WO2020095679A1 - Broche de sonde et gabarit d'inspection - Google Patents

Broche de sonde et gabarit d'inspection Download PDF

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Publication number
WO2020095679A1
WO2020095679A1 PCT/JP2019/041489 JP2019041489W WO2020095679A1 WO 2020095679 A1 WO2020095679 A1 WO 2020095679A1 JP 2019041489 W JP2019041489 W JP 2019041489W WO 2020095679 A1 WO2020095679 A1 WO 2020095679A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe pin
probe
elastic
inspection jig
accommodating
Prior art date
Application number
PCT/JP2019/041489
Other languages
English (en)
Japanese (ja)
Inventor
直哉 笹野
宏真 寺西
貴浩 酒井
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to CN201980071406.XA priority Critical patent/CN112955754A/zh
Priority to KR1020217011321A priority patent/KR102600799B1/ko
Publication of WO2020095679A1 publication Critical patent/WO2020095679A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted

Definitions

  • the present disclosure relates to a probe pin and an inspection jig.
  • continuity inspection and operation characteristic inspection are performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body substrate installed in the electronic component module and the terminals of the inspection device using the probe pins.
  • This probe pin is provided with a pair of contacts capable of contacting the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, respectively, and a meandering portion interposed between the pair of contacts to connect the pair of contacts. There is.
  • the meandering portion expands and contracts along the arrangement direction connecting the pair of contacts, and each contact reciprocates along the arrangement direction.
  • some inspection devices and inspection objects are configured to be connected to a probe pin via a conductor portion of an electric wire.
  • the probe pin is configured to connect the electromagnetic component and the connected electronic component by contacting each contact with the electrode terminal of the electromagnetic component and the electrode terminal of the connected electronic component in the arrangement direction. .. For this reason, for example, when one or both of the electromagnetic component and the connected electronic component are configured to be connectable to the probe pin only through the conductor portion of the electric wire, when the probe pin is used, In some cases, it may not be possible to connect the component to the connected electronic component.
  • the present disclosure aims to provide a probe pin capable of connecting a conductor portion of an electric wire, and an inspection jig including the probe pin.
  • An example probe pin of the present disclosure is An elastic portion elastically deformable along the first direction, A connection portion is provided at one end of the elastic portion in the first direction and is capable of connecting the conductor portion of the electric wire.
  • the inspection jig of the example of the present disclosure is The probe pin, A housing having an accommodating portion in which the probe pin is accommodated so that the connecting portion is exposed to the outside.
  • the probe pin it is provided with an elastic portion that is elastically deformable along the first direction and a connecting portion that is provided at one end of the elastic portion in the first direction and that can connect the conductor portion of the electric wire.
  • a probe pin capable of connecting the conductor portion of the electric wire can be realized.
  • the inspection device Even if one or both of the inspection device and the inspection object cannot be connected by the probe pin only via the conductor portion of the electric wire, the inspection device and It is possible to realize an inspection jig that can connect inspection objects.
  • Sectional drawing which followed the II-II line of FIG. The perspective view showing the probe pin of a 1st embodiment of this indication.
  • the top view of the probe pin of FIG. The top view which shows the 1st modification of the inspection jig of FIG.
  • the top view which shows the 2nd modification of the inspection jig of FIG. The perspective view which shows the inspection jig of 2nd Embodiment of this indication.
  • Sectional drawing which followed the VIII-VIII line of FIG. The perspective view which shows the probe pin of 2nd Embodiment of this indication.
  • the probe pin 10 according to the first embodiment of the present disclosure is used in a state of being housed in a housing 100, for example, as shown in FIGS. 1 and 2, and constitutes the inspection jig 1 together with the housing 100.
  • the inspection jig 1 accommodates a plurality of elongated thin plate-shaped conductive probe pins 10.
  • the housing 100 has, for example, a substantially rectangular column shape.
  • an accommodating portion 110 capable of accommodating the probe pin 10 with the connecting portion 30 of the probe pin 10 to be described later being exposed to the outside of the housing 100.
  • the accommodating portions 110 extend along the first direction (for example, the Y direction) and are arranged side by side in the plate thickness direction (for example, the X direction) of the accommodated probe pins 10 at intervals. ..
