WO2015133516A1 - 基板処理システムおよび基板処理方法 - Google Patents
基板処理システムおよび基板処理方法 Download PDFInfo
- Publication number
- WO2015133516A1 WO2015133516A1 PCT/JP2015/056341 JP2015056341W WO2015133516A1 WO 2015133516 A1 WO2015133516 A1 WO 2015133516A1 JP 2015056341 W JP2015056341 W JP 2015056341W WO 2015133516 A1 WO2015133516 A1 WO 2015133516A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- processing
- supply line
- liquid supply
- substrate
- liquid
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 166
- 238000003672 processing method Methods 0.000 title claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 482
- 238000009826 distribution Methods 0.000 claims abstract description 122
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000011010 flushing procedure Methods 0.000 claims abstract description 27
- 238000004140 cleaning Methods 0.000 claims description 169
- 239000002245 particle Substances 0.000 claims description 48
- 230000007547 defect Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 7
- 230000009471 action Effects 0.000 abstract description 5
- 238000005498 polishing Methods 0.000 description 98
- 235000012431 wafers Nutrition 0.000 description 96
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 48
- 239000010408 film Substances 0.000 description 22
- 239000000126 substance Substances 0.000 description 20
- 239000000243 solution Substances 0.000 description 15
- 238000001035 drying Methods 0.000 description 12
- 239000011362 coarse particle Substances 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000003334 potential effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02035—Shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67219—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one polishing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Definitions
- the present invention relates to a substrate processing system and a substrate processing method for processing a substrate such as a wafer, and more particularly to a substrate processing system and a substrate processing method capable of processing a substrate using a processing liquid and cleaning a processing liquid supply line. .
- a plurality of substrate processing apparatuses for polishing and cleaning a wafer are installed in a semiconductor device manufacturing factory.
- a centralized supply system that distributes a processing liquid such as a polishing liquid or a chemical liquid to the plurality of substrate processing apparatuses is employed.
- the processing liquid circulates through a circulation line installed in the manufacturing factory, and the processing liquid is supplied to each substrate processing apparatus through a branch line extending from the circulation line.
- the processing liquid supplied to the substrate processing apparatus continues to flow in the substrate processing apparatus as long as the wafer is processed (ie, polishing and cleaning). However, when the wafer is not processed, the processing liquid remains in the piping installed in the substrate processing apparatus. If the wafer is not processed for a long time, the processing liquid settles in the pipe. As a result, the concentration distribution of the treatment liquid may change, or particles such as abrasive grains contained in the treatment liquid may aggregate to form large particles (hereinafter referred to as coarse particles). The processing liquid whose concentration distribution has changed causes an adverse effect on the processing result of the substrate. Further, if coarse particles come into contact with the wafer during wafer processing, scratches may occur on the surface of the wafer.
- the present invention has been made in view of the above-described conventional problems, and is a substrate processing system capable of processing a substrate while supplying a processing liquid exhibiting its original properties directly or indirectly to a substrate such as a wafer. It is another object of the present invention to provide a substrate processing method.
- One aspect of the present invention is a substrate processing apparatus that processes a substrate while supplying the processing liquid directly or indirectly from a processing liquid supply nozzle connected to the processing liquid supply line to the substrate, a processing liquid supply source, and the processing.
- a distribution line that connects a liquid supply line, and a flushing device that cleans the distribution line and the treatment liquid supply line, the flushing device passing through the distribution line and a cleaning liquid supply line connected to the distribution line
- a drain mechanism that guides the cleaning liquid supplied to the processing liquid supply line to a liquid disposal location, and is attached to the distribution line and the cleaning liquid supply line, and either the processing liquid or the cleaning liquid flows in the distribution line.
- a supply switching valve that permits this, and an operation control that controls the operation of the drain mechanism and the supply switching valve Comprising a part, the said distribution lines and the supply switching valve is a substrate processing system characterized in that it is arranged outside of the substrate processing apparatus.
- the drain mechanism includes a drain line that branches from the processing liquid supply line and extends to the liquid disposal location, and a drain switching valve attached to the processing liquid supply line and the drain line.
- the drain switching valve is configured to guide the cleaning liquid flowing through the processing liquid supply line to the drain line.
- the drain switching valve is arranged immediately upstream of the processing liquid supply nozzle.
- the drain mechanism is a nozzle moving mechanism that moves the processing liquid supply nozzle from a predetermined position for processing the substrate to a position above the liquid disposal location. To do.
- the operation control unit operates the supply switching valve to flow the cleaning liquid into the processing liquid supply line before the substrate is processed.
- the operation control unit when the operation time of the substrate processing apparatus reaches a predetermined time, the operation control unit operates the supply switching valve and the drain mechanism to supply the cleaning liquid to the processing liquid supply line.
- the cleaning liquid is guided to the liquid disposal location while flowing into the liquid.
- the apparatus further includes a particle measuring device that counts the number of particles contained in the treatment liquid per unit volume.
- the operation control unit issues an alarm or stops the operation of the substrate processing apparatus when the number of particles reaches a predetermined threshold value.
- the operation control unit when the number of particles reaches a predetermined threshold value, the operation control unit operates the supply switching valve to supply the cleaning liquid through the distribution line to the processing liquid supply line.
- the drain mechanism is operated to guide the cleaning liquid supplied to the processing liquid supply line to the liquid disposal location.
- a filter for capturing the particles contained in the processing liquid is further provided, and the particle measuring device is disposed on the downstream side of the filter.
- the operation control unit issues an alarm prompting replacement of the filter when the number of particles reaches a predetermined threshold value.
- a preferred aspect of the present invention further includes a film thickness measuring device for measuring the film thickness of the substrate, and the operation control unit is configured to switch the supply when the measured value of the film thickness exceeds a predetermined allowable range. Operating the valve to flow the cleaning liquid through the distribution line into the processing liquid supply line, and operating the drain mechanism to guide the cleaning liquid supplied to the processing liquid supply line to the liquid disposal point.
- the apparatus further includes a substrate inspector that detects a defect of the substrate, and the operation control unit performs the supply switching when the number of detected defects reaches a predetermined threshold value. Operating the valve to flow the cleaning liquid through the distribution line into the processing liquid supply line, and operating the drain mechanism to guide the cleaning liquid supplied to the processing liquid supply line to the liquid disposal point.
- the cleaning liquid is supplied to the processing liquid supply line while flowing the cleaning liquid to the processing liquid supply line in the substrate processing apparatus through the distribution line to clean the distribution line and the processing liquid supply line.
- the substrate processing method is characterized in that the substrate is processed in the substrate processing apparatus while supplying the processing liquid directly or indirectly to the substrate through the processing liquid supply line.
- a new processing liquid is supplied to the distribution line, the processing liquid remaining in the distribution line is washed away, and the processing liquid is further guided to the liquid disposal site. .
- the method further includes a step of measuring the number of particles contained in the treatment liquid per unit volume. In a preferred aspect of the present invention, when the number of particles reaches a predetermined threshold value, an alarm is issued or the operation of the substrate processing apparatus is stopped. In a preferred aspect of the present invention, when the number of particles reaches a predetermined threshold value, the cleaning liquid is flowed to the processing liquid supply line through the distribution line to clean the distribution line and the processing liquid supply line.
- the step of guiding the cleaning liquid to the liquid disposal site is performed again.
- an alarm is issued to prompt replacement of a filter attached to the distribution line or the processing liquid supply line. .
- a preferred embodiment of the present invention further includes a step of measuring the film thickness of the substrate, and when the measured value of the film thickness exceeds a predetermined allowable range, the cleaning liquid is supplied to the processing liquid supply line through the distribution line. The step of introducing the cleaning liquid to the liquid disposal site is performed again while flowing the flow of the liquid into the liquid and cleaning the distribution line and the processing liquid supply line.
- a preferred embodiment of the present invention further includes a step of detecting a defect of the substrate, and when the number of detected defects reaches a predetermined threshold value, the cleaning liquid is supplied to the processing liquid through the distribution line. The step of introducing the cleaning liquid to the liquid disposal site is performed again while flowing through the line and cleaning the distribution line and the processing liquid supply line.
