JP5363746B2 - Cutting apparatus and cutting method - Google Patents

Abstract

Chips produced from an object being cut are prevented from adhering to the pieces that are already cut. A suction jig (6) for applying suction to a resin-sealed body (1) to be cut includes, on an upper surface thereof, a plurality of grooves (13, 14) that respectively coincide with a plurality of lattice-like boundaries (4) between regions (5) provided in the resin-sealed body (1). When a rotary blade (17) cuts the resin-sealed body (1) along a cutting line (20), the peripheral edge of the rotary blade (17) is received in a groove (21) in a cutting area, the groove (21) coinciding with the cutting line (20). A cleaning liquid (23) is ejected from a cleaning water nozzle (22) disposed in front of the suction jig (6) toward the groove (21) in the direction (-Y) in which the groove (21) extends and in which cut chips are discharged. The cleaning liquid (23) is also ejected from another cleaning water nozzle (24) disposed in front of the suction jig (6) in the -Y direction toward a groove (26) that coincides with a boundary (25) that is cut immediately before cutting the cutting line (20).

Description

  The present invention relates to a cutting apparatus and a cutting method used when a plurality of articles each corresponding to a region is manufactured by cutting a workpiece having a plurality of regions provided in a lattice shape. .

  A conventional method of cutting an object will be described with reference to FIG. FIG. 7 is a schematic perspective view for explaining a conventional method of cutting an object to be cut. As an example of the object to be cut, a resin encapsulant formed by resin-sealing chip-like elements respectively attached to a plurality of regions of the substrate will be described. In this example, a plurality of electronic components corresponding to each region are manufactured by cutting the resin sealing body. In addition, in order to make it easy to understand, all drawings described below are schematically omitted and exaggerated as appropriate.

  The resin sealing body 1 is a composite material having a lead frame, a printed circuit board such as a glass epoxy board, a substrate 2 made of a ceramic substrate, and a cured resin 3. The substrate 2 includes lattice-like boundary lines 4 that are virtually provided, and a plurality of regions 5 that are partitioned by the boundary lines 4. Each region 5 is provided with one or a plurality of chip-like elements (semiconductor chips or the like, hereinafter referred to as “chips” as appropriate), and these chips are resin-sealed with a cured resin 3. Each of the regions 5 included in the resin sealing body 1 is cut and separated into individual pieces, whereby electronic components corresponding to the respective regions 5 are manufactured.

  A cutting device for an electronic component that cuts the resin sealing body 1 is provided with a suction jig 6 that sucks and fixes the resin sealing body 1. The suction jig 6 is attached to the base 7. The base 7 is provided so as to be movable in the X direction, the Y direction, and the Z direction and to be rotatable in the θ direction. The suction jig 6 is provided with a plurality of columnar projections 8 that suck and hold (fix) the plurality of regions 5 of the substrate 2. Further, each protrusion 8 sucks and holds each electronic component (package) formed by cutting the resin sealing body 1 into regions 5 units. On the upper surface of the protrusion 8, a recess 9 that is a space for suction and a suction hole 10 provided in the recess 9 are provided. The suction hole 10 passes through a projection 8, a suction jig 6, a suction pipe (not shown) provided inside the base 7 and a suction pipe 11 in order, and a suction source such as a vacuum pump or a decompression tank. 12 is connected. A groove 13 extending in the X direction and a groove 14 extending in the Y direction are provided between the protrusions 8.

  A cutting mechanism 15 is provided in the vicinity of the suction jig 6 so as to be movable in the Y direction. The cutting mechanism 15 is provided with a rotary shaft 16 of a motor (not shown), a rotary blade 17 fixed to the rotary shaft 16, and a cutting water nozzle 18. The place where the nozzle 18 for cutting water is provided is the destination side where the cutting mechanism 15 is relatively advanced with respect to the resin sealing body 1, and the peripheral end portion of the rotary blade 17 is the resin sealing body. 1 is near the point to be cut, which is a portion in contact with 1. Further, when the resin sealing body 1 is cut, the peripheral end portion of the rotary blade 17 is accommodated in the groove 13 or the groove 14.

