WO2021206019A1 - 多層基板およびその製造方法 - Google Patents

多層基板およびその製造方法 Download PDF

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Publication number
WO2021206019A1
WO2021206019A1 PCT/JP2021/014329 JP2021014329W WO2021206019A1 WO 2021206019 A1 WO2021206019 A1 WO 2021206019A1 JP 2021014329 W JP2021014329 W JP 2021014329W WO 2021206019 A1 WO2021206019 A1 WO 2021206019A1
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WO
WIPO (PCT)
Prior art keywords
electrode
insulating layer
internal electrode
interlayer
back side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/014329
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English (en)
French (fr)
Japanese (ja)
Inventor
恒亮 西尾
和也 宗田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202190000370.9U priority Critical patent/CN218587412U/zh
Priority to JP2022514044A priority patent/JP7294530B2/ja
Publication of WO2021206019A1 publication Critical patent/WO2021206019A1/ja
Priority to US17/897,747 priority patent/US12063738B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4632—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating thermoplastic or uncured resin sheets comprising printed circuits without added adhesive materials between the sheets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298—Multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0237—High frequency adaptations
    • H05K1/025—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0237—High frequency adaptations
    • H05K1/024—Dielectric details, e.g. changing the dielectric material around a transmission line
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0141—Liquid crystal polymer [LCP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/015—Fluoropolymer, e.g. polytetrafluoroethylene [PTFE]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0183—Dielectric layers
    • H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure

Definitions

  • the present invention relates to a multilayer substrate and a method for manufacturing the same.
  • the pitch of the second conductor pad is determined in the first conductor pad and the second conductor pad formed on the first surface and the second surface of the laminate in which the conductor and the resin insulator are laminated.
  • a printed wiring board larger than the pitch of the first conductor pad is disclosed.
  • a via conductor whose diameter is reduced from the first surface side to the second surface side is provided so as to penetrate the resin insulator.
  • Patent Document 2 describes an interlayer connection that penetrates between an insulating substrate in which a plurality of insulating layers are laminated, a wiring circuit layer formed on the surface and inside of the insulating substrate, and wiring circuit layers located above and below the insulating layer.
  • a multilayer wiring board including a conductor is disclosed. The size of the plurality of interlayer connection conductors gradually decreases from the terminal pad side to the electric element connection pad side.
  • JP-A-2018-32659 Japanese Unexamined Patent Publication No. 2005-72228
  • Patent Document 1 an internal electrode arranged on the first surface side (internal side) of a via conductor (hereinafter referred to as an interlayer connecting conductor) and a second conductor pad (hereinafter referred to as an interlayer connecting conductor) arranged on the second surface side (front side).
  • an interlayer connecting conductor a via conductor
  • an interlayer connecting conductor a second conductor pad
  • the overall shape of both the surface electrode and the internal electrode is unknown because there is no description regarding the direction perpendicular to the paper surface.
  • the wiring circuit layer (hereinafter referred to as a surface electrode) located on the front side of the insulating substrate is arranged on the large diameter side of the via conductor (hereinafter referred to as the interlayer connecting conductor) and is located on the inner side of the insulating substrate.
  • a wiring circuit layer (hereinafter referred to as an internal electrode) is arranged on the small diameter side of the interlayer connecting conductor.
  • the interlayer connecting conductor is configured to gradually increase in diameter from the inner side to the front side, it is difficult to make the surface electrode smaller.
  • a surface electrode located on the front side of the laminate and an internal electrode located on the inner side of the laminate are electrically connected via an interlayer connecting conductor. Is connected. Since the surface electrode is located at a position overlapping the internal electrode when viewed from the stacking direction of the laminated body, a capacitance is formed between the surface electrode and the internal electrode. As the multilayer board becomes smaller and thinner, the distance between the surface electrode and the internal electrode becomes narrower, so that the capacitance formed increases.
  • An object of the present invention is to provide a multilayer substrate that suppresses the formation of unnecessary capacitance and a method for manufacturing the same.
  • the multilayer substrate according to one aspect of the present invention is A laminate in which a plurality of insulating layers are laminated in the stacking direction, Among the insulating layers, a surface electrode provided on the front side of the first insulating layer located on the front side of the laminated body and The first internal electrode provided on the back side of the first insulating layer and A multilayer substrate comprising a first interlayer connection conductor that penetrates the first insulating layer in the stacking direction and electrically connects the surface electrode and the first internal electrode.
  • the first interlayer connection conductor has a front side connecting surface electrically connected to the surface electrode and a back side connecting surface electrically connected to the first internal electrode.
  • the outer shape of the front side connecting surface of the first interlayer connecting conductor fits in the outer shape of the back side connecting surface of the first interlayer connecting conductor.
  • the surface electrode has a shape that covers the front side connecting surface of the first interlayer connecting conductor, and the first internal electrode has a shape that covers the back side connecting surface of the first interlayer connecting conductor.
  • the surface electrode is characterized by having an electrode structure that is smaller than the first internal electrode and fits within the outer edge of the first internal electrode when viewed from the stacking direction.
  • the region of the surface electrode covering the front side connecting surface of the first interlayer connecting conductor is smaller than the region of the first internal electrode covering the back side connecting surface of the first interlayer connecting conductor, so that the surface electrode and the first 1 The capacitance formed between the internal electrodes can be suppressed.
  • FIG. 1 It is a figure which shows typically the resin multilayer substrate which concerns on 1st Embodiment.
  • A is a cross-sectional view of a resin multilayer substrate
  • B is a plan view of a conductive layer. It is a figure explaining the relationship between a signal line and an internal electrode in a conductive layer.
  • A) is a case where the signal line is configured to be narrower than the internal electrode
  • (B) is a case where the signal line is configured to be wider than the internal electrode.
  • FIG. It is a top view of the resin multilayer substrate shown in FIG. It is sectional drawing which shows typically the resin multilayer substrate which concerns on 4th Embodiment. It is sectional drawing which shows typically the resin multilayer substrate which concerns on 5th Embodiment. It is sectional drawing which shows typically the resin multilayer substrate which concerns on 6th Embodiment. It is sectional drawing which shows typically the resin multilayer substrate which concerns on 7th Embodiment. It is a figure explaining the manufacturing method of a resin multilayer substrate.
  • each figure shows an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other.
  • the X-axis direction is the direction in which the terminal 5 of the electronic component 4 mounted on the resin multilayer substrate 1 extends.
  • the Y-axis direction is a direction orthogonal to the X-axis.
  • the Z-axis direction is the stacking direction of the laminated body 2 on the resin multilayer substrate 1.
  • the "front side” is the side where the surface electrode 7 is formed in the laminated body 2
  • the "back side” is the side where the surface electrode 7 is formed in the laminated body 2. It is the opposite side, and is the side on which the back surface electrode 9 is formed in the laminated body 2.
