WO2017026304A1 - Broche de sonde et gabarit d'inspection la comprenant - Google Patents

Broche de sonde et gabarit d'inspection la comprenant Download PDF

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Publication number
WO2017026304A1
WO2017026304A1 PCT/JP2016/072398 JP2016072398W WO2017026304A1 WO 2017026304 A1 WO2017026304 A1 WO 2017026304A1 JP 2016072398 W JP2016072398 W JP 2016072398W WO 2017026304 A1 WO2017026304 A1 WO 2017026304A1
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WIPO (PCT)
Prior art keywords
contact
elastic
probe pin
conduction
center line
Prior art date
Application number
PCT/JP2016/072398
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English (en)
Japanese (ja)
Inventor
宏真 寺西
貴浩 酒井
近藤　誠
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to CN201680028141.1A priority Critical patent/CN107615077B/zh
Publication of WO2017026304A1 publication Critical patent/WO2017026304A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Definitions

  • the present invention relates to a probe pin and an inspection jig provided with the probe pin.
  • the probe pin includes a displacement portion formed in a zigzag shape and contact portions provided at both ends of the displacement portion.
  • the displacement portion is formed in a bellows shape, it is difficult to displace the contact portion in parallel along the center line. For this reason, the desired amount of displacement may not be ensured accurately.
  • the electric bellows-shaped displacement part has a large electric resistance, it was difficult for electricity to flow. For this reason, it was difficult to ensure good electrical conductivity.
  • an object of the present invention is to provide a probe pin that can ensure a desired amount of displacement accurately and ensure good electrical conductivity, and an inspection jig including the probe pin.
  • the probe pin according to the present invention is to solve the above problems.
  • a first contact portion and a second contact portion provided independently along the longitudinal direction and spaced apart from each other;
  • Each of the elastic units is A first conducting portion and a second conducting portion, each of which is provided at a tip portion, each extending along the longitudinal direction and spaced apart from and facing each other along the longitudinal direction;
  • Both sides of the probe pin center line extending in the longitudinal direction project symmetrically from the respective bases of the first conducting portion and the second conducting portion in the direction intersecting the longitudinal direction, and each is the probe pin center line.
  • the base portions of the first conductive portion and the second conductive portion are connected and supported without straddling, and provided so as to be expandable and contractable along the longitudinal direction, and the contact portion of the first conductive portion when contracted
  • a pair of elastic support portions that can contact the contact portion of the second conduction portion Have A plurality of the elastic units are adjacent to the first contact portion and the first conductive portion is connected to the first contact portion; and the second conductive portion is adjacent to the second contact portion and the second conductive portion.
  • a second elastic unit coupled to the second contact portion, and in the two adjacent elastic units of the plurality of elastic units, the base and the other of the first conductive portion of one elastic unit The base portion of the second conducting portion of the elastic unit is connected to each other.
  • each of the plurality of elastic units that connect the first contact portion and the second contact portion in series extends in the longitudinal direction, respectively. It has a pair of elastic support parts which connect the 1st conduction part and the 2nd conduction part. Thereby, since the 1st contact part and the 2nd contact part can be expanded-contracted along a probe pin centerline, a desired amount of displacement can be ensured correctly.
  • FIG. 2 is an II arrow view of the inspection jig of FIG.
  • FIG. 3 is a view taken along arrow III of the inspection jig of FIG.
  • FIG. 4 is a sectional view taken along line IV-IV in FIG.
  • FIG. 4 is a cross-sectional view taken along line VV in FIG.
  • FIG. 7 is a VII arrow view of the probe pin of FIG.
  • FIG. 11 is a partial enlarged view for explaining the operation of the probe pin of FIG. 6 following FIG. 10;
  • FIG. 13 is a partially enlarged view for explaining the operation of the probe pin of FIG. 6 following FIG.
  • the inspection jig 1 includes an insulating housing 2 having a substantially rectangular tube shape and a plurality of probe pins 3 housed inside the housing 2.
  • the probe pins 3 are stacked in the plate thickness direction (Y direction), and each is independently retractable.
  • the X direction is a direction orthogonal to the Y direction
  • the Z direction is a direction orthogonal to the X and Y directions
  • the housing 2 has an upper housing 10 and a lower housing 20 having the same outer shape, and is integrated with the upper housing 10 and the lower housing 20 connected in series. .
  • the upper housing 10 includes a storage portion 11 provided in the interior thereof along the Z direction, and a first portion provided on the lower surface in the Z direction and communicating with the storage portion 11. It has the opening part 15 and the 2nd opening part 16 provided in the upper surface of the Z direction and communicating with the accommodating part 11.
  • the first opening 15 and the second opening 25 are provided with the same size.
  • the storage portion 11 is provided along the center line CL1 extending in the Z direction of the housing 2 and symmetrically with respect to the center line CL1 in the X direction.