- the cleaning liquid is flowed to the processing liquid supply line through the distribution line to clean the distribution line and the processing liquid supply line.
- the cleaning liquid supplied to the processing liquid supply line is guided to the liquid disposal location.
- the cleaning liquid flows in the distribution line and the processing liquid supply line, and the deteriorated processing liquid staying in the distribution line and the processing liquid supply line is washed away. Further, the cleaning liquid is guided to the liquid disposal site by the drain mechanism together with the processing liquid, and is discharged to the liquid disposal site. Therefore, the cleaning liquid and the deteriorated processing liquid are not supplied to the substrate, and the processing of the substrate is not adversely affected. After the distribution line and the processing liquid supply line are cleaned with the cleaning liquid, the processing liquid that can exhibit its original properties is supplied directly or indirectly to the substrate. Therefore, the substrate can be processed normally.
- FIG. 2 is a perspective view of a polishing unit incorporated in the substrate processing apparatus shown in FIG. 1. It is the figure which looked at the grinding
- FIG. 1 to FIG. 11 the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.
- FIG. 1 is a plan view showing an embodiment of a substrate processing apparatus 1.
- the substrate processing apparatus 1 is a composite apparatus capable of executing a plurality of processes including polishing, cleaning, and drying of a substrate such as a wafer.
- the substrate processing apparatus 1 includes a substantially rectangular housing 10 and a load port 12 on which a substrate cassette that accommodates a number of wafers is placed.
- the load port 12 is disposed adjacent to the housing 10.
- the load port 12 can be equipped with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod).
- the SMIF and FOUP are sealed containers that can maintain an environment independent of the external space by accommodating a substrate cassette inside and covering with a partition wall.
- polishing units 14a, 14b, 14c and 14d Inside the housing 10 are a plurality (four in this embodiment) of polishing units 14a, 14b, 14c and 14d for cleaning the wafer, and a first cleaning unit 16 and a second cleaning unit 18 for cleaning the polished wafer. And a drying unit 20 for drying the cleaned wafer.
- the polishing units 14 a to 14 d are arranged along the longitudinal direction of the substrate processing apparatus 1, and the cleaning units 16 and 18 and the drying unit 20 are also arranged along the longitudinal direction of the substrate processing apparatus 1.
- a first substrate transfer robot 22 is arranged, and a substrate transfer unit 24 is arranged in parallel with the polishing units 14a to 14d.
- the first substrate transfer robot 22 receives the wafer to be polished from the load port 12 and passes it to the substrate transfer unit 24, and receives the dried wafer from the drying unit 20 and returns it to the load port 12.
- the substrate transfer unit 24 transfers the wafer received from the first substrate transfer robot 22 and delivers the wafer to and from each of the polishing units 14a to 14d.
- Each of the polishing units 14a to 14d polishes the surface of the wafer by bringing the wafer into sliding contact with the polishing surface while supplying a polishing liquid (slurry) to the polishing surface.
- a second substrate transfer robot 26 is disposed between the first cleaning unit 16 and the second cleaning unit 18 to transfer the wafer between the cleaning units 16 and 18 and the substrate transfer unit 24.
- a third substrate transfer robot 28 is arranged between the second cleaning unit 18 and the drying unit 20 to transfer wafers between these units 18 and 20.
- a processing control unit 29 that controls the movement of each unit of the substrate processing apparatus 1 is disposed inside the housing 10.
- the first cleaning unit 16 and the second cleaning unit 18 the first cleaning unit 16 that cleans the wafer by rubbing a roll sponge on both the front and back surfaces of the wafer in the presence of a chemical solution is used.
- a cleaning device that rubs a pen-type sponge against the wafer in the presence of a chemical solution may be used.
- the drying unit 20 a spin drying apparatus is used in which a wafer is dried by ejecting IPA vapor from a moving nozzle and rotating the wafer at a high speed.
- the wafer is polished by at least one of the polishing units 14a to 14d.
- the polished wafer is cleaned by the first cleaning unit 16 and the second cleaning unit 18, and the cleaned wafer is dried by the drying unit 20.
- the wafer dried by the drying unit 20 is transferred to the film thickness measuring device 21 by the first substrate transfer robot 22.
- the film thickness measuring device 21 is configured to measure the film thickness of the wafer. After measuring the film thickness, the first substrate transfer robot 22 takes out the wafer from the film thickness measuring device 21 and returns it to the load port 12.
- FIG. 2 is a perspective view of the polishing unit 14a incorporated in the substrate processing apparatus 1 shown in FIG.
- the polishing unit 14 a supplies a polishing liquid to the polishing table 42 that supports the polishing pad 41, a top ring 43 that presses the wafer W, which is an example of a substrate, against the polishing pad 41, and the polishing pad 41.
- a polishing liquid supply nozzle 50 is provided.
- the polishing table 42 is connected to a table motor 46 disposed below the table shaft 45, and the table motor 46 rotates the polishing table 42 in a direction indicated by an arrow.
- the polishing pad 41 is affixed to the upper surface of the polishing table 42, and the upper surface of the polishing pad 41 constitutes a polishing surface 41 a for polishing the wafer W.
- the top ring 43 is fixed to the lower end of the top ring shaft 47.
- the top ring 43 is configured to hold the wafer W on the lower surface thereof by vacuum suction.
- the top ring shaft 47 is connected to a rotation device (not shown) installed in the top ring arm 48, and the top ring 43 is rotated by the rotation device via the top ring shaft 47.
- the top ring 43 is a substrate holder that holds and rotates the wafer W.
- FIG. 3 is a top view of the polishing unit 14a shown in FIG.
- the polishing liquid supply nozzle 50 is fixed to a nozzle turning shaft 51 and is configured to be turnable around the nozzle turning shaft 51.
- the nozzle turning shaft 51 is connected to a nozzle motor 52 as a nozzle moving mechanism.
- the polishing liquid supply nozzle 50 is located on the outside of the polishing pad 41 and at a position above the polishing pad 41. It is configured to be movable between the processing position P2.
- the polishing of the wafer W is performed as follows.
- the top ring 43 and the polishing table 42 are rotated in directions indicated by arrows in FIG. In this state, the top ring 43 presses the wafer W against the polishing surface 41 a of the polishing pad 41 while supplying the polishing liquid onto the polishing surface 41 a of the polishing pad 41 from the polishing liquid supply nozzle 50 at the processing position P2.
- the wafer W is brought into sliding contact with the polishing pad 41 in the presence of the polishing liquid held on the polishing surface 41a.
- the surface of the wafer W is polished by the mechanical action of abrasive grains contained in the polishing liquid and the chemical action of chemical components of the polishing liquid.
- the polishing unit 14 a further includes a dressing device 54 for dressing the polishing pad 41.
- the dressing device 54 includes a dresser 56 that contacts the polishing surface 41 a of the polishing pad 41, a dresser arm 57 that supports the dresser 56, and a dresser pivot shaft 58 that pivots the dresser arm 57.
- the dresser 56 is configured to be rotated by a motor (not shown) installed in the dresser arm 57.
- the lower surface of the dresser 56 constitutes a dressing surface made up of a large number of abrasive grains such as diamond particles.
- the dressing of the polishing pad 41 is performed after the wafer W is polished. That is, after polishing the wafer W, the top ring 43 holding the wafer W is moved to the outside of the polishing table 42. Next, the dresser 56 is pressed against the polishing surface 41 a of the polishing pad 41 while rotating around its axis. In this state, as the dresser arm 57 turns, the dresser 56 swings on the polishing surface 41a. The dresser 56 dresses the polishing surface 41 a by slightly scraping the polishing pad 41. During dressing of the polishing pad 41, pure water is supplied from the polishing liquid supply nozzle 50 to the polishing pad 41 instead of the polishing liquid.
- FIG. 4 is a perspective view showing the first cleaning unit 16.
- a sponge cleaning tool for cleaning the wafer W a roll sponge extending in the horizontal direction is used.
- the first cleaning unit 16 includes four holding rollers 71, 72, 73, and 74 that hold and rotate the wafer W, cylindrical roll sponges 77 and 78 that are in contact with the upper and lower surfaces of the wafer W, and these rolls.
