WO2013125131A1 - Gabarit de fixation et son procédé de fabrication - Google Patents

Gabarit de fixation et son procédé de fabrication Download PDF

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Publication number
WO2013125131A1
WO2013125131A1 PCT/JP2012/081825 JP2012081825W WO2013125131A1 WO 2013125131 A1 WO2013125131 A1 WO 2013125131A1 JP 2012081825 W JP2012081825 W JP 2012081825W WO 2013125131 A1 WO2013125131 A1 WO 2013125131A1
Authority
WO
WIPO (PCT)
Prior art keywords
fixing jig
sheet
base
mold
cavity
Prior art date
Application number
PCT/JP2012/081825
Other languages
English (en)
Japanese (ja)
Inventor
天川　剛
渡辺　創
秀和 東
幹司 石橋
Original Assignee
Ｔｏｗａ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｔｏｗａ株式会社 filed Critical Ｔｏｗａ株式会社
Priority to CN201280070118.0A priority Critical patent/CN104114320B/zh
Publication of WO2013125131A1 publication Critical patent/WO2013125131A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/084—Work-clamping means other than mechanically-actuated using adhesive means

Definitions

  • the present invention relates to a manufacturing method of a fixing jig for adsorbing and fixing a plate-shaped workpiece or an individualized product obtained by dividing the workpiece, and a fixing jig manufactured by the manufacturing method.
  • a substrate in which a substrate is partitioned into a plurality of lattice-shaped regions, chip-shaped electronic elements are mounted in each region, and the entire substrate is resin-sealed is referred to as a resin sealing body.
  • This resin sealing body is cut using a rotary blade or the like, and is divided into individual regions to form an electronic component.
  • a cutting device for cutting the resin sealing body is provided with a fixing jig for adsorbing and fixing the resin sealing body.
  • the fixing jig includes a base that is movable and rotatable, and a sheet that is fixed to the base.
  • the sheet includes a suction groove which is a concave space provided at a position corresponding to each of the plurality of regions in the resin sealing body, a suction hole provided in the bottom of the suction groove, and a resin sealing body.
  • a kerf through which a rotary blade or the like passes when cutting is provided.
  • Each suction hole is connected to an exhaust pump through a through passage provided in the base, and each region in the resin sealing body is sucked and held even when cut by each suction groove and suction hole ( Patent Document 1).
  • a conventional fixing jig as shown in Patent Document 1 is generally manufactured by the following method. First, a metal base in which a plurality of through passages are provided in a lattice point shape is manufactured. Next, the fluororubber or fluororesin sheet is partitioned into a plurality of regions corresponding to the target resin sealing body, and machined along a line partitioned into the plurality of regions on one side thereof A kerf is made by Similarly, a suction groove is formed at a position corresponding to each of the plurality of through passages, and a suction hole is further formed at the bottom of each suction groove by machining. Finally, the sheet is bonded and fixed to the base while positioning the sheet on the base so that the position of the suction hole matches the position of the through path.
  • the above-described conventional method for manufacturing a fixing jig has the following problems, and it has been difficult to sufficiently meet such a demand.
  • the manufacturing cost increases as the machining becomes finer.
  • the sheet needs to have appropriate flexibility, but it needs to be machined and needs to have appropriate hardness. As such a sheet, the above-described fluororubber or fluororesin sheet is used, but these materials are expensive.
  • the present invention has been made in order to solve the above-mentioned problems, and the object of the present invention is to fix the suction groove easily, the sheet can be easily positioned, and the manufacturing cost is low. It is in providing the manufacturing method of a jig
  • a fixing jig comprising: a sheet having a suction hole provided on the base; and a base on which the sheet is fixed and each has a through-passage corresponding to the suction hole, a) a molding step of supplying a room temperature curable liquid resin to the cavity of a mold having a cavity corresponding to the sheet and a convex portion corresponding to the suction groove provided on the bottom surface of the cavity; b) an abutting step of positioning and abutting the base on a mold surface of the mold in which the room temperature curable liquid resin is supplied to the cavity; c) a curing step for curing the room temperature curable liquid resin; d) a mold release step of forming a sheet on the base by mold release; e) a suction hole
  • room temperature curable liquid resin examples include silicone resins and fluorine resins.
  • the manufacturing method of the fixing jig according to the present invention supplies a room temperature curable liquid resin to a mold cavity, positions the base with respect to the mold surface of the mold, cures the resin at room temperature, A sheet is formed on the base by bonding.
  • the adhesion to the base may be natural adhesion caused by curing of the resin, but it is desirable to apply a primer to the surface of the base in advance in order to further increase the adhesion strength.
  • this manufacturing method by using a mold having a convex portion corresponding to the suction groove on the bottom surface of the cavity, a step of forming the suction groove on the sheet by machining is eliminated.
  • the manufacturing cost is reduced by eliminating the machining step of the suction groove. If an inexpensive silicone resin is used as the room temperature curable liquid resin, the manufacturing cost can be further reduced.
  • the room temperature curable liquid resin is employed in the method according to the present invention, it is not necessary to heat the resin when it is cured. If a thermosetting liquid resin is used, if the base is made of metal, the resin is cured on the base expanded by heating, and when the base shrinks after cooling to room temperature, A twist occurs. In the present invention, such a problem is avoided, and a fixing jig with high dimensional accuracy can be manufactured.
  • a protruding surface having substantially the same planar shape as the opening of the cavity is provided on the base, and the protruding surface is inserted into the opening of the cavity in the contact step. . By doing so, the positioning of the seat and the base becomes more reliable.
  • the room temperature curable liquid resin is supplied in a slightly larger amount in the cavity.
  • the room temperature curable liquid resin enters the through passage of the base and the sheet is cured.
  • the adhesion to the base is improved and the positioning of both is ensured.
  • the amount of the room temperature curable liquid resin supplied to the cavity is further increased and the base is brought into contact with the mold surface of the mold in the contact step, the room temperature curable liquid resin is removed from the through passage of the base. It can also be made to overflow to the back side of the base. By doing so, the adhesion of the sheet after resin curing to the base and the positioning of both are more reliable.
  • the suction hole preparation step pierces through the base through passage and removes the cured resin, so that there is no problem with the resin entering the through passage.
