WO2019024419A1 - 一种制备合金金属粉末的雾化装置和方法 - Google Patents

一种制备合金金属粉末的雾化装置和方法 Download PDF

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Publication number
WO2019024419A1
WO2019024419A1 PCT/CN2017/120070 CN2017120070W WO2019024419A1 WO 2019024419 A1 WO2019024419 A1 WO 2019024419A1 CN 2017120070 W CN2017120070 W CN 2017120070W WO 2019024419 A1 WO2019024419 A1 WO 2019024419A1
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Prior art keywords
oxygen
atomization
alloy metal
containing gas
metal powder
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PCT/CN2017/120070
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English (en)
French (fr)
Inventor
曾玉林
万捷
吴福忠
黄喜南
徐晓华
蔡爱玲
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米亚索乐装备集成（福建）有限公司
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Priority to BR112018014927-6A priority Critical patent/BR112018014927A2/pt
Priority to US16/087,933 priority patent/US20210197265A1/en
Priority to JP2018552773A priority patent/JP2019527290A/ja
Priority to CA3010486A priority patent/CA3010486A1/en
Priority to KR1020187028729A priority patent/KR20190088003A/ko
Priority to EP17889523.1A priority patent/EP3459658A4/en
Publication of WO2019024419A1 publication Critical patent/WO2019024419A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/0848—Melting process before atomisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/086—Cooling after atomisation
    • B22F2009/0876—Cooling after atomisation by gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/088—Fluid nozzles, e.g. angle, distance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/03—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/10—Inert gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • the present application relates to, but is not limited to, an atomizing device, and more particularly to an atomizing device for preparing an alloy metal powder.
  • the alloy powder for the application in the field of solar energy is mainly prepared by an air atomization powdering device, which is mainly used for preparing various metal powders. Since the melting point of each metal component in the alloy powder applied in the solar field is very different, for example, in copper indium gallium alloy, the melting point of indium is 156.6 ° C, the melting point of gallium is 29.8 ° C, and the melting point of copper is 1083.4 ° C in copper indium gallium.
  • Indium-based alloy phase and copper-gallium intermetallic compound are mainly present in the alloy phase of the alloy powder, and the solid-liquid coexistence temperature range of the indium-based alloy is relatively low due to the low melting point of the indium-based alloy (the solid-liquid coexistence temperature range is up to 250) ⁇ 600 ° C), which leads to serious agglomeration and adhesion sites in the alloy powder produced by the current gas atomized milling device, and a large number of small satellite balls are adhered to the surface of the alloy powder.
  • This not only makes the alloy powder yield too low, but also causes the alloy powder to have poor fluidity, which affects the subsequent use of the alloy powder. For example, when the target is sprayed, the conveying alloy powder often has a blockage of the powder feeding system, and the powder feeding is uneven, and the like. It also affects the performance of the final product produced.
  • the present application provides an atomization device for preparing an alloy metal powder, which enables the copper indium gallium alloy metal powder to be generated on the surface of the powder during the powdering process without introducing other metal impurities during the atomization process. Passivation, thereby controlling the sphericity of the alloy metal powder, the number of satellite ball powders and the phenomenon of adhesion between powders, and finally improving the fluidity of the alloy metal powder.
  • the present application provides an atomization device for preparing an alloy metal powder, comprising a body provided with a spray chamber, the spray chamber comprising:
  • An inlet configured to introduce an alloy metal liquid
  • a high pressure inert gas piping system configured to provide a high pressure inert gas as an atomizing medium and power to the alloy metal liquid introduced into the atomization zone of the atomization chamber to cause said Alloy metal liquid atomization;
  • An oxygen-containing gas piping system configured to deliver an oxygen-containing gas to the atomization zone to passivate a surface of the alloy metal powder obtained after atomization.
  • the oxygen-containing gas piping system includes an oxygen-containing gas line and an air intake device in fluid communication with the oxygen-containing gas line, the oxygen-containing gas line passing through the air intake device to The atomization zone delivers the oxygen containing gas.
  • a buffer tray is disposed between the oxygen-containing gas pipeline and the air intake device, and a buffer cavity is disposed in the buffer tray, and the oxygen-containing gas pipeline passes through the buffer cavity and the buffer
  • the intake device is in fluid communication.
  • the oxygen-containing gas pipeline is a low-pressure oxygen-containing gas pipeline, and the pressure in the low-pressure oxygen-containing gas pipeline is not less than 0.2 MPa.
  • the pressure in the low pressure oxygen-containing gas line is in the range of 0.2 MPa to 0.9 MPa.
  • the air intake device includes a plurality of metal tubes that are vertically fixed at an upper portion of the spray chamber and are evenly spaced in a horizontal direction.
  • the air intake device includes a connecting pipe in fluid communication with the oxygen-containing gas line and an annular pipe in fluid communication with the connecting pipe, the annular pipe is provided with a gas jet hole, and the gas jet hole is along
  • the annular tubes are evenly spaced apart.
  • the high pressure inert gas piping system includes a high pressure inert gas line and a gas nozzle, the gas nozzle being in fluid communication with the high pressure inert gas line, the gas nozzle being configured to inject high pressure toward the inlet Inert gas.
  • a nozzle is disposed between the high pressure inert gas line and the gas nozzle, and a cavity in fluid communication with the gas nozzle is disposed in the nozzle, and the gas nozzle is evenly spaced in a horizontal direction.
  • the inlet passes through the middle of the jet, the gas nozzles on the jet being oriented towards the inlet.
  • the oxygen-containing gas pipeline system and the high-pressure inert gas pipeline system are respectively provided with a gas flow control device and a pressure control adjustment device.
  • a bottom of the spray chamber is detachably connected with a powder collection tank.
  • the atomization chamber is provided with an air outlet, the air outlet is in fluid communication with an exhaust gas treatment device, and the exhaust gas treatment device includes a cyclone separator and a dust filtration device that are sequentially connected.
  • the body further includes a vacuum melting chamber, the vacuum melting chamber is provided with a melting device and a heating device, the heating device is configured to heat the melting device, the melting device has a liquid outlet, The liquid outlet is in fluid communication with the inlet of the spray chamber through a draft tube.
  • a heat insulating jacket is disposed on an outer circumference of the draft tube.
  • the present application also provides an atomization device for preparing an alloy metal powder, comprising a main body, wherein the main body is provided with a vacuum melting chamber and a spraying chamber from top to bottom, and the vacuum melting chamber is provided with a melting device and a heating device.
  • the heating device heats the melting device, the melting device has a liquid outlet, and the liquid outlet communicates with the top of the spray chamber through a draft tube, and the liquid outlet is closed before atomization In the sealed state, the liquid outlet is opened before the atomization is started, so that the molten metal is delivered to the atomization point in the lower atomization chamber.
  • a gas nozzle is disposed in the atomization chamber, the gas nozzle is connected to a high pressure inert gas pipeline, and the gas nozzle injects a high pressure inert gas toward an outlet of the draft tube, and the atomization chamber is provided with an oxygen gas tube And an air intake device connected to the oxygen-containing gas line, wherein the oxygen-containing gas line delivers an oxygen-containing gas to the atomization chamber through the air intake device.