  • FIG. 1 is a diagram schematically showing a resin multilayer substrate 1 according to the first embodiment.
  • (A) is a cross-sectional view of the resin multilayer substrate 1
  • (B) is a plan view of the conductive layer 20.
  • FIG. 2 is a diagram illustrating the relationship between the signal line 22 and the internal electrode 24 in the conductive layer 20.
  • (A) is a case where the signal line 22 is configured to be narrower than the internal electrode 24, and
  • (B) is a case where the signal line 22 is configured to be wider than the internal electrode 24.
  • FIG. 3 is a diagram illustrating an electrode structure 3 in the resin multilayer substrate 1.
  • the resin multilayer substrate 1 acts as a multilayer substrate in which a plurality of insulating layers 10 and a conductive layer 20 are laminated, and for example, a plurality of resin layers 10 are stacked in the stacking direction Z. Includes laminate 2.
  • the first resin layer 10a of the plurality of resin layers 10 is arranged on the front side of the laminated body 2.
  • the first resin layer 10a functions as a first insulating layer having electrical insulation.
  • the second resin layer 10b is arranged adjacent to the first resin layer 10a.
  • the second resin layer 10b functions as a second insulating layer having electrical insulation.
  • the third resin layer 10c is arranged adjacent to the second resin layer 10b.
  • the third resin layer 10c functions as a third insulating layer having electrical insulation. Therefore, in the laminated body 2 illustrated in FIG. 1, three resin layers 10, that is, the first resin layer 10a, the second resin layer 10b, and the third resin layer 10c are stacked in the stacking direction Z.
  • the resin layer 10 functions as an insulating layer having an electrically insulating property, and the main material is a thermoplastic resin.
  • the thermoplastic resin is an LCP resin (liquid crystal polymer resin), a PEEK resin (polyether ether ketone), or a PEI resin (poly). Etherimide), PPS resin (poniferen sulfide), thermoplastic PI resin (polykimide) and the like.
  • the resin layer 10 is an LCP resin.
  • a resin multilayer substrate having excellent high frequency characteristics can be obtained.
  • the laminated body 2 includes a conductive layer 20 appropriately arranged on the surface and inside thereof.
  • the conductive layer 20 extends in a plane direction orthogonal to the stacking direction Z of the laminated body 2.
  • the conductive layer 20 is formed as a conductive wiring pattern, and is a metal foil, for example, a copper foil.
  • a surface electrode 7 as a conductive layer 20 is formed on the front surface of the laminate 2, that is, the front surface of the first resin layer 10a.
  • the terminal 5 of the electronic component 4 is bonded to the surface electrode 7 via a conductive bonding material (for example, solder) (not shown), and is electrically connected to the surface electrode 7. Therefore, the surface electrode 7 acts as a mounting electrode for mounting the electronic component 4.
  • the surface electrode 7 has, for example, a circular shape when viewed from the stacking direction Z.
  • the electronic component 4 is, for example, a connector having a plurality of terminals 5.
  • the tip portion 5a of the terminal 5 of the electronic component 4 is contained within the outer edge of the surface electrode 7 when viewed from the stacking direction Z.
  • the tip portion 5a of the terminal 5 is configured so as not to protrude from the surface electrode 7 when viewed from the stacking direction Z.
  • the capacitance formed between the terminal 5 of the electronic component 4 and the first internal electrode 24a can be suppressed.
  • a conductive layer 20 extending in a plane direction orthogonal to the stacking direction Z is provided inside the laminated body 2, that is, between the first resin layer 10a and the second resin layer 10b.
  • the conductive layer 20 has a first internal electrode 24a as an internal electrode 24 and a signal line 22 communicating with the first internal electrode 24a.
  • the first internal electrode 24a has, for example, a circular shape
  • the signal line 22 has, for example, a rectangular shape.
  • the first internal electrode 24a and the signal line 22 extend in the plane direction orthogonal to the stacking direction Z.
  • the signal line 22 extends so as not to overlap the terminal 5 of the electronic component 4 when viewed from the stacking direction Z. As a result, the capacitance formed between the terminal 5 of the electronic component 4 and the signal line 22 can be suppressed.
  • the internal electrode 24 extends in the radial direction from the conductor center P of the interlayer connecting conductor 14 (indicated by a broken line circle) and has the shortest line segment R connected to the signal line 22 as the radius. It can be defined as an area surrounded by a virtual circle Q.
  • FIG. 2A shows a case where the signal line 22 is configured to be narrower than the internal electrode 24 and the virtual circle Q intersects the signal line 22. The boundary between the region of the signal line 22 and the region of the internal electrode 24 is shown by a broken line.
  • FIG. 2B shows a case where the signal line 22 is wider than the internal electrode 24 and the virtual circle Q is in contact with the signal line 22.
  • the first interlayer connecting conductor 14a extends in the stacking direction Z so as to penetrate the first resin layer 10a.
  • the first interlayer connecting conductor 14a functions as an interlayer connecting conductor 14 and is also called a via conductor, and electrically connects the surface electrode 7 and the first internal electrode 24a.
  • the first interlayer connection conductor 14a is formed by solidifying the resin of the conductive paste filled in the interlayer connection hole 12 formed in the first resin layer 10a.
  • the conductive paste is a paste containing a low melting point metal such as tin and a resin.
  • the surface electrode 7 and the internal electrode 24 such as the first internal electrode 24a are, for example, a metal foil as the conductive layer 20, whereas the interlayer connecting conductor 14 such as the first interlayer connecting conductor 14a has a low melting point, for example. Metal and resin. Therefore, the surface electrode 7 and the internal electrode 24 and the interlayer connecting conductor 14 can be distinguished by observing the cross-sectional structure with a microscope (for example, an electron microscope). Further, even when the interlayer connecting conductor 14 is formed by plating, the surface electrode 7 and the internal electrode 24 can be similarly distinguished from the interlayer connecting conductor 14.
  • the first interlayer connection conductor 14a has a tapered shape in which the diameter is reduced from the inner side (back side) of the first resin layer 10a toward the front side in the stacking direction Z.
  • the first interlayer connection conductor 14a is located on the front side and is electrically connected to the surface electrode 7 on the front side connecting surface 14x, and is located on the opposite side (back side) of the front side connecting surface 14x and is electrically connected to the first internal electrode 24a. It has a back side connecting surface 14y to be connected.
  • the front side connecting surface 14x and the back side connecting surface 14y have, for example, a circular shape, respectively.
  • the outer shape of the front side connecting surface 14x of the first interlayer connecting conductor 14a is within the outer shape of the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • the length of the front side connecting surface 14x in the X-axis direction and the length in the Y-axis direction are shorter than those of the back side connecting surface 14y, respectively.
