WO2016084541A1 - 電子部品搬送装置 - Google Patents

電子部品搬送装置 Download PDF

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Publication number
WO2016084541A1
WO2016084541A1 PCT/JP2015/080378 JP2015080378W WO2016084541A1 WO 2016084541 A1 WO2016084541 A1 WO 2016084541A1 JP 2015080378 W JP2015080378 W JP 2015080378W WO 2016084541 A1 WO2016084541 A1 WO 2016084541A1
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WO
WIPO (PCT)
Prior art keywords
electronic component
chuck
stage
unit
turret table
Prior art date
Application number
PCT/JP2015/080378
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
隆行 的場
Original Assignee
上野精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上野精機株式会社 filed Critical 上野精機株式会社
Priority to CN201580002287.4A priority Critical patent/CN105874342B/zh
Publication of WO2016084541A1 publication Critical patent/WO2016084541A1/ja
Priority to HK16110353.2A priority patent/HK1222226A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Definitions

  • the present invention relates to an electronic component transport apparatus that transports electronic components.
  • ⁇ Electronic components undergo various inspection items during the manufacturing process, and non-defective products are screened and packed together for shipment.
  • the inspection item is typically measurement of electrical characteristics.
  • An electrical characteristic is a response to a voltage, current, resistance, frequency, or logic signal of an electronic component.
  • a current-carrying contact called a contact is applied to an electrode of an electronic component, and current injection, voltage application, or logic signal input is performed. Then, the output is analyzed to determine a non-defective product.
  • an insulated gate bipolar transistor or SiC bipolar transistor used as a power semiconductor element for switching high voltage or large current.
  • a stage-cum-lower contact and an upper contact are arranged opposite to each other at an interval so that the upper contact can be lowered.
  • the stage / lower contact places an electronic component and makes electrical contact with the lower electrode (see, for example, Patent Document 1).
  • a typical example of this transporting application is a rotating transport electronic component transporting device.
  • an electronic component conveying apparatus of a chuck outer periphery type rotational conveying system in which suction chucks and the like are arranged on the outer periphery of the turret table at equal circumferential positions and the electronic components are aligned and conveyed by intermittent rotation of the turret table (for example, , See Patent Document 2).
  • This chuck outer peripheral installation type rotary conveyance method has an advantage that electronic components can be received and discharged from the conveyance path by the chuck by itself while achieving high-speed conveyance by the rotation conveyance method.
  • This electronic component transport device arranges each inspection item unit along the transport path formed by the turret table, so that the electronic component transport device receives each inspection item while transporting the electronic component.
  • Each unit is arranged immediately below the chuck stop position due to intermittent rotation of the turret table, and the chuck places electronic components on each unit by lowering and causes the electronic components to receive inspection items. That is, an advancing / retreating drive unit that pushes down the chuck is fixedly installed immediately above each stop position, in other words, immediately above the stage of the unit.
  • the chuck outer peripheral type rotary conveyance type electronic component conveyance device has dramatically improved the production efficiency of electronic components by high-speed conveyance and self-supply and discharge to the conveyance path.
  • an electrical characteristic measuring unit for measuring electrical characteristics of the electronic components of the double-sided electrode cannot be incorporated in the transport path formed by the electronic component transport apparatus.
  • the turret table has a disk shape and has a chuck on the outer edge.
  • the stage of the electrical characteristic measurement unit is arranged immediately below the chuck stop position, the outer edge of the turret table always exists between the upper contact and the stage / lower contact. Therefore, the upper contact cannot be lowered toward the electronic component placed on the stage / lower contact.
  • the advancing / retreating drive unit is fixedly installed at the chuck stop position.
  • the height from the lower end of the chuck to the upper end of the advance / retreat driving unit exceeds the height of the space between the upper contact and the stage / lower contact. For this reason, it is physically impossible to dispose an electrical characteristic measurement unit in which the upper contact and the stage / lower contact are disposed opposite to each other in the transport path. Even if the space between the upper contact and the stage / lower contact is expanded, the upper contact cannot be lowered if the forward / backward drive unit and the turret table are always present.