- Cleaning device rotation devices 80 and 81 for rotating the sponges 77 and 78 around the central axis thereof, an upper rinse liquid supply nozzle 85 for supplying a rinse liquid (for example, pure water) to the upper surface of the wafer W, and a chemical solution for the upper surface of the wafer W
- an upper chemical liquid supply nozzle 87 for supplying the liquid.
- a lower rinsing liquid supply nozzle that supplies a rinsing liquid (for example, pure water) to the lower surface of the wafer W and a lower chemical liquid supply nozzle that supplies a chemical liquid to the lower surface of the wafer W are provided.
- a chemical solution used is an etching solution having an etching action on the thin film constituting the surface of the wafer W.
- the holding rollers 71, 72, 73, and 74 constitute a substrate holding unit that holds and rotates the wafer W.
- the holding rollers 71, 72, 73, 74 can be moved in the direction of approaching and separating from the wafer W by a driving mechanism (for example, an air cylinder) (not shown).
- a driving mechanism for example, an air cylinder
- two holding rollers 71 and 74 are connected to a substrate rotating device 75, and these holding rollers 71 and 74 are rotated in the same direction by the substrate rotating device 75.
- the two holding rollers 71 and 74 rotate, whereby the wafer W rotates about its central axis.
- the cleaning tool rotating device 80 that rotates the upper roll sponge 77 is attached to a guide rail 89 that guides its vertical movement.
- the cleaning tool rotating device 80 is supported by an elevating drive mechanism 82, and the cleaning tool rotating device 80 and the upper roll sponge 77 are moved up and down by the elevating drive mechanism 82.
- the cleaning tool rotating device 81 for rotating the lower roll sponge 78 is also supported by the guide rail, and the cleaning tool rotating device 81 and the lower roll sponge 78 are moved up and down by the lift drive mechanism.
- the lifting drive mechanism for example, a motor drive mechanism using a ball screw or an air cylinder is used.
- the roll sponges 77 and 78 move in directions close to each other and come into contact with the upper and lower surfaces of the wafer W.
- the wafer W is rotated around its central axis by the holding rollers 71, 72, 73 and 74.
- the chemical solution is supplied to the upper and lower surfaces of the wafer W from the upper chemical solution supply nozzle 87 and the lower chemical solution supply nozzle (not shown).
- the upper and lower surfaces of the wafer W are scrubbed by the roll sponges 77 and 78 slidingly contacting the upper and lower surfaces of the wafer W while rotating around the horizontally extending central axis.
- the roll sponges 77 and 78 are longer than the diameter of the wafer W and are in contact with the entire upper and lower surfaces of the wafer W.
- the wafer W is rinsed by supplying a rinsing liquid to the upper and lower surfaces of the rotating wafer W while bringing the roll sponges 77 and 78 into sliding contact with the upper and lower surfaces of the wafer W.
- the polishing units 14a to 14d and the cleaning units 16 and 18 are processing units that process a wafer while supplying a processing liquid to the wafer. That is, the polishing units 14a to 14d polish the wafer while indirectly supplying the polishing liquid to the wafer through the polishing pad 41. The cleaning units 16 and 18 clean the wafer while supplying the chemical solution directly to the wafer.
- the polishing units 14a to 14d and the cleaning units 16 and 18 are collectively referred to as a processing unit, and the polishing liquid (slurry) and the chemical liquid are collectively referred to as a processing liquid.
- FIG. 5 is a schematic view showing a processing liquid supply line 92 for supplying a processing liquid to the processing unit, and a flushing device for cleaning the processing liquid supply line 92.
- the processing liquid supply line 92 shown in FIG. 5 is an example of a processing liquid supply line for supplying a polishing liquid (slurry) as a processing liquid to the polishing liquid supply nozzle 50 of the polishing unit 14a.
- the processing liquid supply line for supplying the polishing liquid as the processing liquid to the polishing units 14b to 14d has the same configuration.
- the processing liquid supply line 92 is installed in the housing 10 of the substrate processing apparatus 1.
- the polishing liquid is referred to as a processing liquid
- the polishing liquid supply nozzle is referred to as a processing liquid supply nozzle.
- the substrate processing apparatus 1 includes a processing liquid supply line 92 that supplies a processing liquid to the processing liquid supply nozzle 50.
- One end of the processing liquid supply line 92 is connected to the processing liquid supply nozzle 50, and the other end is connected to a distribution line 93 provided outside the substrate processing apparatus 1.
- the processing liquid supply line 92 and the distribution line 93 are connected to each other by a connection portion 114.
- the connection portion 114 is provided on the housing 10 of the substrate processing apparatus 1.
- the distribution line 93 connects a processing liquid circulation line 97 as a processing liquid supply source and a processing liquid supply line 92.
- the processing liquid circulation line 97 is laid in a factory where the substrate processing apparatus 1 is installed, and the processing liquid circulates in the factory through the processing liquid circulation line 97. A part of the processing liquid circulating through the processing liquid circulation line 97 flows into the distribution line 93 and is introduced into the substrate processing apparatus 1. Further, the processing liquid is transferred to the processing liquid supply nozzle 50 through the processing liquid supply line 92.
- the distribution line 93 is provided with a filter 94 for capturing coarse particles contained in the processing liquid.
- the filter 94 is configured to capture coarse particles having a predetermined size or larger.
- the processing liquid passes through the filter 94 and then flows into the processing liquid supply line 92.
- the filter 94 is disposed outside the substrate processing apparatus 1, but may be disposed inside the substrate processing apparatus 1. That is, the filter 94 may be attached to the processing liquid supply line 92.
- the flushing device is a cleaning device that cleans the inside of the distribution line 93 and the processing liquid supply line 92 using a cleaning liquid.
- the flushing apparatus includes a cleaning liquid supply line 99 that supplies the cleaning liquid to the processing liquid supply line 92 through the distribution line 93, and a cleaning liquid supplied to the processing liquid supply line 92. ) And a drain mechanism 101 that leads to 100.
- the cleaning liquid is a flushing fluid for removing the processing liquid that flows in the distribution line 93 and the processing liquid supply line 92 and stays in the distribution line 93 and the processing liquid supply line 92. More specifically, the cleaning liquid is supplied into the distribution line 93, flows through the distribution line 93 at a higher flow rate than the processing liquid, and further flows through the processing liquid supply line 92.
- a supply switching valve 104 is attached to the distribution line 93 and the cleaning liquid supply line 99 to allow either the processing liquid or the cleaning liquid to flow through the distribution line 93 and the processing liquid supply line 92.
- the cleaning liquid supply line 99 is connected to the distribution line 93 via the supply switching valve 104.
- the supply switching valve 104 is disposed on the upstream side of the filter 94. The supply switching valve 104 in the initial state allows the processing liquid to flow into the processing liquid supply line 92 through the distribution line 93 by opening the distribution line 93 while closing the cleaning liquid supply line 99.
- the supply switching valve 104 disconnects the connection between the distribution line 93 and the treatment liquid circulation line 97 and connects the cleaning liquid supply line 99 and the distribution line 93, whereby the cleaning liquid becomes the cleaning liquid. It flows into the processing liquid supply line 92 through the supply line 99 and the distribution line 93.
- the supply switching valve 104 a three-way valve or a combination of a plurality of on-off valves is used.
- the cleaning liquid supply line 99 and the supply switching valve 104 are disposed outside the substrate processing apparatus 1, and the drain mechanism 101 is disposed in the substrate processing apparatus 1.
- the supply switching valve 104 is preferably arranged immediately downstream of the connection point between the processing liquid circulation line 97 and the distribution line 93. With this arrangement, the cleaning liquid can flow through most of the distribution line 93.
- the drain mechanism 101 includes a drain line 110 branched from the processing liquid supply line 92 and extending to the drain 100, and a drain switching valve 107 attached to the processing liquid supply line 92 and the drain line 110.
- the drain switching valve 107 is disposed on the downstream side of the connection portion 114.
- the drain switching valve 107 is disposed immediately downstream of the connection portion 114.
