WO2019138505A1 - Broche de sonde, serre-joint d'inspection, unité d'inspection, et dispositif d'inspection - Google Patents

Broche de sonde, serre-joint d'inspection, unité d'inspection, et dispositif d'inspection Download PDF

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Publication number
WO2019138505A1
WO2019138505A1 PCT/JP2018/000508 JP2018000508W WO2019138505A1 WO 2019138505 A1 WO2019138505 A1 WO 2019138505A1 JP 2018000508 W JP2018000508 W JP 2018000508W WO 2019138505 A1 WO2019138505 A1 WO 2019138505A1
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WO
WIPO (PCT)
Prior art keywords
probe pin
inspection
elastic
longitudinal direction
contact portion
Prior art date
Application number
PCT/JP2018/000508
Other languages
English (en)
Japanese (ja)
Inventor
直哉 笹野
宏真 寺西
貴浩 酒井
時薫 崔
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to PCT/JP2018/000508 priority Critical patent/WO2019138505A1/fr
Priority to JP2019564209A priority patent/JP6908133B2/ja
Priority to CN201880051883.5A priority patent/CN111033272B/zh
Priority to CN202010200587.6A priority patent/CN111239447B/zh
Priority to KR1020180011384A priority patent/KR101903319B1/ko
Priority to KR1020180112245A priority patent/KR102058152B1/ko
Publication of WO2019138505A1 publication Critical patent/WO2019138505A1/fr
Priority to KR1020190167468A priority patent/KR102103370B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted

Definitions

  • the present disclosure relates to a probe pin, an inspection jig provided with the probe pin, an inspection unit provided with the inspection jig, and an inspection apparatus provided with the inspection unit.
  • an inspection device is connected to an electrode part such as an FPC contact electrode for connection with a main substrate installed in the electronic component module or a mounted substrate-to-substrate connector using probe pins. It is done by.
  • the probe pin includes a pair of contacts that can contact the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, and a serpentine portion interposed between the pair of contacts and connecting the pair of contacts There is.
  • the contact pressure between each contact and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component is secured by the meandering portion, and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component are secured. Improve contact reliability.
  • probe pins used for inspection of electronic component modules are also required to be compatible with signals in a high frequency region.
  • the signal in the high frequency region can not necessarily be sufficiently coped with, and the loss of the signal in the high frequency region flowing through the probe pin may become large when the electronic component module is inspected. .
  • the present disclosure relates to a probe pin capable of reducing loss of a signal in a high frequency region while securing contact reliability to an inspection object and an inspection apparatus, an inspection jig including the probe pin, and an inspection unit including the inspection jig
  • An object of the present invention is to provide an inspection apparatus provided with the inspection unit.
  • An example probe pin of the present disclosure is An elastic portion that expands and contracts along the longitudinal direction, A plate-like first contact portion connected to the first end of the elastic portion in the longitudinal direction; A plate-like second contact portion disposed in series with the first contact portion and connected to the second end of the elastic portion in the longitudinal direction;
  • the elastic portion is A first straight portion extending in a direction intersecting the longitudinal direction and having one end in the extending direction connected to the first contact portion; It extends in an arc shape projecting in the direction intersecting the longitudinal direction and away from the first contact portion, and one end in the extending direction is the other end in the extending direction of the first straight portion
  • a curved portion connected to the It extends in a direction intersecting the longitudinal direction, and has a second straight portion whose one end in the extending direction is connected to the other end of the curved portion in the extending direction,
  • the central angle of the curved portion is configured to be larger than 90 degrees and smaller than 180 degrees.
  • an inspection jig of an example of the present disclosure is The probe pin, And a housing having a receptacle capable of receiving the probe pin.
  • the probe pin is housed in the housing portion such that the central angle of the curved portion is larger than 90 degrees and smaller than 180 degrees.
  • an inspection unit of an example of the present disclosure is At least one inspection jig was provided.
  • an inspection apparatus is: At least one inspection unit was provided.
  • the elastic portion extends in the direction crossing the longitudinal direction of the probe pin, and the first straight portion whose one end in the extending direction is connected to the first contact portion, and the longitudinal direction of the probe pin A curved portion extending in an arc shape protruding in a crossing direction and in a direction away from the first contact portion, one end of the extending direction being connected to the other end of the first straight portion in the extending direction; And a second straight portion whose one end in the extending direction is connected to the other end of the bending portion in the extending direction, the central angle of the bending portion being 90 degrees It is configured to be larger than 180 degrees smaller.
