JP6559087B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims description 281
- 239000007788 liquid Substances 0.000 claims description 116
- 230000032258 transport Effects 0.000 claims description 86
- 238000001035 drying Methods 0.000 claims description 43
- 239000012530 fluid Substances 0.000 claims description 16
- 238000000352 supercritical drying Methods 0.000 description 52
- 238000012546 transfer Methods 0.000 description 29
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
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- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- H01—ELECTRIC ELEMENTS
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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Description
図1及び図2に示すように、基板処理装置1は、前端部に搬入出部2を形成し、搬入出部2の後方に搬送部3を形成し、搬送部3の後方に処理部4を形成する。また、基板処理装置1は、基板処理装置1の全体の制御を行なう制御部80を備えている。
上記実施例1に係る基板処理装置1では、1個ずつの基板載置部12、基板搬送部13、液処理部14、超臨界乾燥処理部15で基板処理ユニット11を構成しているが、これに限られず、図7に示す基板処理装置56のように、1個の基板載置部12に対して複数個(ここでは、2個)の基板搬送部13、液処理部14、超臨界乾燥処理部15で基板処理ユニット57を構成することもできる。なお、1個の基板載置部12に複数個の載置台21を設けて複数枚の基板7をストックできるようにしてもよい。
上記実施例1に係る基板処理装置1では、基板載置部12を基板搬送部13、液処理部14、超臨界乾燥処理部15と同様の高さに配置して基板処理ユニット11を構成しているが、これに限られず、図8に示す基板処理装置58(基板処理ユニット59)のように、超臨界乾燥処理部15の上方に基板載置部12を配置してもよい。なお、基板載置部12は、超臨界乾燥処理部15の下方に配置してもよく、また、液処理部14の上方又は下方に配置してもよい。
上記実施例1に係る基板処理装置1では、1個ずつの基板載置部12、基板搬送部13、液処理部14、超臨界乾燥処理部15で基板処理ユニット11を構成しているが、これに限られず、図9に示す基板処理装置60のように、1個の基板搬送部13及び液処理部14に対して複数個(ここでは、2個)の基板載置部12及び超臨界乾燥処理部15で基板処理ユニット61を構成することもできる。なお、ここでは、1個の基板搬送部13に対して1個の液処理部14と複数個の超臨界乾燥処理部15を設けた構成としているが、1個の基板搬送部13に対して1個の超臨界乾燥処理部15と複数個の液処理部14を設けた構成や、1個の基板搬送部13に対して複数個の液処理部14及び超臨界乾燥処理部15を設けた構成とすることもできる。
上記実施例1〜4に係る基板処理装置1,56,58,60では、搬入出部2と処理部4との間に搬送部3を設けた構成としているが、これに限られず、図10に示す基板処理装置62(実施例5)又は図11に示す基板処理装置63(実施例6)のように、搬送部3を無くし、処理部4の基板搬入出部10で基板7を搬入出部2から基板処理ユニット64,65に1枚ずつ直接搬送するように構成してもよい。
7 基板
10 基板搬入出部
12 基板載置部
13 基板搬送部
14 液処理部
15 超臨界乾燥処理部
25 乾燥基板用搬送部
26 湿潤基板用搬送部
Claims (5)
- 基板を処理液を用いて液処理する液処理部と、
前記液処理部で液処理した後の湿潤状態の前記基板を乾燥処理する乾燥処理部と、
前記液処理部で液処理する前の乾燥状態の前記基板を載置する基板載置部と、
前記基板載置部から前記液処理部へ処理前の前記基板を搬送する第1搬送部と、
前記液処理部から前記乾燥処理部へ湿潤状態の前記基板を搬送する第2搬送部と、
前記液処理部で液処理する前の前記基板を前記基板載置部へ搬送するとともに、前記乾燥処理部から乾燥処理後の前記基板を搬送する第3搬送部とを有し、