  • An electronic component is temporarily unloaded from a conveyance path constituted by an electronic component conveyance apparatus of a chuck outer peripheral type rotary conveyance method, and the electronic component is reciprocated between the conveyance path and the electrical characteristic measurement unit by a shuttle or the like. Can be considered. However, it is difficult to match the shuttle's reciprocation with the high speed of the turret table. If this method is adopted, all the movements of the electronic component transport device are limited by the shuttle speed. In other words, the advantage of high-speed conveyance that the chuck outer peripheral type rotary conveyance type electronic component conveyance device has is lost.
  • the present invention has been proposed in order to solve the above-described problems.
  • the electric components of the double-sided electrode electronic component are not lost without losing the advantage of high-speed conveying.
  • the purpose is to make it possible to measure characteristics.
  • the present invention further provides an electronic component transfer that can arrange the stage and the structure opposite to each other across the transfer path without losing the advantages of high-speed transfer in an electronic component transfer apparatus of the chuck outer periphery type rotary transfer method.
  • An object is to provide an apparatus.
  • a first aspect of an electronic component conveying apparatus is an electronic component conveying apparatus that conveys an electronic component, has a circular shape having the same radius over the entire circumference, and has a predetermined rotation angle in the circumferential direction.
  • a turret table that rotates intermittently, a chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, and that extends radially toward the outside of the table and holds electronic components; and the turret table are set at respective points divided by the rotation angle of the turret table on the same circumference and are arranged at at least one of the stop positions where the chuck stops and the stop positions of the chuck.
  • a stage on which an electronic component is placed by the chuck a structure that is disposed to face the space above the stage with a space for the chuck to enter;
  • a retreat position that is set next to the stage and the structure, and the chuck is retreated from the stage and the structure while an electronic component is processed on the stage, among the stop positions of the back; It is characterized by.
  • a second aspect of the electronic component transport apparatus is an electronic component transport apparatus for transporting an electronic component, the turret table rotating intermittently at a predetermined rotation angle in the circumferential direction, and the turret table.
  • the chuck On the outer edge of the turret, the chuck is provided at a pitch of twice the rotation angle, extends radially toward the outside of the table and holds an electronic component, and a circle having the same center as the turret table.
  • An advancing / retreating drive unit that is fixedly installed above a trajectory through which the outermost diameter portion of the turret table passes and lowers the chuck toward the stage
  • a structure that is disposed opposite to the chuck above the stage with a space for the chuck to enter, and a position where the chuck is stopped is set next to the stage and the structure, and an electronic component is processed on the stage.
  • the chuck includes a retreat position for retracting the stage from the stage and the structure.
  • a processing unit of processing different from the processing at the stage may be further provided at at least one place of the other stopping positions counted from the retracted position.
  • Each stop position is at least one other place counted from the installation position of the stage and the structure, and the chuck does not perform the different processing only for picking up or removing the electronic component.
  • the different processing is performed at least every other place counted from the stop position and the retreat position, and the time is longer than the time required for pickup or separation at the first type stop position and less than the processing time on the stage.
  • a second type of stop position is performed at least every other place counted from the stop position and the retreat position, and the time is longer than the time required for pickup or separation at the first type stop position and less than the processing time on the stage.
  • a plurality of sets of the stage and the structure are provided, and each set is installed at any one of the stop positions counted from one set, and the retreat position is provided next to each set. It may be.
  • An electrical property measuring unit for measuring electrical properties of an electronic component having double-sided electrodes, and the electrical property measuring unit has the current-carrying contactor on which the electronic component is placed and in contact with the lower surface electrode of the electronic component;
  • the structure may be a current-carrying contact that contacts an upper surface electrode of an electronic component placed on the stage.
  • the structure may be lowered toward the electronic components of the stage, and at a return position from the lowered position, the structure may be left still with room for the chuck to enter.
  • the processing unit of the different processing is an appearance inspection unit that inspects the appearance of the electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores the electronic component and determines the appropriateness of the storage. Also good.
  • the chuck has an L shape that extends downward from the turret table and bends horizontally in the middle, and the bending position is provided at a height between the structure and the stage. Good.