  • the storage portion 11 includes a main body side storage portion 12 that communicates with the first opening 15 and a contact side storage portion 13 that communicates with the second opening 16.
  • the main body side storage portion 12 has a width in the X direction and a length in the Z direction that are larger than those of the contact side storage portion 13.
  • a stepped portion 14 is formed at the connection portion between the main body side storage portion 12 and the contact side storage portion 13 to assist smooth contraction of the entire probe pin 3 as will be described later.
  • the lower housing 20 has the same configuration as the upper housing 10. That is, as shown in FIG. 4 and FIG. 5, the lower housing 20 includes a storage portion 21 provided therein along the Z direction, and a first portion provided on the upper surface in the Z direction that communicates with the storage portion 21. 1 opening 25 and the 2nd opening 26 provided in the lower surface of the Z direction in communication with storage part 21 is provided.
  • the storage portion 21 is provided along the center line CL1 and symmetrically with respect to the center line CL1 in the X direction.
  • the storage portion 21 includes a main body side storage portion 22 that communicates with the first opening 25 and a contact side storage portion 23 that communicates with the second opening 26.
  • the main body side storage portion 22 has a width in the X direction and a length in the Z direction that are larger than those of the contact side storage portion 23.
  • a stepped portion 24 is formed at the connection portion between the main body side storage portion 22 and the contact side storage portion 23 to assist the smooth contraction of the entire probe pin 3 as will be described later.
  • the upper housing 10 and the lower housing 20 have the same width L7 in the X direction. Further, the first opening 15 of the upper housing 10 and the first opening 25 of the lower housing 20 face each other, and the inner wall constituting the main body side storage portion 12 of the upper housing 10 and the main body side storage portion 22 of the lower housing 20 are configured. The inner walls are connected so that they are on the same plane.
  • the probe pin 3 has a long plate shape having substantially the same plate thickness (Y direction thickness), and is provided at both ends of the elastic portion 30 in the longitudinal direction of the probe pin 3.
  • the first contact portion 40 and the second contact portion 50 are provided respectively.
  • the elastic portion 30, the first contact portion 40, and the second contact portion 50 are serially arranged along a center line CL ⁇ b> 2 of an example of a probe pin center line extending in the Z direction of the probe pin 3. Is arranged.
  • the first contact portion 40 and the second contact portion 50 have a first contact portion 41 and a second contact portion 51, respectively.
  • the probe pins 3 are provided independently along the longitudinal direction and are spaced apart from each other, and the first contact portion 41 and the second contact portion 51, and the first contact portion 41 and the first contact portion 41. And a plurality of elastic units 31 that connect the two contact points 51 in series.
  • the probe pin 3 is formed by using an electroforming method, and further has conductivity.
  • the elastic part 30 is connected by a plurality of elastic units 31 connected in series as shown in FIG.
  • Each elastic unit 31 includes a pair of conductive portions 32 and 33 that are disposed so that the contact portion of the tip portion can be contacted and separated along the center line CL ⁇ b> 2, and the width of the pair of conductive portions 32 and 33. It has a pair of elastic support parts 34 and 35 which have a narrow width and connect the base parts 32b and 33b of the pair of conduction parts 32 and 33 to each other.
  • Each of the plurality of elastic units 31 has a pair of conducting portions 32 arranged along the center line CL2 and connected at a constant interval so as to obtain a desired amount of displacement.
  • each of the pair of conductive portions 32 and 33 is configured by a member having an elongated triangular shape (for example, substantially isosceles triangular shape) extending along the longitudinal direction (Z direction), and its distal end portion.
  • apex parts 321 and 331 which are arranged at the front end of each other, are opposed to each other, and are chamfered, and an internal contact part (that is, a contact part) arranged at one side edge of the front end part in the vicinity of the apex parts 321 and 331
  • the slope portions 322 and 332 are provided at one side edge of the front end part in the vicinity of the apex parts 321 and 331.
  • the conductive portions 32 and 33 each extend along the center line CL2 and do not contact each other when the pair of elastic support portions 34 and 35 are extended (when an external force is not acting on the probe pin 3).
  • the conducting portion 32 on the upper side in the Z direction (hereinafter referred to as the first conducting portion 32) has a vertex portion 321 at a position slightly away from the center line CL2 to the left in the X direction.
  • the lower conduction portion 33 (hereinafter referred to as the second conduction portion 33) of the Z direction is arranged such that the apex portion 331 is slightly separated from the center line CL2 on the right side in the X direction.
  • first conductive portion 32 and the second conductive portion 33 have slope portions 322 and 332 that are disposed on the tip portions 32a and 32b so as to be spaced apart from each other along the longitudinal direction. Is provided.
  • the slope portions 322 and 332 are contact surfaces, and are disposed so as to face each other when the pair of elastic support portions 34 and 35 are compressed (when an external force is applied to the probe pin 3). Yes.