  • the first interlayer connecting conductor 14a has a trapezoidal shape in a cross-sectional view, the front side connecting surface 14x corresponds to the short side of the trapezoid, and the back side connecting surface 14y corresponds to the long side of the trapezoid.
  • the area of the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the area of the back side connecting surface 14y.
  • the laminated body 2 of the resin multilayer substrate 1 is an electrode in which the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z. It has a structure 3.
  • the electrode structure 3 is a structure formed between the surface electrode 7, the first internal electrode 24a, and the first interlayer connecting conductor 14a.
  • the surface electrode 7, the first internal electrode 24a, the front side connecting surface 14x, and the back side connecting surface 14y are substantially concentric circles centered on the conductor center P of the first interlayer connecting conductor 14a. There is a relationship.
  • the term "generally concentric circles" in this specification is intended to include an eccentric configuration in which the centers are slightly deviated from each other, in addition to a concentric configuration in which the centers are aligned with each other.
  • the surface electrode 7 Seen from the stacking direction Z, the surface electrode 7 has a shape that covers the front side connecting surface 14x, for example, a shape similar to the front side connecting surface 14x, for example, a circular shape, and is more than the first internal electrode 24a. It has a small diameter.
  • the surface electrode 7 has a reduced diameter overhanging portion 7p that juts out radially outward with respect to the front side connecting surface 14x.
  • the surface electrode 7 has a diameter larger than that of the front connecting surface 14x.
  • the reduced-diameter overhanging portion 7p has, for example, an annular shape, and is used as a first tolerance for aligning the surface electrode 7 with the front connecting surface 14x when forming the surface electrode 7 in the first resin layer 10a. work.
  • the term "circular shape" in this specification includes not only a perfect circle but also a circular shape such as an elliptical shape, an egg shape, or an oval shape.
  • the first internal electrode 24a When viewed from the stacking direction Z, the first internal electrode 24a has a shape that covers the back side connecting surface 14y, for example, a shape similar to the back side connecting surface 14y, for example, a circular shape, and is more than the surface electrode 7. It has a large diameter.
  • the first internal electrode 24a has a diameter-expanded overhanging portion 24p that projects outward in the radial direction with respect to the back side connecting surface 14y.
  • the first internal electrode 24a has a diameter larger than that of the back side connecting surface 14y.
  • the enlarged diameter overhanging portion 24p has, for example, an annular shape, and when a plurality of resin layers 10 are laminated to form the laminated body 2, the first internal electrode 24a is aligned with the back side connecting surface 14y.
  • the second tolerance of is a plurality of resin layers 10 are laminated to form the laminated body 2
  • the first tolerance is related to the patterning accuracy when forming the surface electrode 7, and therefore does not require a large tolerance.
  • the second tolerance is related to the stacking accuracy when laminating the resin layer 10, and therefore requires a large tolerance. Therefore, the radial dimension of the first tolerance, that is, the reduced diameter overhanging portion 7p can be made smaller than the second tolerance, that is, the radial dimension of the enlarged diameter overhanging portion 24p.
  • the front side connecting surface 14x has a smaller diameter than the back side connecting surface 14y, and the reduced diameter overhanging portion 7p has a smaller diameter than the enlarged diameter overhanging portion 24p.
  • the surface electrode 7 in which the front side connecting surface 14x and the diameter-reduced overhanging portion 7p are combined can have a smaller diameter than the first internal electrode 24a in which the back-side connecting surface 14y and the enlarged-diameter overhanging portion 24p are combined.
  • the region of the surface electrode 7 projecting from the front side connecting surface 14x of the first interlayer connecting conductor 14a that is, the radial width of the reduced diameter overhanging portion 7p
  • the surface electrode 7 is smaller than the first internal electrode 24a and is inside the first interior when viewed from the stacking direction Z.
  • the electrode structure 3 is configured so that it fits within the outer edge of the electrode 24a. According to this configuration, the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the first internal electrode 24a covering the back side connecting surface 14y of the first interlayer connecting conductor 14a. Therefore, the capacitance formed between the surface electrode 7 and the first internal electrode 24a can be suppressed. Further, according to the configuration, the capacitance between the terminals formed between the plurality of terminals 5 in the electronic component 4 mounted on the surface electrode 7 can be reduced, and the pitch of the electronic component 4 can be narrowed or downsized. Can also be supported.
  • FIG. 4 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the second embodiment.
  • the second resin layer 10b includes a tapered second interlayer connecting conductor 14b, and the second internal electrode 24b is electrically connected to the back side connecting surface 14y of the tapered second interlayer connecting conductor 14b.
  • the surface electrode 7 is characterized in that it fits within the outer edge of the second internal electrode 24b.
  • the resin multilayer substrate 1 penetrates the second internal electrode 24b provided on the back side of the second resin layer 10b and the second resin layer 10b in the stacking direction Z, and the first internal electrode 24a and the second inside.
  • a second interlayer connecting conductor 14b for electrically connecting the electrodes 24b is provided.
  • the first interlayer connecting conductor 14a of the first resin layer 10a and the second interlayer connecting conductor 14b of the second resin layer 10b are arranged in series in the stacking direction Z, and overlap with each other substantially in a straight line when viewed from the stacking direction Z. In position.
  • the wording in this specification that the centers are roughly straight when viewed from the stacking direction Z means that the centers of each other are on a straight line when viewed from the stacking direction Z, and the centers of each other are slightly deviated from each other when viewed from the stacking direction Z. It is intended to include the configuration as well.
  • the second interlayer connecting conductor 14b functions as an interlayer connecting conductor 14, and has, for example, a tapered shape in which the diameter is reduced from the inner side (back side) of the second resin layer 10b toward the front side.
  • the second interlayer connection conductor 14b is located on the front side and is electrically connected to the first internal electrode 24a.
  • the front side connecting surface 14x and the second internal electrode located on the opposite side (back side) of the front side connecting surface 14x. It has a back side connecting surface 14y that is electrically connected to 24b.
  • the front side connecting surface 14x and the back side connecting surface 14y of the second interlayer connecting conductor 14b have, for example, a circular shape, respectively.
  • the outer shape of the front side connecting surface 14x of the second interlayer connecting conductor 14b is within the outer shape of the back side connecting surface 14y of the second interlayer connecting conductor 14b.
  • the length of the front side connecting surface 14x in the X-axis direction and the length in the Y-axis direction are shorter than those of the back side connecting surface 14y, respectively.
  • the second interlayer connecting conductor 14b has a trapezoidal shape in cross-sectional view, the front side connecting surface 14x corresponds to the short side of the trapezoid, and the back side connecting surface 14y corresponds to the long side of the trapezoid.
