WO2014201794A1 - 阵列基板线路检测装置及检测方法 - Google Patents
阵列基板线路检测装置及检测方法 Download PDFInfo
- Publication number
- WO2014201794A1 WO2014201794A1 PCT/CN2013/086455 CN2013086455W WO2014201794A1 WO 2014201794 A1 WO2014201794 A1 WO 2014201794A1 CN 2013086455 W CN2013086455 W CN 2013086455W WO 2014201794 A1 WO2014201794 A1 WO 2014201794A1
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- Prior art keywords
- output
- sensor
- wiring
- tested
- line
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- 238000001514 detection method Methods 0.000 title claims abstract description 55
- 239000000758 substrate Substances 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 8
- 230000008054 signal transmission Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Definitions
- the present invention relates to the field of line detection technology, and in particular to a line detection device and a detection method suitable for an array substrate. Background technique
- the array substrate of the thin film transistor liquid crystal display (tube: TFT-LCD) is manufactured through a complicated process, and the circuit on the substrate is easily broken and short-circuited, and the circuit breaker and short circuit on the substrate are detected and repaired to improve the yield of the product. Accelerating the detection speed of the detection device and reducing the hardware structure of the detection device can achieve the purpose of improving detection efficiency and saving cost.
- the parallel wires generally include gate lines and data lines.
- the line detection sensor (English name Line Detect Sensor, the tube is called LDS) performs line scan to find out the position of the whole bad line, as shown in Figure 1, taking the gate line 1 as an example, and setting the signal input end of the gate line 1
- the voltage input terminal 2 and the input terminal sensor 3 connected to the voltage input terminal 2 are provided with an output terminal sensor 4 at the signal output end of the gate line 1, and the output terminal sensor 4 is connected to the equivalent resistor 5;
- FIG. 2 is the LDS.
- the equivalent circuit diagram of the detection device is the direction of the arrow in the figure is the signal transmission direction, and V in is the input voltage, V.
- Ut is the output voltage
- C 1 () is the capacitance of the input sensor, C 2 .
- R 2 For the equivalent resistance of the wiring to be tested, R 2 . Is the resistance of the equivalent resistor 5.
- the position detection sensor English name Position Detect Sensor, PDS
- the automatic optical detector English name Auto Optical Inspection, AOI
- the technical problem to be solved by the present invention is how to reduce the process of detecting the line of the array substrate to save cost.
- an array substrate line detecting device which Includes:
- An input sensor wherein the input sensor is connected to the voltage input end;
- the voltage detector is connected in parallel with the equivalent resistor
- At least two output sensors are respectively connected to the equivalent resistor.
- the wiring to be tested is a gate line
- the at least two output end sensors include a first output end sensor, a second output end sensor, and a third output end sensor, wherein the first output end sensor is disposed on the gate line
- the signal output terminals, the second and third output terminals are respectively disposed at signal output ends of the two common electrodes adjacent to the gate lines.
- the wire to be tested is a data line
- the at least two output sensors include a first output sensor and a second output sensor, wherein the first output sensor is disposed at a signal output end of the data line, The two output sensors are disposed at a signal output end of the data line adjacent to the data line.
- the present invention also provides a detection method based on the above array substrate line detecting device, which comprises the following steps:
- the input end sensor is disposed at a signal input end of the wire to be tested, and the first output end sensor of the at least two output end sensors is disposed at a signal output end of the wire to be tested, and the remaining output end sensors are provided a signal output end of the wiring adjacent to the wiring to be tested;
- the measured output voltage is compared with a normal output voltage value to determine the line conduction of the wiring to be tested.
- the wiring to be tested is a gate line
- the at least two output end sensors include a first output end sensor, a second output end sensor, and a third output end sensor, wherein the first output end sensor is disposed on the The signal output ends of the gate lines, the second and third output terminals are respectively disposed at signal output ends of the two common electrodes adjacent to the gate lines.
- the wire to be tested is a data line
- the at least two output sensors include a first output sensor and a second output sensor, wherein the first output sensor is disposed at a signal output end of the data line
- the second output sensor is disposed at a signal output end of the data line adjacent to the data line.
- the wiring to be tested has a signal output but is inconsistent with a normal value, it is determined to be A short circuit occurs in the measurement wiring, and the length of the position zero distance of the position where the short circuit occurs is calculated according to the output voltage value of the wiring to be tested measured by the voltage detector.