  • the row formed by the four accommodating portions 110 arranged side by side in the plate thickness direction of the accommodated probe pins 10 is orthogonal to the arrangement direction of the rows of the four accommodating portions 110 (for example, , Z direction) are provided at intervals.
  • a first opening 111 and a second opening 112 are provided at both ends of each housing 110 in the first direction.
  • the first opening 111 is open to the first surface 101, which is one of a pair of surfaces of the housing 100 facing each other in the Y direction.
  • the connecting portion 30 of the probe pin 10 is exposed to the outside of the housing 100 through the first opening 111.
  • a terminal hole 120 extending along the Y direction from a second surface 102 opposite to the first surface 101 in the Y direction is provided inside the housing 100.
  • a second opening 112 is opened on the bottom surface 121 of the terminal hole 120.
  • the contact portion 40 of the probe pin 10 which will be described later, protrudes toward the inside of the terminal hole 120 through the second opening 112, and is inserted into the terminal hole 120, for example, the connection terminal 300 (FIG. 4) of the inspection device. It is arranged so that it can be contacted.
  • each probe pin 10 has a plate-like shape and is provided with elastic portions 20 that are elastically deformable along the Y direction (an example of the first direction) and both ends of the elastic portion 20 in the Y direction.
  • the connecting portion 30 and the contact portion 40 are provided.
  • Each probe pin is formed by, for example, an electroforming method, and the elastic portion 20, the connecting portion 30, and the contact portion 40 are arranged in series along the Y direction and are integrally configured.
  • the elastic portion 20 has a plurality of elastic pieces (four elastic pieces in the first embodiment) 21, 22, 23, 24 which are arranged with a gap therebetween.
  • each elastic piece 21, 22, 23, 24 has an elongated strip shape and has two extending portions 201, 202 and two extending portions 201, 202 respectively connected to the connecting portion 30 and the contact portion 40. It has one curved portion 203 connected to 201 and 202.
  • Each of the extending portions 201 and 202 is, for example, arranged on one side in the width direction (for example, the Z direction) of the main body portion 31 of the connecting portion 30 or the main body portion 41 of the contact portion 40, and a direction intersecting the first direction. Along a substantially straight line.
  • one end of the extending part 201 in the extending direction constitutes an end of the elastic part 20 on the side of the connecting part 30, and one end of the extending part 202 in the extending direction is a contact part of the elastic part. It constitutes the end on the 40 side.
  • the elastic pieces 21, 22, 23, 24 have substantially the same cross-sectional shape.
  • the connecting portion 30 is configured to be able to connect the conductor portion 200 of the electric wire.
  • the connecting portion 30 includes a main body 31 extending in the Y direction and a direction (eg, Z A pair of elastic holding pieces 32, 33 that are elastically deformable in the direction).
  • One end of the body portion 31 in the Y direction is connected to the elastic portion 20.
  • the elastic sandwiching pieces 32 and 33 are arranged with a gap 34 therebetween in a second direction (for example, the Z direction) orthogonal to the first direction.
  • the connecting portion 30 has a pair of elastic holding pieces 32, 33 capable of holding the conductor portion 200 of the electric wire.
  • the connecting portion 30 also has a substantially C-shaped through hole 36 that penetrates the connecting portion 30 in the plate thickness direction.
  • the end portion 341 of the gap 34 on the main body 31 side has a substantially circular shape when viewed in the plate thickness direction (for example, the X direction).
  • a through hole 36 is arranged around the end 341 of the gap 34 on the main body 31 side. The through hole 36 facilitates elastic deformation of the elastic holding pieces 32, 33 in the Z direction.
  • the contact portion 40 extends in the Y direction and extends in the Y direction from the main body portion 41 having one end in the Y direction connected to the elastic portion 20 and the other end in the Y direction of the main body portion 41.
  • Stoppers 44 are provided on the facing surfaces of the leg portions 42 and 43 that face each other. The stoppers 44 project from the facing surfaces of the leg portions 42 and 43 in directions approaching each other. The stopper 44 can prevent, for example, excessive insertion of the connection terminal 300 of the inspection device.
  • each support portion 50 extends in the Z direction from the body portions 31 and 41, and when the probe pin 10 is housed in the housing portion 110 of the housing 100, as shown in FIG. Is arranged so as to abut. In other words, the probe pins 10 are held in the housing portion 110 by the support portions 50.