- the drain switching valve 107 is configured to guide the cleaning liquid flowing through the processing liquid supply line 92 to the drain line 110. More specifically, the drain switching valve 107 in the initial state closes the drain line 110 and communicates the upstream flow path and the downstream flow path of the processing liquid supply line 92 to allow the processing liquid to flow through the processing liquid supply line 92. It is allowed to flow through to the processing liquid supply nozzle 50. When the drain switching valve 107 is operated, the drain switching valve 107 connects the drain line 110 and the upstream flow path of the processing liquid supply line 92 while closing the downstream flow path of the processing liquid supply line 92, thereby processing liquid. The processing liquid flowing through the supply line 92 is guided to the drain line 110. In FIG.
- the drain switching valve 107 is disposed on the downstream side of the filter 94, but the position of the drain switching valve 107 is not limited to this embodiment.
- the filter 94 may be disposed immediately upstream of the processing liquid supply nozzle 50.
- the drain switching valve 107 a three-way valve or a combination of a plurality of on-off valves is used.
- the cleaning liquid flows through the distribution line 93 and pushes away the processing liquid remaining in the distribution line 93. Further, the cleaning liquid (flushing fluid) flows through the processing liquid supply line 92 and pushes away the processing liquid remaining in the processing liquid supply line 92. In this way, the cleaning liquid can remove the deteriorated processing liquid remaining in the distribution line 93 and the processing liquid supply line 92, and can further clean the distribution line 93 and the processing liquid supply line 92.
- the processing liquid is discharged (discarded) together with the cleaning liquid through the drain line 110 to the drain 100.
- the drain switching valve 107 and the drain 100 are disposed in the vicinity of the connection portion 114 that connects the processing liquid supply line 92 and the distribution line 93.
- the drain switching valve 107 is operated, and the upstream flow path of the processing liquid supply line 92 is connected to the drain line 110. After the new processing liquid flows into the substrate processing apparatus 1, it is immediately introduced to the drain line 110 and discharged (discarded) to the drain 100. Therefore, the inside of the substrate processing apparatus 1 can be kept clean.
- the new processing liquid can be expected not to clean the inside of the processing liquid supply line 92 and the distribution line 93 only by washing away the old processing liquid. Therefore, when the dirt inside the processing liquid supply line 92 and the distribution line 93 is severe, the drain switching valve 107 and the supply switching valve 104 are operated to introduce the cleaning liquid into the distribution line 93. The cleaning liquid flows through the distribution line 93 and the processing liquid supply line 92 to clean the inside thereof, and is further discharged (discarded) to the drain 100 through the drain line 110. Also in this case, since the cleaning liquid and the old processing liquid flow into the substrate processing apparatus 1 and are immediately guided to the drain line 110, the inside of the substrate processing apparatus 1 is not contaminated with the old processing liquid.
- the operations of the drain switching valve 107 and the supply switching valve 104 are controlled by the operation control unit 30.
- the operation control unit 30 may be configured integrally with the processing control unit 29 of the substrate processing apparatus 1.
- the operation control unit 30 operates the supply switching valve 104 and the drain switching valve 107 to connect the cleaning liquid supply line 99 and the distribution line 93, and at the same time, drain line 110 communicates with the processing liquid supply line 92.
- the cleaning liquid is supplied from the cleaning liquid supply line 99 into the distribution line 93 through the supply switching valve 104, flows in this order through the distribution line 93 and the processing liquid supply line 92, and further passes through the drain switching valve 107 and the drain line 110 to the drain 100. It is discharged (discarded).
- the cleaning liquid is directly supplied to the drain 100 without being supplied onto the polishing pad 41.
- the drain 100 is an example of a liquid disposal location, and the liquid disposal location may be a structure for discarding the processing liquid.
- a pure water switching valve 112 is attached to the treatment liquid supply line 92, and a pure water supply line 113 is connected to the pure water switching valve 112.
- the pure water switching valve 112 is arranged on the downstream side of the drain switching valve 107.
- the pure water switching valve 112 is preferably arranged immediately downstream of the drain switching valve 107.
- the operation of the pure water switching valve 112 is controlled by the operation control unit 30.
- the upstream flow path of the processing liquid supply line 92 is closed, while the pure water supply line 113 and the downstream flow path of the processing liquid supply line 92 are connected.
- Pure water that functions as a cleaning liquid is supplied into the processing liquid supply line 92 through the pure water supply line 113, flows through the processing liquid supply line 92, and is supplied from the processing liquid supply nozzle 50 onto the polishing pad 41.
- the pure water is supplied to the processing liquid supply nozzle 50 through the processing liquid supply line 92 periodically (for example, every time a wafer is processed). Accordingly, no processing liquid remains in the processing liquid supply line 92 extending from the pure water switching valve 112 to the processing liquid supply nozzle 50 and in the processing liquid supply nozzle 50.
- the cleaning liquid vigorously flows in the distribution line 93 and the processing liquid supply line 92, and pushes the deteriorated processing liquid to the drain 100.
- the treatment liquid staying in the distribution line 93 and the treatment liquid supply line 92 for a long time may have a concentration distribution greatly changed from the original concentration distribution, and fine particles (usually abrasive grains) may be present. It may contain coarse particles formed by agglomeration.
- Such a processing liquid is not supplied to the polishing pad 41 but is directly discharged to the drain 100. Therefore, the processing liquid having changed properties does not adversely affect the polishing of the wafer.
- the cleaning liquid (that is, flushing fluid) used for cleaning the distribution line 93 and the processing liquid supply line 92 includes pure water, an etching liquid, an aqueous solution containing a chelating agent, a liquid that exerts a zeta potential effect, and a liquid that has been subjected to ultrasonic vibration. Etc.
- acidic or alkaline cleaning liquid adheres to members such as the polishing pad 41, the top ring 43, the dresser 56, and the roll sponges 77 and 78, these members may be contaminated. According to this embodiment, since the cleaning liquid is discharged into the drain 100 outside the polishing pad 41, the cleaning liquid does not adhere to these members.
- a transfer line 111 that guides the cleaning liquid and the processing liquid discharged to the drain 100 to the outside of the substrate processing apparatus 1 may be provided.
- the transfer line 111 extends from the drain 100 to the outside of the substrate processing apparatus 1, and the cleaning liquid and the processing liquid discharged to the drain 100 are discharged to the outside of the substrate processing apparatus 1 through the transfer line 111. Therefore, the inside of the substrate processing apparatus 1 can be prevented from being contaminated by the cleaning liquid and the processing liquid.
- the cleaning of the distribution line 93 and the processing liquid supply line 92 is performed before the wafer is processed, that is, before the wafer is polished.
- the cleaning liquid is supplied when the substrate processing apparatus 1 is idling or when the operation time of the substrate processing apparatus 1 reaches a predetermined time. Accordingly, the old processing liquid remaining in the distribution line 93 and the processing liquid supply line 92 is removed, and a new processing liquid that can exhibit its original properties is supplied to the polishing pad 41 through the distribution line 93 and the processing liquid supply line 92. Is done.
- the operation control unit 30 operates the drain switching valve 107 and the supply switching valve 104 when idling the substrate processing apparatus 1 or when the operation time of the substrate processing apparatus 1 reaches a predetermined time, and automatically supplies the cleaning liquid. You may supply to the distribution line 93 and the process liquid supply line 92.
- the pure water supply line 116 is connected to the cleaning liquid supply line 99.
- a pure water switching valve 117 is attached to the cleaning liquid supply line 99, and the pure water supply line 116 is connected to the cleaning liquid supply line 99 via the pure water switching valve 117.
- pure water is supplied into the distribution line 93 through the pure water supply line 116 and the cleaning liquid supply line 99. Pure water flows through the treatment liquid supply line 92 through the distribution line 93, and is further discharged to the drain 100 through the drain switching valve 107 and the drain line 110. As described above, the pure water removes the cleaning liquid from the inside of the distribution line 93 and the processing liquid supply line 92, thereby keeping the inside of the distribution line 93 and the processing liquid supply line 92 clean.
- FIG. 6 is a diagram showing another embodiment of the flushing device.
- the configuration of the present embodiment that is not particularly described is the same as that of the embodiment shown in FIG.