  • a buffer tray is disposed between the oxygen-containing gas pipeline and the air intake device, and a buffer cavity is disposed in the buffer tray, and the oxygen-containing gas pipeline passes through the buffer cavity and the buffer
  • the intake device is in fluid communication.
  • the oxygen-containing gas pipeline is a low-pressure oxygen-containing gas pipeline, and the pressure in the low-pressure oxygen-containing gas pipeline is not less than 0.2 MPa.
  • the pressure in the low pressure oxygen-containing gas line is in the range of 0.2 MPa to 0.9 MPa.
  • the air intake device includes a plurality of metal tubes vertically fixed at an upper portion of the spray chamber and evenly spaced along a peripheral direction of the spray chamber.
  • the air intake device includes a connecting pipe communicating with the oxygen-containing gas pipeline and an annular pipe in fluid communication with the connecting pipe, the annular pipe is provided with a gas jet hole, and the gas jet hole is along
  • the arrangement of the metal tubes in the circumferential direction is evenly spaced.
  • the annular tube is an annular metal tube.
  • a gas flow control device and a pressure control adjustment device are respectively disposed on the oxygen-containing gas pipeline and the high-pressure inert gas pipeline.
  • a nozzle is disposed between the high pressure inert gas line and the gas nozzle, and a cavity in fluid communication with the gas nozzle is disposed in the spray disk, and the gas nozzle is along the spray disk The circumference is evenly spaced.
  • the gas nozzle is an annular slit.
  • the outlet of the draft tube passes through the middle of the spray disk, and the gas nozzle on the spray disk is disposed toward the outlet of the draft tube.
  • the spray disk is an annular spray disk
  • the cavity is an annular cavity
  • a bottom of the spray chamber is detachably connected with a powder collection tank.
  • the atomization chamber is provided with an air outlet, the air outlet is in fluid communication with an exhaust gas treatment device, and the exhaust gas treatment device includes a cyclone separator and a dust filtration device that are sequentially connected.
  • a heat insulating jacket is disposed on an outer circumference of the draft tube.
  • the application also provides a method of preparing an alloy metal powder, comprising:
  • An oxygen-containing gas is introduced into the atomization zone of the atomization chamber to cause the atomization zone to become an oxidizing atmosphere, thereby passivating the surface of the alloy metal powder obtained after atomization.
  • High pressure inert gas means an inert gas (for example, nitrogen or argon) having a pressure capable of atomizing an alloy metal liquid when being sprayed to an alloy metal liquid by a high pressure inert gas piping system;
  • “Surface passivation of alloy metal powder” means that after the surface of the alloy metal powder is slightly oxidized, it can effectively inhibit the adhesion of the alloy metal powders and reduce the formation of satellite balls;
  • Micro-oxidation on the surface of alloy metal powder means that the surface of the alloy metal powder can be passivated, and the oxidation degree of the alloy metal powder is not changed to change the spherical shape of the alloy metal powder, and the overall oxygen content of the alloy metal powder is as much as possible.
  • the oxidation of the surface of the alloy metal powder at a lower level is limited to the requirement of using the metal powder of the alloy to meet the demand of the sputtering target unit.
  • Low pressure oxygen-containing gas refers to the pressure in the oxygen-containing gas line that enables “micro-oxidation of the surface of the alloy metal powder.”
  • the “annular tube” is not limited to a tube having a toroidal shape, but also includes other shaped tubes that form a closed loop in fluid communication with the connecting tube to release oxygen-containing gas.
  • the atomization chamber of the present application is provided with an oxygen-containing gas pipeline and an air intake device, and the oxygen-containing gas pipeline supplies an oxygen-containing gas to the atomization chamber through the air intake device, and the oxygen-containing gas can be in the atomization process of the alloy metal solution.
  • the surface of the alloy metal powder is passivated. Since the droplet size of the alloy metal solution is atomized during the atomization process, droplets or particles of different sizes will have different velocities in the stable atomizing gas stream.
  • the alloy metal powder passivated by the above surface can significantly reduce the adhesion of small particles, thereby suppressing the formation of satellite balls, and It reduces the sticking phenomenon between powders, especially the indium alloys such as copper indium gallium, which have a large solid-liquid coexistence zone, and the effect is very remarkable.
  • a gas flow control device and a pressure control adjustment device are provided, so that the oxygen-containing gas injected by the air intake device forms an oxidizing atmosphere with controlled oxygen concentration in the atomization chamber;
  • the oxidative strength is determined by the oxygen concentration and flow rate of the injected oxygen-containing gas, and controls the flow rate of the oxygen-containing gas into the atomization zone in the atomization chamber, thereby controlling the oxidation of small droplets and small particles in the atomization process of the alloy metal solution.
  • this controlled oxidation process can be used to modify and passivate the surface of the alloy metal powder, and the powder oxygen content does not affect the performance of the final product.
  • the air outlet of the atomization chamber is connected with the exhaust gas treatment device, so that the atomized gas flows out of the atomization chamber through the air outlet, and the fine powder is separated by the cyclone separator, and then the dust filtering device can be used. Discharge to the atmosphere.
  • the bottom of the atomization chamber is detachably connected with a powder collection tank, so that the alloy metal powder formed by atomization in the atomization chamber falls into the powder collection tank, and the atomization can be obtained by disassembling the powder collection tank. The resulting alloy powder.
  • the oxygen-containing gas pipeline in this application is a low-pressure oxygen-containing gas pipeline.
  • the oxygen-containing gas pipeline in the present application communicates with the air intake device through the buffer cavity, and the buffer cavity enables the air intake device to spray the oxygen-containing gas under a stable pressure environment, thereby effectively achieving accurate flow control of the oxygen-containing gas.
  • the air intake device is a plurality of metal pipes uniformly arranged in the horizontal direction, and the oxygen-containing gas transported by the metal pipe into the atomization chamber can be uniformly distributed.
  • the air intake device of the present application comprises an annular metal tube and a gas jet hole disposed on the annular metal tube to uniformly distribute the oxygen-containing gas transported by the gas injection hole into the atomization chamber.
  • the high-pressure inert gas pipeline communicates with the gas nozzle through the annular spray disk, and the annular spray disk enables the gas nozzle to inject high-pressure inert gas under a stable pressure environment, thereby effectively achieving accurate flow control of the high-pressure inert gas.
  • the outer circumference of the draft tube is provided with a heating and heat insulating sleeve, and the heating and heat insulating sleeve can heat the draft tube to a predetermined temperature before the start of the atomizing operation, so as to prevent the molten metal from solidifying in the guiding tube at the beginning of the atomization. Block the draft tube.
  • Figure 1 is a cross-sectional view of an embodiment of an atomizing device of the present application
  • Figure 3 is a cross-sectional view of another embodiment of the atomizing device of the present application.
  • FIG. 4 is a schematic structural view of an air intake device in an atomizing device of the present application.
  • Figure 5 is a schematic view showing the structure of the bottom of the annular metal pipe in the air intake device of the present application.