  • the elastic portion 20 that is elastically deformable along the Y direction and the connection portion that is provided at one end of the elastic portion 20 in the Y direction and that can connect the conductor portion 200 of the electric wire. 30 and 30 are provided.
  • the connecting portion 30 can realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected.
  • the connecting portion 30 has a pair of elastic holding pieces 32 and 33 that extend along the Y direction and elastically deform in a direction away from each other to hold the conductor portion 200 of the electric wire. .. Since the conductor portion 200 of the electric wire can be held by the pair of elastic holding pieces 32 and 33, the probe pin 10 capable of connecting the conductor portion 200 of the electric wire by crimping can be realized.
  • the inspection jig 1 even if one or both of the inspection device and the inspection object can be connected by the probe pin 10 only via the conductor portion 200 of the electric wire, The inspection jig 1 capable of connecting the inspection device and the inspection object can be realized.
  • each accommodation portion 110 of the housing 100 is not limited to one and may be plural.
  • a plurality of probe pins 10 are stacked in the plate thickness direction in a state of being in contact with each other,
  • the probe pin laminated body 2 to which the conductor portion 200 is connected can be accommodated.
  • the inspection jig 1 capable of flowing a large current as compared with the inspection jig 1 in which one probe pin 10 is housed and held. it can.
  • the accommodating portions 110 are arranged side by side in the plate thickness direction (for example, the X direction) of the accommodated probe pins 10 and are connected in the Z direction.
  • the parts 30 can be arranged in a zigzag pattern with alternating offsets.
  • each housing 110 changes its shape, size, and arrangement according to the shape and size of the probe pin 10 housed therein, or the arrangement of the inspection device and the connection terminal of the inspection object. be able to.
  • the inspection jig 1 may include at least one probe pin 10 and a housing 100 that accommodates the probe pin 10 therein.
  • the probe pin 10 As shown in FIGS. 7 to 10, the probe pin 10 according to the second embodiment of the present disclosure is configured such that the connecting portion 30 has a soldering portion 35 to which the conductor portion 200 of the electric wire can be connected by soldering. It is different from the first embodiment in that.
  • the same parts as those in the first embodiment will be designated by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.
  • the inspection jig 1 includes a housing 100 having a substantially L-shaped cross section along the first direction (for example, the Y direction).
  • the probe pins 10 accommodating 15 accommodating portions 110 are arranged in a line in the plate thickness direction at intervals.
  • each probe pin 10 is composed of a plurality of elastic pieces (two elastic pieces in this embodiment) 25 and 26 arranged with a gap therebetween.
  • each elastic piece 25, 26 is in the shape of an elongated strip and is adjacent to a plurality of extending portions extending in the Z direction (in the second embodiment, ten extending portions 28 as an example).
  • a plurality of curved portions 27 in the second embodiment, nine curved portions 27 in the second embodiment, both ends of which are connected to the extending portion 28, have a meandering shape in which they are alternately connected in the Z direction. ing.
  • each extending portion 28 at both ends in the Y direction of each elastic piece 25, 26 are connected to the main body portion 31 of the connecting portion 30 and the main body portion 41 of the contact portion 40, respectively.
  • each extending portion 28 is arranged closer to the other end side than one end in the width direction of the main body 41 when viewed along the plate thickness direction of the probe pin 10.
  • each extending portion 28 is arranged above the lower end in the Z direction in the width direction of the main body 41 in the Z direction when viewed along the plate thickness direction of the probe pin 10.
  • each extending portion 28 extends in a substantially linear shape along a direction intersecting the first direction (for example, an orthogonal direction), and one end portion of the extending portion 201 in the extending direction is an elastic portion.
  • the end portion of the extension portion 202 on the side of the contact portion 40 is formed, and the one end portion of the extension portion 202 in the extending direction forms the end portion of the elastic portion on the contact portion 40 side.
  • the connecting portion 30 of each probe pin 10 includes a main body portion 31 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20, and the other end portion of the main body portion 31 in the Y direction. And the connected soldering portion 35.
  • the soldering portion 35 has a substantially rectangular ring shape when viewed from the plate thickness direction of the probe pin 10 (for example, the X direction).