  • the area of the front side connecting surface 14x of the second interlayer connecting conductor 14b is smaller than the area of the back side connecting surface 14y.
  • the first internal electrode 24a When viewed from the stacking direction Z, the first internal electrode 24a has, for example, a circular shape as described above, and the second internal electrode 24b has a shape that covers the back side connecting surface 14y of the second interlayer connecting conductor 14b.
  • the shape is similar to, for example, the back side connecting surface 14y of the second interlayer connecting conductor 14b, and more specifically, it has a circular shape, for example. Since the second internal electrode 24b has substantially the same shape as the first internal electrode 24a and corresponds to the back side connecting surface 14y of the second interlayer connecting conductor 14b, the region of the second internal electrode 24b is formed. , Larger than the region of the surface electrode 7.
  • the first interlayer connecting conductor 14a and the second interlayer connecting conductor 14b are located at positions where they overlap with each other in a substantially straight line when viewed from the stacking direction Z, and the region of the surface electrode 7 is located from the second internal electrode 24b when viewed from the stacking direction Z. Is also small and fits within the outer edge of the region of the second internal electrode 24b. Therefore, the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the second internal electrode 24b covering the back side connecting surface 14y of the second interlayer connecting conductor 14b, so that the surface electrode The capacitance formed between the 7 and the second internal electrode 24b can be suppressed.
  • FIG. 5 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the third embodiment.
  • FIG. 6 is a plan view of the resin multilayer substrate 1 shown in FIG.
  • the third embodiment is characterized in that a protective layer 31 is provided to cover the front surface of the first resin layer 10a.
  • a protective layer 31 is provided on the front side of the first resin layer 10a.
  • the protective layer 31 is, for example, an electrically insulating coverlay film or a solder resist film.
  • the protective layer 31 has an opening 32 for covering the front surface of the first resin layer 10a and exposing a part of the surface electrode 7.
  • the opening 32 extends in the Y-axis direction, which is the arrangement direction of the plurality of surface electrodes 7, and is provided so as to partially open the surface electrodes 7.
  • the terminal 5 of the electronic component 4 is bonded to the surface electrode 7 exposed from the opening 32 via a conductive bonding material 8 such as solder, and is electrically connected to the surface electrode 7.
  • the protective layer 31 covers the arc portions on one side and the other side of the surface electrode 7, and the surface electrode 7 having an oval shape, for example, is exposed. do. Therefore, the region of the surface electrode 7 becomes smaller. As a result, the capacitance formed between the surface electrode 7 and the terminal 5 can be suppressed.
  • the surface electrode 7 may have a rectangular shape.
  • the protective layer 31 is not formed between the adjacent terminals 5 and 5. As a result, the capacitance formed between the adjacent terminals 5 can be suppressed.
  • FIG. 7 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the fourth embodiment.
  • the electrode structure 3 is provided on the front side of the laminated body 2 so that the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z. Both are characterized in that the back surface electrode 9 is contained within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the resin multilayer substrate 1 includes a second interlayer connecting conductor 14b and a third interlayer connecting conductor 14c that acts as a backside interlayer connecting conductor.
  • the first interlayer connecting conductor 14a, the second interlayer connecting conductor 14b, and the third interlayer connecting conductor 14c are arranged in series in the stacking direction Z, and are located at positions where they overlap substantially in a straight line when viewed from the stacking direction Z.
  • the second interlayer connecting conductor 14b penetrates the second resin layer 10b acting as a certain resin layer (a certain insulating layer) in the stacking direction Z, and has a reduced diameter from the inner side (back side) of the laminated body 2 toward the front side. It has a tapered shape.
  • the second interlayer connection conductor 14b functions as a certain interlayer connection conductor, and is located on the front side and is electrically connected to the first internal electrode 24a.
  • the front side connecting surface 14x and the back side connecting surface 14y of the second interlayer connecting conductor 14b When viewed from the stacking direction Z, the front side connecting surface 14x and the back side connecting surface 14y of the second interlayer connecting conductor 14b have, for example, a circular shape, respectively.
  • the outer shape of the front side connecting surface 14x of the second interlayer connecting conductor 14b is within the outer shape of the back side connecting surface 14y of the second interlayer connecting conductor 14b.
  • the length of the front side connecting surface 14x in the X-axis direction and the length in the Y-axis direction are shorter than those of the back side connecting surface 14y.
  • the second interlayer connecting conductor 14b has a trapezoidal shape in a cross-sectional view
  • the front side connecting surface 14x corresponds to the short side of the trapezoid
  • the back side connecting surface 14y corresponds to the long side of the trapezoid.
  • the area of the front side connecting surface 14x of the second interlayer connecting conductor 14b is smaller than the area of the back side connecting surface 14y.
  • the third interlayer connection conductor 14c penetrates the third resin layer 10c acting as another resin layer (another insulating layer) and the back side resin layer (back side insulating layer) in the stacking direction Z, and penetrates the inner side of the laminated body 2 (the third interlayer connecting conductor 14c). It has a tapered shape with a diameter reduced from the back side) to the back side.
  • the third interlayer connection conductor 14c functions as another interlayer connection conductor and a backside interlayer connection conductor, and is opposite to the front side connection surface 14x located on the back surface side and electrically connected to the front surface electrode 7 and the front side connection surface 14x. It has a back side connecting surface 14y located on the side (back side).
  • the front side connecting surface 14x and the back side connecting surface 14y of the third interlayer connecting conductor 14c When viewed from the stacking direction Z, the front side connecting surface 14x and the back side connecting surface 14y of the third interlayer connecting conductor 14c have, for example, a circular shape, respectively.
  • the outer shape of the front side connecting surface 14x of the third interlayer connecting conductor 14c is within the outer shape of the back side connecting surface 14y of the third interlayer connecting conductor 14c.
  • the length of the front side connecting surface 14x in the X-axis direction and the length in the Y-axis direction are shorter than those of the back side connecting surface 14y.
  • the third interlayer connecting conductor 14c has an inverted trapezoidal shape in cross-sectional view, the front side connecting surface 14x corresponds to the short side of the trapezoid, and the back side connecting surface 14y corresponds to the long side of the trapezoid. Furthermore, the area of the front side connecting surface 14x of the third interlayer connecting conductor 14c is smaller than the area of the back side connecting surface 14y.
  • the second interlayer connecting conductor 14b acting as a certain interlayer connecting conductor and the third interlayer connecting conductor 14c acting as another interlayer connecting conductor and the backside interlayer connecting conductor form a connecting structure in which they are joined in series in the stacking direction Z. There is.
  • the back side connecting surface 14y of the second interlayer connecting conductor 14b and the back side connecting surface 14y of the third interlayer connecting conductor 14c are directly joined and electrically connected.
