WO2017104354A1 - Procédé de fabrication de plaque de verre - Google Patents

Procédé de fabrication de plaque de verre Download PDF

Info

Publication number
WO2017104354A1
WO2017104354A1 PCT/JP2016/084444 JP2016084444W WO2017104354A1 WO 2017104354 A1 WO2017104354 A1 WO 2017104354A1 JP 2016084444 W JP2016084444 W JP 2016084444W WO 2017104354 A1 WO2017104354 A1 WO 2017104354A1
Authority
WO
WIPO (PCT)
Prior art keywords
defect
glass plate
content
specifying step
lines
Prior art date
Application number
PCT/JP2016/084444
Other languages
English (en)
Japanese (ja)
Inventor
弘和 奥村
高橋　忠
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to CN201680057172.XA priority Critical patent/CN108139336B/zh
Priority to KR1020187002366A priority patent/KR102623714B1/ko
Publication of WO2017104354A1 publication Critical patent/WO2017104354A1/fr

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a method for manufacturing a glass plate provided with an inspection process for detecting defects in the glass plate.
  • the glass plate defects detected in the inspection process include, for example, glass particles, cracks, foreign matters, dirt, processing defects, and the like.
  • the present invention has a technical problem of specifying the content of a defect while suppressing the inspection time in an inspection process for detecting a defect in a glass plate.
  • the present inventor obtained the following knowledge as a result of intensive studies. That is, when specifying the content of the defect in the inspection process, the inspection process includes a defect coordinate specifying step for specifying the coordinates of the defect, and a defect content specifying step for specifying the content of the defect at the coordinates specified in the defect coordinate specifying step. And can be divided into In that case, generally, the defect content specifying step takes more time than the defect coordinate specifying step. Therefore, when the number of lines in the defect coordinate specifying step is the same as the number of lines in the defect content specifying step, a situation occurs in which the glass plate that has completed the defect coordinate specifying step must wait for the defect content specifying step.
  • the manufacturing method of the glass plate of the present invention created based on this knowledge is a processing step for processing a glass plate, a cleaning step for cleaning the glass plate processed in the processing step, and a cleaning step in the cleaning step.
  • a glass plate manufacturing method comprising: an inspection step for inspecting a defect of the glass plate, wherein the inspection step is specified by a defect coordinate specifying step for specifying a defect coordinate and the defect coordinate specifying step.
  • a defect content specifying step for specifying the content of the defect in coordinates, and the number of lines in the defect content specifying step is greater than the number of lines in the defect coordinate specifying step, and passes through the lines in the defect coordinate specifying step.
  • the glass plate is distributed to the defect content identification process line.
  • the number of lines in the defect content specifying process is larger than the number of lines in the defect coordinate specifying process, and the glass plate that has passed through the line in the defect coordinate specifying process is distributed to the line of the defect content specifying process. Therefore, it is possible to avoid a situation in which the glass plate that has completed the defect coordinate specifying step must wait for the defect content specifying step. Thereby, the time which the whole inspection process requires can be shortened compared with the case where the number of lines of a defect coordinate specific process and the number of lines of a defect content specific process are the same. That is, according to the manufacturing method of the glass plate of this invention, it is possible to specify the content of a defect, suppressing inspection time in the inspection process which detects the defect of a glass plate.
  • the glass plate is lifted at a middle portion in the perpendicular direction of the conveyance direction and supported in a non-contact manner and is conveyed in a state of being supported in contact at both end portions in the perpendicular direction. It is preferable to specify the coordinates.
  • the time required for the defect coordinate specifying process can be further shortened. Moreover, since it conveys in the state which floated the glass plate in the intermediate part and was non-contact supported, it can suppress that a defect newly arises in a glass plate. Moreover, since it conveys in the state which floated the glass plate, it is hard to produce deformation
  • the defect content specifying step it is preferable to specify the content of the defect in a state where the glass plate is supported by surface contact and fixed.
  • the position of the glass plate is stabilized, so that the coordinates specified in the defect coordinate specifying process can be more accurately focused and focused.
  • the number of lines in the defect content specifying step is 1 to 3 more than the number of lines in the defect coordinate specifying step.
