S3) (step S4).
  • the notification control unit 38 After the lapse of the first predetermined time from the start of the output of the warning sound (when the vacuum pressure supply path 16 is switched or immediately after that), the notification control unit 38 outputs the first notification sound from the notification unit 32 (step S5). .. After that, in the case of the embodiment (FIG. 2), after the first predetermined time has elapsed and the second predetermined time has elapsed (YES in step S6), the notification control unit 38 outputs the second notification sound. (Step S7). In the case of the modification 1 (FIG. 4), the notification control unit 38 outputs a second notification sound when it is determined that the change of the holding force is completed regardless of the passage of time (YES in step S16). (Step S7). In this way, starting from the start of output of the warning sound, the notification control unit 38 switches the connection state, and the notification control unit 38 outputs the first notification sound (and the second notification sound).
  • the switching control unit 36 sets the holding force of the holding unit 20 to zero by not connecting any of the plurality of vacuum pressure supply paths 16 to the vacuum source 12, but the switching control unit 36 has selected.
  • the holding force may be set to zero by connecting the vacuum pressure supply path 16 to the vacuum source 12. That is, the throttle valve 22 of the specific vacuum pressure supply path 16 is closed, and the switching control unit 36 connects the vacuum pressure supply path 16 to the vacuum source 12. By doing so, the holding force can be set to zero without disconnecting all of the plurality of vacuum pressure supply paths 16.
  • the vacuum pressure supply system (10) has a plurality of vacuum pressures for supplying the vacuum pressure from the vacuum source (12) to the holding portion (20) that holds the object using the vacuum pressure.
  • the pressure adjusting mechanism (18) that adjusts the pressure in the plurality of vacuum pressure supply paths so that the holding force for holding the object is different from each other, and the holding force of the holding portion.
  • a switching mechanism (14) for switching a connection state between the vacuum source and the plurality of vacuum pressure supply paths. The switching mechanism switches the connection state by selecting one of the vacuum pressure supply paths and connecting the vacuum pressure source to the vacuum source.
  • the holding force of the holding portion can be changed by switching the connection state between the vacuum source and the plurality of vacuum pressure supply paths. That is, the holding force can be changed without using a plurality of vacuum sources.
  • the switching mechanism switches the connection state so that the plurality of vacuum pressure supply paths are not connected to the vacuum source.
  • the holding force of the holding portion can be reduced to zero by preventing the plurality of vacuum pressure supply paths from being connected to the vacuum source.
  • the vacuum pressure supply system has a switching control unit (36) that controls the switching mechanism to switch the connection state in order to change the holding force of the holding unit, and before the connection state is switched.
  • a notification control unit (38) for notifying the notification that the holding force is changed from the notification unit (32) is provided. As a result, the operator can be alerted by notifying in advance that the holding force will be changed.
  • the notification control unit notifies the notification unit that the holding force has changed due to the switching of the connection state. As a result, the operator can grasp that the holding force has changed by receiving the notification of the holding force change.
  • the notification control unit notifies the notification unit that the holding force is changed only when the holding force is reduced by switching the connection state. As a result, the operator can be alerted only when the holding force is reduced.
  • the operator includes an operation unit (30) for performing an operation for changing the holding force, and the switching control unit controls the switching mechanism according to an operation performed by the operator. This makes it possible to change the holding force of the holding portion by the operation of the operator.
  • the notification unit is a speaker
  • the switching control unit switches the connection state after a first predetermined time has elapsed from the operation by the operator
  • the notification control unit switches the connection state after the first predetermined time has elapsed from the operation by the operator.
  • the notification sound for notifying that the holding force is changed is output from the notification unit
  • the notification sound for notifying that the holding force has changed is output after the lapse of the first predetermined time. Output from the notification unit.
  • the notification control unit outputs the warning sound and the notification sound in different modes. This makes it easier for the operator to distinguish between the warning sound and the notification sound, and it becomes possible to more reliably grasp the progress of the holding force change.
  • the notification control unit When the first predetermined time has elapsed from the operation by the operator, the notification control unit outputs a first notification sound notifying that the holding force is being changed, and then the holding force is changed. A second notification sound is output to notify the completion. Thereby, the operator can grasp the change state of the holding force in more detail by the first notification sound and the second notification sound.
  • the notification control unit outputs the first notification sound and the second notification sound in different modes. This makes it easier for the operator to distinguish between the first notification sound and the second notification sound, and it becomes possible to more reliably grasp the transition of the change completion while the holding force is being changed.
  • the vacuum pressure supply system includes a pressure detecting unit (40) that detects the suction pressure of the holding unit, and the notification control unit changes the holding force based on the detection signal of the pressure detecting unit. Determine if it is complete. Thereby, by detecting the suction pressure of the holding portion, it is possible to more reliably determine whether or not the change of the holding force is completed.
  • the pressure adjusting mechanism has a plurality of throttle valves (22) provided in the plurality of vacuum pressure supply paths. This makes it possible to use a plurality of throttle valves to adjust the pressure in the plurality of vacuum pressure supply paths so that the holding forces for holding the object are different from each other.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2021/026061 2020-07-17 2021-07-12 真空圧供給システム Ceased WO2022014509A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US18/005,539 US20230278173A1 (en) 2020-07-17 2021-07-12 Vacuum pressure supply system
JP2022536335A JPWO2022014509A1 (https=) 2020-07-17 2021-07-12
CN202180060308.3A CN116157230A (zh) 2020-07-17 2021-07-12 真空压供给系统
DE112021003831.1T DE112021003831T5 (de) 2020-07-17 2021-07-12 Unterdruckversorgungssystem