  • the back side connecting surface 14y of one interlayer connecting conductor 14b and the front connecting surface 14x of another interlayer connecting conductor 14c, which have a large bonding region, are joined to each other, so that the second interlayer connecting conductor 14b and the third interlayer connecting conductor 14b are joined.
  • the bond with 14c is stable.
  • the second interlayer connecting conductor 14b and the third interlayer connecting conductor 14c are electrically connected without the internal electrode 24.
  • the back surface electrode 9 as the conductive layer 20 is formed on the back surface of the laminate 2, that is, the back surface of the third resin layer 10c.
  • the terminal 5 of the electronic component 4 is bonded to the back surface electrode 9 via a conductive bonding material (not shown), and is electrically connected to the back surface electrode 9. Therefore, the back surface electrode 9 formed on the back surface of the third resin layer 10c functions as a mounting electrode for mounting the electronic component 4.
  • the back electrode 9 on the back side has, for example, a circular shape when viewed from the stacking direction Z.
  • the electronic component 4 mounted on the back side is, for example, an IC chip. Therefore, the resin multilayer substrate 1 according to the fourth embodiment can be mounted on both the front side and the back side.
  • the first internal electrode 24a has, for example, a circular shape as described above, and the back electrode 9 on the back side has a shape that covers the front side connecting surface 14x of the third interlayer connecting conductor 14c. It has a shape similar to, for example, the front side connecting surface 14x, and more specifically, a circular shape, for example.
  • the back surface electrode 9 on the back side has substantially the same shape as the front surface electrode 7 on the front side.
  • the first interlayer connection conductor 14a, the second interlayer connection conductor 14b, and the third interlayer connection conductor 14c are positioned so as to be substantially aligned with each other when viewed from the stacking direction Z, and the region of the front surface electrode 7 on the front side and the back surface electrode 9 on the back side are located. Is within the outer edge of the region of the first internal electrode 24a when viewed from the stacking direction Z. Then, in addition to the electrode structure 3 in which the front surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z, the back surface electrode 9 is viewed from the stacking direction Z. It is contained within the outer edge of the first internal electrode 24a.
  • the formed capacitance can be suppressed respectively.
  • FIG. 8 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the fifth embodiment.
  • a fifth embodiment is characterized in that a ground surface electrode 7b is arranged between adjacent signal surface electrodes 7a and 7a.
  • a plurality of surface electrodes 7 are provided on the front side of the first resin layer 10a, and the plurality of surface electrodes 7 are configured as a signal surface electrode 7a and a ground surface electrode 7b, and are adjacent to each other.
  • a ground surface electrode 7b is arranged between the matching signal surface electrodes 7a and 7a.
  • the electrode structure 3 is applied in which the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the ground surface electrode 7b may have a structure in which the ground surface electrode 7b has substantially the same shape as the first internal electrode 24a when viewed from the stacking direction Z. In this case, the adhesion strength of the ground surface electrode 7b to the front surface of the first resin layer 10a can be increased, and the connection strength between the electronic component 4 and the resin multilayer substrate 1 can be increased.
  • the area of the ground surface electrode 7b is larger than the area of the signal surface electrode 7a.
  • the adhesion strength of the ground surface electrode 7b to the front surface of the first resin layer 10a can be increased, and the connection strength between the electronic component 4 and the resin multilayer substrate 1 can be increased.
  • an electrode structure 3 in which the ground surface electrode 7b is contained within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z can also be applied. In this case, the capacitance formed between the signal surface electrode 7a and the ground surface electrode 7b can be suppressed.
  • FIG. 9 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the sixth embodiment.
  • the electrode structure 3 is provided on the front side of the laminated body 2 so that the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the ground electrode layer 27 is provided on the back side of the laminated body 2.
  • the resin multilayer substrate 1 has a third internal electrode 24c electrically connected to the third interlayer connecting conductor 14c and a fourth resin layer (third resin layer) in comparison with the fourth embodiment shown in FIG. 4 Insulation layer) 10d and a ground electrode layer 27 provided on the back surface of the fourth resin layer 10d (the surface on the back side of the laminate 2) are further provided.
  • the third interlayer connection conductor 14c has a tapered shape in which the diameter of the third resin layer 10c is reduced from the inner side (front side) to the back side of the laminated body 2 by penetrating the third resin layer 10c in the stacking direction Z, and is located on the back side. It has a front side connecting surface 14x and a back side connecting surface 14y located on the opposite side (front side) of the front side connecting surface 14x.
  • the third internal electrode 24c is electrically connected to the front side connecting surface 14x of the third interlayer connecting conductor 14c.
  • the third internal electrode 24c has a shape that covers the front side connecting surface 14x of the third interlayer connecting conductor 14c, and has a shape similar to, for example, the front side connecting surface 14x, for example, a circle. It has a shape.
  • the third internal electrode 24c has substantially the same shape as the front surface electrode 7.
  • the third internal electrode 24c faces the ground electrode layer 27.
  • a conductive layer 20 extending in a plane direction orthogonal to the stacking direction Z is provided between the third resin layer 10c and the fourth resin layer 10d.
  • the conductive layer 20 has a third internal electrode 24c and a signal line 22 communicating with the third internal electrode 24c.
  • the signal line 22 has, for example, a rectangular shape when viewed from the stacking direction Z.
  • a ground electrode layer 27 is provided on the surface on the back side of the fourth resin layer 10d (the surface on the back side of the laminated body 2).
  • the ground electrode layer 27 extends in a plane direction orthogonal to the stacking direction Z of the laminated body 2.
  • the ground electrode layer 27 is a metal foil, for example, a copper foil.
  • the ground electrode layer 27 may cover the surface on the back side of the fourth resin layer 10d (the surface on the back side of the laminated body 2) and may have an opening if necessary.
  • the third internal electrode 24c covers the front connecting surface 14x of the third interlayer connecting conductor 14c and has a small diameter corresponding to the front connecting surface 14x of the third interlayer connecting conductor 14c, the region of the third internal electrode 24c is formed. It becomes smaller. As a result, the capacitance formed between the third internal electrode 24c and the ground electrode layer 27 can be suppressed.
  • a ground electrode layer 27 can be provided on the front surface (front surface of the laminate 2) of the first resin layer 10a on which the surface electrode 7 is formed.
  • the ground electrode layer 27 extends in a plane direction orthogonal to the stacking direction Z of the laminated body 2.
  • the ground electrode layer 27 formed on the front surface of the laminated body 2 is a metal foil, for example, a copper foil, which covers the front surface of the first resin layer 10a and overlaps with the internal electrode 24 when viewed from the stacking direction Z. It has an opening that is configured so that it does not become. As a result, the capacitance formed between the ground electrode layer 27 formed on the front surface of the laminated body 2 and the internal electrode 24 can be suppressed.