  • the sheet is formed using a mold having a convex portion corresponding to the suction groove in the cavity, the suction groove having a desired shape can be easily manufactured. Further, the sheet can be easily positioned with respect to the base as compared with the conventional method. Furthermore, as described above, the manufacturing cost can be reduced by eliminating the machining step of the suction groove. If an inexpensive silicone resin is used as the room temperature curable liquid resin, the manufacturing cost can be further reduced. This makes it possible to easily manufacture a large fixing jig having fine suction grooves and suction holes at a low manufacturing cost. In the manufacturing method of the fixing jig according to the present invention, the kerf is produced by machining as in the prior art, but the kerf can be produced relatively easily and at low cost even by machining. .
  • FIG. 2 is a sectional view taken along line A-A ′ of the fixing jig 1 in FIG. 1.
  • mold 10 which concerns on a present Example.
  • the manufacturing process figure of the fixing jig which concerns on a present Example.
  • FIG. 1 is an overall perspective view of a fixing jig 1 manufactured by the method according to the present embodiment
  • FIG. 2 is a cross-sectional view of the fixing jig 1 taken along the line A-A 'in FIG.
  • the fixing jig 1 is a resin seal formed by partitioning a substrate into a plurality of grid-like regions, mounting chip-like electronic elements in each region, and then sealing the entire substrate with resin. This is for separating the stationary body into pieces.
  • the fixing jig 1 includes a rectangular base 3 having a rectangular protruding surface 31 protruding from the upper surface, and a sheet 2 provided so as to cover the protruding surface 31.
  • the base 3 is made of metal, and a plurality of through passages 32 are provided in the form of lattice points in a range having the protruding surface 31. In this embodiment, a total of 20 through passages 32 are provided, 5 in the longitudinal direction of the fixing jig 1 and 4 in the lateral direction.
  • the sheet 2 is formed by molding a silicone-based room temperature curable liquid resin into a sheet shape, and the upper surface thereof is partitioned into a plurality of rectangular regions 21 by kerfs 22 corresponding to the target resin sealing body. .
  • the cut groove 22 is where the rotary blade passes when the resin sealing body is separated into pieces.
  • a suction groove 23 that is a rectangular concave space that is slightly smaller than the region 21 is formed in the region 21, and a suction hole 24 is formed in the bottom surface of the suction groove 23.
  • the sheet 2 is adhesively fixed to the protruding surface 31 of the base 3 at a position where each suction hole 24 communicates with each through-path 32 of the base 3.
  • Each suction hole 24 is connected to an exhaust pump (not shown) through each through passage 32.
  • FIG. 3 is a longitudinal sectional view of a mold 10 for producing the sheet 2
  • FIG. 4 is a diagram showing a manufacturing process of the fixing jig 1.
  • the mold 10 has a cavity 14 corresponding to one sheet 2.
  • Convex portions 11 corresponding to the respective suction grooves 23 of the sheet 2 are provided on the bottom surface of the cavity 14.
  • the opening of the cavity 14 has substantially the same rectangular shape as the protruding surface 31 of the base 3, but is designed to be slightly larger than the protruding surface 31 so that the protruding surface 31 of the base 3 can be inserted.
  • a silicone-based room temperature curable liquid resin 20 (hereinafter simply referred to as “resin 20”) is poured into the cavity 14 of the mold 10 (step S1: FIG. 4 corresponds to the “molding step” of the present invention). At this time, the liquid level of the resin 20 is set to exceed the mold surface 13 of the mold 10.
  • the resin 20 described above is not limited to a silicone resin, and a fluorine resin can also be used.
  • Step S2 the mold 10 is placed in a vacuum desiccator 61 equipped with a dry rotary pump and allowed to stand for 20 minutes under conditions of room temperature and about 100 kPa, thereby removing the bubbles 50 inside the resin 20 (FIG. 4).
  • Step S2 a primer is applied in advance to the protruding surface 31 of the base 3, and the base 3 is brought into contact with the mold surface 13 of the mold 10 while the protruding surface 31 is inserted into the opening of the cavity 14 (step S3: of the present invention). Equivalent to “contact process”).
  • step S4 corresponding to the “curing step” of the present invention. This ensures the adhesion of the sheet 2 to the base 3 and the positioning of both.
  • thermosetting liquid resin the resin is cured on the base 3 expanded by heating, and the sheet 2 is warped or twisted when the base 3 contracts upon cooling to room temperature. .
  • a room temperature curable liquid resin such a problem can be avoided by using a room temperature curable liquid resin, and the fixing jig 1 with high dimensional accuracy can be manufactured.
  • step S5 in FIG. 4: corresponding to the “bonding step” of the present invention the primer applied to the protruding surface 31 of the base 3 is cured, and the resin 20 is firmly bonded to the protruding surface 31.
  • the resin 20 may be bonded to the base 3 by natural bonding caused by curing of the resin 20 as long as sufficient adhesive strength is obtained. In this case, primer application and adhesion steps are not required.
  • the sheet 2 appears on the protruding surface 31 of the base 3.
  • a portion of the sheet 2 where the suction groove 23 is not formed is cut into a straight line with a cutting disk to produce the cut groove 22.
  • drilling is performed through the through passage 32 to remove the resin 20 cured inside the through passage 32 and the suction hole 24 is formed in the sheet 2 (step S7: equivalent to the “suction hole preparation step” of the present invention). ).
  • step S7 equivalent to the “suction hole preparation step” of the present invention.
  • the sheet 2 is molded using the mold 10 having the convex portion 11 corresponding to the suction groove 23 in the cavity 14, a desired shape is obtained.
  • the suction groove 23 can be easily manufactured. Further, the sheet 2 can be easily positioned with respect to the base 3 as compared with the conventional method. Furthermore, as described above, the manufacturing cost can be reduced by eliminating the machining step of the suction groove 23. If an inexpensive silicone resin is used as the room temperature curable liquid resin 20, the manufacturing cost can be further reduced. In this way, the large fixing jig 1 having the fine suction grooves 23 and the suction holes 24 can be easily manufactured at a low manufacturing cost.
  • the kerf 22 is produced by machining as in the prior art, but the kerf 22 is produced relatively easily and at low cost even by machining. Can do.
  • the shape of the sheet 2 and the base 3 is rectangular, but other shapes may be adopted depending on the shape of the object to be cut and held by the fixing jig 1. Further, the shape of the suction groove 23 may be a circle or an ellipse. Further, the amount of the resin 20 supplied to the mold 10 is slightly less than the above-described amount (that is, the amount of the liquid surface of the resin 20 exceeding the mold surface 13 of the mold 10), and the resin 20 enters the through passage 32 of the base 3. It is good also as the quantity of the grade which penetrates.
  • the sheet 2 Before the resin 20 is supplied to the mold 10, the sheet 2 may be made conductive by adding carbon powder to the resin 20. Since the fixing jig 1 having such a sheet 2 can release static electricity generated when the resin sealing body is attached or removed, it is prevented that the static electricity damages the electronic elements inside the resin sealing body. The Moreover, you may produce the transparent sheet 2 and the sheet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Jigs For Machine Tools (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Abstract