  • the vertex portions 321 and the flange 331 are not arranged on the center line CL2 and opposed to each other along the center line CL2, but are shifted from the left and right with respect to the center line CL2, and a pair of elastic supports When the portions 34 and 35 are contracted, the slope portions 322 and 332 are in slidable contact with each other in the vicinity of the center line CL2 without directly contacting along the center line CL2.
  • the first conductive portion 32 of the first elastic unit 31 ⁇ / b> A (shown in FIG. 6) adjacent to the first contact portion 41 (that is, the first contact portion 40) is the first contact portion 41.
  • the second conductive portion 33 of the first elastic unit 31A is connected to the second conductive portion 33 of the third elastic unit 33C (shown in FIG. 6) adjacent to the first elastic unit 33A.
  • the first conductive portion 32 of the second elastic unit 31B (shown in FIG. 6) adjacent to the second contact portion 51 (that is, the second contact portion 50) is the fourth elastic unit 31D (adjacent to the second elastic unit 31B). 6) and the second conductive portion 33 of the second elastic unit 31 ⁇ / b> B are connected to the second contact portion 51.
  • a base portion 33 b of the second conductive portion 33 of one elastic unit 31 and a base portion 32 b of the first conductive portion 32 of another elastic unit 31 adjacent to the one elastic unit 31 are included. And are connected via a connecting portion 36 extending along the longitudinal direction (Z direction).
  • each of the elastic units 31 is arranged point-symmetrically with respect to a virtual point P that is on the center line CL ⁇ b> 2 and is intermediate between the first conduction part 32 and the second conduction part 33. Has been.
  • each of the pair of elastic support portions 34 and 35 is provided symmetrically with respect to the center line Cl2 in the X direction, as shown in FIG. That is, each of the pair of elastic support portions 34 and 35 has a center line CL2 extending in the longitudinal direction from the base portions 32b and 33b of the first conducting portion 32 and the second conducting portion 33 in the direction intersecting the longitudinal direction.
  • the base portions 32b and 33b of the first conductive portion 32 and the second conductive portion 33 are connected and supported by, for example, narrow curved arm portions without projecting symmetrically on both sides, and without crossing the center line CL2. ing.
  • each of the pair of elastic support portions 34 and 35 has a curved frame shape (for example, an arc frame shape) configured by a narrow curved arm portion, and can be expanded and contracted along the longitudinal direction of the probe pin 3. Is provided.
  • the curved frame shape is elastically deformed and bent so that the contact portion 322 of the first conduction portion 32 and the contact portion 332 of the second conduction portion 33 are in contact with each other. It has become.
  • the elastic support portions 34 and 35 are provided symmetrically with respect to a straight line ML passing through the intermediate points 341 and 351 in the Z direction of the elastic support portions 34 and 35 in the Z direction.
  • the right elastic support portion 34 in the X direction includes connection portions 342, 343 connected to the right side of the first conduction portion 32 and the second conduction portion 33 in the X direction, It is comprised by the circular-arc-shaped belt
  • the left elastic support part 35 in the X direction is connected to the connection parts 352 and 353 connected to the left side of the first conduction part 32 and the second conduction part 33 in the X direction, and the circle connecting the connection parts 352 and 353. And an arcuate belt portion 354.
  • Each of the connecting portions 342, 343, 352, 353 extends from the bases of the first conducting portion 32 and the second conducting portion 33 so as to be curved away from the straight line ML. Thereby, the stress applied to the joint portion between the first conductive portion 32 and the second conductive portion 33 and each of the pair of elastic support portions 34 and 35 is dispersed while securing the elastic force. Further, each of the arc-shaped strip portions 344 and 354 has a substantially semicircular ring shape.
  • the first contact portion 40 extends along the center line CL ⁇ b> 2, the first contact portion 41 provided at the free end portion (the upper end portion in the Z direction), and the elastic portion 30. Are connected to each other by a pair of support protrusions 42 provided at the base end (the lower end in the Z direction) and a through hole 43 provided at the free end.
  • the first contact part 41 has an asymmetric wave shape with respect to the center line CL2 in the X direction.
  • the support protrusion 42 protrudes from the base end portion in the X direction, and the distance L1 from the center line CL2 to the tip end 421 is between the center points 341 and 351 of the pair of elastic support portions 34 and 35 from the center line CL2. It is provided to be larger than the distance L2 to each. That is, the support protrusion 42 can come into contact with the step portion 14 of the upper housing 10 when the probe pin 3 is stored in the storage portion 11 of the housing 2.
  • the through hole 43 has a substantially rectangular shape, and one side of the free end portion side is formed in a wave shape along the contact portion 41.
  • the second contact portion 50 extends along the center line CL ⁇ b> 2, and the contact portion 51 provided at the free end (lower end in the Z direction) and the elastic portion 30 are provided. It is comprised with a pair of support protrusion 52 provided in the base end part (end part of the upper side of Z direction) connected.