  • the resin multilayer substrate 1 is electrically connected by stacking a ground electrode layer, a plurality of interlayer connecting conductors, a plurality of internal electrodes, and a ground electrode layer adjacent to the electronic component 4 (on the right side of FIG. 9). It can have a laminated structure. In this laminated structure, the ground electrode layer 27 on the front side, the first interlayer connecting conductor 14a, the first internal electrode 24a, the second interlayer connecting conductor 14b, the third interlayer connecting conductor 14c, and the like are arranged in this order from the surface side. 3 It has an internal electrode 24c, a fourth interlayer connecting conductor 14d, and a ground electrode layer 27 on the back side.
  • the first interlayer connecting conductor 14a and the second interlayer connecting conductor 14b have a tapered shape in which the diameter is reduced from the back side to the front side of the laminated body 2 and the third interlayer connecting conductor 14c and the fourth interlayer connecting conductor 14d have a tapered shape.
  • the front side ground electrode 27 on the left side and the front side ground electrode 27 on the right side may be electrically connected.
  • the electronic component 4 can be configured to be surrounded by the ground electrodes 27 on the left side and the front side on the right side.
  • FIG. 10 is a cross-sectional view schematically showing the resin multilayer substrate 1 according to the seventh embodiment.
  • the seventh embodiment is characterized in that the resin layer 10 has a multilayer structure including one sub-resin layer 10x and another sub-resin layer 10y.
  • the first resin layer 10a has a multilayer structure including a certain sub-resin layer (a certain sub-insulating layer) 10x and another sub-resin layer (another sub-insulating layer) 10y.
  • One sub-resin layer 10x is located on the front side, and another sub-resin layer 10y is located on the inner side (back side).
  • Another sub-resin layer 10y is a resin having a lower relative permittivity than a certain sub-resin layer 10x.
  • a certain sub-resin layer 10x is, for example, an LCP resin (liquid crystal polymer resin).
  • Another sub-resin layer 10y is a thermoplastic fluororesin such as a PTFE resin (polytetrafluoroethylene resin) or a PFA resin (perfluoroalkoxy alkane resin).
  • the second resin layer 10b is, for example, an LCP resin (liquid crystal polymer resin).
  • the third resin layer 10c is, for example, an LCP resin (liquid crystal polymer resin).
  • the resin layer 10 includes another sub-resin layer 10y having a low relative permittivity, unnecessary capacitance can be reduced.
  • another auxiliary resin layer 10y having a low relative permittivity is in contact with the signal line 22, so that the electric field formed around the signal line 22 can be relaxed and the line width of the signal line is increased. Therefore, it is possible to suppress an increase in the conductor loss of the signal line 22 in the high frequency band. Further, when the dielectric loss tangent of another auxiliary resin layer 10y is low, the dielectric loss can be further reduced.
  • the arrangement can be reversed from the arrangement shown in FIG. That is, another sub-resin layer 10y having a low relative permittivity may be arranged on the front side, and a certain sub-resin layer 10x having a higher relative permittivity than the other sub-resin layer 10y may be arranged on the inner side (back side). can.
  • another auxiliary resin layer 10y having a low relative permittivity is in contact with the surface electrode 7, the capacitance formed between the adjacent surface electrodes 7 and 7 can be suppressed.
  • the resin layer 10 having a multilayer structure including a certain sub-resin layer 10x and another sub-resin layer 10y is used for the first resin layer 10a located on the front side of the laminated body 2. It is also appropriately used for various resin layers 10 such as a second resin layer 10b and a third resin layer 10c located inside the laminate 2, and a fourth resin layer 10d located on the back side of the laminate 2.
  • the multilayer structure of the resin layer 10 exemplifies a two-layer structure including one sub-resin layer 10x and another sub-resin layer 10y, but is it the same as one sub-resin layer 10x and another sub-resin layer 10y? Alternatively, it may have a three-layer structure or a four-layer structure having a different additional secondary resin layer.
  • FIG. 11 is a diagram illustrating a method for manufacturing the resin multilayer substrate 1.
  • the resin multilayer substrate 1 described above is manufactured by, for example, the manufacturing method described below.
  • a plurality of resin layers 10 with a conductive layer 20 are prepared (a step of preparing a plurality of resin layers 10).
  • the resin layer 10 with the conductive layer 20 is a sheet in which a conductor foil acting as the conductive layer 20 is laminated on one side of the resin layer 10.
  • the resin layer 10 is made of a thermoplastic resin, for example, an LCP resin (liquid crystal polymer resin).
  • the conductive layer 20 is a metal foil, for example, a copper foil.
  • an interlayer connection hole 12 penetrating the resin layer 10 is formed (interlayer connection hole 12).
  • the interlayer connection hole 12 penetrates the resin layer 10, but does not penetrate the conductive layer 20. Since the interlayer connection hole 12 is formed by irradiation with laser light, the interlayer connection hole 12 has a tapered shape whose diameter is reduced from the side of the resin layer 10 toward the side of the conductive layer 20.
  • the interlayer connection hole 12 is formed at a position corresponding to the surface electrode 7 and the first internal electrode 24a.
  • a desired conductor pattern is formed on one surface of the resin layer 10.
  • the surface electrode 7 is formed as a conductor pattern (step of forming the surface electrode 7).
  • the signal line 22 and the first internal electrode 24a are formed as a conductor pattern (step of forming the first internal electrode 24a). ..
  • the interlayer connection hole 12 is filled with the conductive paste by screen printing or the like.
  • the tapered first interlayer connecting conductor 14a whose diameter is reduced from the resin layer 10 side toward the conductive layer 20 side is formed (step of forming the first interlayer connecting conductor 14a).
  • the tapered first interlayer connecting conductor 14a has a front connecting surface 14x located on the side of the conductive layer 20 and electrically connected to the surface electrode 7, and a back connecting surface 14y located on the opposite side of the front connecting surface 14x. And have. When viewed from the stacking direction Z, the front side connecting surface 14x and the back side connecting surface 14y of the first interlayer connecting conductor 14a have, for example, a circular shape, respectively.
  • the outer shape of the front side connecting surface 14x of the first interlayer connecting conductor 14a is within the outer shape of the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • the position of the front side connecting surface 14x of the first interlayer connecting conductor 14a coincides with the position of the surface electrode 7.
  • the first interlayer connection conductor 14a may be formed first, and then a conductor pattern such as the surface electrode 7 or the first internal electrode 24a may be formed.
  • a plurality of resin layers 10 including a first resin layer 10a having a surface electrode 7 and a second resin layer 10b having a signal line 22 and a first internal electrode 24a are laminated. Stacked in direction Z (step of stacking resin layers 10).