  • An embodiment of the present application provides an atomization device for preparing an alloy metal powder, comprising a body provided with a spray chamber, the spray chamber comprising:
  • An inlet configured to introduce an alloy metal liquid
  • a high pressure inert gas piping system configured to provide a high pressure inert gas as an atomizing medium and power to the alloy metal liquid introduced into the atomization zone of the atomization chamber to cause said Alloy metal liquid atomization;
  • An oxygen-containing gas piping system configured to deliver an oxygen-containing gas to the atomization zone to passivate a surface of the alloy metal powder obtained after atomization.
  • the embodiment of the present application also provides a method for preparing an alloy metal powder, and a flow chart of the method is shown in FIG. 2 .
  • the method includes:
  • An oxygen-containing gas is introduced into the atomization zone of the atomization chamber to cause the atomization zone to become an oxidizing atmosphere, thereby passivating the surface of the alloy metal powder obtained after atomization.
  • an atomization device for preparing an alloy metal powder includes a main body 1 having a cylindrical tower body and a conical bottom portion, and a vacuum melting chamber 2 is disposed in the main body 1 from top to bottom.
  • the atomization chamber 3, the vacuum melting chamber 2 is disposed directly above the atomization chamber 3, and is separated by a plate body between the vacuum melting chamber 2 and the atomization chamber 3.
  • the vacuum melting chamber 2 is provided with a melting device 5 and a heating device 4.
  • the melting device 5 is a crucible, and the heating device 4 is disposed around the outer circumference of the melting device 5, and the heating device 4 is capable of heating the melting device 5, and
  • the temperature in the melting device 5 can be heated until all of the alloy metal therein is melted into an alloy metal liquid.
  • a liquid outlet 18 is provided at the bottom of the melting device 5, and the melting device 5 communicates with one end of the draft tube 6 through the liquid outlet 18, and the liquid outlet 18 can introduce the alloy metal liquid in the melting device 5 into the draft tube 6. .
  • the liquid outlet 18 is blocked by a mechanical seal (not shown) before the atomization begins. At the time of atomization, the mechanical seal controls the closing of the liquid outlet 18 as needed to control the flow of the alloy metal liquid through the draft tube 6 to the atomization point.
  • the draft tube 6 passes through the plate body for isolating between the vacuum melting chamber 2 and the atomizing chamber 3, and the outlet 7 at the other end of the draft tube 6 communicates with the top of the atomizing chamber 3, so that the alloy metal liquid can be transported.
  • the atomization is carried out to the top of the atomization chamber 3.
  • the outer circumference of the draft tube 6 is provided with a heating and heat insulating sleeve, and the heating and insulating sleeve can heat the draft tube 6 to a predetermined temperature before the start of the atomizing operation, so as to prevent the alloy metal solution from solidifying in the draft tube 6 at the beginning of the atomization. Block the draft tube.
  • a high-pressure inert gas line 8 At the top of the atomization chamber 3, there are provided a high-pressure inert gas line 8, a ring-shaped spray disk 9 and a gas nozzle 10 which are sequentially connected, and a high-pressure inert gas line 8 is used for conveying a high-pressure inert gas into the atomization chamber 3, and the ring
  • the spray nozzle 9 is horizontally fixed to the top of the atomization chamber 3, and has an annular cavity 11 therein.
  • a plurality of gas nozzles 10 are communicated at the bottom of the annular spray disk 9, and the gas nozzle 10 is along the annular spray disk 9. The circumferential direction is arranged, or an annular slit is used as the gas nozzle 10.
  • the high-pressure inert gas line 8 first delivers the high-pressure inert gas to the annular cavity 11 in the annular spray disk 9 for buffering, and the high-pressure inert gas in the annular cavity 11 is again sent to the gas nozzle.
  • the gas nozzle 10 is continuously and stably injected with a high pressure inert gas.
  • the middle portion of the annular nozzle 9 is a hollow structure, that is, an annular cavity 11, and the draft tube 6 passes through the annular nozzle 9 so that the gas nozzle 10 at the bottom of the annular nozzle 9 surrounds the outlet of the draft tube 6.
  • the gas nozzle 10 is disposed toward the outlet 7 of the draft tube 6, and the high pressure inert gas ejected from the gas nozzle 10 is sprayed to the outlet 7 of the flow tube 6.
  • the alloy metal solution in the draft tube 6 flows out from the outlet 7, and the gas nozzle 10 injects a high-pressure inert gas to the alloy metal solution flowing out from the outlet 7, and atomizes the alloy metal solution.
  • the top of the atomization chamber 3 is further provided with an oxygen-containing gas line 12, a buffer tray 13 and an air inlet device 14 which are sequentially connected, and the oxygen-containing gas line 12 is used for conveying oxygen in the atomization chamber 3.
  • the buffer tray 13 has an annular shape, and an annular buffer chamber 15 is disposed therein.
  • the oxygen-containing gas line 12 communicates with the buffer chamber 15 , and an air intake device 14 is disposed at the bottom of the buffer tray 13 .
  • the air intake devices 14 are a plurality of vertically disposed metal tubes, such as stainless steel tubes, and the air intake devices 14 are evenly spaced along the circumferential direction of the bottom of the buffer tray 13, and one end of the air intake device 14 is in communication with the buffer chamber 15, and the air intake device 14 is further One end is vertically fixed to the upper portion of the atomization chamber 3.
  • the oxygen-containing gas line 12 firstly delivers the oxygen-containing gas to the buffer chamber 15 in the buffer tray 13 for buffering, and the oxygen-containing gas in the buffer chamber 15 is again transported into the air intake device 14.
  • the intake device 14 is configured to deliver an oxygen-containing gas into the atomization chamber 3.
  • the oxygen-containing gas can passivate the surface of the alloy metal powder during the atomization process of the alloy metal solution, and the size of the droplet formed by the atomization of the alloy metal solution during the atomization process is different, and the size is different in the stable atomization gas flow.
  • the droplets or particles will have different velocities, the smaller the particles, the faster the speed; therefore, the small particles tend to collide with the slower particles, and the surface-passivated alloy metal powder can significantly reduce the small particle stickiness.
  • the attached phenomenon thus inhibiting the formation of satellite spheres, especially for indium alloys such as copper indium gallium, which have a large solid-liquid coexistence zone, is very effective.
  • the oxygen-containing gas line 12 communicates with the air intake device 14 through the buffer chamber 15, and the buffer chamber 15 enables the air intake device 14 to spray an oxygen-containing gas under a stable pressure environment, which can be easily realized.
  • the precise flow control of the oxygen gas; in the present invention, the air intake devices 14 are evenly spaced along the circumferential direction of the atomization chamber 3, so that the oxygen-containing gas transported by the air intake device 14 into the atomization chamber 3 can be uniformly distributed.
  • the oxygen-containing gas line 12 is a low-pressure oxygen-containing gas line, wherein the low-pressure oxygen-containing gas line means a line having a gas pressure of 0.2 MPa to 0.9 MPa, and a low-pressure oxygen-containing gas tube.
  • the road is capable of introducing a low-pressure oxygen-containing gas into the atomization chamber 3 to achieve precise flow control at low flow rates of the oxygen-containing gas.
  • the oxygen-containing gas line 12 and the high-pressure inert gas line 8 are respectively provided with a gas flow control device and a pressure control adjusting device, and the gas flow control device and the pressure control adjusting device are respectively used for controlling the oxygen-containing gas pipe.