  • the second contact portion 51 has a semicircular shape.
  • the support protrusion 52 protrudes from the base end portion in the X direction, and has the same shape and size as the support protrusion 42 of the first contact portion 40. That is, the support protrusion 52 has a distance L1 from the center line CL2 to the tip 521 larger than the distance L2 from the center line CL2 to each of the intermediate points 341 and 351 of the pair of elastic support portions 34 and 35. , Provided. Further, the support protrusion 52 can come into contact with the step portion 24 of the lower housing 20 when the probe pin 3 is stored in the storage portion 11 of the housing 2.
  • the first contact portion 40 has a width L3 (shown in FIG. 7) in the X direction excluding the base end portion on which the pair of support protrusions 42 are provided. It is provided so as to be smaller than the width L6 of the side storage portion 13 in the X direction.
  • the base end portion of the first contact portion 40 has a distance L4 (shown in FIG. 7) between the tip ends 421 of the pair of support protrusions 42 equal to the width L7 in the X direction of the main body side storage portion 12 of the upper housing 10. It is provided so as to be substantially equal.
  • the second contact portion 50 has a width L5 (shown in FIG. 7) in the X direction excluding the base end portion on which the pair of support protrusions 52 are provided, in the X direction of the contact side storage portion 23 of the lower housing 20. It is provided to be smaller than the width L8.
  • the base end portion of the second contact portion 50 is provided so that the distance L4 between the tip ends 521 of the pair of support protrusions 52 is substantially equal to the width L7 in the X direction of the main body side storage portion 22 of the lower housing 20. It has been.
  • the distance L 9 between the upper side surface of the support protrusion 42 in the Z direction and the lower side surface of the support protrusion 52 in the Z direction is It is provided so as to be shorter than the distance L10 between the portion 14 and the step portion 24 of the lower housing 20.
  • each probe pin 3 in the initial state housed in the housing 2 includes the first contact portion 41 of the first contact portion 40 and the second contact portion 51 of the second contact portion 50.
  • the first conducting portion 32 and the second conducting portion 33 are separated, and the pair of elastic support portions 34 and 35 can be expanded and contracted.
  • each probe pin 3 is housed inside the housing 2 without rattling, and can be contracted smoothly.
  • the apex portion 321 of the first conducting portion 32 and the apex portion 331 of the second conducting portion 33 are not facing each other, but are in contact with each other with a slight shift in the X direction. Further, as the first contact portion 40 and the second contact portion 50 are pushed into the housing 2, each of the pair of elastic support portions 34 and 35 is gradually compressed in the Z direction.
  • each first conductive portion 32 is pushed to the left in the X direction from the center line CL ⁇ b> 2 by the opposing second conductive portion 33.
  • each second conductive portion 33 is pushed from the center line CL2 to the right in the X direction by the opposing first conductive portion 32.
  • the slope portion 322 on the right side in the X direction of the first conduction portion 32 and the slope portion 332 on the left side in the X direction of the second conduction portion 33 slide in a state of surface contact with each other. For this reason, high contact reliability is securable.
  • the vertex portion 321 of the first conduction portion 32 and the vertex portion 331 of the second conduction portion 33 are paired with the pair of elastic support portions 34. , 35, or the first contact portion 41 and the second contact portion 51 are completely accommodated in the housing 2. Thereby, movement of the 1st contact part 40 and the 2nd contact part 50 stops.
  • the probe pin 3 having the above-described configuration includes a plurality of elastic units 31 connected along the center line CL2, and the elastic portion 30 that expands and contracts along the center line CL2, and the longitudinal direction of the probe pin 3 A first contact part 41 and a second contact part 51 provided at both ends of the elastic part 30 are provided.
  • each of the plurality of elastic units 31 that connect the first contact part 41 and the second contact part 51 in series extends along the longitudinal direction of the probe pin 3, respectively.
  • a pair of elastic support portions 34 and 35 for connecting the first conduction portion 32 and the second conduction portion 33 are provided.
  • each of the elastic units 31 is provided symmetrically with respect to the center line CL2 and the first conduction part 32 and the second conduction part 33 that are disposed so as to be capable of contacting and separating along the center line CL2. And a pair of elastic support portions 34 and 35 that connect the first conduction portion 32 and the second conduction portion 33.
  • electrical_connection part 33 have each the slope parts 322 and 332 arrange
  • each of the elastic units 31 is an example of a contact portion that extends along the longitudinal direction of the probe pin 3 and is disposed so as to be spaced from and opposed to each other along the longitudinal direction of the probe pin 3.
  • the first conducting portion 32 and the second conducting portion 33 having the slope portions 322 and 332 provided at the tip portions 32a and 33a, respectively, and the first conducting portion 32 and the second conducting portion on both sides of the center line CL2 extending in the longitudinal direction of the probe pin 3.