  • the first resin layer 10a and the second resin layer 10b are positioned so that the back side connecting surface 14y of the first interlayer connecting conductor 14a overlaps with the first internal electrode 24a when viewed from the stacking direction.
  • the laminated body 2 is thermocompression-bonded by applying heat and pressure in a state where the plurality of resin layers 10 are laminated (step of thermocompression-bonding the laminated body 2).
  • the conductive paste filled in the interlayer connection hole 12 is solidified, and the back side connection surface 14y of the first interlayer connection conductor 14a is joined to the first internal electrode 24a and electrically connected to the first internal electrode 24a. Will be done.
  • the surface electrode 7 is smaller than the first internal electrode 24a when viewed from the stacking direction Z, and is inside the outer edge of the first internal electrode 24a.
  • the electrode structure 3 is provided. If necessary, the protective layer 31 may be provided on the front surface of the first resin layer 10a.
  • the laminated body 2 is formed with an electrode structure 3 in which the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z. .. Therefore, the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the first internal electrode 24a covering the back side connecting surface 14y of the first interlayer connecting conductor 14a, so that the surface electrode The capacitance formed between the 7 and the first internal electrode 24a can be suppressed.
  • the interlayer connecting conductors 14 such as the first interlayer connecting conductor 14a, the second interlayer connecting conductor 14b, and the third interlayer connecting conductor 14c have an ideal trapezoidal tapered shape in cross-sectional view, but in reality, they are rectangular. These various shapes are included because they may have a shape or the sides may be discontinuous.
  • the shapes of the surface electrode 7, the internal electrode 24, the front side connecting surface 14x, and the back side connecting surface 14y may be not only a circular shape but also an elliptical shape, an oval shape, or a rectangular shape.
  • the multilayer substrate 1 is A laminated body 2 in which a plurality of insulating layers 10 are laminated in the stacking direction Z, Among the insulating layers 10, the surface electrodes 7 provided on the front side of the first insulating layer 10a located on the front side of the laminated body 2 and The first internal electrode 24a provided on the back side of the first insulating layer 10a and A multilayer substrate 1 including a first interlayer connection conductor 14a that penetrates the first insulating layer 10a in the stacking direction Z and electrically connects the surface electrode 7 and the first internal electrode 24a.
  • the first interlayer connection conductor 14a has a front side connection surface 14x electrically connected to the surface electrode 7 and a back side connection surface 14y electrically connected to the first internal electrode 24a.
  • the outer shape of the front side connecting surface 14x of the first interlayer connecting conductor 14a fits within the outer shape of the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • the surface electrode 7 has a shape that covers the front side connecting surface 14x of the first interlayer connecting conductor 14a, and the first internal electrode 24a has a shape that covers the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • the surface electrode 7 is characterized by having an electrode structure that is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the first internal electrode 24a covering the back side connecting surface 14y of the first interlayer connecting conductor 14a. Therefore, the capacitance formed between the surface electrode 7 and the first internal electrode 24a can be suppressed.
  • the front side connecting surface 14x of the first interlayer connecting conductor 14a has a circular shape when viewed from the stacking direction Z.
  • the back side connecting surface 14y of the first interlayer connecting conductor 14a has a circular shape when viewed from the stacking direction Z.
  • the diameter of the front side connecting surface 14x is smaller than the diameter of the back side connecting surface 14y.
  • the formation of unnecessary capacitance can be suppressed, and the alignment between the front side connecting surface 14x and the surface electrode 7 and between the back side connecting surface 14y and the first internal electrode 24a can be suppressed. Becomes easier.
  • the area of the front side connecting surface 14x is smaller than the area of the back side connecting surface 14y.
  • the formation of unnecessary capacitance can be suppressed, and the alignment between the front side connecting surface 14x and the surface electrode 7 and between the back side connecting surface 14y and the first internal electrode 24a can be suppressed. Becomes easier.
  • the surface electrode 7 is an electrode for electrically connecting the terminal 5 of the electronic component 4.
  • the first internal electrode 24a communicates with a signal line 22 extending in a plane direction orthogonal to the stacking direction Z.
  • the signal line 22 extends so as not to overlap the terminal 5 when viewed from the stacking direction Z.
  • the capacitance formed between the terminal 5 of the electronic component 4 and the signal line 22 can be suppressed.
  • the tip portion 5a of the terminal 5 fits within the outer edge of the surface electrode 7 when viewed from the stacking direction Z.
  • the capacitance formed between the terminal 5 of the electronic component 4 and the first internal electrode 24a can be suppressed.
  • a second insulating layer 10b adjacent to the back side of the first insulating layer 10a, A second internal electrode 24b provided on the back side of the second insulating layer 10b, and A second interlayer connecting conductor 14b that penetrates the second insulating layer 10b in the stacking direction Z and electrically connects the first internal electrode 24a and the second internal electrode 24b is further provided.
  • the second interlayer connecting conductor 14b has a front side connecting surface 14x electrically connected to the first internal electrode 24a and a back side connecting surface 14y electrically connected to the second internal electrode 24b.
  • the outer shape of the front side connecting surface 14x of the second interlayer connecting conductor 14b fits within the outer shape of the back side connecting surface 14y of the second interlayer connecting conductor 14b.
  • the second internal electrode 24b has a shape that covers the back side connecting surface 14y of the back side connecting surface 14y.
  • the surface electrode 7 is smaller than the second internal electrode 24b and fits within the outer edge of the second internal electrode 24b when viewed from the stacking direction Z.
  • the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the second internal electrode 24b covering the back side connecting surface 14y of the second interlayer connecting conductor 14b. Therefore, the capacitance formed between the surface electrode 7 and the second internal electrode 24b can be suppressed.
  • a third interlayer connecting conductor 14c that penetrates the third insulating layer 10c in the stacking direction Z and is electrically connected to the second interlayer connecting conductor 14b.
  • the third internal electrode 24c electrically connected to the back side connecting surface 14y of the third interlayer connecting conductor 14c, and the third internal electrode 24c.
  • the third internal electrode 24c faces the ground electrode layer 27, and the third internal electrode 24c faces the ground electrode layer 27.
  • the third internal electrode 24c has a shape that covers the back side connecting surface 14y of the third interlayer connecting conductor 14c.
  • the third internal electrode 24c is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the capacitance formed between the third internal electrode 24c and the ground electrode layer 27 can be suppressed.
  • An electrically insulating protective layer 31 that covers the front surface of the first insulating layer 10a and has an opening 32 for exposing a part of the surface electrode 7 is provided.
  • the capacitance formed between the surface electrode 7 and the terminal 5 can be suppressed.
  • the protective layer 31 is not formed between the adjacent surface electrodes 7 and 7.
  • the capacitance formed between the adjacent terminals 5 and 5 can be suppressed.