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Application Number Priority Date Filing Date Title
JP2020122819 2020-07-17
JP2020-122819 2020-07-17

Publications (1)

Publication Number Publication Date
WO2022014509A1 true WO2022014509A1 (ja) 2022-01-20

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JP (1) JPWO2022014509A1 (https=)
CN (1) CN116157230A (https=)
DE (1) DE112021003831T5 (https=)
WO (1) WO2022014509A1 (https=)

Citations (7)

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Publication number Priority date Publication date Assignee Title
JPH04199655A (ja) * 1990-11-29 1992-07-20 Canon Inc 真空吸着基板保持装置の真空配管
JPH06151561A (ja) * 1992-11-10 1994-05-31 Canon Inc 基板保持装置、並びにこれを用いた露光装置と半導体デバイス製造方法
JP2000252187A (ja) * 1999-02-26 2000-09-14 Dainippon Screen Mfg Co Ltd 基板保持装置およびそれを用いた基板処理装置
JP2002343852A (ja) * 2001-05-16 2002-11-29 Canon Inc 基板保持装置、基板保持方法、露光装置およびデバイス製造方法
JP2010040847A (ja) * 2008-08-06 2010-02-18 Nikon Corp 露光装置、露光システム及び露光方法並びにデバイス製造方法
JP2010140978A (ja) * 2008-12-10 2010-06-24 Hitachi Kokusai Electric Inc 基板処理装置
JP2011163451A (ja) * 2010-02-10 2011-08-25 Murata Mfg Co Ltd 真空度切替方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6896929B2 (en) * 2001-08-03 2005-05-24 Applied Materials, Inc. Susceptor shaft vacuum pumping
JP2006229027A (ja) 2005-02-18 2006-08-31 Disco Abrasive Syst Ltd ウェハ搬送装置
TWI656082B (zh) * 2018-06-11 2019-04-11 旭騰股份有限公司 電動吸盤

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04199655A (ja) * 1990-11-29 1992-07-20 Canon Inc 真空吸着基板保持装置の真空配管
JPH06151561A (ja) * 1992-11-10 1994-05-31 Canon Inc 基板保持装置、並びにこれを用いた露光装置と半導体デバイス製造方法
JP2000252187A (ja) * 1999-02-26 2000-09-14 Dainippon Screen Mfg Co Ltd 基板保持装置およびそれを用いた基板処理装置
JP2002343852A (ja) * 2001-05-16 2002-11-29 Canon Inc 基板保持装置、基板保持方法、露光装置およびデバイス製造方法
JP2010040847A (ja) * 2008-08-06 2010-02-18 Nikon Corp 露光装置、露光システム及び露光方法並びにデバイス製造方法
JP2010140978A (ja) * 2008-12-10 2010-06-24 Hitachi Kokusai Electric Inc 基板処理装置
JP2011163451A (ja) * 2010-02-10 2011-08-25 Murata Mfg Co Ltd 真空度切替方法

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CN116157230A (zh) 2023-05-23
US20230278173A1 (en) 2023-09-07
DE112021003831T5 (de) 2023-05-04
JPWO2022014509A1 (https=) 2022-01-20

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