  • the first conductive portion 32 and the second conductive portion 33 project symmetrically from the respective base portions 32b and 33b of the two conductive portions 33 in the direction intersecting the longitudinal direction of the probe pin 3 and do not cross the center line CL2.
  • the base portions 32b and 33b of the first conductive portion 32 are connected to and supported by the base portions 32b and 33b so as to be expandable and contractable along the longitudinal direction. 322 and the inclined surface portion 332 of the second conductive portion 33 has a pair of elastic support portions 34, 35 capable of contacting.
  • the plurality of elastic units 31 are adjacent to the first contact part 41 and the first conduction part 32 is connected to the first contact part 41;
  • the second conductive portion 33 includes a second elastic unit 31B coupled to the second contact portion 51, and in the two adjacent elastic units of the plurality of elastic units 31, the first conductive portion 32 of one elastic unit.
  • the base 32b and the base 33b of the second conducting portion 33 of the other elastic unit 31 are connected to each other. Thereby, since the shortest conduction
  • the slope portion 322 of the first conduction portion 32 and the slope portion 332 of the second conduction portion 33 are in surface contact. Thereby, the contact resistance of the 1st conduction
  • electrical_connection part 33 can be suppressed, and favorable electroconductivity can be ensured.
  • the contact portion 41 of the first contact portion 40 has an asymmetric shape with respect to the center line CL2.
  • the shape of the contact part 41 can be changed as appropriate according to the design of the probe pin 3 or the like, the degree of freedom in designing the probe pin 3 can be expanded.
  • each of the pair of elastic support portions 34 and 35 has a curved frame shape. Thereby, the elastic force of each elastic support part 34 and 35 is raised.
  • a base portion 33 b of the second conductive portion 33 of one elastic unit 31 and a base portion 32 b of the first conductive portion 32 of another elastic unit 31 adjacent to the one elastic unit 31 are included. And are connected via a connecting portion 36 extending along the longitudinal direction (Z direction). Thereby, the 1st contact part 41 and the 2nd contact part 51 can be displaced more reliably along the centerline CL2.
  • each of the elastic units 31 is arranged point-symmetrically with respect to a virtual point P that is on the center line CL ⁇ b> 2 and is intermediate between the first conduction part 32 and the second conduction part 33. Has been. Thereby, the 1st contact part 41 and the 2nd contact part 51 can be approached or spaced apart stably with sufficient balance along the centerline CL2.
  • the slope portion 322 of the first conduction portion 32 and the slope portion 332 of the second conduction portion 33 are arranged to face each other so as to press each other when the pair of elastic support portions 34 and 35 contract. . Thereby, high contact reliability is securable.
  • the plurality of probe pins 3 can be extended and contracted independently. Therefore, for example, even if the device under test is tilted, each of the first contact portions 41 and the second contact portions 51 of the plurality of probe pins 3 comes into contact with the device under test in a flexible manner corresponding to the tilt. be able to. Thereby, the inspection jig 1 having high contact stability can be obtained.
  • (Second Embodiment) 13 and 14 are diagrams showing the probe pin 103 of the second embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described.
  • the probe pin 103 of the second embodiment is different from the first embodiment in that a first conducting portion 62 and a second conducting portion 63 having a substantially equilateral triangular shape are provided. ing.
  • electrical_connection part 63 have the same structure as the 1st conduction
  • first conductive portion 62 and the second conductive portion 63 have slope portions 322 and 332 that are disposed on the tip portions 62a and 62b so as to be spaced apart from each other along the longitudinal direction. Is provided.
  • Each of the pair of elastic support portions 34 and 35 supports the base portion 62b of the first conduction portion 62 and the base portion 63b of the second conduction portion 63 connected to each other without straddling the center line CL2.
  • FIG. 15 and 16 are diagrams showing a probe pin 203 of the third embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.
  • the probe pin 203 of the third embodiment has a first conducting portion 72 having a flag pole shape extending along the center line CL2, and a substantially rectangular shape extending along the center line CL2.
  • the second conducting part 73 is provided, and the first conducting part 72 and the second conducting part 73 are different from the first embodiment in that the second conducting part 73 and the second conducting part 73 are arranged asymmetrically with respect to the virtual point P.
  • the first conductive portion 72 is composed of a rectangular base portion 74 and a distal end portion 75 having a width in the X direction wider than the base portion 74.
  • the distal end portion 75 is provided with an inclined surface portion 76 disposed so as to face the second conduction portion 72.
  • the second conduction portion 73 has a slope portion 77 disposed so as to face the slope portion 76 of the first conduction portion 72.
  • the tip 75 of the first conduction part 72 protrudes from the center line CL2 to the right in the X direction, and the second conduction part 72 has one side surface on the center line CL2. positioned.
  • the slope portion 76 of the first conduction portion 72 and the slope portion 77 of the second conduction portion are arranged so as to correspond to each other, the probe pin 203 is accommodated inside the housing 2, and the contact portions 41 and 51 are connected to each other. They are placed in surface contact with each other when force is applied.