L'objet de la présente invention consiste à proposer un procédé de fabrication d'un gabarit de fixation, capable de fabriquer, facilement et avec un coût de production faible, un gabarit de fixation permettant de tenir de façon adhésive un article plat devant être coupé ; et le gabarit de fixation fabriqué à l'aide dudit procédé.　La présente invention concerne un procédé de fabrication pour un gabarit de fixation comprenant une feuille possédant une rainure d'adhérence et des trous d'adhérence, et une base comportant des passages traversants correspondant à chaque trou d'adhérence, et présentant : a) une étape de moulage (S1) dans laquelle une résine liquide durcissable à une température normale est introduite dans une cavité dans un moule, la cavité correspondant à la feuille, et une section convexe correspondant à la rainure d'adhérence formée dans la surface inférieure de la cavité ; b) une étape de contact (S3) dans laquelle une base est positionnée et amenée en contact avec la surface du moule ; c) une étape de durcissement (S4) dans laquelle la résine est durcie ; d) une étape de libération (S6) dans laquelle la feuille est formée sur la base par la libération de ladite feuille à partir du moule ; et e) une étape de préparation des trous d'adhérence (S7) dans laquelle des trous d'adhérence sont préparés dans la feuille par la perforation de la feuille à travers les passages traversants.
PCT/JP2012/081825 2012-02-23 2012-12-07 Gabarit de fixation et son procédé de fabrication WO2013125131A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201280070118.0A CN104114320B (zh) 2012-02-23 2012-12-07 固定治具的制造方法以及固定治具