  • the soldering portion 35 of the connecting portion 30 of each probe pin 10 projects to the outside of the housing 100 via the first opening portion 111 of the housing portion 110.
  • the contact portion 40 of each probe pin 10 includes a body portion 41 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20, and the other end in the Y direction of the body portion 41. It has a pair of contact portions 421 and 431 protruding in the Y direction.
  • the connecting portion 30 has the soldering portion 35 to which the conductor portion 200 of the electric wire can be connected by soldering.
  • the soldering portion 35 can realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected by soldering.
  • the soldering portion 35 is not limited to the second embodiment, and any configuration can be adopted as long as the conductor portion 200 of the electric wire can be connected by soldering.
  • connection part 30 is not limited to the first embodiment and the second embodiment, and other configurations capable of connecting the conductor part 200 of the electric wire can be adopted.
  • the probe pin 10 of the first aspect of the present disclosure is An elastic portion 20 that is elastically deformable along the first direction,
  • the elastic portion 20 is provided at one end in the first direction and includes a connecting portion 30 to which the conductor portion 200 of the electric wire can be connected.
  • the probe pin 10 of the first aspect capable of connecting the conductor portion 200 of the electric wire can be realized by the connecting portion 30.
  • the probe pin 10 of the second aspect of the present disclosure is
  • the connecting portion 30 extends along the first direction and has a pair of elastic holding pieces 32 and 33 that can elastically deform in a direction away from each other to hold the conductor portion 200.
  • the probe pin 10 of the second aspect since the conductor portion 200 of the electric wire can be held by the pair of elastic holding pieces 32 and 33, the probe pin 10 capable of connecting the conductor portion 200 of the electric wire by crimping is realized. it can.
  • the probe pin 10 of the third aspect of the present disclosure is
  • the connection part 30 has a soldering part 35 to which the conductor part 200 can be connected by soldering.
  • the soldering portion 35 can realize the probe pin 10 that can connect the conductor portion 200 of the electric wire by soldering.
  • the inspection jig 1 is A probe pin 10 of the above aspect,
  • the housing 100 has a housing 110 in which the probe pin 10 is housed so that the connection part 30 is exposed to the outside.
  • the probe pin 10 is configured so that one or both of the inspection device and the inspection object can be connected only via the conductor portion 200 of the electric wire. Also, the inspection jig 1 capable of connecting the inspection device and the inspection object can be realized.
  • the inspection jig 1 is The probe pin 10 is a probe pin laminated body 2 in which a plurality of the probe pins 10 are laminated in a plate thickness direction in a state of being in contact with each other and the conductor portion 200 of one electric wire is connected,
  • the housing portion 110 can house the probe pin stack 2.
  • the inspection jig 1 of the fifth aspect capable of passing a larger current than the inspection jig 1 in which one probe pin 10 is housed and held by the probe pin laminated body 2, for example. 1 can be obtained.
  • the inspection jig 1 is The probe pin 10 is a plurality of the probe pins 10,
  • the accommodating part 110 is a plurality of accommodating parts 110 capable of accommodating at least one probe pin 10 in each,
  • Each of the accommodating portions 110 is arranged side by side in the plate thickness direction of the accommodated probe pins 10 with a space therebetween, and the second direction intersects with the plate thickness direction when viewed from the first direction.
  • the connecting portions 30 are arranged in a zigzag pattern in which the connecting portions 30 are alternately displaced.
  • the probe pin of the present disclosure can be applied to an inspection jig used for inspection of semiconductors such as a camera device, a USB device, or a QFN device and a SON device.
  • the inspection jig of the present disclosure can be applied to, for example, an inspection apparatus used for inspecting a semiconductor such as a camera device, a USB device, or a QFN device and a SON device.
  • an inspection apparatus used for inspecting a semiconductor such as a camera device, a USB device, or a QFN device and a SON device.
  • Probe pin laminated body 10 Probe pin 20 Elastic part 201, 202 Extension part 203 Bending part 21, 22, 23, 24 Elastic piece 25, 26 Elastic piece 27 Bending part 28 Extension part 30 Connection part 31 Main body Part 32, 33 Elastic clamping piece 34 Gap 341 End part 35 Soldering part 36 Through hole 40 Contact part 41 Main body part 42, 43 Leg part 44 Stopper 50 Support part 100 Housing 101 First surface 102 Second surface 110 Storage part 111th 1 Opening 112 Second Opening 120 Terminal Hole 200 Conductor 300 Connection Terminal