  • the content of the defect can be specified while suppressing the inspection time in the inspection process for detecting the defect of the glass plate.
  • FIG. 1 is a schematic view showing a method for producing a glass plate according to an embodiment of the present invention.
  • processing such as end face processing is performed on the glass plate.
  • the glass plate produced by the production method 1 has a size of, for example, 300 ⁇ 300 mm to 3500 ⁇ 3500 mm, and a thickness of, for example, 0.1 to 1.1 mm.
  • This manufacturing method 1 includes a charging step S1 for charging a glass plate, a processing step S2 for processing the glass plate input in the charging step S1, and a cleaning step S3 for cleaning the glass plate processed in the processing step S2. And inspection process S4 which test
  • the inspection step S4 includes a defect coordinate specifying step S4a for specifying the coordinates of the defect, and a defect content specifying step S4b for specifying the content of the defect at the coordinates specified in the defect coordinate specifying step S4a.
  • the number of lines in the defect content specifying step S4b is larger than the number of lines in the defect coordinate specifying step S4a, and the glass plate that has passed through the line in the defect coordinate specifying step S4a is distributed to the line in the defect content specifying step S4b. It is configured to be.
  • one line including the defect coordinate specifying step S4a branches to form three lines including the defect content specifying step S4b. That is, the number of lines in the defect coordinate specifying step S4a is one, the number of lines in the defect content specifying step S4b is three, and the number of lines in the defect content specifying step S4b is more than the number of lines in the defect coordinate specifying step S4a. 2 more.
  • the glass plate is charged in the charging step S1.
  • processing such as end face processing (chamfering processing or the like) is performed on the glass plate input in the input step S1.
  • the cleaning step S3 the glass plate processed in the processing step S2 is cleaned, for example, with high pressure water or a roll brush.
  • the glass plate 3 is automatically transported by the transport mechanism 2 shown in FIGS. 2A and 2B.
  • the transport mechanism 2 includes, for example, a floating portion 2a such as an air float that brings the glass plate 3 into a floating state by jetting air, and a feeding portion 2b such as a roller that contacts and feeds the glass plate 3.
  • the transport mechanism 2 transports the glass plate 3 in a state in which the glass plate 3 is lifted at an intermediate portion in a direction perpendicular to the transport direction and supported in a non-contact manner and is supported in contact at both ends in a direction perpendicular to the transport direction.
  • the glass plate 3 is conveyed with a traction force applied by the feeding portion 2b in a state of being floated with respect to the floating portion 2a by the floating portion 2a. During this conveyance, the glass plate 3 maintains a more natural shape (flat plate shape) by causing the pressure of the air directed vertically upward from the lower part to act in a horizontal state so as to cancel the weight of the glass plate 3. .
  • the defect coordinate specifying step S4a the number of defects on the glass plate 3 is counted and the coordinates of the defects are specified.
  • the defect coordinate specifying step S4a the number of defects in the glass plate 3 is counted and the coordinates of the defect are continuously conveyed from the first conveyance path R1 by the conveyance mechanism 2. To identify. At this time, the glass plate 3 is sent to the feeding portion 2b and conveyed in a state of being floated with respect to the floating portion 2a.
  • the coordinate specifying inspection device 4 detects defects in the glass plate 3, automatically counts the number of defects, and automatically specifies the coordinates of the defects.
  • the coordinate specifying inspection apparatus 4 includes a light source 4 a and an imaging unit 4 b such as a camera disposed so as to face the light source 4 a through the conveyance path of the glass plate 3.
  • the light source 4 a illuminates a wide area along a direction perpendicular to the conveyance direction of the glass plate 3.
  • the imaging unit 4b images a wide area along a direction perpendicular to the conveyance direction of the glass plate 3.
  • the coordinate specifying inspection apparatus 4 captures an image of the entire area of the glass plate 3 as the glass plate 3 passes through the conveyance path in a state where the imaging unit 4b is fixed.
  • the coordinate specifying inspection apparatus 4 is of a type that images with light transmitted through the glass plate 3.
  • the glass plate 3 In the second conveyance path R2 from the defect coordinate identification step S4a to the defect content identification step S4b, the glass plate 3 is automatically conveyed (contact conveyance) while being contacted by, for example, a roller conveyor. In the second transport path R2, the glass plate 3 that has completed the defect coordinate specifying step S4a is automatically distributed to the defect content specifying step S4b.