- the drain switching valve 107 is disposed immediately upstream of the processing liquid supply nozzle 50.
- the cleaning liquid can pass through most of the distribution line 93 and the processing liquid supply line 92, and most of the distribution line 93 and the processing liquid supply line 92 can be cleaned with the cleaning liquid.
- the pure water switching valve 112 When the pure water switching valve 112 is operated, pure water is supplied into the processing liquid supply line 92 through the pure water supply line 113, flows through the processing liquid supply line 92, and is supplied from the processing liquid supply nozzle 50 onto the polishing pad 41. Is done. Thus, since the processing liquid in the processing liquid supply nozzle 50 and the processing liquid supply line 92 is replaced with pure water after the wafer processing, the retention and aggregation of the processing liquid in the processing liquid supply nozzle 50 and the processing liquid supply line 92 are caused. Is prevented.
- the drain switching valve 107 is disposed on the downstream side of the pure water switching valve 112. Accordingly, the pure water can remove the cleaning liquid from the entire processing liquid supply line 92.
- FIG. 7 is a view showing still another embodiment of the flushing apparatus.
- the drain mechanism 101 includes a nozzle motor 52 as a nozzle moving mechanism that moves the processing liquid supply nozzle 50 from the processing position P2 above the polishing pad 41 to the retracted position P1 above the drain 100. (Refer to FIG. 3 for details of the saving position P1 and the processing position P2.)
- the drain switching valve 107 and the drain line 110 described above are not provided.
- the drain 100 is provided below the processing liquid supply nozzle 50 moved to the retracted position P1.
- the operation of the nozzle motor 52 is controlled by the operation control unit 30. That is, the operation control unit 30 operates the nozzle motor 52 to move the processing liquid supply nozzle 50 to the retracted position P1 above the drain 100 before the wafer W is polished. Thereafter, the supply switching valve 104 is operated to allow the cleaning liquid (or pure water) to flow into the processing liquid supply line 92 through the distribution line 93. The processing liquid staying in the distribution line 93 and the processing liquid supply line 92 is discharged together with the cleaning liquid (or pure water) to the drain 100 through the processing liquid supply nozzle 50 and is not supplied onto the polishing pad 41. According to this embodiment, the cleaning liquid (or pure water) can be passed through the entire processing liquid supply line 92 and the processing liquid supply nozzle 50, and the entire processing liquid supply line 92 and the processing liquid supply nozzle 50 can be cleaned. Or pure water).
- the drain switching valve 107 is unnecessary.
- the filter 94 is configured to capture coarse particles contained in the processing liquid.
- the pressure on the inflow side of the filter 94 increases, and a large amount of particles are pushed out of the filter 94.
- a processing solution containing a large amount of particles causes serious damage to the wafer. Therefore, it is necessary to replace the filter 94 before the filter 94 is clogged.
- a flow meter or pressure gauge may be used to detect clogging of the filter 94.
- the flushing device counts (counts) the number of particles contained in the processing liquid flowing through the processing liquid supply line 92.
- a device 120 is provided.
- the particle measuring device 120 is configured to measure the size of the particles and count the number of particles contained in the treatment liquid per unit volume for each particle size.
- the particle measuring device 120 is attached to the processing liquid supply line 92 and is arranged on the downstream side of the filter 94.
- the particle measuring device 120 is connected to the operation control unit 30 and configured to send the number of particles to the operation control unit 30.
- the particle measuring device 120 is also called a particle monitor. 5 to 7, the particle measuring device 120 is arranged in the substrate processing apparatus 1, but the particle measuring device 120 may be attached to the distribution line 93.
- the operation control unit 30 predicts clogging of the filter 94 based on the number of particles. As described above, when the filter 94 starts to be clogged, the number of particles contained in the processing liquid that has passed through the filter 94 increases. When the number of particles contained in the processing liquid per unit volume reaches a predetermined threshold value, the operation control unit 30 issues an alarm that prompts replacement of the filter 94. Therefore, the filter 94 can be replaced before the filter 94 is clogged.
- the operation control unit 30 When the number of particles reaches a threshold value, the operation control unit 30 operates the drain mechanism 101 while operating the supply switching valve 104 to flow the cleaning liquid into the distribution line 93 and the processing liquid supply line 92. The cleaning liquid may be guided to the drain 100 together with the processing liquid. Further, the operation control unit 30 may issue an alarm and / or stop the operation of the substrate processing apparatus 1 when the number of particles reaches a threshold value.
- the operation control unit 30 When the measurement value of the particle size reaches a predetermined threshold value, the operation control unit 30 operates the supply switching valve 104 to flow the cleaning liquid into the distribution line 93 and the processing liquid supply line 92.
- the drain mechanism 101 may be operated so that the cleaning liquid is guided to the drain 100 together with the processing liquid. Further, the operation control unit 30 may issue an alarm and / or stop the operation of the substrate processing apparatus 1 when the measurement value of the particle size reaches a predetermined threshold value.
- the film thickness measuring device 21 (see FIG. 1) is connected to the operation control unit 30, and the film thickness measuring device 21 is configured to send a measurement value of the film thickness of the wafer to the operation control unit 30.
- the operation control unit 30 operates the supply switching valve 104 to cause the cleaning liquid to flow into the processing liquid supply line 92 through the distribution line 93 and the drain mechanism 101. And the cleaning liquid supplied to the processing liquid supply line 92 may be guided to the drain 100.
- the operation control unit 30 may issue an alarm and / or stop the operation of the substrate processing apparatus 1 when the measured value of the film thickness exceeds a predetermined allowable range.
- the film thickness measuring device 21 shown in FIG. 1 is a so-called in-line type film thickness measuring device incorporated in the substrate processing apparatus 1, but the film thickness measuring device 21 is a stand-alone type installed outside the substrate processing apparatus 1.
- the external film thickness measuring device may be used.
- the operation control unit 30 calculates the wafer polishing rate from the initial value of the film thickness, the measured value of the film thickness, and the polishing time, and when this polishing rate exceeds a predetermined allowable range, the supply switching valve 104 is calculated.
- the cleaning liquid may be caused to flow into the processing liquid supply line 92 through the distribution line 93, and the drain mechanism 101 may be operated to guide the cleaning liquid supplied to the processing liquid supply line 92 to the drain 100.
- the operation control unit 30 may issue an alarm and / or stop the operation of the substrate processing apparatus 1 when the polishing rate exceeds a predetermined allowable range.
- FIG. 8 is a schematic diagram showing an example in which a defect inspection device 23 is provided outside the substrate processing apparatus 1.
- the defect inspector 23 is configured to detect defects such as scratches formed on the surface of the wafer and foreign matters attached to the surface of the wafer and count the number of the defects.
- a light scattering type defect inspection device that irradiates light (visible light, infrared light, ultraviolet light, etc.) on the wafer surface and detects scratches on the wafer surface from scattered light from the wafer surface is used.
- the particles contained in the processing liquid increase, scratches may be formed on the surface of the wafer. Therefore, the wafer processed by the substrate processing apparatus 1 is transferred to the defect inspection device 23, and the defect inspection device 23 detects a scratch formed on the wafer surface.
- the defect inspector 23 is connected to the operation control unit 30, and the number of detected scratches is sent to the operation control unit 30.
- the operation control unit 30 operates the supply switching valve 104 to cause the cleaning liquid to flow into the processing liquid supply line 92 through the distribution line 93 and the drain mechanism.
- the cleaning liquid supplied to the processing liquid supply line 92 may be guided to the drain 100 by operating 101.
- the operation control unit 30 may issue an alarm and / or stop the operation of the substrate processing apparatus 1 when the number of detected scratches reaches a predetermined threshold value.
- FIG. 9, FIG. 10, and FIG. 11 are schematic views showing a processing liquid supply system for supplying a chemical liquid as a processing liquid to the cleaning unit 16.
- the processing liquid supply system shown in FIGS. 9, 10, and 11 has basically the same configuration as the processing liquid supply system shown in FIGS. 5, 6, and 7, and FIGS.
- the embodiment shown in FIG. 11 corresponds to the embodiment shown in FIG. 5, FIG. 6, and FIG.