  • each of a pair of elastic support parts 34 and 35 has connected and supported the base 74 of the 1st conduction
  • the probe pin 203 of the third embodiment is housed in the housing 2 and a force is applied directly or indirectly to the first contact portion 41 and the second contact portion 51 to thereby form the first contact portion 40 and the second contact portion. 50 is pushed into the housing 2. Then, the first conductive portion 72 and the second conductive portion 73 of each elastic unit 31 approach each other along the center line CL2, and before reaching the full stroke, the slope portion 76 and the second conductive portion of the first conductive portion 72. The slope portions 77 of each other come into contact with each other and become conductive. As a result, a conduction path along the center line CL2 is formed.
  • the leading end portion 75 of the first conduction portion 72 is pushed from the center line CL2 to the left side in the X direction by the second conduction portion 73.
  • the second conducting portion 73 is pushed to the right in the X direction from the center line CL2 by the tip 75 of the first conducting portion 72. That is, the slope part 76 of the first conduction part 72 and the slope part 77 of the second conduction part 73 slide in a state of surface contact with each other.
  • electrical_connection part 73 are examples of an internal contact part (namely, contact part).
  • (Fourth embodiment) 17 and 18 are diagrams showing a probe pin 303 of the fourth embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described.
  • the probe pin 303 of the fourth embodiment includes a first conducting portion 82 having a substantially rectangular shape extending along the center line CL ⁇ b> 2 and a pair of parallel extensions extending along the center line CL ⁇ b> 2.
  • a second conductive portion 83 having an elastic arm portion 84 is provided, which is different from the first embodiment in that it is arranged symmetrically with respect to the center line CL2 in the X direction.
  • the elastic arm portion 84 of the second conducting portion 83 has a protruding portion 85 that protrudes toward the center line CL2 at the tip thereof.
  • the protrusions 85 are arranged such that the distance between the protrusions 85 facing each other is narrower than the width of the first conduction part 82 in the X direction.
  • Each of the pair of elastic support portions 34 and 35 connects and supports the base portion 82a of the first conduction portion 82 and the base portion 84b of the elastic arm portion 84 of the second conduction portion 83 without straddling the center line CL2. ing.
  • the probe pin 303 according to the fourth embodiment is housed in the housing 2, and a force is applied directly or indirectly to the first contact part 41 and the second contact part 51, so that the first contact part 40 and the second contact part are applied. 50 is pushed into the housing 2. Then, the first conductive portion 82 and the second conductive portion 83 of each elastic unit 31 approach each other along the center line CL2, and before reaching the full stroke, the corner portion 86 of the tip portion of the first conductive portion 82 The projecting portion 85 of the second conducting portion 83 comes into contact. As a result, a conduction path along the center line CL2 is formed.
  • the first conduction portion 82 is pushed between the elastic arm portions 84 of the second conduction portion 83.
  • the protrusions 85 of the pair of elastic arm portions 84 are pushed apart in the direction away from the center line CL2 by the side surfaces 87 of the first conduction portion 82 in the X direction. That is, the first conduction portion 82 slides while being sandwiched between the elastic arm portions 84 of the second conduction portion 83. For this reason, high contact reliability is securable.
  • electrical_connection part 83 are examples of an internal contact part (namely, contact part).
  • (Fifth embodiment) 19 and 20 are diagrams showing a probe pin 403 of the fifth embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.
  • the probe pin 403 of the fifth embodiment is different from the first embodiment in that substantially semi-annular first and second conducting portions 92 and 93 are provided.
  • the first conducting portion 92 and the second conducting portion 93 are arranged symmetrically with respect to the center line CL2 in the X direction and symmetrically with respect to the straight line ML in the Z direction.
  • Each of the pair of elastic support portions 34 and 35 connects and supports the base portion 92a of the first conductive portion 92 and the base portion 93b of the second conductive portion 93 without straddling the center line CL2.
  • the probe pin 403 of the fifth embodiment is housed in the housing 2 and a force is applied directly or indirectly to the first contact portion 41 and the second contact portion 51 to thereby form the first contact portion 40 and the second contact portion. 50 is pushed into the housing 2. Then, the first conducting portion 92 and the second conducting portion 93 of each elastic unit 31 approach each other along the center line CL2, and before reaching the full stroke, the apex 94 and the second apex 94 of the tip portion of the first conducting portion 32 are reached. The vertices 95 at the distal end of the conductive portion 33 come into contact with each other. As a result, a conduction path along the center line CL2 is formed.
  • apex 94 at the distal end of the first conductive portion 32 and the apex 95 at the distal end of the second conductive portion 33 are examples of internal contact portions (ie, contact portions).
  • the pair of conducting portions may be arranged so as to be capable of contacting and separating along the center line CL2 of the probe pin, depending on the design of the probe pin and the like.