  • a back electrode 9 provided on the back side of the back side insulating layer 10c located on the back side of the laminated body 2 and A backside interlayer connecting conductor 14c having a backside connecting surface 14y that penetrates the backside insulating layer 10c in the stacking direction Z and is electrically connected to the backside electrode 9 is further provided.
  • the back surface electrode 9 has a shape that covers the back side connecting surface 14y of the back side interlayer connecting conductor 14c.
  • the back surface electrode 9 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the capacitance formed between the front surface electrode 7 and the first internal electrode 24a, and the back surface electrode 9 and the first internal electrode can be suppressed respectively.
  • a front-side connecting surface of a certain interlayer connecting conductor 14b located on the front side of the laminated body 2 which is a certain interlayer connecting conductor 14b penetrating a certain insulating layer 10b constituting the laminated body 2 in the stacking direction Z.
  • Another interlayer connecting conductor 14c that penetrates the layer 10c in the stacking direction Z, and the outer shape of the back side connecting surface 14y of the other interlayer connecting conductor 14c located on the back side of the laminated body 2 is the outer shape of the laminated body 2.
  • Another interlayer connecting conductor 14c that fits within the outer shape of the front side connecting surface 14x of the other interlayer connecting conductor 14c located on the front side forms a connecting structure in which the other interlayer connecting conductor 14c is joined in series in the stacking direction Z, the certain interlayer is formed.
  • the back side connecting surface 14y of the connecting conductor 14b and the front side connecting surface 14x of the other interlayer connecting conductor 14c are joined.
  • the back side connecting surface 14y of a certain interlayer connecting conductor 14b and the front connecting surface 14x of another interlayer connecting conductor 14c, which have a large bonding region, are joined to each other.
  • the bonding with the interlayer connecting conductor 14c is stable.
  • a plurality of the surface electrodes 7 are provided on the front side of the first insulating layer 10a.
  • the plurality of surface electrodes 7 are configured as a signal surface electrode 7a and a ground surface electrode 7b, and the ground surface electrode 7b is arranged between adjacent signal surface electrodes 7a and 7a. Will be done.
  • isolation between adjacent signal terminals 5 and 5 is improved, and crosstalk can be suppressed.
  • the area of the ground surface electrode 7b is larger than the area of the signal surface electrode 7a.
  • connection strength between the electronic component 4 and the multilayer board 1 can be increased.
  • the insulating layer 10 has a multilayer structure including a certain sub-insulating layer 10x and another sub-insulating layer 10y having a relative permittivity lower than that of the certain sub-insulating layer 10x.
  • the insulating layer 10 since the insulating layer 10 includes another sub-insulating layer 10y having a low relative permittivity, unnecessary capacitance can be reduced.
  • the other sub-insulating layer 10y which has a lower relative permittivity than the one sub-insulating layer 10x, is arranged on the side of the surface electrode 7.
  • the other sub-insulating layer 10y which has a lower relative permittivity than the one sub-insulating layer 10x, is arranged on the side of the first internal electrode 24a.
  • the electric field formed around the signal line 22 can be relaxed and the line width of the signal line can be increased, so that the high frequency band can be obtained. It is possible to suppress an increase in the conductor loss of the signal line 22 in the above.
  • the insulating layer 10 has a multilayer structure including a certain sub-insulating layer 10x and another sub-insulating layer 10y having a dielectric loss tangent lower than that of the certain sub-insulating layer 10x.
  • the other sub-insulating layer 10y having a low dielectric loss tangent is arranged on the side of the first internal electrode 24a.
  • the dielectric loss can also be reduced.
  • the insulating layer 10 having the multilayer structure is used for the first insulating layer 10a.
  • the method for manufacturing the multilayer substrate 1 is as follows.
  • a step of preparing a plurality of insulating layers 10 including a first insulating layer 10a with a conductive layer 20 and a second insulating layer 10b with a conductive layer 20 arranged adjacent to the back side of the first insulating layer 10a.
  • the first interlayer connection conductor 14a has a front side connection surface 14x electrically connected to the surface electrode 7 and a back side connection surface 14y electrically connected to the first internal electrode 24a.
  • the outer shape of the front side connecting surface 14x of the first interlayer connecting conductor 14a fits within the outer shape of the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • the surface electrode 7 has a shape that covers the front side connecting surface 14x of the first interlayer connecting conductor 14a
  • the first internal electrode 24a has a shape that covers the back side connecting surface 14y of the first interlayer connecting conductor 14a.
  • An electrode structure 3 is formed in which the surface electrode 7 is smaller than the first internal electrode 24a and fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z.
  • the laminated body 2 is formed with an electrode structure 3 in which the surface electrode 7 fits within the outer edge of the first internal electrode 24a when viewed from the stacking direction Z. Therefore, the region of the surface electrode 7 covering the front side connecting surface 14x of the first interlayer connecting conductor 14a is smaller than the region of the first internal electrode 24a covering the back side connecting surface 14y of the first interlayer connecting conductor 14a, so that the surface electrode The capacitance formed between the 7 and the first internal electrode 24a can be suppressed.
  • Resin multilayer substrate (multilayer substrate) 2 ... Laminated body 3 ... Electrode structure 4 ... Electronic component 5 ... Terminal 5a ... Tip 7 ... Surface electrode 7a ... Signal surface electrode 7b ... Ground surface electrode 7p ... Reduced diameter overhang 8 ... Conductive bonding material 9 ... Back electrode 10 ... Resin layer (insulating layer) 10a ... 1st resin layer (1st insulating layer) 10b ... Second resin layer (second insulating layer, certain insulating layer) 10c ... Third resin layer (third insulating layer, another insulating layer, backside insulating layer) 10d ... 4th resin layer (4th insulating layer) 10x ...

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  • Production Of Multi-Layered Print Wiring Board (AREA)
PCT/JP2021/014329 2020-04-07 2021-04-02 多層基板およびその製造方法 Ceased WO2021206019A1 (ja)

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WO2012124362A1 (ja) * 2011-03-17 2012-09-20 株式会社 村田製作所 樹脂多層基板
JP2018014387A (ja) * 2016-07-20 2018-01-25 住友電工ファインポリマー株式会社 基板、フレキシブルプリント配線板用基材、フレキシブルプリント配線板及び基板の製造方法

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JP2010087429A (ja) * 2008-10-02 2010-04-15 Denso Corp 多層回路基板およびその製造方法
WO2012124362A1 (ja) * 2011-03-17 2012-09-20 株式会社 村田製作所 樹脂多層基板
JP2018014387A (ja) * 2016-07-20 2018-01-25 住友電工ファインポリマー株式会社 基板、フレキシブルプリント配線板用基材、フレキシブルプリント配線板及び基板の製造方法

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