  • the probe pin has high contact reliability to the inspection object and the inspection apparatus, and the inspection jig has a small loss of signals in a high frequency region when connected to the inspection object and the inspection apparatus. Can be realized.
  • the inspection jig has high contact reliability with respect to the inspection object and the inspection apparatus, and an inspection unit with little loss of signals in a high frequency region when connected to the inspection object and the inspection apparatus. realizable.
  • the inspection unit realizes an inspection apparatus having high contact reliability to the inspection object and the inspection apparatus, and having a small loss of signals in a high frequency region when connected to the inspection object and the inspection apparatus. it can.
  • FIG. 1 is a cross-sectional perspective view showing an inspection unit of an embodiment of the present disclosure.
  • Sectional drawing along the II-II line of FIG. 1 is a perspective view of a probe pin according to an embodiment of the present disclosure.
  • FIG. 4 is a plan view of the probe pin of FIG. 3;
  • FIG. 4 is an enlarged plan view of an elastic portion of the probe pin of FIG. 3;
  • FIG. 7 is an enlarged plan view of an elastic portion showing a first modified example of the probe pin of FIG. 3;
  • FIG. 14 is a plan view showing a second modification of the probe pin of FIG. 3;
  • the probe pin 10 has conductivity, and is used in a state of being accommodated in the socket 3 as shown in FIGS. 1 and 2, for example, and constitutes the inspection jig 2 together with the socket 3 Do.
  • the inspection jig 2 accommodates, for example, a plurality of thin thin plate-like probe pins 10.
  • the inspection jig 2 constitutes a part of the inspection unit 1.
  • the inspection unit 1 includes, as an example, a substantially rectangular base housing 4 in which a plurality of inspection jigs 2 are incorporated.
  • the base housing 4 is composed of a substantially rectangular plate-shaped first housing 5 and a second housing 6 stacked in the thickness direction of the first housing 5.
  • the socket 3 has a plurality of accommodating portions 7 capable of accommodating the respective probe pins 10 and is held by the first housing 5 and the second housing 6.
  • Each housing portion 7 is surrounded by the socket 3 and the second housing 6 of the base housing 4, and a first contact portion 121 and a second contact portion 131 described later are exposed to the outside of the socket 3 and the base housing 4, respectively. In the state, each probe pin 10 can be accommodated.
  • the 1st contact part 121 is comprised, for example so that contact with the terminal provided in the board
  • the second contact portion 131 is configured to be capable of coming into contact with the terminal 120 of the inspection object (for example, a substrate-to-substrate (BtoB) connector) 110.
  • each probe pin 10 is connected to an elastic portion 11 which expands and contracts along its longitudinal direction (that is, the vertical direction in FIG. 3) and a first end 111 of the elastic portion 11 in the longitudinal direction.
  • a plate-like first contact portion 12 and a plate-like second contact portion 13 connected to the second end 112 in the longitudinal direction of the elastic portion 11 are provided.
  • the probe pin 10 is formed, for example, by an electroforming method, and the elastic portion 11, the first contact portion 12, and the second contact portion 13 are integrally configured.
  • the elastic portion 11 has a serpentine shape as viewed in the thickness direction of the first contact portion 12 (i.e., the paper surface penetrating direction in FIG. 4), and is arranged with a gap 23 therebetween.
  • a plurality of elastic strips (in this embodiment, two elastic strips) 21 and 22 are provided.
  • Each of the elastic strips 21 and 22 has an elongated strip shape, and the first end 211 which is one end in the longitudinal direction of the probe pin 10 is connected to the first contact portion 12, and the other end in the longitudinal direction of the probe pin 10
  • the second end 212 which is a portion, is connected to the second contact portion 13.
  • each of the elastic strips 21 and 22 has four linear portions (ie, first linear portions 31 and 32, second linear portions 51 and 52, and third linear portions). 71, 72, fourth straight portion 91, 92), and three belt-like curved portions (that is, first curved portions 41, 42, second curved portions 61, 62, third curved portions 81, 82) And.