  • the shape can be changed as appropriate. That is, a probe pin with a high degree of design freedom can be provided.
  • Both the first contact part 41 and the second contact part 51 may have a shape that is symmetric with respect to the center line CL2, or both may have a shape that is asymmetric with respect to the center line CL2. Good.
  • the shape of the contact portion can be appropriately changed according to the design of the probe pin and the like.
  • the probe pin of the above embodiment is not limited to the electroforming method, and may be manufactured by any other method if possible.
  • the shape of the housing 2 is not limited to a substantially rectangular tube shape, but can be appropriately changed according to the design of the inspection jig.
  • the number of probe pins 3 stored in the inspection jig 1 is not limited to a plurality, and may be one.
  • the probe pin of the present invention is An elastic part having a plurality of elastic units connected along a center line, and extending and contracting along the center line; Contact portions respectively provided at both ends of the elastic portion; With The elastic unit is A pair of conductive portions disposed opposite to each other so as to be contactable and separable along the center line, a pair of elastic support portions provided symmetrically with respect to the center line, and connecting the pair of conductive portions; Have The pair of conductive portions are When the elastic portions are contracted along the center line, they each have an internal contact portion disposed so as to come into contact with each other.
  • the probe pin includes a plurality of elastic units connected along the center line, and includes elastic portions that expand and contract along the center line, and contact portions provided at both ends of the elastic portion, respectively. ing. Thereby, since a contact part can be approached or separated along a centerline, a desired displacement amount can be ensured correctly.
  • a pair of conductive portions that are arranged opposite to each other so that the elastic unit can be contacted and separated along the center line
  • a pair of elastic support portions that are provided symmetrically with respect to the center line and connect the pair of conductive portions
  • the pair of conducting portions each have a contact portion disposed so as to come into contact with each other when the elastic portion is contracted along the center line.
  • the probe pin of the present invention is A first contact portion and a second contact portion provided independently along the longitudinal direction and spaced apart from each other; A plurality of elastic units connecting the first contact part and the second contact part in series; With Each of the elastic units is A first conducting portion and a second conducting portion, each of which is provided at a tip portion, each extending along the longitudinal direction and spaced apart from and facing each other along the longitudinal direction; Both sides of the probe pin center line extending in the longitudinal direction project symmetrically from the respective bases of the first conducting portion and the second conducting portion in the direction intersecting the longitudinal direction, and each is the probe pin center line.
  • the base portions of the first conductive portion and the second conductive portion are connected and supported without straddling, and provided so as to be expandable and contractable along the longitudinal direction, and the contact portion of the first conductive portion when contracted
  • a pair of elastic support portions that can contact the contact portion of the second conduction portion Have A plurality of the elastic units are adjacent to the first contact portion and the first conductive portion is connected to the first contact portion; and the second conductive portion is adjacent to the second contact portion and the second conductive portion.
  • each of the plurality of elastic units that connect the first contact portion and the second contact portion in series extends in the longitudinal direction, respectively. It has a pair of elastic support parts which connect the 1st conduction part and the 2nd conduction part. Thereby, since a 1st contact part and a 2nd contact part can be approached or spaced apart along a probe pin centerline, a desired displacement amount can be ensured correctly.
  • each of the elastic units projects symmetrically from the respective bases of the first conductive part and the second conductive part on both sides of the probe pin center line extending in the longitudinal direction in the direction intersecting the longitudinal direction, and each of the elastic units is a probe.
  • the base portions of the first conducting portion and the second conducting portion are connected and supported without straddling the pin center line, and are provided so as to be expandable and contractable along the longitudinal direction.
  • a pair of elastic support portions that can contact the contact portion of the conducting portion.
  • the plurality of elastic units are adjacent to the first contact portion and the first conductive portion is connected to the first contact portion; and the second elastic portion is adjacent to the second contact portion and the second conductive portion is the second.
  • a second elastic unit coupled to the contact portion, and in two adjacent elastic units of the plurality of elastic units, a base portion of the first conductive portion of one elastic unit and a second conductive portion of the other elastic unit Are connected to each other.
  • each of the pair of elastic support portions may have a curved frame shape.
  • the elastic force of each elastic support portion can be increased.
  • each of the elastic units is arranged point-symmetrically with respect to a virtual point located on the probe pin center line and in the middle of the first conducting portion and the second conducting portion. It is good also as composition which has.
  • the first contact portion and the second contact portion can be stably expanded and contracted along the probe pin center line in a balanced manner.
  • the contact portion may be a contact surface.
  • the contact resistance of the pair of conductive portions can be suppressed, and good electrical conductivity can be ensured.
  • a base portion of the second conductive portion of one elastic unit and the first conductive portion of another elastic unit adjacent to the one elastic unit To the base portion may be connected via a connecting portion extending along the longitudinal direction.
  • the first conducting portion and the second conducting portion can be reliably displaced along the probe pin center line.