  • the flow rate and pressure of the gas in the path 12 and the high pressure inert gas line 8, the gas flow rate control means on the oxygen-containing gas line 12, and the pressure control adjusting means enable the oxygen-containing gas injected from the air intake means 14 to be in the atomization chamber 3.
  • a controlled oxidizing atmosphere is formed therein; since the oxidizing strength in the atomizing chamber 3 is determined by the oxygen concentration and flow rate of the injected oxygen-containing gas, the oxygen-containing gas is controlled to enter the atomizing region in the atomizing chamber 3.
  • the flow rate thereby controlling the degree of oxidation of small droplets and small particles in the atomization process of the alloy metal solution, can be used to achieve the modification and passivation of the surface of the alloy metal powder by using this controllable oxidation process.
  • the bottom of the atomization chamber 3 is detachably connected to the powder collection tank 16, wherein the powder collection tank 16 is connected to the bottom of the spray chamber 3 through a flange, and the powder collection tank 16 is used for collection.
  • the alloy metal powder formed by atomization in the atomization chamber 3 is obtained by disassembling the powder collection tank 16, and the alloy powder obtained by atomization can be obtained.
  • the atomization chamber 3 is provided with an air outlet, and the air outlet is connected with the exhaust gas treatment device.
  • the exhaust gas treatment device includes a cyclone separator 17 and a dust filter device which are sequentially connected, and the exhaust gas treatment device completes the atomization gas. After flowing out of the atomization chamber 3 through the air outlet, and separating the fine powder through the cyclone separator 17, and then filtering through the dust filtering device, it can be discharged to the atmosphere.
  • each metal raw material is completely melted in the melting device 5, and before the atomization, the liquid outlet 18 at the bottom of the melting device 5 is blocked by a mechanical sealing device (for example, a plunger device),
  • the alloy metal liquid is dropped into the atomization chamber 3 through the draft tube 6, and when the atomization is started, the mechanical sealing device of the liquid outlet 18 at the bottom of the melting device 5 is lifted by an externally connected mechanism, and the alloy metal liquid passes through the diversion flow.
  • the tube 6 flows to the top of the atomization chamber 3, that is, the center position of the hollow structure in the middle of the annular spray disk 9.
  • the high-pressure inert gas line 8 and the oxygen-containing gas line 12 are opened, and the flow rate and pressure of the high-pressure inert gas are adjusted to a prescribed value.
  • the high-pressure inert gas passes through the gas nozzle 10 at the bottom of the annular spray plate 9, A high-speed airflow will be generated, and the speed will even exceed the speed of sound, causing a violent interaction with the alloying metal liquid flowing out of the draft tube 6, causing it to be atomized into fine droplets, which will then be forced quickly during the airflow pushing process.
  • the oxygen concentration in the atomization chamber 3 can be effectively adjusted, thereby controlling the degree of oxidation of the surface of the alloy metal powder, so that even if the surface of the alloy metal powder is passivated, the alloy metal powder is also obtained.