前記第3搬送部と面する側に前記第1搬送部と前記第2搬送部と前記乾燥処理部と前記基板載置部が並べて配置されるとともに、前記乾燥処理部と前記基板載置部との間に前記第1搬送部と前記第2搬送部とが配置され、前記第1搬送部と前記第2搬送部に面し前記第3搬送部と反対側に前記液処理部が配置され、前記第3搬送部と前記液処理部との間に前記第1搬送部と前記第2搬送部とが配置されることを特徴とする基板処理装置。 - 1個の前記第1搬送部及び前記第2搬送部に対して複数個の前記液処理部又は前記乾燥処理部を設けて、前記第1搬送部及び前記第2搬送部を複数個の前記液処理部又は前記乾燥処理部で共用することを特徴とする請求項1に記載の基板処理装置。
- 前記第3搬送部は、複数枚の前記基板を収容したキャリアとの間で前記基板の搬送を行うことを特徴とする請求項1又は請求項2に記載の基板処理装置。
- 前記乾燥処理部は、容器本体に対して蓋体及び基板載置台を内部に収容した処理位置と外部に退避した待機位置とに移動可能とし、前記乾燥処理部の蓋体及び基板載置台の待機位置に前記第2搬送部により前記基板を搬入し、前記乾燥処理部の蓋体及び基板載置台の待機位置から前記第3搬送部により前記基板を搬出することを特徴とする請求項1〜請求項3のいずれかに記載の基板処理装置。
- 前記乾燥処理部は、湿潤状態の前記基板を超臨界流体を用いて乾燥処理することを特徴とする請求項1〜請求項4のいずれかに記載の基板処理装置。
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JP2016070517A JP6559087B2 (ja) | 2016-03-31 | 2016-03-31 | 基板処理装置 |
US15/467,001 US10593571B2 (en) | 2016-03-31 | 2017-03-23 | Substrate processing apparatus |
KR1020170039954A KR102334274B1 (ko) | 2016-03-31 | 2017-03-29 | 기판 처리 장치 |
CN201710201871.3A CN107275259B (zh) | 2016-03-31 | 2017-03-30 | 基板处理装置 |
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TWI831656B (zh) * | 2018-01-04 | 2024-02-01 | 日商東京威力科創股份有限公司 | 基板處理裝置及基板處理方法 |
JP7278059B2 (ja) * | 2018-11-16 | 2023-05-19 | 株式会社ディスコ | 加工システム |
JP6899813B2 (ja) * | 2018-11-27 | 2021-07-07 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP7410547B2 (ja) * | 2019-12-06 | 2024-01-10 | 株式会社レクザム | ウェハ処理装置 |
JP7427232B2 (ja) * | 2020-02-10 | 2024-02-05 | 株式会社レクザム | ウェハ処理装置 |
JP6959668B2 (ja) * | 2020-02-06 | 2021-11-02 | 株式会社レクザム | ウェハ処理装置 |
WO2021112130A1 (ja) * | 2019-12-06 | 2021-06-10 | 株式会社レクザム | ウェハ処理装置 |
KR102584514B1 (ko) * | 2020-07-09 | 2023-10-06 | 세메스 주식회사 | 기판 반송 장치, 기판 처리 장치 및 방법 |
KR20230033256A (ko) * | 2021-08-31 | 2023-03-08 | 삼성전자주식회사 | 기판 이송 유닛, 기판 처리 장치, 및 기판 처리 방법 |
CN114068365A (zh) * | 2021-11-04 | 2022-02-18 | 上海至临半导体技术有限公司 | 一种用于超临界清洗的湿法设备及其工作方法 |
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JP3891809B2 (ja) * | 2001-09-26 | 2007-03-14 | 株式会社荏原製作所 | 湿式処理方法及び装置 |
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KR102314667B1 (ko) * | 2015-10-04 | 2021-10-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 작은 열 질량의 가압 챔버 |
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