  • the first straight portions 31, 32 extend in a direction (for example, an orthogonal direction) intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction is connected to the first contact portion 12, One end portion 211, 221 is configured.
  • the first straight portions 31 and 32 are connected to the first contact portion 12 from a direction (for example, a direction orthogonal to the longitudinal direction) intersecting with the longitudinal direction of the probe pin 10.
  • the first curved portions 41, 42 project in a direction intersecting the longitudinal direction of the probe pin 10 and in a direction away from the first contact portion 12, and in an arc with respect to a central angle ⁇ 1 larger than 90 degrees and smaller than 180 degrees. It extends along. Further, one end of the first curved portion 41, 42 in the extending direction is connected to the other end of the first straight portion 31, 32 in the extending direction.
  • the second straight portions 51, 52 extend in a direction intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction is the other end of the first bending portion 41, 42 in the extending direction. It is connected.
  • the second straight portions 51, 52 have a first straight line in the longitudinal direction of the probe pin 10 as they move from one end to the other end in the extending direction (that is, as they move away from the first curved portions 41, 42). It extends away from the sections 31, 32.
  • the second curved portions 61, 62 protrude in the direction intersecting the longitudinal direction of the probe pin 10 and in the direction approaching the first contact portion 12, and are arcs with respect to the central angle ⁇ 2 larger than 90 degrees and smaller than 180 degrees. It extends along the Further, one end of the second curved portion 61, 62 in the extending direction is connected to the other end of the second straight portion 51, 52 in the extending direction.
  • the third straight portions 71, 72 extend in a direction intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction is the other end of the second curved portion 61, 62 in the extending direction. It is connected.
  • the third straight portions 71 and 72 extend in the longitudinal direction of the probe pin 10 from the one end to the other end in the extending direction (that is, as they are separated from the second curved portions 61 and 62). It extends away from the parts 51, 52.
  • the third curved portions 81, 82 project in a direction intersecting the longitudinal direction of the probe pin 10 and in a direction away from the first contact portion 12, and in an arc with respect to a central angle ⁇ 3 larger than 90 degrees and smaller than 180 degrees. It extends along. Further, one end of the third curved portion 81, 82 in the extending direction is connected to the other end of the third linear portion 71, 72 in the extending direction.
  • the fourth straight portions 91, 92 extend in a direction (for example, an orthogonal direction) intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction is the extension of the third curved portion 81, 82 It is connected to the other end of the direction.
  • the fourth straight portion 91, 92 has a third straight line in the longitudinal direction of the probe pin 10 as it goes from one end to the other end in the extending direction (that is, as it moves away from the third curved portion 81, 82). It extends away from the parts 71, 72.
  • the other ends of the fourth straight portions 91 and 92 in the extending direction are connected to the second contact portion 13 to configure the second ends 212 and 222.
  • the fourth straight portions 91 and 92 are connected to the second contact portion 13 in the longitudinal direction of the probe pin 10.
  • the first straight portions 31, 32 and the fourth straight portions 91, 92 pass straight through the center of curvature of the second curved portions 61, 62 and extend in a direction orthogonal to the longitudinal direction of the probe pin 10.
  • the second straight portions 51 and 52 and the third straight portions 71 and 72 are disposed symmetrically with respect to the straight line L1
  • the first curved portions 41 and 42 and the third curved portions 81 and 82 with respect to the straight line L1. Are arranged symmetrically.
  • each of the elastic strips 21 and 22 (that is, in the width direction orthogonal to the extending direction of the path between the first end 211 and 221 and the second end 212 and 222 of each elastic strip 21 or 22
  • the lengths W1 and W2 are configured to be smaller than the shortest distance W3 between the adjacent elastic strips 21 and 22.
  • the linear distance between the first bending portions 41 and 42 is shown as the shortest distance W5.
  • the first contact portion 12 extends along the longitudinal direction of the probe pin 10, and one end portion in the extending direction is connected to the first end portion 111 of the elastic portion 11.
  • a first contact portion 121 is provided at the other end of the first contact portion 12 in the extending direction.
  • the second contact portion 13 extends along the longitudinal direction of the probe pin 10, and one end portion in the extending direction is connected to the second end portion 112 of the elastic portion 11.