  • the degree of oxidation does not change the spherical shape of the alloy metal powder, and the overall oxygen content of the alloy metal powder is as low as possible, and the copper indium gallium powder prepared by the apparatus and method has an oxygen content of 5000 ppm or less, preferably The oxygen content is from 100 to 1500 ppm.
  • the copper indium gallium target was made by testing the copper indium gallium powder to meet the requirements of the sputtering target unit.
  • Embodiment 2 differs from Embodiment 1 in that, as shown in FIGS. 3, 4, and 5, the air intake device 14 of FIG. 1 is replaced with an air intake device including a connecting pipe 19 and an annular metal pipe 20, and a connecting pipe 19 Vertically fixed at the top of the atomization chamber 3, one end of the connection tube 19 communicates with the buffer chamber 15 in the buffer tray 13, and the other end communicates with the annular metal tube 20, and the bottom of the annular metal tube 20 is provided with a gas jet hole, a jet The holes are evenly spaced along the circumferential direction of the annular metal tube 20.
  • the oxygen-containing gas finally reaches the annular metal pipe 20 via the oxygen-containing gas line 12, the buffer chamber 15, and the connecting pipe 19, and is ejected from the gas injection holes of the annular metal pipe 20. Therefore, in the present embodiment, the gas injection holes on the annular metal pipe 20 can be more advantageous for the uniform transportation and distribution of the oxygen-containing gas in the atomization zone.
  • the present application provides an atomization device and method for preparing an alloy metal powder, by which the adhesion of small alloy metal particles during atomization can be effectively reduced, thereby controlling the sphericity of the alloy metal powder and the number of satellite ball powder.
  • the phenomenon of blocking between the powders and finally improving the fluidity of the alloy metal powder enables the alloy metal powder having good fluidity to be obtained more efficiently and efficiently.

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Abstract

一种制备合金金属粉末的雾化装置及方法，包括设置有雾化室（3）的主体（1），所述雾化室（3）包括：入口，所述入口被配置成引入合金金属液体；高压惰性气体管路系统（8），所述高压惰性气体管路系统（8）被配置成为被引入到雾化室的雾化区的所述合金金属液体提供作为雾化介质和动力的高压惰性气体，以使所述合金金属液体雾化；以及含氧气体管路系统（12），所述含氧气体管路系统（12）被配置成向所述雾化区输送含氧气体，以使雾化后得到的合金金属粉末的表面钝化。

Description

一种制备合金金属粉末的雾化装置和方法 技术领域
本申请涉及但不限于一种雾化装置，尤指一种制备合金金属粉末的雾化装置。
背景
目前制备太阳能领域应用的合金粉末主要通过气雾化制粉装置进行制备，气雾化制粉装置主要用于制备各种金属粉末。由于太阳能领域应用的合金粉末中各金属组分的熔点差异很大，例如，在铜铟镓合金中，铟熔点为156.6℃，镓熔点为29.8℃，铜的熔点为1083.4℃，在铜铟镓合金粉末的合金相中主要存在铟基合金相和铜镓金属间化合物，而由于铟基合金的熔点较低以及铜铟镓合金的固液共存温度范围较大(其固液共存温度范围达250～600℃)，这就导致目前的气雾化制粉装置制得的合金粉末存在严重的团聚和粘连现场，合金粉末的颗粒表面粘附有大量的小卫星球。这不仅使得合金粉末产率过低，还导致合金粉末流动性差，影响合金粉末后续的使用，例如喷涂靶材时，输送合金粉末经常发生送粉系统的阻塞，以及送粉不均匀等状况，同时也影响最终生产的产品的性能。
发明概述
以下是对本文详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。
本申请提供了一种制备合金金属粉末的雾化装置，该雾化装置能够雾化过程中使铜铟镓合金金属粉末在不引入其它金属杂质的前提下，在制粉过程中使粉末表面发生钝化，从而达到控制合金金属粉末的球形度、卫星球粉末的数量及粉末间粘连的现象，并最终提高合金金属粉末的流动性。
本申请提供了一种制备合金金属粉末的雾化装置，包括设置有雾化室的主体，所述雾化室包括：
入口，所述入口被配置成引入合金金属液体；
高压惰性气体管路系统，所述高压惰性气体管路系统被配置成为被引入到雾化室的雾化区的所述合金金属液体提供作为雾化介质和动力的高压惰性气体，以使所述合金金属液体雾化；以及
含氧气体管路系统，所述含氧气体管路系统被配置成向所述雾化区输送含氧气体，以使雾化后得到的合金金属粉末的表面钝化。
可选地，所述含氧气体管路系统包括含氧气体管路以及与所述含氧气体管路流体连通的进气装置，所述含氧气体管路通过所述进气装置向所述雾化区输送所述含氧气体。
可选地，所述含氧气体管路与所述进气装置之间设有缓冲盘，所述缓冲盘内设有缓冲腔体，所述含氧气体管路通过所述缓冲腔体与所述进气装置流体连通。
可选地，所述含氧气体管路为低压含氧气体管路，所述低压含氧气体管路内的压力不小于0.2MPa。
可选地，所述低压含氧气体管路内的压力在0.2MPa至0.9MPa范围内。
可选地，所述进气装置包括多个金属管，所述金属管竖直固定在所述雾化室的上部，并在水平方向上间隔均匀的排布。
