WO2013125131A1

WO2013125131A1 - Production method for fixing jig and fixing jig

Info

Publication number: WO2013125131A1
Application number: PCT/JP2012/081825
Authority: WO
Inventors: 天川　剛; 渡辺　創; 秀和東; 幹司石橋
Original assignee: Ｔｏｗａ株式会社
Priority date: 2012-02-23
Filing date: 2012-12-07
Publication date: 2013-08-29
Also published as: TW201341107A; TWI491465B; MY170846A; JP5627618B2; JP2013169638A; CN104114320B; CN104114320A

Abstract

The purpose of the present invention is to provide: a production method for a fixing jig that is capable of producing, readily and at a low production cost, a fixing jig for adherently holding a planar item to be cut; and the fixing jig produced using said method.　This invention is a production method for a fixing jig comprising a sheet having an adhesion groove and adhesion holes, and a base having through passages corresponding to each adhesion hole, and has: a) a molding step (S1) in which a normal temperature-curable liquid resin is supplied to a cavity in a mold having the cavity which corresponds to the sheet, and a convex section corresponding to the adhesion groove provided in the bottom surface of the cavity; b) a contact step (S3) in which a base is positioned and brought into contact with the mold surface of the mold; c) a curing step (S4) in which the resin is cured; d) a release step (S6) in which the sheet is formed on the base by releasing same from the mold; and e) an adhesion hole preparation step (S7) in which adhesion holes are prepared in the sheet by perforating the sheet through the through passages.

Description

Fixing jig manufacturing method and fixing jig

The present invention relates to a manufacturing method of a fixing jig for adsorbing and fixing a plate-shaped workpiece or an individualized product obtained by dividing the workpiece, and a fixing jig manufactured by the manufacturing method.

A substrate in which a substrate is partitioned into a plurality of lattice-shaped regions, chip-shaped electronic elements are mounted in each region, and the entire substrate is resin-sealed is referred to as a resin sealing body. This resin sealing body is cut using a rotary blade or the like, and is divided into individual regions to form an electronic component.
A cutting device for cutting the resin sealing body is provided with a fixing jig for adsorbing and fixing the resin sealing body. The fixing jig includes a base that is movable and rotatable, and a sheet that is fixed to the base. The sheet includes a suction groove which is a concave space provided at a position corresponding to each of the plurality of regions in the resin sealing body, a suction hole provided in the bottom of the suction groove, and a resin sealing body. A kerf through which a rotary blade or the like passes when cutting is provided. Each suction hole is connected to an exhaust pump through a through passage provided in the base, and each region in the resin sealing body is sucked and held even when cut by each suction groove and suction hole ( Patent Document 1).

A conventional fixing jig as shown in Patent Document 1 is generally manufactured by the following method.
First, a metal base in which a plurality of through passages are provided in a lattice point shape is manufactured.
Next, the fluororubber or fluororesin sheet is partitioned into a plurality of regions corresponding to the target resin sealing body, and machined along a line partitioned into the plurality of regions on one side thereof A kerf is made by Similarly, a suction groove is formed at a position corresponding to each of the plurality of through passages, and a suction hole is further formed at the bottom of each suction groove by machining.
Finally, the sheet is bonded and fixed to the base while positioning the sheet on the base so that the position of the suction hole matches the position of the through path.

JP 2009-202311 A

In recent years, electronic components have become more and more compact, and there is a strong demand to increase the number of electronic components on a single substrate in order to increase the manufacturing efficiency of electronic components. Along with this, the size of the fixing jig is increased, and the section of the sheet, each suction groove, and the suction hole are becoming smaller.