  • a second contact portion 131 is provided at the other end of the second contact portion 13 in the extending direction.
  • Each of the first contact portion 12 and the second contact portion 13 is arranged in series along an imaginary straight line L ⁇ b> 2 extending along the longitudinal direction of the probe pin 10. That is, as shown in FIG. 5, each of the straight portions 31, 32, 51, 52, 71, 72, 91, 92 of the elastic portion 11, the first curved portions 41, 42 and the third curved portions 81, 82
  • the second curved portions 61 and 62 are disposed between the first contact portion 12 and the second contact portion 13 and are disposed on the same side with respect to the virtual straight line L2 (that is, one side in the width direction of the first contact portion 12). And it arrange
  • a support portion 122 is provided on one side in the width direction of the middle portion in the extending direction of the first contact portion 12.
  • the supporting portion 122 is a first straight line with respect to the virtual straight line L3 in a direction (for example, an orthogonal direction) intersecting the longitudinal direction of the probe pin 10 from the first contact portion 1 when viewed from the thickness direction of the first contact portion 12 It protrudes toward the parts 31 and 32 side.
  • the support portion 122 of the first contact portion 12 has a surface on the first contact portion 121 side in the longitudinal direction of the probe pin 10
  • the housing 7 is configured to be in contact with the surface facing the first housing 5 of the second housing 6 that constitutes the housing 7.
  • the fourth linear portion 91 of the strip-like elastic piece 21 is on the surface of the socket 3 constituting the housing portion 7 facing the second housing 6 in the surface on the second contact portion 131 side in the longitudinal direction. It is comprised so that it may contact
  • the central angles ⁇ 1, ⁇ 2, ⁇ 3 of the respective curved portions 41, 42, 61, 62, 81, 82 are larger than 90 degrees and smaller than 180 degrees Is configured.
  • the first linear portion 31 of the elastic strip 21 may be configured to abut on the surface of the second housing 6 facing the first housing 5. Good. That is, the probe pin 10 may be supported by the first linear portion 31 and the fourth linear portion 91 of the strip-like elastic piece 21 inside the accommodation portion 7.
  • a through hole 132 penetrating the second contact portion 13 in the thickness direction is provided at the end of the second contact portion 13 on the side of the elastic portion 11 in the longitudinal direction of the probe pin 10. It is done.
  • the through holes 132 extend in the longitudinal direction of the probe pin 10 and are connected to the gaps 23 between the elastic strips 21 and 22. The through holes 132 disperse the stress generated in the second contact portion 13.
  • central angle (theta) 1 of the 1st curved part 41, 42 is 180 degrees or more, sufficient distance can not be provided between the 1st linear parts 31 and 32 and the 2nd linear parts 51 and 52. Therefore, for example, the signal in the high frequency area flowing through the first straight portions 31, 32 interferes with the signal in the high frequency area flowing through the second straight portions 51, 52, making it difficult to reduce the loss of signals in the high frequency area. become.
  • the elastic portion 11 extends in a direction intersecting the longitudinal direction of the probe pin 10, and a first straight portion in which one end portion 111 in the extending direction is connected to the first contact portion 12 31 and 32, extending in an arc shape projecting in a direction crossing the longitudinal direction of the probe pin 10 and away from the first contact portion 12, one end of the extending direction is the extension of the first straight portion 31, 32
  • the first curved portions 41 and 42 connected to the other end in the existing direction, and one end portion in the extending direction which extends in a direction intersecting the longitudinal direction of the probe pin 10 is the extension of the first curved portions 41 and 42
  • second straight portions 51 and 52 connected to the other end of the direction, and the central angle .theta.1 of the first curved portions 41 and 42 is configured to be larger than 90 degrees and smaller than 180 degrees.
  • each of the curved portions 41, 42, 61, 62, 81, 82 has a central angle ⁇ 1, ⁇ 2, ⁇ 3 of 180 degrees (hereinafter referred to as a probe pin of the comparative example), and each curved portion 41, Insertion loss and return loss were measured for probe pins 10 (hereinafter referred to as probe pins in the examples) having central angles ⁇ 1, ⁇ 2, ⁇ 3 of 42, 61, 62, 81, 82 all at 150 degrees.