  • the stage and the structure can be arranged to face each other across the transport path of the electronic component. Therefore, without losing the high-speed transportability of the electronic component, the stage and the structure can be attached to the electronic component. Processing is possible.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 2nd state, (b) is a time chart which shows the stop time of a 2nd state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 3rd state, (b) is a time chart which shows the stop time of a 3rd state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 4th state, (b) is a time chart which shows the stop time of a 4th state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 5th state, (b) is a time chart which shows the stop time of a 5th state.
  • the electrical characteristic measurement unit 41 measures electrical characteristics of the electronic component W.
  • the electrical characteristic measurement unit 41 is in electrical contact with the electrodes of the electronic component W, applies voltage or current injection to the electronic component W, and inspects the electrical characteristics.
  • the electrical characteristics include the voltage, current, resistance, or frequency of the electronic component W with respect to current injection or voltage application to the electronic component W, an output signal with respect to a logic signal, and the like.
  • the electronic component W is a component used for an electric product, and a semiconductor element or the like is packaged.
  • the semiconductor element include discrete semiconductors such as transistors, diodes, capacitors, resistors, and integrated circuits.
  • This electronic component W has a double-sided electrode package provided with electrodes for external connection on both sides.
  • the electrical property measurement unit 41 for the electronic component W having double-sided electrodes includes a stage / lower contact 412 and an upper contact 411.
  • the stage / lower contact 412 has the electronic component W placed thereon, and electrically contacts the bottom electrode of the electronic component W as an energizing contact.
  • the stage / lower contact 412 has a stage on which the electronic component W is placed and a lower contact in contact with the lower surface electrode, and the lower contact may be inserted from the back of the stage.
  • the upper contact 411 is a current-carrying contact that contacts the upper surface electrode of the electronic component W.
  • the upper contact 411 is supported by an upper base 413 that is taller than the stage / lower contact 412.
  • the upper contact 411 protrudes from the upper base 413 toward the conveyance path 2 (see FIG. 2) side of the electronic component W, and extends to a position directly above the stage / lower contact 412.
  • the upper contact 411 can be moved up and down.
  • the upper contact 411 approaches and separates from the stage / lower contact 412 by moving up and down.
  • the electrical characteristic measurement unit 41 includes a lifting drive unit 414 that lifts and lowers the upper contact 411.
  • the elevating drive unit 414 is a drive source and transmission mechanism module that converts rotational motion into linear motion of the upper contact 411.
  • the elevating drive unit 414 includes a tension spring 415, a motor 416, a cam 417, and a cam follower 418.
  • the tension spring 415 biases the upper base 413 so that the upper contact 411 moves toward the stage / lower contact 412.
  • the motor 416 has a rotating shaft that extends horizontally. Horizontal is a direction orthogonal to the arrangement of the upper contact 411 and the stage / lower contact 412.
  • the cam 417 is supported by the rotating shaft of the motor 416, has a flat shape, and forms a cam surface on the peripheral surface.
  • the cam follower 418 is fixed to the bottom surface of the upper base 413, contacts the cam 417 from the upper side, and follows the cam surface.
  • the electrical property measuring unit 41 lowers the upper contact 411 when the electronic component W is placed on the stage / lower contact 412. Then, the stage / lower contact 412 is brought into contact with the lower electrode, the upper contact 411 is brought into contact with the upper electrode, current injection, voltage application, or input of a logic signal is performed, and the output signal is analyzed.
  • FIG. 2 is an overall configuration diagram of an electronic component transport apparatus including the electrical characteristic measurement unit.
  • FIG. 3 is a partially enlarged view of the electronic component transport device viewed from the side. 2 and 3 conveys an electronic component W for measurement of various inspection items including measurement of electrical characteristics.
  • the electronic component transport apparatus 1 constitutes a transport path 2 for electronic components W, and various units are arranged along the transport path 2.
  • the various units are a supply unit 3, various inspection units including an electrical characteristic measurement unit 41, an inspection support unit 5, a discharge container 6, and a storage unit 7.
  • an appearance inspection unit 42 is further provided as an inspection unit.
  • the conveyance path 2 includes a turret table 21 and a chuck 22.
  • the turret table 21 is a circular disk extending in the horizontal direction and having the same radius over the entire circumference.
  • the drive source of the turret table 21 is a direct drive motor 23.