可选地，所述进气装置包括与所述含氧气体管路流体连通的连接管以及与所述连接管流体连通的环形管，所述环形管上设有喷气孔，所述喷气孔沿所述环形管间隔均匀的排布。
可选地，所述高压惰性气体管路系统包括高压惰性气体管路和气体喷嘴，所述气体喷嘴与所述高压惰性气体管路流体连通，所述气体喷嘴被配置为朝向所述入口喷射高压惰性气体。
可选地，所述高压惰性气体管路与所述气体喷嘴之间设有喷盘，所述喷盘内设有与所述气体喷嘴流体连通的空腔，所述气体喷嘴在水平方向间隔均匀的排布，可选地所述气体喷嘴为环状狭缝。
可选地，所述入口从所述喷盘的中部穿过，所述喷盘上的气体喷嘴朝向所述入口方向设置。
可选地，所述含氧气体管路系统和所述高压惰性气体管路系统分别设有气体流量控制装置和压力控制调节装置。
可选地，所述雾化室的底部可拆卸连接有粉料收集罐。
可选地，所述雾化室设有出气口，所述出气口与尾气处理装置流体连通，所述尾气处理装置包括顺次连接的旋风分离器和粉尘过滤设备。
可选地，所述主体还包括真空熔炼室，所述真空熔炼室内设有熔化装置和加热装置，所述加热装置配置为对所述熔化装置加热，所述熔化装置具有出液口，所述出液口通过导流管与所述雾化室的所述入口流体连通。
可选地，所述导流管的外周设有加热保温套。
本申请还提供了一种制备合金金属粉末的雾化装置，包括主体，所述主体内由上至下依次设有真空熔炼室和雾化室，所述真空熔炼室内设有熔化装置和加热装置，所述加热装置对所述熔化装置加热，所述熔化装置具有出液口，所述出液口通过导流管与所述雾化室的顶部连通，该出液口在雾化前为封闭密封状态，开始雾化前开启该出液口，以便熔化的金属液被输送至下部雾化腔内的雾化点。所述雾化室内设有气体喷嘴，所述气体喷嘴与高压惰性气体管路相连，所述气体喷嘴朝向所述导流管的出口喷射高压惰性气体，所述雾化室内设有含氧气体管路以及与所述含氧气体管路连接的进气装置，所述含氧气体管路通过所述进气装置向所述雾化室内输送含氧气体。
可选地，所述含氧气体管路与所述进气装置之间设有缓冲盘，所述缓冲盘内设有缓冲腔体，所述含氧气体管路通过所述缓冲腔体与所述进气装置流体连通。
可选地，所述含氧气体管路为低压含氧气体管路，所述低压含氧气体管路内的压力不小于0.2MPa。
可选地，所述低压含氧气体管路内的压力在0.2MPa至0.9MPa范围内。
可选地，所述进气装置包括多个金属管，所述金属管竖直固定在所述雾化室的上部，并沿所述雾化室周边方向间隔均匀的排布。
可选地，所述进气装置包括与所述含氧气体管路连通的连接管以及与所述连接管流体连通的环形管，所述环形管上设有喷气孔，所述喷气孔沿所述 金属管周边方向间隔均匀的排布。
可选地，所述环形管为环形金属管。
可选地，所述含氧气体管路和所述高压惰性气体管路上分别设有气体流量控制装置和压力控制调节装置。
可选地，所述高压惰性气体管路与所述气体喷嘴之间设有喷盘，所述喷盘内设有与所述气体喷嘴流体连通的空腔，所述气体喷嘴沿所述喷盘周边间隔均匀的排布。
可选地，所述气体喷嘴为环状狭缝。
可选地，所述导流管的出口从所述喷盘的中部穿过，所述喷盘上的气体喷嘴朝向所述导流管的出口方向设置。
可选地，所述喷盘为环状喷盘，所述空腔为环状空腔。
可选地，所述雾化室的底部可拆卸连接有粉料收集罐。
可选地，所述雾化室设有出气口，所述出气口与尾气处理装置流体连通，所述尾气处理装置包括顺次连接的旋风分离器和粉尘过滤设备。
可选地，所述导流管的外周设有加热保温套。
本申请还提供了一种制备合金金属粉末的方法，包括：
将合金金属液体引入雾化室；
向所述合金金属液体喷射高压惰性气体，以使所述合金金属液体雾化；并且
将含氧气体引入所述雾化室的雾化区，以使所述雾化区变成氧化性气氛，从而使雾化后得到的合金金属粉末的表面钝化。
在本申请中，本领域普通技术人员应理解：
“高压惰性气体”指的是由高压惰性气体管路系统提供，向合金金属液体喷射时，具有能够实现合金金属液体雾化的压力的惰性气体(例如，氮气或氩气)；
“合金金属粉末的表面钝化”指的是合金金属粉末表面被微量氧化后，能够达到有效抑制合金金属粉末间互相粘连，减少卫星球的形成的程度；
“合金金属粉末表面微量氧化”指的是既能达到既使合金金属粉末表面钝化，也使合金金属粉末氧化程度不致于改变合金金属粉末的球形形状，并尽可能使合金金属粉末总体氧含量在较低的水平的合金金属粉末表面的氧化，其以能够实现使用该合金金属粉末制作靶材，可满足溅射靶材使用单位的需求为限。
“低压含氧气体”指的是含氧气体管路中能够实现“合金金属粉末表面微量氧化”的压力。
“环形管”不限于具有圆环形状的管路，还包括形成闭合回路，与连接管流体连通，释放含氧气体的其他形状的管路。
本申请的有益效果是：
1、本申请的雾化室内设有含氧气体管路和进气装置，含氧气体管路通过进气装置向雾化室内输送含氧气体，含氧气体能够在合金金属溶液雾化过程中使合金金属粉末的表面钝化，由于雾化过程中合金金属溶液被雾化形成的液滴大小各异，在稳定的雾化气流中，大小不同的液滴或颗粒将具有不同的速度，颗粒越小，速度越快；因此小颗粒往往会与速度较慢的较大颗粒发生碰撞，经过上述表面钝化的合金金属粉末能显著减少小颗粒粘附的现象，从而抑制卫星球的形成，并减少粉末间粘结现象，尤其是对固液共存区范围较大的铜铟镓等铟合金，效果非常显著。
2、本申请中含氧气体管路上设有气体流量控制装置和压力控制调节装置，使进气装置喷射的含氧气体在雾化室内形成氧浓度可控的氧化性气氛；因为雾化室内的氧化性强弱是由该喷射的含氧气体的氧浓度、流量决定，控制含氧气体进入雾化室内的雾化区的流量，从而控制合金金属溶液雾化过程小液滴和小颗粒的氧化程度，故可利用此可控的氧化过程来实现合金金属粉末表面的改性和钝化，并且粉末氧含量不会影响最终产品的使用性能。
3、本申请中雾化室的出气口与尾气处理装置连通，使完成雾化的气体，经出气口流出雾化室，并通过旋风分离器分离出细粉后，再经粉尘过滤设备即可向大气排放。
4、本申请中雾化室的底部可拆卸连接有粉料收集罐，使雾化室内雾化形 成的合金金属粉末落入粉料收集罐内，通过拆卸粉料收集罐，即可获得雾化所得的合金粉末。
5、本申请中含氧气体管路为低压含氧气体管路，通过向雾化室内引入低压含氧气体，可以有效实现低流量下的精确流量控制。
6、本申请中含氧气体管路通过缓冲腔体与进气装置连通，缓冲腔体能够使进气装置在稳定的压力环境下，喷射含氧气体，可以有效实现含氧气体精确流量控制。
7、本申请中进气装置为多个在水平方向间隔均匀排布的金属管，可实现金属管向雾化室内输送的含氧气体均匀分布。
8、本申请中进气装置包括环形金属管以及设置在环形金属管上的喷气孔，实现喷气孔向雾化室内输送的含氧气体均匀分布。
9、本申请中高压惰性气体管路通过环状喷盘与气体喷嘴连通，环状喷盘能够使气体喷嘴在稳定的压力环境下，喷射高压惰性气体，可以有效实现高压惰性气体精确流量控制。
10、本申请中导流管的外周设有加热保温套，加热保温套能够在雾化动作开始前，将导流管加热至规定温度，以避免雾化开始阶段金属液在导流管凝固而阻塞导流管。
本申请的其它特征和优点将在随后的说明书中阐述，并且，部分地从说明书中变得更加清楚，或者通过实施本申请而了解。本申请的目的和其他优点可通过在说明书、权利要求书以及附图中所特别指出的结构来实现和获得。
附图简述
附图用来提供对本申请技术方案的进一步理解，并且构成说明书的一部分，与本申请的实施例一起用于解释本发明的技术方案，并不构成对本申请技术方案的限制。
图1为本申请雾化装置一实施例的剖视图；
图2为本申请制备合金金属粉末方法的流程图；
图3为本申请雾化装置另一实施例的剖视图；
图4为本申请雾化装置中进气装置的结构示意图；
图5为本申请进气装置中环形金属管底部的结构示意图。
发明详述
为使本申请的目的、技术方案和优点更加清楚明白，下文中将结合附图对本申请的实施例进行详细说明。需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互任意组合。
本申请实施方案提供了一种制备合金金属粉末的雾化装置，包括设置有雾化室的主体，所述雾化室包括：
入口，所述入口被配置成引入合金金属液体；
高压惰性气体管路系统，所述高压惰性气体管路系统被配置成为被引入到雾化室的雾化区的所述合金金属液体提供作为雾化介质和动力的高压惰性气体，以使所述合金金属液体雾化；以及
含氧气体管路系统，所述含氧气体管路系统被配置成向所述雾化区输送含氧气体，以使雾化后得到的合金金属粉末的表面钝化。