  • an insertion loss of ⁇ 1 dB occurred for the signal of 14.28 Gbps, and a return loss of ⁇ 10 dB occurred for the signal of 13.40 Gbps.
  • an insertion loss of ⁇ 1 dB occurs for a 30.60 Gbps signal, and a ⁇ 10 dB return loss occurs for a 30.24 Gbps signal. . That is, by configuring the probe pin 10 such that the central angle ⁇ 1 of the first curved portions 41 and 42 is larger than 90 degrees and smaller than 180 degrees, it is possible to reduce the loss of signals in the high frequency region.
  • the elastic portion 11 is composed of a plurality of elastic strips arranged with a gap 23 therebetween, and the widths W1 and W2 of the elastic strips 21 and 22 are adjacent to each other. It is configured to be smaller than the shortest distance W3 between the elastic strips 21 and 22.
  • inspection contact with the inspection object and the inspection apparatus is high by the probe pin 10, and inspection and repair with a small loss of signals in the high frequency region when connected to the inspection object and the inspection apparatus.
  • Tool 2 can be realized.
  • the inspection jig 2 has high contact reliability to the inspection object and the inspection apparatus, and the inspection unit has a small loss of signals in the high frequency region when connected to the inspection object and the inspection apparatus. 2 can be realized.
  • the inspection unit 1 can constitute a part of the inspection apparatus. According to such an inspection apparatus, the inspection unit 1 realizes an inspection apparatus having high contact reliability with respect to the inspection object and the inspection apparatus and little loss of signals in a high frequency region when connected to the inspection object and the inspection apparatus. it can.
  • the elastic portion 11 has first linear portions 31, 32, first curved portions 41, 42 and second linear portions 51, 52, and the central angle of the first curved portions 41, 42 is larger than 90 degrees and 180 degrees. It should just be comprised so that it may become smaller.
  • the elastic portion 11 may be configured by only the first straight portions 31 and 32, the first bending portions 41 and 42, and the second straight portions 51 and 52.
  • the elastic portion 11 is not limited to the case where it has the two strip-like elastic pieces 21 and 22 disposed with the gap 23 therebetween.
  • the elastic portion 11 may have four elastic strips 21, 22, 24, 25 spaced apart from one another, although not shown in the figure. It may have one elastic band.
  • the widths W1 and W2 of the elastic strips 21 and 22 are not limited to the case where the widths W1 and W2 of the elastic strips 21 and 22 are smaller than the shortest distance W3 between the adjacent elastic strips 21 and 22.
  • first contact portion 12 and the second contact portion 13 can be appropriately changed according to the design and the like of the probe pin 10.
  • the second contact portion 13 may be provided on each of the tips of the pair of legs 133 and 134 extending along the longitudinal direction of the probe pin 10. That is, each of the first contact portion 121 and the second contact portion 131 can be appropriately changed in shape, position, and the like according to various aspects of the inspection apparatus or the inspection object.
  • the configurations of the inspection jig 2 and the base housing 4 can be appropriately changed according to various aspects of the inspection apparatus or the inspection object. That is, the inspection jig 2 and the base housing 4 can be generalized, and the productivity of the inspection unit 1 (and thus the inspection apparatus) can be improved.
  • the probe pin 10 of the first aspect of the present disclosure is An elastic portion 11 extending and contracting along the longitudinal direction; A plate-like first contact portion 12 connected to the first end portion 111 in the longitudinal direction of the elastic portion 11; And a plate-like second contact portion 13 disposed in series with the first contact portion 12 and connected to the second end 112 in the longitudinal direction of the elastic portion 11;
  • the elastic portion 11 is The first straight portion 31 extends in a direction intersecting the longitudinal direction, and one end portion in the extending direction is connected to the first contact portion; While extending in the shape of an arc projecting in the direction crossing the longitudinal direction and in the direction away from the first contact portion 12, one end portion in the extending direction is the other extending direction of the first straight portion 31
  • the second linear portion 51 extends in a direction intersecting the longitudinal direction, and has one end in the extending direction connected to the other end in the extending direction of the curved portion 41,
  • the central angle ⁇ 1 of the curved portion 41 is configured
  • the probe pin 10 of the first aspect since a distance can be provided between the first linear portion 31 and the second linear portion 51 in the longitudinal direction of the probe pin 10, for example, it flows in the first linear portion 31 Interference with the signal of the high frequency area flowing through the second straight portion 51 of the signal of the high frequency area can be reduced. As a result, it is possible to realize the probe pin 10 capable of reducing the loss of the signal in the high frequency region while securing the contact reliability to the inspection object and the inspection apparatus.