  • the direct drive motor 23 is connected to the bottom surface of the turret table 21, supports the turret table 21, and intermittently rotates the turret table 21 by a predetermined angle in the circumferential direction.
  • the chuck 22 is attached to the outer edge of the turret table 21. Therefore, the chuck 22 sequentially stops at each stop position 24 by intermittent rotation of the turret table 21. In other words, the stop position 24 is provided at each point divided by the rotation angle of one pitch of the turret table 21 on the circumference having the same center as the turret table 21.
  • the chuck 22 extends horizontally from the outer edge of the turret table 21.
  • the chuck 22 holds the electronic component W at a tip away from the turret table 21. That is, the conveyance path 2 is a trajectory through which the tip of the chuck 22 passes, and is formed around the turret table 21.
  • the type of the chuck 22 is not particularly limited, but the chuck 22 is, for example, a suction chuck.
  • the chuck 22 which is an adsorption chuck has a hollow tube inside.
  • the tip of the chuck 22 has an opening 22a facing downward, and the opening 22a is connected to the hollow tube.
  • the hollow tube communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a.
  • a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a.
  • the chuck 22 is attached to the outer edge of the turret table 21 via a bearing or a slider, and can move up and down.
  • the chuck 22 receives the electronic component W from the supply unit 3 by moving up and down, and exchanges the electronic component W with the inspection support unit 5, the electrical characteristic measurement unit 41, and the appearance inspection unit 42.
  • the chuck 22 places an electronic component W whose electrical characteristics have not been measured on the stage / lower contact 412 of the electrical characteristic measuring unit 41, and the electronic component whose electrical characteristics have been measured from the stage / lower contact 412 is finished. W is collected.
  • the chuck 22 is lowered by being pushed down by the advance / retreat drive unit 25.
  • the advance / retreat drive unit 25 is installed immediately above the outer edge of the turret table 21.
  • the base end of the chuck 22 exists on a vertical line extending from the advance / retreat drive unit 25.
  • the advance / retreat drive unit 25 and the turret table 21 have no fixed relationship, and the advance / retreat drive unit 25 does not move.
  • the advance / retreat drive unit 25 includes a motor, a cam mechanism, and a rod, and converts the rotational force of the motor into a linear motion by the cam mechanism and transmits the linear motion to the rod.
  • the rod extends toward the stop position 24 of the chuck 22, contacts the base end of the chuck 22 existing at the stop position 24 from above, and further pushes down the chuck 22 downward.
  • the chuck 22 extends while maintaining a height that enters between the upper contact 411 and the stage / lower contact 412 of the electrical characteristic measurement unit 41.
  • the upper contact 411 and the stage / lower contact 412 are installed on the outer edge of the turret table 21 and on the outer side in the table radial direction with respect to the advance / retreat driving unit 25, and between the upper contact 411 and the stage / lower contact 412.
  • the outer edge of the turret table 21 and the advance / retreat drive unit 25 are not provided.
  • the chuck 2 extends downward from the base end and bent outward in the middle. By adopting the shape, it can be extended to the height of the space.
  • the number of the stop positions 24 of the chuck 22 is twice the number of the chucks 22 arranged. That is, the chucks 22 are arranged at equal circumferential positions around the turret table 21, and when the arrangement interval is an angle 2a, the direct drive motor 23 rotates the turret table 21 by an angle a per pitch. For example, 32 stop positions 24 are set for 16 chucks 22.
  • Each unit 3, 41, 42, 5, 6, 7 is installed at one of the stop positions 24 of the chuck 22.
  • the electronic component transport apparatus 1 transports the electronic component W along the transport path 2, stops at least each of the units 3, 41, 42, 5, 6, and 7, and stops each unit 3, 41, 42, 5 , 6 and 7 cause the electronic component W to be processed.
  • Two electrical characteristic measurement units 41 are provided, and one stop position 24 is provided, and each is arranged at the stop position 24.
  • the stop position 24 adjacent to each of the two electrical property measurement units 41 is a retreat position 41a of the chuck 22 in the electrical property measurement time zone, and the unit is not disposed.
  • the retreat position 41 a is set on the downstream side in the transport direction of the electrical characteristic measurement unit 41.
  • the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7 are arranged at any one of the stop positions 24 counted from the retreat position 41a.