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-037077 2012-02-23
JP2012037077A JP5627618B2 (ja) 2012-02-23 2012-02-23 固定治具の製造方法及び固定治具

Publications (1)

Publication Number Publication Date
WO2013125131A1 true WO2013125131A1 (fr) 2013-08-29

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Application Number Title Priority Date Filing Date
PCT/JP2012/081825 WO2013125131A1 (fr) 2012-02-23 2012-12-07 Gabarit de fixation et son procédé de fabrication

Country Status (5)

Country Link
JP (1) JP5627618B2 (fr)
CN (1) CN104114320B (fr)
MY (1) MY170846A (fr)
TW (1) TWI491465B (fr)
WO (1) WO2013125131A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109509708A (zh) * 2017-09-15 2019-03-22 东和株式会社 保持构件及其制造方法、保持机构以及制品的制造装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6257266B2 (ja) 2013-10-29 2018-01-10 Ｔｏｗａ株式会社 電子部品の製造装置及び製造方法
JP6886379B2 (ja) * 2017-09-28 2021-06-16 Ｔｏｗａ株式会社 保持部材、保持部材の製造方法、検査装置及び切断装置
KR101948179B1 (ko) 2017-11-23 2019-02-13 주식회사 토이즈빌 피가공물 가이드 지그 및 이를 가지는 가공스테이지
JP7175628B2 (ja) * 2018-04-26 2022-11-21 株式会社ディスコ チャックテーブル
JP6746756B1 (ja) * 2019-05-24 2020-08-26 Ｔｏｗａ株式会社 吸着プレート、切断装置および切断方法
JP7418271B2 (ja) 2020-04-13 2024-01-19 株式会社ディスコ 治具テーブル及び分割方法

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Publication number Priority date Publication date Assignee Title
JPH10107131A (ja) * 1996-09-25 1998-04-24 Teikoku Seiki Kk 吸着テーブル及びそのエレメント
JP2002254267A (ja) * 2001-02-27 2002-09-10 Mitsubishi Gas Chem Co Inc 真空吸着加工用補助板
JP2009142992A (ja) * 2007-12-11 2009-07-02 Disco Abrasive Syst Ltd パッケージ基板の保持治具

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JP3688465B2 (ja) * 1997-05-27 2005-08-31 Ｔｄｋ株式会社 加工用治具
JP2002254262A (ja) * 2000-12-28 2002-09-10 Sony Corp ねじりコイルばねの組込装置及び方法
JP2003309087A (ja) * 2002-04-18 2003-10-31 Towa Corp 基板の切断方法及び装置
CN100398238C (zh) * 2003-06-06 2008-07-02 住友电气工业株式会社 穿孔的多孔树脂基材及穿孔内壁面导电化的多孔树脂基材的制法
JP4268091B2 (ja) * 2004-05-12 2009-05-27 信越ポリマー株式会社 部品保持具
JP5363746B2 (ja) * 2008-02-29 2013-12-11 Ｔｏｗａ株式会社 切断装置及び切断方法
JP5385636B2 (ja) * 2009-02-26 2014-01-08 Ｔｏｗａ株式会社 圧縮成形用金型
JP5428903B2 (ja) * 2010-02-03 2014-02-26 第一精工株式会社 樹脂封止金型装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10107131A (ja) * 1996-09-25 1998-04-24 Teikoku Seiki Kk 吸着テーブル及びそのエレメント
JP2002254267A (ja) * 2001-02-27 2002-09-10 Mitsubishi Gas Chem Co Inc 真空吸着加工用補助板
JP2009142992A (ja) * 2007-12-11 2009-07-02 Disco Abrasive Syst Ltd パッケージ基板の保持治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109509708A (zh) * 2017-09-15 2019-03-22 东和株式会社 保持构件及其制造方法、保持机构以及制品的制造装置
CN109509708B (zh) * 2017-09-15 2022-07-12 东和株式会社 保持构件及其制造方法、保持机构以及制品的制造装置

Also Published As

Publication number Publication date
JP5627618B2 (ja) 2014-11-19
CN104114320A (zh) 2014-10-22
MY170846A (en) 2019-09-10
CN104114320B (zh) 2016-08-24
TW201341107A (zh) 2013-10-16
JP2013169638A (ja) 2013-09-02
TWI491465B (zh) 2015-07-11

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