  • the contact part of the first conduction part and the contact part of the second conduction part are opposed to each other so as to press each other when the pair of elastic support parts contracts. It is good also as the structure arranged.
  • At least one of the contact portions may have an asymmetric shape with respect to the probe pin center line.
  • the shape of the contact portion can be appropriately changed according to the design of the probe pin and the like. For this reason, the freedom degree of design of a probe pin can be expanded.
  • the housing and the contact portion are exposed from the housing, the pair of conductive portions are separated, and the pair of elastic support portions are extendable and retractable in the housing.
  • the probe pin is housed.
  • an inspection jig including a probe pin that can secure a desired displacement while ensuring a good electrical conductivity.
  • the probe pin and the inspection jig of the present invention can be used, for example, for continuity inspection or operation characteristic inspection of a semiconductor integrated circuit or a semiconductor device.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

L'invention concerne une broche de sonde qui comprend une partie élastique qui comprend une pluralité d'unités élastiques (31) reliées le long d'une ligne centrale (CL2) et qui se dilate et se contracte le long de la ligne centrale (CL2), et des parties de contact (41, 51) disposées aux deux extrémités de la partie élastique. Chaque unité élastique (31) comprend une paire de parties de conduction (32, 33) qui sont disposées dans un agencement face à face et de manière à être aptes à venir en contact l'une avec l'autre et séparées l'une de l'autre le long de la ligne centrale (CL2), et une paire de parties de support élastiques (34, 35) qui sont disposées de manière symétrique par rapport à la ligne centrale (CL2) et qui relient la paire de parties de conduction (32, 33). La paire de parties de conduction (32, 33) ont respectivement des parties de contact internes (322, 332) qui sont disposées de façon à être en contact mutuel lorsque la partie élastique s'est contractée le long de la ligne centrale (CL2).
PCT/JP2016/072398 2015-08-07 2016-07-29 Broche de sonde et gabarit d'inspection la comprenant WO2017026304A1 (fr)

Priority Applications (1)

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CN201680028141.1A CN107615077B (zh) 2015-08-07 2016-07-29 探针以及具备探针的检查夹具

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JP2015-157295 2015-08-07
JP2015157295A JP6641772B2 (ja) 2015-08-07 2015-08-07 プローブピン、および、これを備えた検査治具

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WO2020045066A1 (fr) * 2018-08-28 2020-03-05 オムロン株式会社 Boîtier de broche de sonde, outil d'inspection, unité d'inspection et dispositif d'inspection
WO2020095679A1 (fr) * 2018-11-08 2020-05-14 オムロン株式会社 Broche de sonde et gabarit d'inspection
WO2023188165A1 (fr) * 2022-03-30 2023-10-05 日本電子材料株式会社 Carte sonde

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JP2018197714A (ja) * 2017-05-24 2018-12-13 山一電機株式会社 Ｍｅｍｓ型プローブ、及び、これを使用した電気検査用装置
JP2020180889A (ja) * 2019-04-25 2020-11-05 オムロン株式会社 プローブピン、検査治具および検査ユニット
KR102183326B1 (ko) * 2019-05-30 2020-11-26 리노공업주식회사 컨택트 및 그를 사용한 검사소켓
CN111579837B (zh) * 2020-05-18 2022-09-20 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
TWI801901B (zh) * 2021-06-15 2023-05-11 美商全球連接器科技有限公司 電性檢測元件及電性測試裝置
KR102704948B1 (ko) * 2021-11-17 2024-09-09 (주)포인트엔지니어링 전기 전도성 접촉핀 및 이를 구비하는 검사장치
KR102614928B1 (ko) * 2021-11-24 2023-12-19 (주)티에스이 프로브 카드
TWI833186B (zh) * 2022-03-29 2024-02-21 大陸商迪科特測試科技(蘇州)有限公司 探針及其彈性結構

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WO2020045066A1 (fr) * 2018-08-28 2020-03-05 オムロン株式会社 Boîtier de broche de sonde, outil d'inspection, unité d'inspection et dispositif d'inspection
JP2020034352A (ja) * 2018-08-28 2020-03-05 オムロン株式会社 プローブピン用ハウジング、検査治具、検査ユニットおよび検査装置
WO2020095679A1 (fr) * 2018-11-08 2020-05-14 オムロン株式会社 Broche de sonde et gabarit d'inspection
JP2020076666A (ja) * 2018-11-08 2020-05-21 オムロン株式会社 プローブピンおよび検査治具
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WO2023188165A1 (fr) * 2022-03-30 2023-10-05 日本電子材料株式会社 Carte sonde

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JP6641772B2 (ja) 2020-02-05
TW201706609A (zh) 2017-02-16
CN107615077B (zh) 2020-06-12
CN107615077A (zh) 2018-01-19
JP2017036959A (ja) 2017-02-16

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