  • the supply unit 3 and the discharge container 6 are arranged at any one stop position 24 counted from the arrangement position of the electrical characteristic measurement unit 41. That is, when the stop position 24 is provided at an even number, the appearance inspection unit 42, the inspection support unit 5, and the housing unit 7 are placed at the odd-numbered stop position 24 counted from the electrical characteristic measurement unit 41 at the supply unit 3 and the discharge container 6. Are arranged at even-numbered stop positions 24.
  • the supply unit 3 supplies the electronic component W to the transport path 2.
  • the supply unit 3 is a unit that does not perform processing on the electronic component W, such as a sliding movement device, a tray movement device, or a wafer holder device.
  • the sliding movement device aligns and conveys a large number of electronic components W accommodated in a mortar-like container and moves them to the entrance of the conveyance path 2.
  • the tray moving device moves the tray in two orthogonal axes.
  • the tray is partitioned in a lattice shape, and the electronic component W is accommodated in each lattice.
  • the electronic components W in each lattice are moved to the entrance of the transport path 2 by moving the tray in the two orthogonal axes along the spreading plane of the tray.
  • the wafer holder device moves the wafer ring in two orthogonal axes.
  • the wafer ring is formed by arranging electronic components W in an array.
  • Each electronic component W is moved to the entrance of the conveyance path 2 by moving the wafer ring in two orthogonal axes along the spreading plane of the wafer ring.
  • a rotary pickup that relays the electronic component W may be installed between the supply unit 3 and the transport path W.
  • the discharge container 6 is a unit that only receives the electronic component W whose test result is not good and does not process the electronic component W. Moreover, the accommodation unit 7 accommodates the electronic component W whose test result is good.
  • the accommodation unit 7 is, for example, a taping device, a tube device, a tray moving device, a wafer holder device, or the like, and is a unit that includes a determination process of whether accommodation is appropriate.
  • the taping device is a device for running a tape in which pockets are arranged along the longitudinal direction of the band, and moves each pocket to the exit of the conveyance path 2.
  • the tube device moves a tube that accommodates the electronic component W.
  • the inspection support unit 5 performs a process of correcting the posture of the electronic component W to be inspected in advance in order to improve inspection accuracy.
  • the inspection support unit 5 has an XY ⁇ stage on which the electronic component W is placed.
  • the XY ⁇ stage moves in two orthogonal axes along the stage plane, and rotates on an axis perpendicular to the stage plane.
  • the inspection support unit 5 corrects the orientation and position of the electronic component W by placing the electronic component W passed from the transport path 2 on the XY ⁇ stage and moving and rotating the XY ⁇ stage.
  • the inspection support unit 5 includes a camera that images the electronic component W, and analyzes the direction and position of the electronic component W in the image to control the movement amount and the rotation amount of the XY ⁇ stage.
  • the appearance inspection unit 42 photographs the electronic component W with a camera, analyzes the image of the electronic component W, and detects the presence or absence of scratches or dirt on the surface.
  • A is the measurement time by the electrical characteristic measurement unit 41
  • B is the longest processing time by the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7.
  • a ⁇ B> C is, in general, the measurement time by the electrical characteristic measurement unit 41 is long.
  • Supply and discharge of the electronic component W to the transport path 2 are completed in a relatively short time.
  • the appearance inspection of the electronic component W, the posture correction of the electronic component W, and the accommodation of the electronic component W take longer than the supply and discharge to the transport path 2, but do not reach the measurement time by the electrical characteristic measurement unit 41.
  • the units 42, 5 and 7 that complete the processing in such a medium time B are arranged at every other stop position 24 counted from the retreat position 41a.
  • the units 3 and 6 that complete processing in a short time C are arranged at every other stop position 24 counting from the arrangement position of the electrical characteristic measurement unit 41.
  • the units that complete processing in the short time C may be arranged at every other stop position 24 counting from the retreat position 41a.
  • the electronic component transport apparatus 1 is configured such that the electronic components W whose electrical characteristics have not been measured are arranged in the two electrical characteristics measuring units 41 (in the drawings, from stage (a) to stage (d).
  • the electronic component W is placed on the stage / lower stage 412 (step (e) in the figure).