- the wiring to be tested has no signal output, it is determined that the wiring to be tested is disconnected, and the input end sensor is moved toward the output end of the wiring to be tested until the output end sensor detects the signal.
- the length of the positional deviation coordinate zero point at which the disconnection occurs is calculated according to the output voltage value of the wiring to be tested measured by the voltage detector.
- the method further comprises the steps of: locating all the output end sensors perpendicular to the to-be-tested The length of the wiring is moved by the position of one detecting unit to measure the line conduction of the next detecting unit.
- the array substrate line detecting device and the detecting method provided by the above technical solution can directly find the specific position coordinates when the sensor performs line scanning, and can directly find the specific position coordinates by using the PDS or the AOI, thereby reducing the number of operations. , saving inspection time, thereby saving equipment production costs.
- FIG. 1 is a schematic diagram of a conventional LDS detecting device
- FIG. 1 is an equivalent circuit diagram of the existing LDS detection method
- FIG. 3 is a schematic diagram of a line detecting device under a normal circuit according to an embodiment of the present invention
- FIG. 4 is an equivalent circuit diagram of a line detecting device under a normal circuit according to an embodiment of the present invention
- FIG. 5 is a line according to an embodiment of the present invention. a schematic diagram of the detecting device under a short circuit
- FIG. 6 is a schematic diagram of a line detecting device under a short circuit according to an embodiment of the present invention.
- FIG. 7 is a schematic diagram of a line detecting device under an open circuit according to an embodiment of the present invention.
- Figure 8 is a schematic illustration of a line detecting device under open circuit in accordance with an embodiment of the present invention.
- an array substrate line detecting device which includes: a voltage input terminal 20; an input terminal sensor 30, which is connected to a voltage input terminal 20;
- the resistor 50, the equivalent resistor 50 may be an equivalent resistance of a wire connected to the output sensor of the line detecting device, or may be a separately connected resistor; a voltage detector 80, the voltage detector 80 and the equivalent
- the resistors 50 are connected in parallel for measuring the output voltage of the wiring to be tested; at least two output terminals are respectively connected to the equivalent resistor 50.
- the input sensor 30 and the output sensor are line detection sensors.
- the wiring to be tested in this embodiment is a gate line 10, and the at least two output terminals include a first output end sensor 41, a second output end sensor 42, and a third output end sensor 43, wherein the first output end sensor 41
- the second output end sensor 42 and the third output end sensor 43 are respectively disposed at the signal output end of the two common electrodes 60 adjacent to the gate line 10, adjacent to the gate line 10, at the signal output end of the gate line 10.
- the two common electrodes are: one common electrode is located on one side of the gate line 10 (as shown in FIG. 3, the upper side of the gate line 10), and the other common electrode is located on the other side of the gate line 10 (as shown in FIG. 3,
- the lower side of the gate line 10) is specifically located on the side of the pixel region on the other side of the gate line 10 (as shown in FIG. 3, the lower side of the pixel region on the lower side of the gate line 10).
- the gate line 10 and the common electrode adjacent to both sides of the gate line are used as a detecting unit, and each time a line detecting operation of the detecting unit is performed, when the detecting unit is completed, the moving detecting unit is integer multiples.
- the position is detected by the line of the next detecting unit, whereby the detection position can be moved along the grid lines one by one, thereby realizing line detection for each gate line.
- the input terminal sensor 30 is placed at the signal input end of the gate line, the voltage input terminal 20 inputs the voltage, the input terminal sensor 30 detects the input voltage signal, and transmits the voltage signal through the gate line, when the first output end sensor 41 When a normal output voltage signal is detected, it indicates that the detected gate line is normally turned on, and there is no short circuit or open circuit, as shown in FIGS. 3 and 4, at this time, the second output end sensor 42 and the third output end. Sensor 43 has no signal. When the output voltage signal detected by the first output end sensor 41 does not coincide with the normal output voltage, it indicates that the detected gate line has a short circuit phenomenon.
- the A short circuit occurs between the common electrode 60 corresponding to the second output end sensor 42 and the gate line, as shown in FIG. 5 and FIG. 6; if the third output end sensor 43 has signal transmission, the third output end sensor 43 is illustrated. A short circuit occurs between the second output terminal sensor 42 and the third output terminal sensor 43. Therefore, a short circuit occurs between the two common electrodes and the gate line.
