JP7294530B2 - 多層基板およびその製造方法 - Google Patents
多層基板およびその製造方法 Download PDFInfo
- Publication number
- JP7294530B2 JP7294530B2 JP2022514044A JP2022514044A JP7294530B2 JP 7294530 B2 JP7294530 B2 JP 7294530B2 JP 2022514044 A JP2022514044 A JP 2022514044A JP 2022514044 A JP2022514044 A JP 2022514044A JP 7294530 B2 JP7294530 B2 JP 7294530B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating layer
- interlayer connection
- connection conductor
- internal electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000010410 layer Substances 0.000 claims description 314
- 239000004020 conductor Substances 0.000 claims description 245
- 239000011229 interlayer Substances 0.000 claims description 240
- 238000003475 lamination Methods 0.000 claims description 16
- 239000011241 protective layer Substances 0.000 claims description 13
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 229920005989 resin Polymers 0.000 description 189
- 239000011347 resin Substances 0.000 description 189
- 229920000106 Liquid crystal polymer Polymers 0.000 description 11
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 11
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000011888 foil Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000004813 Perfluoroalkoxy alkane Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000012787 coverlay film Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
- H05K1/0298—Multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4632—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating thermoplastic or uncured resin sheets comprising printed circuits without added adhesive materials between the sheets
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/025—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/024—Dielectric details, e.g. changing the dielectric material around a transmission line
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0141—Liquid crystal polymer [LCP]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/015—Fluoropolymer, e.g. polytetrafluoroethylene [PTFE]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020069181 | 2020-04-07 | ||
| JP2020069181 | 2020-04-07 | ||
| PCT/JP2021/014329 WO2021206019A1 (ja) | 2020-04-07 | 2021-04-02 | 多層基板およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021206019A1 JPWO2021206019A1 (https=) | 2021-10-14 |
| JPWO2021206019A5 JPWO2021206019A5 (https=) | 2022-10-14 |
| JP7294530B2 true JP7294530B2 (ja) | 2023-06-20 |
Family
ID=78023274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022514044A Active JP7294530B2 (ja) | 2020-04-07 | 2021-04-02 | 多層基板およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12063738B2 (https=) |
| JP (1) | JP7294530B2 (https=) |
| CN (1) | CN218587412U (https=) |
| WO (1) | WO2021206019A1 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080245557A1 (en) | 2007-04-04 | 2008-10-09 | Bird Steven C | Optimizing asic pinouts for hdi |
| WO2012124362A1 (ja) | 2011-03-17 | 2012-09-20 | 株式会社 村田製作所 | 樹脂多層基板 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3656484B2 (ja) * | 1999-03-03 | 2005-06-08 | 株式会社村田製作所 | セラミック多層基板の製造方法 |
| JP4462473B2 (ja) * | 2002-07-01 | 2010-05-12 | 富士通株式会社 | 高周波回路基板及びそれを用いた半導体装置 |
| JP4323231B2 (ja) * | 2003-06-20 | 2009-09-02 | 富士通マイクロエレクトロニクス株式会社 | 高周波伝送線路基板 |
| JP2005072328A (ja) | 2003-08-26 | 2005-03-17 | Kyocera Corp | 多層配線基板 |
| DE602005023039D1 (de) * | 2004-10-29 | 2010-09-30 | Murata Manufacturing Co | Mehrschichtiges substrat mit elektronischer komponente des chiptyps und herstellungsverfahren dafür |
| KR100890371B1 (ko) * | 2004-10-29 | 2009-03-25 | 가부시키가이샤 무라타 세이사쿠쇼 | 세라믹 다층기판 및 그 제조방법 |
| WO2009069398A1 (ja) * | 2007-11-30 | 2009-06-04 | Murata Manufacturing Co., Ltd. | セラミック複合多層基板及びその製造方法並びに電子部品 |
| JP4957638B2 (ja) | 2008-04-24 | 2012-06-20 | イビデン株式会社 | 多層プリント配線板及び多層プリント配線板の製造方法 |
| JP5293060B2 (ja) * | 2008-10-02 | 2013-09-18 | 株式会社デンソー | 多層回路基板およびその製造方法 |
| JP5382225B2 (ja) * | 2010-07-29 | 2014-01-08 | 株式会社村田製作所 | セラミック多層基板およびその製造方法 |
| JP2018014387A (ja) * | 2016-07-20 | 2018-01-25 | 住友電工ファインポリマー株式会社 | 基板、フレキシブルプリント配線板用基材、フレキシブルプリント配線板及び基板の製造方法 |
| JP2018032659A (ja) | 2016-08-22 | 2018-03-01 | イビデン株式会社 | プリント配線板およびプリント配線板の製造方法 |
-
2021
- 2021-04-02 JP JP2022514044A patent/JP7294530B2/ja active Active
- 2021-04-02 WO PCT/JP2021/014329 patent/WO2021206019A1/ja not_active Ceased
- 2021-04-02 CN CN202190000370.9U patent/CN218587412U/zh active Active
-
2022
- 2022-08-29 US US17/897,747 patent/US12063738B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080245557A1 (en) | 2007-04-04 | 2008-10-09 | Bird Steven C | Optimizing asic pinouts for hdi |
| WO2012124362A1 (ja) | 2011-03-17 | 2012-09-20 | 株式会社 村田製作所 | 樹脂多層基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220418102A1 (en) | 2022-12-29 |
| CN218587412U (zh) | 2023-03-07 |
| US12063738B2 (en) | 2024-08-13 |
| JPWO2021206019A1 (https=) | 2021-10-14 |
| WO2021206019A1 (ja) | 2021-10-14 |
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