  • the chuck 22 is interposed between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41 (step (e) in the figure).
  • both chucks 22 on which the electronic component W is placed move one pitch and move to the retreat position 41a (step (f) in the figure).
  • the chuck 22 is separated from the space between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41, and the structure is not interposed except for the electronic component W (in the drawing).
  • the electrical characteristic measuring unit 41 starts measuring electrical characteristics when both chucks 22 have moved to the retracted position 41a (step (g) in the figure).
  • the electrical characteristic measuring unit 41 brings the upper contact 411 closer to the stage / lower contact 412, contacts the upper surface electrode with the upper contact 411, and contacts the lower electrode with the stage / lower contact 412, Voltage application is started and an output signal from the electronic component W is analyzed.
  • step (h ) When the measurement of the electrical characteristics is completed, the upper contacts 411 are raised, and both chucks 22 on which the electronic component W is placed move back by one pitch and move from the retracted position 41a to the electrical characteristics measurement unit 41 (step (h )), Receiving the electronic component W whose electrical characteristics have been measured (step (i) in the figure). Then, the chuck 22 holding the electronic component W for which the measurement of electrical characteristics has been completed moves away from the electrical characteristics measurement unit 41 (step (j) in the figure).
  • the electrical characteristics of the electronic component W are measured.
  • the turret table 21 repeats a rotation routine for moving the chuck 22 forward by 3 pitches and then retracting it by 1 pitch.
  • one rotation routine is composed of 2N + 1 forward movements and one backward movement.
  • each stop time included in this rotation routine is different.
  • the first type of stop time when the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the first electrical property measuring unit 41 is as follows. This is the shortest time C that can be supplied to or discharged from the transport path 2.
  • the leading chuck 22A arrives at the first electrical characteristic measuring unit 41, the leading chuck 22A keeps holding the electronic component W while still.
  • the other chuck 22B arrives at the supply unit 3, and the other chucks 22F and 22G arrive at the discharge container 6, and pick up the electronic component W and discharge the electronic component W, respectively. That is, the shortest stop time is the later of the series of steps of lowering the chuck 22B, holding the electronic component, and raising the chuck 22B, or detaching the electronic component W by the chucks 22F and 22G. In general, the series of steps of the chuck 22B is slower.
  • the inspection support unit 5, the appearance inspection unit 42, and the accommodation unit 7 on the transport path 2 are installed at every other stop position 24 counting from the retreat position 41 a adjacent to the electrical characteristic measurement unit 41. Since these units 5, 42, 7 do not operate, the first type of stop time is not restricted by the processing time of these units 5, 42, 7.
  • the second type of stop time at this timing is the longest time of the inspection support unit 5, the appearance inspection unit 42, or the housing unit 7, and is a time B shorter than the measurement time of the electrical characteristics.
  • the other chucks 22B, 22G, and 22F arrive at the inspection support unit 5, the appearance inspection unit 52, and the housing unit 7 while holding the electronic component W.
  • the inspection support unit 5 the chuck 22B is lowered, the electronic component W is detached from the XY ⁇ stage, the chuck 22B is raised, the XY ⁇ stage is changed, the chuck 22B is lowered again, the electronic component W is picked up from the XY ⁇ stage, and A series of steps for re-raising the chuck 22B is performed.
  • the appearance inspection unit 42 the electronic component W is imaged.
  • a series of steps of lowering the chuck 22 ⁇ / b> F, detaching the electronic component W to the housing location, inspecting the success or failure of proper housing, and raising the chuck 22 ⁇ / b> F are performed.
  • Each of these series of processes takes longer than the shortest time C, and the stop time B is the longest time of each series of these processes.
  • the second type of stop time has elapsed, and the chuck 22 again moves one pitch as shown in FIG. Then, the pair of chucks 22 ⁇ / b> A and 22 ⁇ / b> B holding the electronic component W whose electrical characteristics are not measured arrives at each electrical characteristic measurement unit 41.
  • the stop time at this timing may be the same as the first type stop time.
  • the pair of chucks 22 ⁇ / b> A and 22 ⁇ / b> B only places the electronic component W on the electrical property measurement unit 41, and the process by the electrical property measurement unit 41 is not performed.
  • none of the chucks 22 has arrived at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.