- the array substrate line detecting device of this embodiment differs from the first embodiment only in that: the wire to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the first The output end sensor is disposed at a signal output end of the data line, and the second output end sensor is disposed at a signal output end of the data line adjacent to the data line.
- each set of two adjacent data lines serves as a detecting unit, and each time a line detecting operation of one detecting unit is performed, when the detecting unit of the one detecting unit completes the position of the integer multiple of the moving detecting unit, the next one is performed.
- the line detection of the detecting unit makes it possible to move the detection position along every two data lines, thereby realizing line detection for each data line.
- the two output sensors in each detection unit are set as a first output sensor and a second output sensor.
- the input sensor is placed at the signal input end of one of the data lines, the voltage input terminal inputs the voltage, the input terminal sensor detects the input voltage signal, and transmits the voltage signal via the data line, wherein the first output The end sensor and the input sensor are connected to the same data line.
- the first output end sensor detects a normal output voltage signal, it indicates that the detected data line is normally turned on, and there is no short circuit or open circuit.
- the second output The end sensor has no signal; when the output voltage signal detected by the first output sensor is inconsistent with the normal output voltage, it indicates that the detected data line is short-circuited.
- Embodiment 3 The embodiment is based on the detection method of the array substrate line detecting device according to the first embodiment, which includes the following steps:
- the input end sensor is disposed at a signal input end of the wiring to be tested, and the first output end sensor of the at least two output end sensors is disposed at a signal output end of the wiring to be tested, and the remaining output end sensors are provided. a signal output end of the wiring adjacent to the wiring to be tested;
- the wiring to be tested in this embodiment is a gate line 10
- the at least two output terminals include a first output end sensor 41, a second output end sensor 42, and a third output end sensor 43, wherein
- the first output end sensor 41 is disposed at the signal output end of the gate line 10
- the second output end sensor 42 and the third output end sensor 43 are respectively disposed at the signal output ends of the two common electrodes 60 adjacent to the gate lines, and the gate
- the two common electrodes adjacent to the line are respectively: one common electrode is located on one side of the gate line 10, and the other common electrode is located on the side of the pixel area on the other side of the gate line 10.
- the gate line 10 and the common electrode 60 adjacent to both sides of the gate line are used as a detecting unit, and each time a line detecting operation of the detecting unit is performed, when the detecting unit is completed, the moving detecting unit is integer multiples. The position is taken for line detection of the next detection unit.
- the input sensor is placed at the signal input end of the gate line, the voltage input terminal inputs the voltage, the input terminal sensor detects the input voltage signal, and transmits the voltage signal through the gate line.
- the first output terminal sensor detects a normal output voltage signal, it indicates that the detected gate line is normally turned on, and there is no short circuit or open circuit. At this time, the second output terminal sensor There is no signal to the third output sensor.
- the normal output voltage signal at the signal output end of the gate line is a normal output voltage V calculated by the following formula 1 when the gate line is turned on normally,
- the equivalent resistance value of the gate line 10 can be detected by an instrument such as a multimeter
- R 2 is the resistance value of the equivalent resistor 50
- ⁇ is the input voltage of the voltage input terminal 20, ⁇ .
- ⁇ is the first output sensor 41
- the angular frequency is the capacitance of the first output sensor 41.
- the second output end sensor 42 has a signal transmission, the common electrode 60 and the gate line 10 corresponding to the second output end sensor 42 are illustrated. A short circuit occurs between the common electrode 60 and the gate line 10 corresponding to the third output end sensor 43 as shown in FIG. 5 and FIG. If both the second output terminal sensor 42 and the third output terminal sensor 43 have signals, it is indicated that a short circuit occurs between the two common electrodes and the gate line.
- the current gate line 10 and the two common electrodes 60 adjacent thereto When one of the common electrodes is short-circuited, the length of the short-circuited position from the coordinate zero point can be obtained by the following formula 2:
- the signal input end of the gate line 10 is the coordinate zero point, and L is the total length of the gate line 10, X! The distance from the position zero point of the position where the short circuit occurs; V in is the input voltage of the voltage input terminal 20, V. Ut is the output voltage of the gate line 10 measured by the voltage detector 80; Zj is the impedance from the position where the short circuit occurs to the output sensor (including the output sensor), and Z 2 is from the signal input terminal to the output The position of the short circuit and the impedance of the equivalent resistor 50.