However, the above-described conventional method for manufacturing a fixing jig has the following problems, and it has been difficult to sufficiently meet such a demand.
(1) It is necessary to adsorb and hold the resin sealing body. Therefore, although a moderate flexibility is required for the sheet, it is difficult to perform fine machining on the flexible sheet, and in particular, it is difficult to produce the suction groove.
(2) When the machined sheet is bonded and fixed to the base, positioning is difficult because the sheet expands and contracts.
(3) The manufacturing cost increases as the machining becomes finer. In addition, as described above, the sheet needs to have appropriate flexibility, but it needs to be machined and needs to have appropriate hardness. As such a sheet, the above-described fluororubber or fluororesin sheet is used, but these materials are expensive.

The present invention has been made in order to solve the above-mentioned problems, and the object of the present invention is to fix the suction groove easily, the sheet can be easily positioned, and the manufacturing cost is low. It is in providing the manufacturing method of a jig | tool, and the fixing jig manufactured by this manufacturing method.

In order to solve the above problems, the present invention relates to a suction groove for holding and holding a plate-like object to be cut and an individualized product obtained by cutting the plate-like object to be cut, and a bottom of the suction groove. A fixing jig comprising: a sheet having a suction hole provided on the base; and a base on which the sheet is fixed and each has a through-passage corresponding to the suction hole,
a) a molding step of supplying a room temperature curable liquid resin to the cavity of a mold having a cavity corresponding to the sheet and a convex portion corresponding to the suction groove provided on the bottom surface of the cavity;
b) an abutting step of positioning and abutting the base on a mold surface of the mold in which the room temperature curable liquid resin is supplied to the cavity;
c) a curing step for curing the room temperature curable liquid resin;
d) a mold release step of forming a sheet on the base by mold release;
e) a suction hole creating step of creating a suction hole in the sheet by punching the sheet through the through path;
It is characterized by having.

Specific examples of the room temperature curable liquid resin include silicone resins and fluorine resins.

The manufacturing method of the fixing jig according to the present invention supplies a room temperature curable liquid resin to a mold cavity, positions the base with respect to the mold surface of the mold, cures the resin at room temperature, A sheet is formed on the base by bonding.
The adhesion to the base may be natural adhesion caused by curing of the resin, but it is desirable to apply a primer to the surface of the base in advance in order to further increase the adhesion strength.
In this manufacturing method, by using a mold having a convex portion corresponding to the suction groove on the bottom surface of the cavity, a step of forming the suction groove on the sheet by machining is eliminated.
Further, since the base is positioned with respect to the mold surface, the positioning of the sheet with respect to the base is facilitated as compared with the conventional method.
In the method according to the present invention, as described above, the manufacturing cost is reduced by eliminating the machining step of the suction groove. If an inexpensive silicone resin is used as the room temperature curable liquid resin, the manufacturing cost can be further reduced.

In addition, since the room temperature curable liquid resin is employed in the method according to the present invention, it is not necessary to heat the resin when it is cured. If a thermosetting liquid resin is used, if the base is made of metal, the resin is cured on the base expanded by heating, and when the base shrinks after cooling to room temperature, A twist occurs. In the present invention, such a problem is avoided, and a fixing jig with high dimensional accuracy can be manufactured.

In the method according to the present invention, it is desirable that a protruding surface having substantially the same planar shape as the opening of the cavity is provided on the base, and the protruding surface is inserted into the opening of the cavity in the contact step. . By doing so, the positioning of the seat and the base becomes more reliable.

In this case, in the molding step, it is desirable that the room temperature curable liquid resin is supplied in a slightly larger amount in the cavity. Thus, when the base is brought into contact with the mold surface of the mold in the contact step, the room temperature curable liquid resin enters the through passage of the base and the sheet is cured. The adhesion to the base is improved and the positioning of both is ensured.
When the amount of the room temperature curable liquid resin supplied to the cavity is further increased and the base is brought into contact with the mold surface of the mold in the contact step, the room temperature curable liquid resin is removed from the through passage of the base. It can also be made to overflow to the back side of the base. By doing so, the adhesion of the sheet after resin curing to the base and the positioning of both are more reliable.
In any case, the suction hole preparation step pierces through the base through passage and removes the cured resin, so that there is no problem with the resin entering the through passage.