  • the pickup of the electronic component W from the supply unit 3 need not be executed. This is because the same situation occurs at the second stop timing. Rather than picking up the electronic component W at this timing, picking up the electronic component W at the second stop timing reduces the number of intermittent movements of the electronic component W in the transport path 2, resulting in sudden stop and acceleration. Since the number of times of receiving the inertial force is reduced, the possibility that the electronic component W is displaced is reduced.
  • the third type of stop time is This is the longest time A in which electrical characteristics can be measured.
  • the chucks 22A and 22B on which the electronic component W is placed on the stage / lower contact 412 are present at the retracted position 41a, so that a structure is formed between the upper contact 411 and the stage / lower contact 412.
  • the body is absent, and the upper contact 411 is lowered to be able to contact the upper electrode.
  • the electrical characteristics are measured at this timing.
  • the chucks 22 ⁇ / b> C, 22 ⁇ / b> H, and 22 ⁇ / b> G arrive at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7 while holding the electronic component W. Therefore, inspection support, appearance inspection, and accommodation are also performed at this timing.
  • these inspection support, appearance inspection, and accommodation are shorter than the measurement of electrical characteristics, the longest time A is stopped at this timing.
  • the third type of stop time accompanied by the measurement of the electrical characteristics has elapsed, and the chucks 22A and 22B are moved back to the electrical characteristics measurement unit 41 again as shown in FIG. Then, the chucks 22 ⁇ / b> A and 22 ⁇ / b> B hold the electronic component W whose electrical characteristics have been measured again.
  • the stop time at this timing may be the same as the first type stop time.
  • the pair of chucks only picks up the electronic component W from the electrical characteristic measurement unit 41. Further, only the electronic component W that has been subjected to the inspection support and the appearance inspection is returned to the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.
  • the chuck 22C may be picked up at this timing.
  • the electronic component transport apparatus 1 may adopt a chuck outer periphery type rotary transport system in which the turret table 21 constituting the transport path 2 has the same radius over the entire circumference.
  • the chucks 22 that hold the electronic components W are extended horizontally in the radial direction toward the outside of the table.
  • the upper contact 411 is disposed above the stage / lower contact 412 on which the electronic component W is placed by the chuck 22, only the chuck 22 is interposed between the stage / lower contact 412 and the upper contact 411. Since the upper contact 411 and the turret table 21 do not come into contact with each other, the electronic component W can be placed on the stage / lower contact 412.
  • the chuck 22 is provided on the outer edge of the turret table 21 at a pitch twice the intermittent rotation angle of the turret table 21, and a retracting position 41 a for retracting the chuck 22 is set next to the stage / lower contact 412 and the upper contact 411. did.
  • the upper contact 411 can be lowered to contact the upper surface electrode of the electronic component W without being obstructed by the chuck 22.
  • the electrical characteristic measuring unit 41 is provided.
  • the turret table 21 can be installed in the transport path 2, and the electrical characteristics of the electronic component W having double-sided electrodes can be measured on the transport path 2. That is, it is possible to measure the electrical characteristics of the electronic component W having double-sided electrodes on the transport path 2 configured only by the chuck outer periphery type rotary transport format. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
  • the turret table 21 may be absent between the stage and the lower contact 412 and the upper contact 411 between the arms.
  • the electronic component conveying apparatus 1 includes an advance / retreat driving unit 25 that lowers the chuck 22 toward the stage / lower contact 412 in order to place the electronic component W on the stage / lower contact 412. May be fixedly installed above the trajectory through which the outermost diameter portion passes. Also in this case, by making the chuck 22 extend radially toward the outside of the table, the upper contact 411 and the advance / retreat drive unit 25 are not contacted, and the electronic component W is placed on the stage / lower contact 412. Can be placed.
  • the electronic component W having double-sided electrodes can be measured by the transport path 2 configured only by the rotational transport type. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
  • a stage is installed on the lower side and a structure is arranged facing the stage.
  • a structure is arranged facing the stage.
  • it is desired to take an image of an electronic component with a camera from directly above the stage that is, in addition to the upper contact 411, other structures such as a laser marking device and a camera may exist above the stage. Even when it is necessary to dispose such a structure other than the upper contact 411 above the stage, the electronic component transport apparatus 1 needs to be temporarily detached from the transport path 2 configured by the turret table 21.