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

L'invention concerne une broche de sonde qui comprend : une partie élastique qui est élastiquement déformable dans une première direction ; et une partie de liaison qui est disposée à une extrémité de la partie élastique dans la première direction, et à laquelle une partie conductrice d'un fil électrique est apte à être connectée.
PCT/JP2019/041489 2018-11-08 2019-10-23 Broche de sonde et gabarit d'inspection WO2020095679A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201980071406.XA CN112955754A (zh) 2018-11-08 2019-10-23 探针和检查工具
KR1020217011321A KR102600799B1 (ko) 2018-11-08 2019-10-23 프로브 핀 및 검사 지그

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-210797 2018-11-08
JP2018210797A JP7354534B2 (ja) 2018-11-08 2018-11-08 プローブピンおよび検査治具

Publications (1)

Publication Number Publication Date
WO2020095679A1 true WO2020095679A1 (fr) 2020-05-14

Family

ID=70610983

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/041489 WO2020095679A1 (fr) 2018-11-08 2019-10-23 Broche de sonde et gabarit d'inspection

Country Status (5)

Country Link
JP (1) JP7354534B2 (fr)
KR (1) KR102600799B1 (fr)
CN (1) CN112955754A (fr)
TW (1) TWI708441B (fr)
WO (1) WO2020095679A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111579836A (zh) * 2020-05-18 2020-08-25 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08271547A (ja) * 1995-03-31 1996-10-18 Nec Corp プローブ装置
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2009016291A (ja) * 2007-07-09 2009-01-22 Sensata Technologies Massachusetts Inc ソケット用アダプタ
JP2009052913A (ja) * 2007-08-23 2009-03-12 Yamaichi Electronics Co Ltd 同軸型コンタクト及び同軸多芯コネクタ
WO2017026304A1 (fr) * 2015-08-07 2017-02-16 オムロン株式会社 Broche de sonde et gabarit d'inspection la comprenant
JP2017146119A (ja) * 2016-02-15 2017-08-24 オムロン株式会社 プローブピンおよびこれを用いた検査装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002134202A (ja) 2000-10-27 2002-05-10 Otax Co Ltd 電子部品用ソケット
US8970238B2 (en) 2011-06-17 2015-03-03 Electro Scientific Industries, Inc. Probe module with interleaved serpentine test contacts for electronic device testing
JP5821432B2 (ja) * 2011-09-05 2015-11-24 日本電産リード株式会社 接続端子及び接続治具
JP2017130421A (ja) 2016-01-22 2017-07-27 山一電機株式会社 コンタクト端子、コンタクト支持体、および、それを備える接続装置
KR101672826B1 (ko) * 2016-02-03 2016-11-07 주식회사 프로이천 니들 타입 핀 보드
JP6624999B2 (ja) * 2016-03-31 2019-12-25 日鉄日新製鋼株式会社 自動車用端子
JP6737002B2 (ja) * 2016-06-17 2020-08-05 オムロン株式会社 プローブピン
JP6515877B2 (ja) * 2016-06-17 2019-05-22 オムロン株式会社 プローブピン
KR101938387B1 (ko) * 2017-02-16 2019-01-14 (주)에이피텍 테스트 핀 및 이를 포함하는 테스트 장치
WO2019138505A1 (fr) 2018-01-11 2019-07-18 オムロン株式会社 Broche de sonde, serre-joint d'inspection, unité d'inspection, et dispositif d'inspection
CN111033273B (zh) 2018-01-11 2022-04-26 欧姆龙株式会社 探针、检查工具、检查单元和检查装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08271547A (ja) * 1995-03-31 1996-10-18 Nec Corp プローブ装置
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2009016291A (ja) * 2007-07-09 2009-01-22 Sensata Technologies Massachusetts Inc ソケット用アダプタ
JP2009052913A (ja) * 2007-08-23 2009-03-12 Yamaichi Electronics Co Ltd 同軸型コンタクト及び同軸多芯コネクタ
WO2017026304A1 (fr) * 2015-08-07 2017-02-16 オムロン株式会社 Broche de sonde et gabarit d'inspection la comprenant
JP2017146119A (ja) * 2016-02-15 2017-08-24 オムロン株式会社 プローブピンおよびこれを用いた検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111579836A (zh) * 2020-05-18 2020-08-25 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器

Also Published As

Publication number Publication date
JP7354534B2 (ja) 2023-10-03
KR20210062046A (ko) 2021-05-28
CN112955754A (zh) 2021-06-11
TW202019031A (zh) 2020-05-16
KR102600799B1 (ko) 2023-11-10
TWI708441B (zh) 2020-10-21
JP2020076666A (ja) 2020-05-21

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