  • the probe pin 10 of the second aspect of the present disclosure is The elastic portion 11 is composed of a plurality of elastic strips 21 and 22 disposed with a gap 23 therebetween, The widths W1 and W2 of the plurality of elastic strips 21 and 22 are smaller than the shortest distance W3 between the adjacent elastic strips 21 and 22.
  • each of the strip elastic pieces 21 and 22 is a probe pin 10 when each of the first contact portion 121 and the second contact portion 131 is in contact with the inspection object and the inspection device. Even when compressed in the longitudinal direction, contact between the elastic strips 21 and 22 can be prevented, and a probe pin 10 capable of ensuring high contact reliability can be realized.
  • the inspection jig 2 of the third aspect of the present disclosure is The probe pin 10; And a socket 3 having a receptacle 7 capable of receiving the probe pin 10;
  • the probe pin 10 is housed in the housing portion 7 so that the central angle of the curved portion 41 is larger than 90 degrees and smaller than 180 degrees.
  • the inspection jig 2 of the third aspect inspection with high contact reliability to the inspection object and the inspection apparatus by the probe pin 10 and little loss of signals in a high frequency region when connected to the inspection object and the inspection apparatus
  • the jig 2 can be realized.
  • the inspection unit 1 of the fourth aspect of the present disclosure is At least one inspection jig was provided.
  • the inspection jig 2 has high contact reliability with respect to the inspection object and the inspection apparatus, and inspection with a small loss of signals in the high frequency region when connected to the inspection object and the inspection apparatus Unit 2 can be realized.
  • the inspection apparatus of the fifth aspect of the present disclosure is At least one inspection unit 1 was provided.
  • the inspection device has high contact reliability with respect to the inspection object and the inspection device, and a small loss of signal in the high frequency region when connected to the inspection object and the inspection device realizable.
  • the probe pin of the present disclosure can be applied to, for example, an inspection jig used for inspection of a liquid crystal panel.
  • the inspection jig of the present disclosure can be applied to, for example, an inspection unit used for inspection of a liquid crystal panel.
  • the inspection unit of the present disclosure can be applied to, for example, an inspection device of a liquid crystal panel.
  • the inspection apparatus of the present disclosure can be used, for example, for inspection of a liquid crystal panel.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)

Abstract

Selon l'invention, une broche de sonde est équipée d'une partie élastique, d'une première partie contact et d'une seconde partie contact. La partie élastique possède : une première partie droite telle qu'une partie extrémité de direction prolongement est reliée à une première partie contact ; une partie courbe telle qu'une partie extrémité de direction prolongement est reliée à une autre partie extrémité de direction prolongement de la première partie droite ; et une seconde partie droite telle qu'une partie extrémité de direction prolongement est reliée à une autre partie extrémité de direction prolongement de la partie courbe. L'angle central de la partie courbe est configuré de manière à être supérieur à 90 degrés et inférieur à 180 degrés.
PCT/JP2018/000508 2018-01-11 2018-01-11 Broche de sonde, serre-joint d'inspection, unité d'inspection, et dispositif d'inspection WO2019138505A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
PCT/JP2018/000508 WO2019138505A1 (fr) 2018-01-11 2018-01-11 Broche de sonde, serre-joint d'inspection, unité d'inspection, et dispositif d'inspection
JP2019564209A JP6908133B2 (ja) 2018-01-11 2018-01-11 プローブピン、検査治具、検査ユニットおよび検査装置
CN201880051883.5A CN111033272B (zh) 2018-01-11 2018-01-11 探针、检查工具、检查单元和检查装置
CN202010200587.6A CN111239447B (zh) 2018-01-11 2018-01-11 探针、检查工具、检查单元和检查装置
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KR102103370B1 (ko) 2020-04-22
CN111033272B (zh) 2022-07-26
JP6908133B2 (ja) 2021-07-21
JPWO2019138505A1 (ja) 2020-08-06
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CN111033272A (zh) 2020-04-17

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