  • the action of the structure can be imparted to the electronic component W on the conveyance path 2 constituted by the turret table 21, and the high-speed conveyance that is the advantage of the rotary conveyance type can be exhibited, and the production efficiency can be improved.
  • the retreat position 41a may be disposed next to the downstream side in the transport direction as viewed from the electrical characteristic measurement unit 41, or may be disposed next to the upstream side in the transport direction.
  • the chuck 22 may be an electrostatic chuck, a Bernoulli chuck, or a chuck that has a pinch and is mechanically pinched.
  • the groups of every other stop position 24 counted from the electrical characteristic measuring unit 41 and the retracted position 41a are counted. Every other stop position 24 group.
  • the processing units 5, 42, and 7 of processing different from the electrical characteristic measuring unit 41 are arranged at every other stop position 24 counted from the retreat position 41a.
  • the stop time when the chuck 22 with the electronic component W placed on the electrical property measurement unit 41 is present at the retracted position 41a is C due to the regulation of electrical property measurement.
  • the electronic component transport apparatus 1 when the C is stopped for a long time due to the measurement of the electrical characteristics, other processing can be performed by the processing units 5, 42, and 7 in which the other chucks 22 are stopped. In other words, at the timing when only the electronic component W is placed on the electrical characteristic measurement unit 41, other processing is not performed, and the stop time at this timing can be shortened. Even when the measurement of electrical characteristics is included in the inspection item, the transportation of the electronic component W by the electronic component transportation apparatus 1 can be further speeded up, and the production efficiency can be further improved.
  • an appearance inspection unit 42 that inspects the appearance of the electronic component W
  • an inspection support unit 5 that corrects the attitude of the electronic component W
  • a storage unit that stores the electronic component W and determines the appropriateness of the storage. 7 was mentioned.
  • a processing unit that performs processing that takes more time than picking up and discharging the electronic component W it may be placed at every other stop position 24 counting from the retreat position 41a.
  • each electrical property measuring unit 41 is installed at any one of the other stop positions 24 counted from one electrical property measuring unit 41, and the retracted position 41a. Is provided next to each electrical characteristic measuring unit 41. In this aspect, it is possible to measure the electrical characteristics at a time after the electronic components W are aligned in all the electrical characteristics measuring units 41.
  • the electrical property measuring unit 41 is not limited to two devices, and a plurality of devices can be installed, and the number of occurrences of electrical property measurement is reduced in inverse proportion to the number of installed devices, thereby improving the transport speed of the electronic component W. Can do. Further, even if the processing unit is other than the electrical characteristic measurement unit 41, a plurality of the same type may be installed, and the processing may be performed after the electronic components W are arranged in all the processing units.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Specific Conveyance Elements (AREA)
PCT/JP2015/080378 2014-11-28 2015-10-28 電子部品搬送装置 WO2016084541A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201580002287.4A CN105874342B (zh) 2014-11-28 2015-10-28 电子零件搬送装置
HK16110353.2A HK1222226A1 (zh) 2014-11-28 2016-08-31 電子零件搬送裝置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-241439 2014-11-28
JP2014241439A JP5865470B1 (ja) 2014-11-28 2014-11-28 電子部品搬送装置

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TWI679422B (zh) * 2016-12-02 2019-12-11 全新方位科技股份有限公司 高載量手臂自動機
DE102017124571B4 (de) * 2017-10-20 2020-01-09 Asm Assembly Systems Gmbh & Co. Kg Halte- und Antriebseinrichtung, Werkzeugeinrichtung, Ergänzungswerkzeugeinrichtung von einer modular aufgebauten Bauelement-Handhabungsvorrichtung, Vorrichtung zum Handhaben von Bauelementen sowie Verfahren zum anwendungsspezifischen Konfigurieren einer solchen Vorrichtung
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JP5865470B1 (ja) 2016-02-17
HK1222226A1 (zh) 2017-06-23
JP2016102723A (ja) 2016-06-02
CN105874342B (zh) 2017-10-24
TWI555687B (zh) 2016-11-01
CN105874342A (zh) 2016-08-17

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