本申请实施方案还提供一种制备合金金属粉末的方法，该方法的流程图如图2所示。所述方法包括：
将合金金属液体引入雾化室；
向所述合金金属液体喷射高压惰性气体，以使所述合金金属液体雾化；并且
将含氧气体引入到所述雾化室的雾化区，以使所述雾化区变成氧化性气氛，从而使雾化后得到的合金金属粉末表面钝化。
具体地，参考以下实施例1和2进行详细说明。
实施例1
如图1所示，一种制备合金金属粉末的雾化装置，包括主体1，主体1 具有圆柱状的塔身及圆锥状的底部，主体1内由上至下依次设有真空熔炼室2和雾化室3，真空熔炼室2设置在雾化室3的正上方，在真空熔炼室2与雾化室3之间通过一板体隔开。真空熔炼室2内设有熔化装置5和加热装置4，在本实施例中，熔化装置5为坩埚，加热装置4围绕熔化装置5的外周设置，加热装置4能够对熔化装置5进行加热，并能够将熔化装置5内的温度加热至使其内的合金金属全部熔化成合金金属液体。在熔化装置5的底部设有出液口18，熔化装置5通过出液口18与导流管6的一端连通，出液口18能够将熔化装置5内的合金金属液体导入导流管6内。在雾化开始前，该出液口18由机械密封装置(未示出)封堵。在雾化时，该机械密封装置根据需要控制出液口18的闭合，从而控制合金金属液体经导流管6到达雾化点。
导流管6穿过用于隔离真空熔炼室2与雾化室3之间的板体，并且导流管6另一端的出口7与雾化室3的顶部连通，即可将合金金属液体输送至雾化室3的顶部进行雾化。导流管6的外周设有加热保温套，加热保温套能够在雾化动作开始前，将导流管6加热至规定温度，以避免雾化开始阶段合金金属溶液在导流管6内凝固而阻塞导流管。
在雾化室3的顶部设有顺次连接的高压惰性气体管路8、环状喷盘9和气体喷嘴10，高压惰性气体管路8用于向雾化室3内输送高压惰性气体，环状喷盘9水平固定在雾化室3的顶部，其内设有环状空腔11，在环状喷盘9的底部连通有多个气体喷嘴10，且气体喷嘴10沿环状喷盘9的圆周方向排布，或者以环状狭缝作为所述气体喷嘴10。当开始雾化时，高压惰性气体管路8首先将高压惰性气体输送至环状喷盘9中的环状空腔11，进行缓冲，环状空腔11内的高压惰性气体再输送至气体喷嘴10内，实现气体喷嘴10持续稳定喷射高压惰性气体。上述环状喷盘9的中部为中空结构，即为环状空腔11，导流管6穿过环状喷盘9，使环状喷盘9底部的气体喷嘴10环绕导流管6的出口7排布，气体喷嘴10朝向导流管6的出口7设置，使气体喷嘴10喷出的高压惰性气体喷向导流管6的出口7。当开始雾化时，导流管6内的合金金属溶液由出口7流出，气体喷嘴10向出口7流出的合金金属溶液喷射高压惰性气体，将合金金属溶液雾化。
本实施例中雾化室3的顶部还设有顺次连通的含氧气体管路12、缓冲盘 13以及进气装置14，含氧气体管路12用于向雾化室3内输送含氧气体，缓冲盘13呈环状，其内设有环状的缓冲腔体15，含氧气体管路12与缓冲腔体15连通，在缓冲盘13的底部设有进气装置14，进气装置14为多个竖直设置的金属管，例如不锈钢管，进气装置14沿缓冲盘13底部圆周方向间隔均匀排布，进气装置14的一端与缓冲腔体15连通，进气装置14的另一端竖直固定在雾化室3的上部。当开始雾化时，含氧气体管路12首先将含氧气体输送至缓冲盘13中的缓冲腔体15，进行缓冲，缓冲腔体15内的含氧气体再输送至进气装置14内，实现进气装置14向雾化室3内输送含氧气体。
含氧气体能够在合金金属溶液雾化过程中使合金金属粉末的表面钝化，由于雾化过程中合金金属溶液被雾化形成的液滴大小各异，在稳定的雾化气流中，大小不同的液滴或颗粒将具有不同的速度，颗粒越小，速度越快；因此小颗粒往往会与速度较慢的较大颗粒发生碰撞，经过上述表面钝化的合金金属粉末能显著减少小颗粒粘附的现象，从而抑制卫星球的形成，尤其是对固液共存区范围较大的铜铟镓等铟合金，效果非常显著。
本实施例中，含氧气体管路12通过缓冲腔体15与进气装置14连通，缓冲腔体15能够使进气装置14在稳定的压力环境下，喷射含氧气体，可以很容易实现含氧气体精确流量控制；本发明中进气装置14沿雾化室3圆周方向间隔均匀排布，可实现进气装置14向雾化室3内输送的含氧气体均匀分布。
在本实施例中，含氧气体管路12为低压含氧气体管路，其中，低压含氧气体管路是指其内的气体压力为0.2MPa至0.9MPa的管路，低压含氧气体管路能够向雾化室3内引入低压含氧气体，可实现含氧气体低流量下的精确流量控制。
在本实施例中，含氧气体管路12和高压惰性气体管路8上分别设有气体流量控制装置和压力控制调节装置，气体流量控制装置和压力控制调节装置分别用于控制含氧气体管路12和高压惰性气体管路8内气体的流量和压力，含氧气体管路12上的气体流量控制装置和压力控制调节装置，能够使进气装置14喷射的含氧气体在雾化室3内形成可控的氧化性气氛；因为雾化室3内的氧化性强弱是由该喷射的含氧气体的氧浓度、流量决定，控制含氧气体进入雾化室3内的雾化区的流量，从而控制合金金属溶液雾化过程小液滴和小 颗粒的氧化程度，故可利用此可控的氧化过程来实现合金金属粉末表面的改性和钝化。
在本实施例中，雾化室3的底部可拆卸连接有粉料收集罐16，其中，粉料收集罐16通过法兰与雾化室3的底部连接，粉料收集罐16用于收集将雾化室3内雾化形成的合金金属粉末，通过拆卸粉料收集罐16，即可获得雾化所得的合金粉末。
在本实施例中，雾化室3设有出气口，出气口与尾气处理装置连通，尾气处理装置包括顺次连接的旋风分离器17和粉尘过滤设备，尾气处理装置使完成雾化的气体，经出气口流出雾化室3，并通过旋风分离器17分离出细粉后，再经粉尘过滤设备过滤，即可向大气排放。
本申请在雾化准备过程中，各金属原料在熔化装置5中被完全熔化，在雾化前，熔化装置5底部的出液口18被机械密封装置(例如，柱塞装置)封堵，没有合金金属液体通过导流管6滴落到雾化室3内，开始雾化时，通过外部相连的机构将熔化装置5底部的出液口18的机械密封装置抬起，合金金属液体通过导流管6流至雾化室3的顶部，即环状喷盘9中部的中空结构的中心位置。与此同时，开启高压惰性气体管路8和含氧气体管路12的开关，将高压惰性气体的流量和压力调至规定值，高压惰性气体通过环状喷盘9底部的气体喷嘴10时，将产生高速气流，速度甚至将超过音速，从而与从导流管6流出的合金金属液体发生猛烈的相互作用，使其雾化成细小液滴，细小液滴将随后在气流推动过程中被强制迅速冷却，得到合金金属粉末，而同时经缓冲盘13和进气装置14引导的含氧气体被引入到雾化室中的雾化区处，而该含氧气体所含的氧气使雾化区域变成可控的氧化性气氛，小液滴在飞行冷却的过程中形成表面微量氧化，使获得的合金金属粉末表面钝化，从而抑制合金金属粉末间互相粘连，减少卫星球的形成，尤其是对固液共存区范围较大的铜铟镓等铟合金，效果非常显著。
本申请通过调整含氧气体的压力和流量，可以有效地调节雾化室3内的氧气浓度，从而控制合金金属粉末表面的氧化程度，达到既使合金金属粉末表面钝化，也使合金金属粉末氧化程度不至于改变合金金属粉末的球形形状，并尽可能使合金金属粉末总体氧含量在较低的水平，如通过此装置及方法制 备的铜铟镓粉末的氧含量为5000ppm以下，较佳的氧含量为100～1500ppm。经试用测试该铜铟镓粉末制做成铜铟镓靶材，完全满足溅射靶材使用单位的需求。
实施例2
实施例2与实施例1的区别在于，如图3、图4和图5所示，图1中的进气装置14替换为包括连接管19以及环形金属管20的进气装置，连接管19竖直固定在雾化室3的顶部，连接管19的一端与缓冲盘13中的缓冲腔体15连通，其另一端与环形金属管20连通，环形金属管20的底部设有喷气孔，喷气孔沿环形金属管20圆周方向间隔均匀的排布。含氧气体经由含氧气体管路12、缓冲腔体15、连接管19最终到达环形金属管20，并从环形金属管20的喷气孔喷出。因此，本实施例中，环形金属管20上的喷气孔能够更加有利于含氧气体在雾化区均匀输送和分布。