In the method for manufacturing a fixing jig according to the present invention, since the sheet is formed using a mold having a convex portion corresponding to the suction groove in the cavity, the suction groove having a desired shape can be easily manufactured.
Further, the sheet can be easily positioned with respect to the base as compared with the conventional method.
Furthermore, as described above, the manufacturing cost can be reduced by eliminating the machining step of the suction groove. If an inexpensive silicone resin is used as the room temperature curable liquid resin, the manufacturing cost can be further reduced.
This makes it possible to easily manufacture a large fixing jig having fine suction grooves and suction holes at a low manufacturing cost.
In the manufacturing method of the fixing jig according to the present invention, the kerf is produced by machining as in the prior art, but the kerf can be produced relatively easily and at low cost even by machining. .

The perspective whole view of the fixing jig manufactured by the manufacturing method of the fixing jig which concerns on one Example of this invention. FIG. 2 is a sectional view taken along line A-A ′ of the fixing jig 1 in FIG. 1. The longitudinal cross-sectional view of the type | mold 10 which concerns on a present Example. The manufacturing process figure of the fixing jig which concerns on a present Example.

Hereinafter, an embodiment of a method for manufacturing a fixing jig according to the present invention will be described with reference to the drawings. FIG. 1 is an overall perspective view of a fixing jig 1 manufactured by the method according to the present embodiment, and FIG. 2 is a cross-sectional view of the fixing jig 1 taken along the line A-A 'in FIG.

The fixing jig 1 according to the present embodiment is a resin seal formed by partitioning a substrate into a plurality of grid-like regions, mounting chip-like electronic elements in each region, and then sealing the entire substrate with resin. This is for separating the stationary body into pieces. The fixing jig 1 includes a rectangular base 3 having a rectangular protruding surface 31 protruding from the upper surface, and a sheet 2 provided so as to cover the protruding surface 31.

The base 3 is made of metal, and a plurality of through passages 32 are provided in the form of lattice points in a range having the protruding surface 31. In this embodiment, a total of 20 through passages 32 are provided, 5 in the longitudinal direction of the fixing

jig

1 and 4 in the lateral direction.
The sheet 2 is formed by molding a silicone-based room temperature curable liquid resin into a sheet shape, and the upper surface thereof is partitioned into a plurality of rectangular regions 21 by kerfs 22 corresponding to the target resin sealing body. . The cut groove 22 is where the rotary blade passes when the resin sealing body is separated into pieces. In this embodiment, five regions 21 in the longitudinal direction and four regions in the short direction, a total of 20 regions 21 are provided in a lattice shape so as to be sandwiched by the cut grooves 22, but the arrangement and number of the regions 21 are as follows. It is not limited to. A suction groove 23 that is a rectangular concave space that is slightly smaller than the region 21 is formed in the region 21, and a suction hole 24 is formed in the bottom surface of the suction groove 23.
The sheet 2 is adhesively fixed to the protruding surface 31 of the base 3 at a position where each suction hole 24 communicates with each through-path 32 of the base 3. Each suction hole 24 is connected to an exhaust pump (not shown) through each through passage 32.

Next, a method for manufacturing the fixing jig 1 according to the present embodiment will be described with reference to FIGS. FIG. 3 is a longitudinal sectional view of a mold 10 for producing the sheet 2, and FIG. 4 is a diagram showing a manufacturing process of the fixing jig 1.
The mold 10 has a cavity 14 corresponding to one sheet 2. Convex portions 11 corresponding to the respective suction grooves 23 of the sheet 2 are provided on the bottom surface of the cavity 14. The opening of the cavity 14 has substantially the same rectangular shape as the protruding surface 31 of the base 3, but is designed to be slightly larger than the protruding surface 31 so that the protruding surface 31 of the base 3 can be inserted.