- the upper chemical solution supply nozzle 87 and the lower chemical solution supply nozzle (not shown) are moved to a retreat position P1 outside the wafer W and a processing position above the wafer W by the upper nozzle motor 122 and the lower nozzle motor (not shown). It is configured to be movable between P2.
- the drain mechanism 101 includes an upper nozzle motor 122 and a lower nozzle motor (not shown).
- the drain 100 which is an example of a liquid disposal location, is located outside the holding rollers 71, 72, 73, and 74 that are substrate holding units that hold the wafer W. Therefore, when the drain mechanism 101 operates, the cleaning liquid and the processing liquid (chemical liquid) that have flowed through the processing liquid supply line 92 are not supplied to the wafer W but are directly guided to the drain 100.
- the present invention is applicable to a substrate processing system and a substrate processing method capable of cleaning a processing liquid supply line.
- Substrate processing apparatus 10 Housing 12 Load port 14a-14d Polishing unit 16 1st washing
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
本発明の好ましい態様は、前記ドレイン切り替え弁は、前記処理液供給ノズルの直ぐ上流側に配置されていることを特徴とする。
本発明の好ましい態様は、前記ドレイン機構は、前記処理液供給ノズルを、前記基板を処理するための所定位置から、前記液体廃棄箇所の上方の位置に移動させるノズル移動機構であることを特徴とする。
本発明の好ましい態様は、前記動作制御部は、前記基板の処理が行われる前に、前記供給切り替え弁を作動させて前記洗浄液を前記処理液供給ライン内に流すことを特徴とする。
本発明の好ましい態様は、単位体積当たりの前記処理液に含まれる粒子の数をカウントする粒子測定装置をさらに備えたことを特徴とする。
本発明の好ましい態様は、前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、警報を発し、または前記基板処理装置の運転を停止することを特徴とする。
本発明の好ましい態様は、前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、前記供給切り替え弁を作動させて前記洗浄液を前記分配ラインを通じて前記処理液供給ライン内に流し、かつ前記ドレイン機構を作動させて前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする。
本発明の好ましい態様は、前記処理液に含まれる前記粒子を捕捉するためのフィルタをさらに備え、前記粒子測定装置は前記フィルタの下流側に配置されていることを特徴とする。
本発明の好ましい態様は、前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、前記フィルタの交換を促す警報を発することを特徴とする。
本発明の好ましい態様は、前記基板の欠陥を検出する基板検査器をさらに備え、前記動作制御部は、検出された前記欠陥の数が所定のしきい値に達した場合には、前記供給切り替え弁を作動させて前記洗浄液を前記分配ラインを通じて前記処理液供給ライン内に流し、かつ前記ドレイン機構を作動させて前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする。
本発明の好ましい態様は、単位体積当たりの前記処理液に含まれる粒子の数を測定する工程をさらに含むことを特徴とする。
本発明の好ましい態様は、前記粒子の数が所定のしきい値に達した場合には、警報を発し、または前記基板処理装置の運転を停止することを特徴とする。
本発明の好ましい態様は、前記粒子の数が所定のしきい値に達した場合には、前記分配ラインを通じて前記洗浄液を前記処理液供給ラインに流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記洗浄液を前記液体廃棄箇所にまで導く工程を再度実行することを特徴とする。
本発明の好ましい態様は、前記粒子の数が所定のしきい値に達した場合には、前記分配ラインまたは前記処理液供給ラインに取り付けられたフィルタの交換を促す警報を発することを特徴とする。
本発明の好ましい態様は、前記基板の欠陥を検出する工程をさらに含み、検出された前記欠陥の数が所定のしきい値に達した場合には、前記分配ラインを通じて前記洗浄液を前記処理液供給ラインに流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記洗浄液を前記液体廃棄箇所にまで導く工程を再度実行することを特徴とする。
本発明の好ましい態様は、前記基板処理装置の運転時間が所定の時間に達したときに、前記分配ラインを通じて前記処理液供給ラインに前記洗浄液を流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする。
10 ハウジング
12 ロードポート
14a~14d 研磨ユニット
16 第1洗浄ユニット
18 第2洗浄ユニット
20 乾燥ユニット
21 膜厚測定器
22 第1基板搬送ロボット
23 欠陥検査器
24 基板搬送ユニット
26 第2基板搬送ロボット
28 第3基板搬送ロボット
29 処理制御部
30 動作制御部
41 研磨パッド
42 研磨テーブル
43 トップリング(基板保持部)
45 テーブル軸
46 テーブルモータ
47 トップリングシャフト
48 トップリングアーム
50 研磨液供給ノズル(処理液供給ノズル)
51 ノズル旋回軸
52 ノズルモータ
54 ドレッシング装置
56 ドレッサ
57 ドレッサアーム
71~74 保持ローラー(基板保持部)
75 基板回転装置
77,78 ロールスポンジ
80,81 洗浄具回転装置
82 昇降駆動機構
85 リンス液供給ノズル
87 薬液供給ノズル(処理液供給ノズル)
89 ガイドレール
92 処理液供給ライン
93 分配ライン
94 フィルタ
97 処理液循環ライン
100 ドレイン(液体廃棄箇所)
101 ドレイン機構
104 供給切り替え弁
107 ドレイン切り替え弁
110 ドレインライン
111 移送ライン
112 純水切り替え弁
113 純水供給ライン
114 接続部
116 純水供給ライン
117 純水切り替え弁
120 粒子測定装置
122 上側ノズルモータ
Claims (22)
- 処理液供給ラインに接続された処理液供給ノズルから処理液を基板に直接または間接に供給しながら、該基板を処理する基板処理装置と、
処理液供給源と前記処理液供給ラインとを接続する分配ラインと、
前記分配ラインおよび前記処理液供給ラインを洗浄するフラッシング装置とを備え、
前記フラッシング装置は、
前記分配ラインに接続された洗浄液供給ラインと、
前記分配ラインを通じて前記処理液供給ラインに供給された洗浄液を液体廃棄箇所にまで導くドレイン機構と、
前記分配ラインおよび前記洗浄液供給ラインに取り付けられ、前記処理液または前記洗浄液のいずれか一方が前記分配ライン内を流れることを許容する供給切り替え弁と、
前記ドレイン機構および前記供給切り替え弁の動作を制御する動作制御部と、を備え、
前記分配ラインおよび前記供給切り替え弁は、前記基板処理装置の外に配置されていることを特徴とする基板処理システム。 - 前記ドレイン機構は、前記処理液供給ラインから分岐して前記液体廃棄箇所まで延びるドレインラインと、前記処理液供給ラインおよび前記ドレインラインに取り付けられたドレイン切り替え弁とを備え、
前記ドレイン切り替え弁は、前記処理液供給ラインを流れる前記洗浄液を前記ドレインラインに導くように構成されていることを特徴とする請求項1に記載の基板処理システム。 - 前記ドレイン切り替え弁は、前記処理液供給ノズルの直ぐ上流側に配置されていることを特徴とする請求項2に記載の基板処理システム。
- 前記ドレイン機構は、前記処理液供給ノズルを、前記基板を処理するための所定位置から、前記液体廃棄箇所の上方の位置に移動させるノズル移動機構であることを特徴とする請求項1に記載の基板処理システム。
- 前記動作制御部は、前記基板の処理が行われる前に、前記供給切り替え弁を作動させて前記洗浄液を前記処理液供給ライン内に流すことを特徴とする請求項1に記載の基板処理システム。
- 前記動作制御部は、前記基板処理装置の運転時間が所定の時間に達したときに、前記供給切り替え弁および前記ドレイン機構を作動させて前記洗浄液を前記処理液供給ライン内に流しつつ、前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする請求項1に記載の基板処理システム。
- 単位体積当たりの前記処理液に含まれる粒子の数をカウントする粒子測定装置をさらに備えたことを特徴とする請求項1に記載の基板処理システム。
- 前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、警報を発し、または前記基板処理装置の運転を停止することを特徴とする請求項7に記載の基板処理システム。
- 前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、前記供給切り替え弁を作動させて前記洗浄液を前記分配ラインを通じて前記処理液供給ライン内に流し、かつ前記ドレイン機構を作動させて前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする請求項7に記載の基板処理システム。
- 前記処理液に含まれる前記粒子を捕捉するためのフィルタをさらに備え、
前記粒子測定装置は前記フィルタの下流側に配置されていることを特徴とする請求項7に記載の基板処理システム。 - 前記動作制御部は、前記粒子の数が所定のしきい値に達した場合には、前記フィルタの交換を促す警報を発することを特徴とする請求項10に記載の基板処理システム。
- 前記基板の膜厚を測定する膜厚測定器をさらに備え、
前記動作制御部は、前記膜厚の測定値が所定の許容範囲を超えた場合には、前記供給切り替え弁を作動させて前記洗浄液を前記分配ラインを通じて前記処理液供給ライン内に流し、かつ前記ドレイン機構を作動させて前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする請求項1に記載の基板処理システム。 - 前記基板の欠陥を検出する基板検査器をさらに備え、