  • the defect content specifying step S4b the content of the defect at the coordinates is specified based on the coordinates specified in the defect coordinate specifying step S4a.
  • the defect content specifying step S4b the content of the defect is specified in a state where the glass plate 3 is supported by the support member 5 by surface contact and fixed.
  • the defect specifying device 6 images the defect of the glass plate 3 and specifies the content of the defect.
  • the content specifying inspection apparatus 6 includes an imaging unit 6a such as a microscope and a moving mechanism 6b such as a gantry for supporting and moving the imaging unit 6a.
  • the content specifying inspection device 6 images the defect of the glass plate 3 by moving the imaging unit 6 a in a state where the glass plate 3 is fixed on the support member 5.
  • the support member 5 does not transmit light, and the content specifying inspection device 6 is a type that captures an image with light reflected on the glass plate 3.
  • the support member 5 is configured to eject air and float the glass plate 3 before positioning, but is configured to adsorb the glass plate 3 after positioning.
  • the identification of the content of the defect may be determined by a human by looking at the captured image, or may be determined automatically by processing the captured image data.
  • the glass plate is automatically contacted and conveyed by, for example, a roller conveyor.
  • the defect content specifying step S4b determines whether or not the glass plate 3 that has been inspected is a non-defective product based on the inspection result (number of defects) in the defect coordinate specifying step S4a and the inspection result (defect content) in the defect content specifying step S4b This determination is performed by a determination unit (not shown).
  • the glass plate 3 determined as a non-defective product based on the determination result by the determination unit is packaged as a non-defective product in the packing step S5 and shipped.
  • the glass plate 3 determined to be a defective product is packed as a defective product.
  • the number of lines in the defect content specifying step S4b is larger than the number of lines in the defect coordinate specifying step S4a, and passes through the lines in the defect coordinate specifying step S4a.
  • the processed glass plate is distributed to the line of the defect content specifying step S4b. Therefore, it is possible to avoid a situation where the glass plate 3 that has completed the defect coordinate specifying step S4a must wait for the defect content specifying step S4b.
  • the time required for the entire inspection process S4 can be made shorter than when the number of lines in the defect coordinate identification process S4a is the same as the number of lines in the defect content identification process S4b. That is, according to the manufacturing method 1 of the glass plate of this embodiment, it is possible to specify the content of the defect while suppressing the inspection time in the inspection process for detecting the defect of the glass plate.
  • the inspection process S4 includes the defect coordinate specifying process S4a (short time) for specifying only the positional information and the presence / absence of a defect (short time), and the defect content for specifying the defect content (long time).
  • the process is divided into specific processes S4b.
  • the layout configuration is such that the lines of the defect content specifying step S4b that require a long time in the inspection step S4 are doubled. Thereby, the processing capability of inspection process S4 can be improved.
  • the back surface of the glass plate 3 is conveyed in a non-contact manner from the cleaning step S3 to the defect coordinate specifying step S4a, it is possible to suppress new defects from being generated on the surface of the glass plate 3. Further, during the period from the cleaning step S3 to the defect content specifying step S4b, the handling of the glass plate 3, the movement of the upper, lower, left and right glass plates 3 for changing the transport direction and the change of the posture of the glass plate 3 are performed as much as possible. Do not. Therefore, it can suppress that a new defect arises in the glass plate 3. FIG. By these synergistic effects, unnecessary defects are less likely to occur in the manufacturing method 1, and the yield rate is improved.
  • the present invention is not limited to the above embodiment, and various modifications are possible within the scope of the technical idea.
  • the distribution of the glass plate 3 that has completed the defect coordinate specifying step S4a to the defect content specifying step S4b is automatically performed in the second transport path R2, but is performed by a human hand or a cart. May be.
  • the glass plate 3 was automatically conveyed in 1st conveyance path R1 and 3rd conveyance path R3 in a line, the glass plate 3 may be conveyed by a human hand or a trolley
  • the coordinate specifying inspection device 4 is a type that captures an image with light transmitted through the glass plate 3, but may be a type that captures an image with light reflected on the glass plate 3. Moreover, in the said embodiment, although the content-inspecting inspection apparatus 6 was a type imaged with the light reflected on the glass plate 3, the type which image