本公开内容是本申请实施例的原则的示例，并非对本申请作出任何形式上或实质上的限定，或将本申请限定到具体的实施方案。对本领域的技术人员而言，很显然本申请实施例的技术方案的要素、方法和系统等，可以进行变动、改变、改动、演变，而不背离如上所述的本申请的实施例、技术方案的，如权利要求中所定义的原理、精神和范围。这些变动、改变、改动、演变的实施方案均包括在本申请的等同实施例内，这些等同实施例均包括在本申请的由权利要求界定的范围内。虽然可以许多不同形式来使本申请实施例具体化，但此处详细描述的是本发明的一些实施方案。此外，本申请的实施例包括此处所述的各种实施方案的一些或全部的任意可能的组合，也包括在本申请的由权利要求界定的范围内。在本申请中或在任一个引用的专利、引用的专利申请或其它引用的资料中任何地方所提及的所有专利、专利申请和其它引用资料据此通过引用以其整体并入。
以上公开内容规定为说明性的而不是穷尽性的。对于本领域技术人员来说，本说明书会暗示许多变化和可选择方案。所有这些可选择方案和变化旨在被包括在本权利要求的范围内，其中术语“包括”意思是“包括，但不限于”。 在此完成了对本发明可选择的实施方案的描述。本领域技术人员可认识到此处所述的实施方案的其它等效变换，这些等效变换也为由附于本文的权利要求所包括。
工业实用性
本申请提供一种制备合金金属粉末的雾化装置和方法，通过该装置和方法可有效减少雾化过程中小合金金属颗粒的粘附，从而达到控制合金金属粉末的球形度、卫星球粉末的数量及粉末间粘连的现象，并最终提高合金金属粉末的流动性，能够更有效且高效地获得流动性良好的合金金属粉末。

Claims (27)

  1. 一种制备合金金属粉末的雾化装置，包括设置有雾化室的主体，所述雾化室包括：
    入口，所述入口被配置成引入合金金属液体；
    高压惰性气体管路系统，所述高压惰性气体管路系统被配置成为被引入到雾化室的雾化区的所述合金金属液体提供作为雾化介质和动力的高压惰性气体，以使所述合金金属液体雾化；以及
    含氧气体管路系统，所述含氧气体管路系统被配置成向所述雾化区输送含氧气体，以使雾化后得到的合金金属粉末的表面钝化。
  2. 根据权利要求1所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路系统包括含氧气体管路以及与所述含氧气体管路流体连通的进气装置，所述含氧气体管路通过所述进气装置向所述雾化区输送所述含氧气体。
  3. 根据权利要求2所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路与所述进气装置之间设有缓冲盘，所述缓冲盘内设有缓冲腔体，所述含氧气体管路通过所述缓冲腔体与所述进气装置流体连通。
  4. 根据权利要求2或3所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路为低压含氧气体管路，所述低压含氧气体管路内的压力不小于0.2MPa，可选地所述低压含氧气体管路内的压力在0.2MPa至0.9MPa范围内。
  5. 根据权利要求2至4任一项所述的制备合金金属粉末的雾化装置，其中，所述进气装置包括多个金属管，所述金属管竖直固定在所述雾化室的上部，并沿所述雾化室周边方向间隔均匀的排布。
  6. 根据权利要求2至5任一项所述的制备合金金属粉末的雾化装置，其中，所述进气装置包括与所述含氧气体管路流体连通的连接管以及与所述连接管流体连通的环形管，所述环形管上设有喷气孔，所述喷气孔沿所述环形管周边方向间隔均匀的排布。
  7. 根据权利要求1至6任一项所述的制备合金金属粉末的雾化装置，其中，所述高压惰性气体管路系统包括高压惰性气体管路和气体喷嘴，所述气 体喷嘴与所述高压惰性气体管路流体连通，所述气体喷嘴被配置为朝向所述入口喷射高压惰性气体。
  8. 根据权利要求7所述的制备合金金属粉末的雾化装置，其中，所述高压惰性气体管路与所述气体喷嘴之间设有喷盘，所述喷盘内设有与所述气体喷嘴流体连通的空腔，所述气体喷嘴沿所述喷盘周边方向间隔均匀的排布，可选地所述气体喷嘴为环状狭缝。
  9. 根据权利要求8所述的制备合金金属粉末的雾化装置，其中，所述入口从所述喷盘的中部穿过，所述喷盘上的气体喷嘴朝向所述入口方向设置。
  10. 根据权利要求1至9任一项所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路系统和所述高压惰性气体管路系统分别设有气体流量控制装置和压力控制调节装置。
  11. 根据权利要求1至10任一项所述的制备合金金属粉末的雾化装置，其中，所述雾化室的底部可拆卸连接有粉料收集罐。
  12. 根据权利要求1至11任一项所述的制备合金金属粉末的雾化装置，其中，所述雾化室设有出气口，所述出气口与尾气处理装置流体连通，所述尾气处理装置包括顺次连接的旋风分离器和粉尘过滤设备。
  13. 根据权利要求1至12任一项所述的制备合金金属粉末的雾化装置，其中，所述主体还包括真空熔炼室，所述真空熔炼室内设有熔化装置和加热装置，所述加热装置配置为对所述熔化装置加热，所述熔化装置具有出液口，所述出液口通过导流管与所述雾化室的所述入口流体连通。
  14. 根据权利要求13所述的制备合金金属粉末的雾化装置，其中，所述导流管的外周设有加热保温套。
  15. 一种制备合金金属粉末的雾化装置，所述雾化装置包括主体，所述主体内由上至下依次设有真空熔炼室和雾化室，所述真空熔炼室内设有熔化装置和加热装置，所述加热装置对所述熔化装置加热，所述熔化装置具有出液口，所述出液口通过导流管与所述雾化室的顶部连通，所述雾化室内设有气体喷嘴，所述气体喷嘴与高压惰性气体管路相连，所述气体喷嘴朝向所述导流管的出口喷射高压惰性气体，所述雾化室内设有含氧气体管路以及与所 述含氧气体管路连接的进气装置，所述含氧气体管路通过所述进气装置向所述雾化室内输送含氧气体。
  16. 根据权利要求15所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路与所述进气装置之间设有缓冲盘，所述缓冲盘内设有缓冲腔体，所述含氧气体管路通过所述缓冲腔体与所述进气装置流体连通。
  17. 根据权利要求15或16所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路为低压含氧气体管路，所述低压含氧气体管路内的压力不小于0.2MPa，可选地所述低压含氧气体管路内的压力在0.2MPa至0.9MPa范围内。
  18. 根据权利要求15至17任一项所述的制备合金金属粉末的雾化装置，其中，所述进气装置包括多个金属管，所述金属管竖直固定在所述雾化室的上部，并沿所述雾化室周边方向间隔均匀的排布。
  19. 根据权利要求15至18任一项所述的制备合金金属粉末的雾化装置，其中，所述进气装置包括与所述含氧气体管路流体连通的连接管以及与所述连接管流体连通的环形管，所述环形管上设有喷气孔，所述喷气孔沿所述环形管周边方向间隔均匀的排布。
  20. 根据权利要求15至19任一项所述的制备合金金属粉末的雾化装置，其中，所述含氧气体管路和所述高压惰性气体管路上分别设有气体流量控制装置和压力控制调节装置。
  21. 根据权利要求15至20任一项所述的制备合金金属粉末的雾化装置，其中，所述高压惰性气体管路与所述气体喷嘴之间设有喷盘，所述喷盘内设有与所述气体喷嘴流体连通的空腔，所述气体喷嘴沿所述喷盘周边方向间隔均匀的排布。
  22. 根据权利要求15至21任一项所述的制备合金金属粉末的雾化装置，其中，所述气体喷嘴为环状狭缝。
  23. 根据权利要求21所述的制备合金金属粉末的雾化装置，其中，所述导流管的出口从所述喷盘的中部穿过，所述喷盘上的气体喷嘴朝向所述导流管的出口方向设置。
  24. 根据权利要求15至23任一项所述的制备合金金属粉末的雾化装置，其中，所述雾化室的底部可拆卸连接有粉料收集罐。
  25. 根据权利要求15至24任一项所述的制备合金金属粉末的雾化装置，其中，所述雾化室设有出气口，所述出气口与尾气处理装置流体连通，所述尾气处理装置包括顺次连接的旋风分离器和粉尘过滤设备。
  26. 根据权利要求15至25任一项所述的制备合金金属粉末的雾化装置，其中，所述导流管的外周设有加热保温套。
  27. 一种制备合金金属粉末的方法，包括：
    将合金金属液体引入雾化室；
    向所述合金金属液体喷射高压惰性气体，以使所述合金金属液体雾化；并且
    将含氧气体引入到所述雾化室的雾化区，以使所述雾化区变成氧化性气氛，从而使雾化后得到的合金金属粉末表面钝化。
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