前記動作制御部は、検出された前記欠陥の数が所定のしきい値に達した場合には、前記供給切り替え弁を作動させて前記洗浄液を前記分配ラインを通じて前記処理液供給ライン内に流し、かつ前記ドレイン機構を作動させて前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする請求項1に記載の基板処理システム。 - 分配ラインを通じて基板処理装置内の処理液供給ラインに洗浄液を流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記処理液供給ラインに供給された前記洗浄液を液体廃棄箇所にまで導き、
前記処理液供給ラインを通じて処理液を基板に直接または間接に供給しながら、該基板を前記基板処理装置内で処理することを特徴とする基板処理方法。 - 新たな処理液を前記分配ラインに供給して前記分配ライン内に残留している処理液を押し流し、さらに前記処理液を前記液体廃棄箇所にまで導くことを特徴とする請求項14に記載の基板処理方法。
- 単位体積当たりの前記処理液に含まれる粒子の数を測定する工程をさらに含むことを特徴とする請求項14に記載の基板処理方法。
- 前記粒子の数が所定のしきい値に達した場合には、警報を発し、または前記基板処理装置の運転を停止することを特徴とする請求項16に記載の基板処理方法。
- 前記粒子の数が所定のしきい値に達した場合には、前記分配ラインを通じて前記洗浄液を前記処理液供給ラインに流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記洗浄液を前記液体廃棄箇所にまで導く工程を再度実行することを特徴とする請求項16に記載の基板処理方法。
- 前記粒子の数が所定のしきい値に達した場合には、前記分配ラインまたは前記処理液供給ラインに取り付けられたフィルタの交換を促す警報を発することを特徴とする請求項16に記載の基板処理方法。
- 前記基板の膜厚を測定する工程をさらに含み、
前記膜厚の測定値が所定の許容範囲を超えた場合には、前記分配ラインを通じて前記洗浄液を前記処理液供給ラインに流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記洗浄液を前記液体廃棄箇所にまで導く工程を再度実行することを特徴とする請求項14に記載の基板処理方法。 - 前記基板の欠陥を検出する工程をさらに含み、
検出された前記欠陥の数が所定のしきい値に達した場合には、前記分配ラインを通じて前記洗浄液を前記処理液供給ラインに流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記洗浄液を前記液体廃棄箇所にまで導く工程を再度実行することを特徴とする請求項14に記載の基板処理方法。 - 前記基板処理装置の運転時間が所定の時間に達したときに、前記分配ラインを通じて前記処理液供給ラインに前記洗浄液を流して前記分配ラインおよび前記処理液供給ラインを洗浄しながら、前記処理液供給ラインに供給された前記洗浄液を前記液体廃棄箇所にまで導くことを特徴とする請求項14に記載の基板処理方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/122,975 US10618140B2 (en) | 2014-03-07 | 2015-03-04 | Substrate processing system and substrate processing method |
KR1020167027178A KR101852705B1 (ko) | 2014-03-07 | 2015-03-04 | 기판 처리 시스템 및 기판 처리 방법 |
CN201580012332.4A CN106102996B (zh) | 2014-03-07 | 2015-03-04 | 基板处理系统及基板处理方法 |
SG11201607004QA SG11201607004QA (en) | 2014-03-07 | 2015-03-04 | Substrate processing system and substrate processing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-045172 | 2014-03-07 | ||
JP2014045172A JP6295107B2 (ja) | 2014-03-07 | 2014-03-07 | 基板処理システムおよび基板処理方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015133516A1 true WO2015133516A1 (ja) | 2015-09-11 |
Family
ID=54055318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/056341 WO2015133516A1 (ja) | 2014-03-07 | 2015-03-04 | 基板処理システムおよび基板処理方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10618140B2 (ja) |
JP (1) | JP6295107B2 (ja) |
KR (1) | KR101852705B1 (ja) |
CN (1) | CN106102996B (ja) |
SG (1) | SG11201607004QA (ja) |
TW (1) | TWI638706B (ja) |
WO (1) | WO2015133516A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11141832B2 (en) * | 2016-02-10 | 2021-10-12 | Ebara Corporation | Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017057727A1 (ja) * | 2015-09-30 | 2017-04-06 | 芝浦メカトロニクス株式会社 | 基板処理装置及び基板処理方法 |
JP6623032B2 (ja) | 2015-10-29 | 2019-12-18 | 株式会社Screenホールディングス | フィルタ連結装置およびこれを備えた基板処理装置 |
US9865477B2 (en) * | 2016-02-24 | 2018-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside polisher with dry frontside design and method using the same |
JP6559087B2 (ja) * | 2016-03-31 | 2019-08-14 | 東京エレクトロン株式会社 | 基板処理装置 |
KR101900788B1 (ko) * | 2017-01-03 | 2018-09-20 | 에스케이실트론 주식회사 | 웨이퍼 연마 시스템 |
CN108857858A (zh) * | 2017-05-15 | 2018-11-23 | 株式会社荏原制作所 | 清洗基板的背面的装置和方法、背面清洗装置和基板处理装置 |
CN107363716A (zh) * | 2017-08-31 | 2017-11-21 | 苏州市永通不锈钢有限公司 | 不锈钢薄板研磨装置 |
CN107414682A (zh) * | 2017-08-31 | 2017-12-01 | 苏州市永通不锈钢有限公司 | 一种不锈钢薄板研磨装置 |
KR102591906B1 (ko) * | 2017-10-31 | 2023-10-20 | 가부시키가이샤 에바라 세이사꾸쇼 | 연마 장치 및 연마 방법 |
JP7080766B2 (ja) * | 2018-08-07 | 2022-06-06 | 株式会社荏原製作所 | 液面検出センサと組み合わせて使用されるセンサターゲットカバー、および湿式処理装置 |
KR102134432B1 (ko) * | 2018-12-04 | 2020-07-16 | 세메스 주식회사 | 배관 세정용 지그, 이를 포함하는 기판 처리 장치, 그리고 배관 유닛 세정 방법 |
TWI693655B (zh) * | 2018-12-17 | 2020-05-11 | 辛耘企業股份有限公司 | 基板處理設備及方法 |
CN111326441B (zh) * | 2018-12-17 | 2022-09-16 | 辛耘企业股份有限公司 | 基板处理设备及方法 |
US20230023260A1 (en) * | 2019-12-11 | 2023-01-26 | Ebara Corporation | Substrate cleaning system and substrate cleaning method |
US11752592B2 (en) * | 2021-07-16 | 2023-09-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Slurry enhancement for polishing system |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10233377A (ja) * | 1996-12-18 | 1998-09-02 | Lucent Technol Inc | 集積回路製造方法 |
JP2002154057A (ja) * | 2000-11-17 | 2002-05-28 | Rion Co Ltd | 研磨液の供給装置 |
JP2003142442A (ja) * | 2001-11-02 | 2003-05-16 | Nec Kansai Ltd | 半導体基板研磨装置 |
WO2004113023A1 (ja) * | 2003-06-20 | 2004-12-29 | Fujitsu Limited | 薬液供給装置 |
JP2007229845A (ja) * | 2006-02-28 | 2007-09-13 | Nikon Corp | スラリー供給装置、このスラリー供給装置を用いた研磨装置及びこの研磨装置を用いた半導体デバイス製造方法 |
JP2008036744A (ja) * | 2006-08-03 | 2008-02-21 | Disco Abrasive Syst Ltd | 研磨装置 |
JP2009135174A (ja) * | 2007-11-29 | 2009-06-18 | Sumco Corp | 研磨装置とその方法、及び研磨液再生装置とその方法 |
JP2013169620A (ja) * | 2012-02-21 | 2013-09-02 | Tok Engineering Kk | マグネットストレーナ及びそれを用いた研磨装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0929637A (ja) | 1995-07-13 | 1997-02-04 | Toshiba Mach Co Ltd | スラリー供給装置 |
JP3663728B2 (ja) * | 1996-03-28 | 2005-06-22 | 信越半導体株式会社 | 薄板の研磨機 |
JPH10163138A (ja) * | 1996-11-29 | 1998-06-19 | Fujitsu Ltd | 半導体装置の製造方法および研磨装置 |
US6024829A (en) | 1998-05-21 | 2000-02-15 | Lucent Technologies Inc. | Method of reducing agglomerate particles in a polishing slurry |