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Textile Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

La présente invention concerne un procédé de fabrication de plaque de verre (1) qui comporte : une étape d'usinage (S2) consistant à usiner une plaque de verre ; une étape de nettoyage (S3) consistant à nettoyer la plaque de verre usinée au cours de l'étape d'usinage (S2) ; et une étape d'inspection (S4) consistant à détecter des défauts dans la plaque de verre nettoyée au cours de l'étape de nettoyage (S3). L'étape d'inspection (S4) comprend : une étape d'identification de coordonnées de défaut (S4a) consistant à identifier des coordonnées de défaut ; et une étape d'identification de détails de défaut (S4b) consistant à identifier les détails du défaut aux coordonnées identifiées au cours de l'étape d'identification de coordonnées de défaut (S4a). Le nombre de lignes permettant la mise en œuvre l'étape d'identification de détails de défaut (S4b) est supérieur au nombre de lignes permettant la mise en œuvre de l'étape d'identification de coordonnées de défaut (S4a) et les plaques de verre qui sont passées par la ligne permettant la mise en œuvre de l'étape d'identification de coordonnées de défaut (S4a) sont affectées aux lignes permettant la mise en œuvre de l'étape d'identification de détails de défaut (S4b).
PCT/JP2016/084444 2015-12-17 2016-11-21 Procédé de fabrication de plaque de verre WO2017104354A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201680057172.XA CN108139336B (zh) 2015-12-17 2016-11-21 玻璃板的制造方法
KR1020187002366A KR102623714B1 (ko) 2015-12-17 2016-11-21 유리판의 제조 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-246324 2015-12-17
JP2015246324A JP6587211B2 (ja) 2015-12-17 2015-12-17 ガラス板の製造方法

Publications (1)

Publication Number Publication Date
WO2017104354A1 true WO2017104354A1 (fr) 2017-06-22

Family

ID=59056400

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/084444 WO2017104354A1 (fr) 2015-12-17 2016-11-21 Procédé de fabrication de plaque de verre

Country Status (5)

Country Link
JP (1) JP6587211B2 (fr)
KR (1) KR102623714B1 (fr)
CN (1) CN108139336B (fr)
TW (1) TWI702389B (fr)
WO (1) WO2017104354A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102247090B1 (ko) 2018-08-10 2021-04-29 주식회사 엘지화학 전류 검출 회로, 배터리 관리 시스템 및 배터리팩
JP6726327B2 (ja) * 2019-02-27 2020-07-22 シャープ株式会社 レシート出力装置及びレシート出力方法
JP2022061531A (ja) * 2020-10-07 2022-04-19 日本電気硝子株式会社 ガラス板の製造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06347406A (ja) * 1993-06-10 1994-12-22 Nuclear Fuel Ind Ltd 核燃料ペレットの周面検査装置
JPH1019772A (ja) * 1996-07-01 1998-01-23 Ishikawajima Shibaura Mach Co Ltd 果実の糖度測定装置
JP2000035319A (ja) * 1999-05-31 2000-02-02 Olympus Optical Co Ltd 外観検査装置
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置
JP2012163358A (ja) * 2011-02-03 2012-08-30 Nippon Electric Glass Co Ltd ガラス板の端面撮像装置およびその撮像方法
WO2012153662A1 (fr) * 2011-05-10 2012-11-15 旭硝子株式会社 Procédé et dispositif d'inspection de très petits défauts sur corps en forme de plaque translucide
JP2015049347A (ja) * 2013-08-30 2015-03-16 住友化学株式会社 光学部材貼合体の製造方法
JP2015105930A (ja) * 2013-12-02 2015-06-08 旭硝子株式会社 透光性基板の微小欠陥検査方法および透光性基板の微小欠陥検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100582344B1 (ko) * 2003-12-09 2006-05-22 삼성코닝정밀유리 주식회사 유리기판의 검사장치
KR100703694B1 (ko) * 2004-12-01 2007-04-05 삼성전자주식회사 디스플레이 검사 장치
KR100675302B1 (ko) * 2006-01-19 2007-01-29 삼성전자주식회사 반도체 제조설비 및 이를 이용한 반도체 제조방법
CN101558292B (zh) * 2006-12-14 2013-08-28 日本电气硝子株式会社 玻璃板的缺陷检测装置和制造方法、玻璃板制品、玻璃板的好坏判定装置和检查方法
JP2009014617A (ja) * 2007-07-06 2009-01-22 Olympus Corp 基板外観検査装置
CN101686635B (zh) * 2008-09-27 2014-03-19 松下电器产业株式会社 电子部件贴装系统及电子部件贴装方法
KR20150141096A (ko) 2014-06-09 2015-12-17 한국기계연구원 방열필름의 열적성능 평가방법