- R is an equivalent resistance value of the gate line 10 unit length, wherein
- ⁇ is the equivalent resistance value of the common electrode 60 which is short-circuited with the gate line 10.
- R 2 is the resistance of the equivalent resistor 50
- ⁇ is the angular frequency of the first output end sensor 41, which is the capacitance of the first output end sensor 41, and coi is the output end of the signal output end of the wiring short-circuited with the wiring to be tested.
- the angular frequency, Q is the capacitance of the output sensor of the signal output end of the wiring short-circuited with the wiring to be tested, where i is a natural number greater than 2, i is 2 or 3 in this embodiment, and ⁇ 2 is the second output
- the angular frequency of the end sensor 42, C 2 is the capacitance of the second output sensor 42, ⁇ 3 is the angular frequency of the third output sensor 43, and C 3 is the capacitance of the third output sensor 43.
- the f-port formula 9 is derived:
- the signal input end of the gate line 10 is the coordinate zero point, and the x 2 is the position where the disconnection occurs.
- the length of the zero point, L is the total length of the grid line.
- R is an equivalent resistance value of the gate line 10 unit length, where R is.
- V in is the voltage at the voltage input 20
- Ut is the output voltage of the gate line measured by the voltage detector 80
- R 2 is the resistance of the equivalent resistor 50.
- the embodiment is a detection method of the array substrate line detecting device based on the second embodiment.
- the fourth embodiment differs from the third embodiment only in that the wire to be tested is a data line, and correspondingly, the at least two output sensors are The first output end sensor and the second output end sensor are disposed, wherein the first output end sensor is disposed at a signal output end of the data line, and the second output end sensor is disposed at a signal output of the data line adjacent to the data line
- the detection process and the calculation process are the same as those in the third embodiment. It is only necessary to change the gate line into one of the data lines, and the two common electrodes that are short-circuited or disconnected from the gate line become another data line.
- each set of two adjacent data lines serves as a detecting unit, and each time a line detecting operation of one detecting unit is performed, when the detecting unit of the one detecting unit completes the position of the integer multiple of the moving detecting unit, the next one is performed.
- Line detection of the detection unit The two output sensors in each detection unit are set as a first output sensor and a second output sensor.
- the array substrate line detecting device and the detecting method provided by the above technical method can directly find the specific position coordinates when the sensor performs line scanning, and can directly find the specific position coordinates by using the PDS or the ⁇ , thereby reducing the process and saving.
- the inspection time saves the production cost of the equipment.
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Priority Applications (1)
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US14/359,222 US9891264B2 (en) | 2013-06-20 | 2013-11-01 | Line detecting apparatus and method for array substrate |
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CN201310247381.9A CN103308817B (zh) | 2013-06-20 | 2013-06-20 | 阵列基板线路检测装置及检测方法 |
CN201310247381.9 | 2013-06-20 |
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CN104122689A (zh) * | 2014-07-29 | 2014-10-29 | 深圳市华星光电技术有限公司 | 一种测试装置及其测试方法 |
US10761654B2 (en) | 2014-10-29 | 2020-09-01 | Nidec-Read Corporation | Circuit board inspection device and circuit board inspection method |
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CN105096786B (zh) * | 2015-08-19 | 2017-08-29 | 京东方科技集团股份有限公司 | 阵列检测可靠性判断方法、有机发光背板检测方法及装置 |
CN108872905A (zh) * | 2017-05-08 | 2018-11-23 | 原相科技股份有限公司 | 电容式感测装置及对应的短路测试方法 |
CN108519705B (zh) * | 2018-03-29 | 2020-09-08 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板以及显示面板 |
CN113487988B (zh) * | 2021-06-23 | 2022-03-22 | 惠科股份有限公司 | 显示面板的侦测方法和显示面板 |
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KR20120090490A (ko) * | 2011-02-08 | 2012-08-17 | 주식회사 지.엠 | 기판 검사장치 |
CN102788924A (zh) * | 2011-05-20 | 2012-11-21 | 株式会社联箭技术 | 导电图案检查装置 |
CN103308817A (zh) * | 2013-06-20 | 2013-09-18 | 京东方科技集团股份有限公司 | 阵列基板线路检测装置及检测方法 |
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CN103308817A (zh) | 2013-09-18 |
US20140375347A1 (en) | 2014-12-25 |
US9891264B2 (en) | 2018-02-13 |
CN103308817B (zh) | 2015-11-25 |
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