First, a silicone-based room temperature curable liquid resin 20 (hereinafter simply referred to as “resin 20”) is poured into the cavity 14 of the mold 10 (step S1: FIG. 4 corresponds to the “molding step” of the present invention). At this time, the liquid level of the resin 20 is set to exceed the mold surface 13 of the mold 10.
The resin 20 described above is not limited to a silicone resin, and a fluorine resin can also be used.

Next, the mold 10 is placed in a vacuum desiccator 61 equipped with a dry rotary pump and allowed to stand for 20 minutes under conditions of room temperature and about 100 kPa, thereby removing the bubbles 50 inside the resin 20 (FIG. 4). Step S2).
Further, a primer is applied in advance to the protruding surface 31 of the base 3, and the base 3 is brought into contact with the mold surface 13 of the mold 10 while the protruding surface 31 is inserted into the opening of the cavity 14 (step S3: of the present invention). Equivalent to “contact process”). By inserting the protruding surface 31 into the cavity 14, the position of the base 3 with respect to the mold surface 13 is determined.
When the base 3 is brought into contact with the mold surface 13 of the mold 10 in this way, pressure is applied to the resin 20 inside the cavity 14 by the protruding surface 31, so that the resin 20 enters the through passage 32 of the base 3, and further the base 3 It overflows to the back side. In this state, the mold 10 and the base 3 are left at room temperature for 24 hours to completely cure the resin 20 (step S4: corresponding to the “curing step” of the present invention). This ensures the adhesion of the sheet 2 to the base 3 and the positioning of both.

If a thermosetting liquid resin is used, the resin is cured on the base 3 expanded by heating, and the sheet 2 is warped or twisted when the base 3 contracts upon cooling to room temperature. . In this embodiment, such a problem can be avoided by using a room temperature curable liquid resin, and the fixing jig 1 with high dimensional accuracy can be manufactured.

After the resin 20 is cured, the mold 10 and the base 3 are placed in an oven 62 and heated at 100 ° C. for 1 hour (step S5 in FIG. 4: corresponding to the “bonding step” of the present invention). As a result, the primer applied to the protruding surface 31 of the base 3 is cured, and the resin 20 is firmly bonded to the protruding surface 31.
The resin 20 may be bonded to the base 3 by natural bonding caused by curing of the resin 20 as long as sufficient adhesive strength is obtained. In this case, primer application and adhesion steps are not required.

Thereafter, the resin 20 that has reached the back side of the base 3 is removed, and the mold 10 is removed (step S6 in FIG. 4: corresponding to the “release process” of the present invention). Thereby, the sheet 2 appears on the protruding surface 31 of the base 3.
Finally, a portion of the sheet 2 where the suction groove 23 is not formed is cut into a straight line with a cutting disk to produce the cut groove 22. Further, drilling is performed through the through passage 32 to remove the resin 20 cured inside the through passage 32 and the suction hole 24 is formed in the sheet 2 (step S7: equivalent to the “suction hole preparation step” of the present invention). ). Thus, the fixing jig 1 according to the present embodiment is obtained.

As described above, in the method for manufacturing the fixing jig 1 according to the present invention, since the sheet 2 is molded using the mold 10 having the convex portion 11 corresponding to the suction groove 23 in the cavity 14, a desired shape is obtained. The suction groove 23 can be easily manufactured.
Further, the sheet 2 can be easily positioned with respect to the base 3 as compared with the conventional method.
Furthermore, as described above, the manufacturing cost can be reduced by eliminating the machining step of the suction groove 23. If an inexpensive silicone resin is used as the room temperature curable liquid resin 20, the manufacturing cost can be further reduced.
In this way, the large fixing jig 1 having the fine suction grooves 23 and the suction holes 24 can be easily manufactured at a low manufacturing cost.
In the manufacturing method of the fixing jig according to the present invention, the kerf 22 is produced by machining as in the prior art, but the kerf 22 is produced relatively easily and at low cost even by machining. Can do.