JP2000202765A (ja) | 1999-01-12 | 2000-07-25 | Ebara Corp | ポリッシング装置用研磨剤流量計の洗浄装置及び洗浄方法及びポリッシング装置 |
JP3748731B2 (ja) | 1999-03-26 | 2006-02-22 | 株式会社荏原製作所 | 砥液供給装置 |
US6423638B1 (en) * | 1999-09-28 | 2002-07-23 | Motorola, Inc. | Filter apparatus and method therefor |
US6498571B2 (en) * | 1999-12-09 | 2002-12-24 | Luxxon Corporation | Multiple stream variable length encoder and decoder |
US6709313B2 (en) * | 2000-11-17 | 2004-03-23 | Rion Co., Ltd. | Apparatus for producing polishing solution and apparatus for feeding the same |
US6554467B2 (en) | 2000-12-28 | 2003-04-29 | L'air Liquide - Societe' Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process and apparatus for blending and distributing a slurry solution |
WO2003041881A1 (en) | 2001-11-15 | 2003-05-22 | L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Source liquid supply apparatus having a cleaning function |
US20030220708A1 (en) * | 2001-11-28 | 2003-11-27 | Applied Materials, Inc. | Integrated equipment set for forming shallow trench isolation regions |
CN100497731C (zh) | 2002-11-15 | 2009-06-10 | 株式会社荏原制作所 | 基板处理装置和基板处理方法 |
JP4400096B2 (ja) | 2003-06-03 | 2010-01-20 | パナソニック株式会社 | スラリー供給装置、スラリーの供給方法 |
JP2005011977A (ja) * | 2003-06-18 | 2005-01-13 | Ebara Corp | 基板研磨装置および基板研磨方法 |
JP2007290111A (ja) * | 2006-03-29 | 2007-11-08 | Ebara Corp | 研磨方法および研磨装置 |
KR100775060B1 (ko) * | 2006-06-26 | 2007-11-08 | 삼성전자주식회사 | 반도체 제조장치 및 슬러리 품질 측정방법 |
JP4841484B2 (ja) | 2007-03-27 | 2011-12-21 | 大日本スクリーン製造株式会社 | 基板処理装置 |
CN102365716A (zh) | 2009-03-25 | 2012-02-29 | 应用材料公司 | 化学机械研磨(cmp)浆料的使用点回收系统 |
US20110070811A1 (en) * | 2009-03-25 | 2011-03-24 | Applied Materials, Inc. | Point of use recycling system for cmp slurry |
US20120042575A1 (en) | 2010-08-18 | 2012-02-23 | Cabot Microelectronics Corporation | Cmp slurry recycling system and methods |
JP2013215409A (ja) | 2012-04-09 | 2013-10-24 | Maruhon Industry Co Ltd | パチンコ遊技機 |
JP6027454B2 (ja) * | 2013-02-05 | 2016-11-16 | 株式会社荏原製作所 | 研磨装置 |
-
2014
- 2014-03-07 JP JP2014045172A patent/JP6295107B2/ja active Active
-
2015
- 2015-03-04 SG SG11201607004QA patent/SG11201607004QA/en unknown
- 2015-03-04 KR KR1020167027178A patent/KR101852705B1/ko active IP Right Grant
- 2015-03-04 WO PCT/JP2015/056341 patent/WO2015133516A1/ja active Application Filing
- 2015-03-04 US US15/122,975 patent/US10618140B2/en active Active
- 2015-03-04 CN CN201580012332.4A patent/CN106102996B/zh active Active
- 2015-03-04 TW TW104106792A patent/TWI638706B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10233377A (ja) * | 1996-12-18 | 1998-09-02 | Lucent Technol Inc | 集積回路製造方法 |
JP2002154057A (ja) * | 2000-11-17 | 2002-05-28 | Rion Co Ltd | 研磨液の供給装置 |
JP2003142442A (ja) * | 2001-11-02 | 2003-05-16 | Nec Kansai Ltd | 半導体基板研磨装置 |
WO2004113023A1 (ja) * | 2003-06-20 | 2004-12-29 | Fujitsu Limited | 薬液供給装置 |
JP2007229845A (ja) * | 2006-02-28 | 2007-09-13 | Nikon Corp | スラリー供給装置、このスラリー供給装置を用いた研磨装置及びこの研磨装置を用いた半導体デバイス製造方法 |
JP2008036744A (ja) * | 2006-08-03 | 2008-02-21 | Disco Abrasive Syst Ltd | 研磨装置 |
JP2009135174A (ja) * | 2007-11-29 | 2009-06-18 | Sumco Corp | 研磨装置とその方法、及び研磨液再生装置とその方法 |
JP2013169620A (ja) * | 2012-02-21 | 2013-09-02 | Tok Engineering Kk | マグネットストレーナ及びそれを用いた研磨装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11141832B2 (en) * | 2016-02-10 | 2021-10-12 | Ebara Corporation | Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control |
Also Published As
Publication number | Publication date |
---|---|
KR20160132043A (ko) | 2016-11-16 |
TW201538278A (zh) | 2015-10-16 |
TWI638706B (zh) | 2018-10-21 |
CN106102996B (zh) | 2018-10-16 |
SG11201607004QA (en) | 2016-10-28 |
JP2015168035A (ja) | 2015-09-28 |
CN106102996A (zh) | 2016-11-09 |
JP6295107B2 (ja) | 2018-03-14 |
KR101852705B1 (ko) | 2018-04-26 |
US10618140B2 (en) | 2020-04-14 |
US20170066101A1 (en) | 2017-03-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6295107B2 (ja) | 基板処理システムおよび基板処理方法 | |
US11285517B2 (en) | Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus | |
KR102146872B1 (ko) | 기판 세정 장치 및 기판 세정 방법 | |
KR200477678Y1 (ko) | 화학기계적연마 장비의 웨이퍼 세정 장치 | |
TWI703644B (zh) | 研磨基板表面的裝置及方法 | |
JP6054805B2 (ja) | 基板洗浄装置 | |
TWI601196B (zh) | 基板處理方法 | |
KR102074269B1 (ko) | 기판의 표면을 연마하는 장치 및 방법 | |
JP6159282B2 (ja) | 基板処理装置、および基板処理装置の配管洗浄方法 | |
JP2015015284A (ja) | 基板洗浄装置および基板洗浄方法 | |
US20220395874A1 (en) | Substrate cleaning device, substrate processing apparatus, break-in device, method for estimating number of fine particles adhering to substrate, method for determining degree of contamination of substrate cleaning member, and method for determining break-in processing | |
KR102652480B1 (ko) | 자가 세척 기능을 가지는 연마 후 세정용 버핑 장치 | |
JP6353774B2 (ja) | ウェハ研削装置 | |
JP6091976B2 (ja) | 液体供給装置、及び基板処理装置 | |
JP2018011087A (ja) | 基板洗浄装置 | |
KR20100050712A (ko) | 패드 컨디셔너의 디스크 세정 장치 및 이를 이용하는 세정방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15759331 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15122975 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20167027178 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 15759331 Country of ref document: EP Kind code of ref document: A1 |