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06347406A (ja) * 1993-06-10 1994-12-22 Nuclear Fuel Ind Ltd 核燃料ペレットの周面検査装置
JPH1019772A (ja) * 1996-07-01 1998-01-23 Ishikawajima Shibaura Mach Co Ltd 果実の糖度測定装置
JP2000035319A (ja) * 1999-05-31 2000-02-02 Olympus Optical Co Ltd 外観検査装置
JP2012163358A (ja) * 2011-02-03 2012-08-30 Nippon Electric Glass Co Ltd ガラス板の端面撮像装置およびその撮像方法
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置
WO2012153662A1 (fr) * 2011-05-10 2012-11-15 旭硝子株式会社 Procédé et dispositif d'inspection de très petits défauts sur corps en forme de plaque translucide
JP2015049347A (ja) * 2013-08-30 2015-03-16 住友化学株式会社 光学部材貼合体の製造方法
JP2015105930A (ja) * 2013-12-02 2015-06-08 旭硝子株式会社 透光性基板の微小欠陥検査方法および透光性基板の微小欠陥検査装置

Also Published As

Publication number Publication date
TW201732273A (zh) 2017-09-16
JP2017111033A (ja) 2017-06-22
CN108139336B (zh) 2021-08-24
CN108139336A (zh) 2018-06-08
KR102623714B1 (ko) 2024-01-11
KR20180093867A (ko) 2018-08-22
JP6587211B2 (ja) 2019-10-09
TWI702389B (zh) 2020-08-21

Similar Documents

Publication Publication Date Title
KR101442483B1 (ko) Led 패키지 비전 검사 및 분류 시스템
JP5923172B2 (ja) 板ガラスの検査ユニット及び製造設備
WO2017104354A1 (fr) Procédé de fabrication de plaque de verre
JP2002107307A (ja) ソフトバッグ総合検査システム
JP2018126860A (ja) ガラス基板の面取り装置
KR101621861B1 (ko) 편광필름 검사장치
JP5607734B2 (ja) 離散的な低剛性の透明又は半透明体の欠陥を検査する装置及び方法
JP4713278B2 (ja) 多結晶半導体ウエハの外観検査方法および外観検査装置
JP2012073036A (ja) ガラス基板欠陥検査装置及びガラス基板欠陥検査方法
JP6200190B2 (ja) 放射性廃棄物検査装置および放射性廃棄物検査方法
KR100838265B1 (ko) 반도체 패키지 핸들링장치
JP2006234725A (ja) 筒状物品の側面部検査方法およびその装置
WO2020105368A1 (fr) Procédé de fabrication d'une plaque de verre, et dispositif pour la fabrication d'une plaque de verre
JP5600984B2 (ja) 透明物品の外観検査装置および外観検査方法
JP5618209B2 (ja) ガラス板の端面撮像装置およびその撮像方法
JP5532025B2 (ja) ガラス基板検査システム、およびガラス基板製造方法
JP2006349599A (ja) 透明基板検査装置及び検査方法
JP6148674B2 (ja) 対基板作業システム
WO2018131489A1 (fr) Système d'inspection de panneau
JP2005134163A (ja) 容器底面検査装置
JP2005134358A (ja) ４枚の傾斜ミラーの使用により、カメラ１台で平面と４方向側面を撮像する方式
JP5683333B2 (ja) 基板検査装置及び方法
CN211042088U (zh) 玻璃基板的尺寸测量装置
JP2010066241A (ja) 基板検査装置、及び、基板検査方法
CN210557222U (zh) 搬运辊

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16875338

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20187002366

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16875338

Country of ref document: EP

Kind code of ref document: A1