In the embodiment described above, the shape of the sheet 2 and the base 3 is rectangular, but other shapes may be adopted depending on the shape of the object to be cut and held by the fixing jig 1. Further, the shape of the suction groove 23 may be a circle or an ellipse.
Further, the amount of the resin 20 supplied to the mold 10 is slightly less than the above-described amount (that is, the amount of the liquid surface of the resin 20 exceeding the mold surface 13 of the mold 10), and the resin 20 enters the through passage 32 of the base 3. It is good also as the quantity of the grade which penetrates.

Before the resin 20 is supplied to the mold 10, the sheet 2 may be made conductive by adding carbon powder to the resin 20. Since the fixing jig 1 having such a sheet 2 can release static electricity generated when the resin sealing body is attached or removed, it is prevented that the static electricity damages the electronic elements inside the resin sealing body. The
Moreover, you may produce the transparent sheet 2 and the sheet | seat 2 of a desired color by using the resin 20 which added the transparent resin 20 and the pigment | dye.

DESCRIPTION OF SYMBOLS 1 ... Fixing jig 10 ... Type | mold 11 ... Protruding part 13 ... Mold surface 14 ... Cavity 2 ... Sheet 20 ... Silicone-type resin 21 ... Area 22 ... Cut groove 23 ... Adsorption groove 24 ... Adsorption hole 3 ... Base 31 ... Projection surface 32 ... through passage 50 ... bubble 61 ... vacuum desiccator 62 ... oven

Claims

A sheet having an adsorption groove for adsorbing and holding a plate-like object to be cut and an individualized product obtained by cutting the plate-like object, and an adsorption hole provided at the bottom of the adsorption groove; Are fixed, and a manufacturing method of a fixing jig comprising a base having a through passage corresponding to each of the suction holes,
a) a molding step of supplying a room temperature curable liquid resin to the cavity of a mold having a cavity corresponding to the sheet and a convex portion corresponding to the suction groove provided on the bottom surface of the cavity;
b) an abutting step of positioning and abutting the base on a mold surface of the mold in which the room temperature curable liquid resin is supplied to the cavity;
c) a curing step for curing the room temperature curable liquid resin;
d) a mold release step of forming a sheet on the base by mold release;
e) a suction hole creating step of creating a suction hole in the sheet by punching the sheet through the through path;
The manufacturing method of the fixing jig characterized by having.
In the contact step, a primer is previously applied to a surface of the base that contacts the mold surface of the mold,
2. The method according to claim 1, further comprising the step of f) adhering the room temperature curable liquid resin to the base by curing the primer after the curing step and before the releasing step. The manufacturing method of the fixing jig of description.
The base includes a projecting surface having a planar shape substantially the same as the opening of the cavity;
The method for manufacturing a fixing jig according to claim 2, wherein the projecting surface is inserted into the opening of the cavity in the contact step.
4. The method of manufacturing a fixing jig according to claim 3, wherein in the molding step, an amount of room temperature curable liquid resin that penetrates into the through-passage of the base is supplied to the cavity.
The method for manufacturing a fixing jig according to claim 3, wherein in the molding step, an amount of room temperature curable liquid resin that reaches the back side of the base is supplied to the cavity through the through path. .
6. The method of manufacturing a fixing jig according to claim 1, wherein a silicone resin is used for the room temperature curable liquid resin.
After the mold release step,
The method for manufacturing a fixing jig according to any one of claims 1 to 6, wherein a cut groove is formed in the sheet by a cutting disk.
The method for manufacturing a fixing jig according to any one of claims 1 to 7, wherein the sheet is made conductive by adding carbon powder to the room temperature curable liquid resin before curing.
A fixing jig manufactured by the method for manufacturing a fixing jig according to any one of claims 1 to 8.