  In the step of cutting the resin sealing body 1, first, the rotary blade 17 is aligned in the X, Y, and Z directions with respect to the boundary line 4 along the Y direction to be cut. Next, the cutting mechanism 15 is moved in the + Y direction toward the resin sealing body 1. Thereby, the resin sealing body 1 can be completely cut (full cut) along the boundary line 4. After cutting the resin sealing body 1 at all of the boundary lines 4 along the Y direction, the base 7 is rotated by 90 ° in the θ direction. Thereafter, the resin sealing body 1 is completely cut (full cut) at each of the boundary lines 4 that are newly along the Y direction. Thereby, the resin sealing body 1 can be cut | disconnected and can be separated into the electronic component corresponding to each area | region 5, respectively.

  When cutting the resin sealing body 1, the cutting water nozzle 18 discharges cutting water 19 from above or obliquely upward toward the cutting point. The cutting water 19 includes a reduction in processing resistance between the rotary blade 17 and the resin sealing body 1 (in other words, lubrication), cooling of the rotary blade 17 and the resin sealing body 1, and removal of generated cutting waste. Play a role.

  By the way, in recent years, there has been an increasing tendency to increase the number of electronic components that can be obtained on a single substrate based on a request for cost reduction. From this tendency, it is required to increase the size of the substrate 2 and to reduce the cutting allowance (kerfloss, cutting width) when cutting the resin sealing body 1. As a result, the following problems occur.

  First, there is a problem due to the increase in size of the substrate 2. Due to the increase in size of the substrate 2, the length of the groove 13 extending in the X direction and the length of the groove 14 extending in the Y direction are increased. Therefore, in the system in which the cutting water 19 is discharged from above or obliquely above, it is difficult for the cutting water 19 to reach all the portions in the length direction of the grooves 13 and 14 with a sufficient momentum. For this reason, it is difficult for water including cutting waste to be removed from the grooves 13 and 14.

  When water containing cutting waste remains in the grooves 13 and 14, the following situation occurs when an electronic component released from suction in the suction jig 6 is transported by a transport mechanism (not shown). There is a risk. That is, when a plurality of separated electronic components are collectively sucked by the transport mechanism, the remaining water including cutting waste is sucked up in the grooves 13 and 14 and adheres to the entire surface of the electronic component. It is a situation. And an electronic component is conveyed in the state which the water containing cutting waste adhered to the whole surface of an electronic component.

  The cutting waste adhering to the electronic component causes a first problem that a defect occurs in a later process. In particular, a large amount of resin-based cutting waste generated by cutting the glass epoxy substrate or the like and the cured resin 3 causes contact failure. Further, metal-based cutting waste resulting from the copper foil used as the wiring material in the substrate 2 causes a short circuit. Further, the cutting waste adhering to the electronic component causes a second problem that the number of man-hours increases because a process of cleaning the electronic component and completely removing the cutting waste is required.

  Next, there is a problem due to the narrowing of the cutting allowance. In the conventional system in which the cutting water 19 is discharged from above or obliquely above, the cutting water 19 is injected into the grooves 13 and 14 through a cutting margin. Therefore, in the conventional method, as the cutting margin becomes narrow, it becomes difficult for the cutting water 19 to be poured into the grooves 13 and 14 through the narrowed cutting margin. As a result, it is difficult for the cutting water 19 to reach all the portions of the grooves 13 and 14 in the length direction with a sufficient momentum. Therefore, since the water containing cutting waste is difficult to be removed from the grooves 13, 14, the two problems described above occur.

  In addition, when protruding electrodes such as solder bumps are formed on the surface of the substrate 2 (the surface shown in the upper side in the drawing), cutting chips are likely to adhere to the base portion of the protruding electrodes. Therefore, the two problems described above become more prominent.

  In order to cope with the above-described problem, a configuration in which a high-pressure cleaning nozzle is provided obliquely above a workpiece (workpiece) apart from a grinding water (cutting water) supply nozzle has been proposed. According to this configuration, the high-pressure cleaning nozzle is provided in the vicinity of the cutting stroke end of the workpiece, and supplies cleaning water having a pressure higher than that of the grinding water from obliquely upward toward the workpiece after cutting (for example, see Patent Document 1). ).

  However, even if this configuration is adopted, cleaning water is applied to all the lengthwise portions of the relief grooves provided on the upper surface of the jig body as the work substrate is enlarged and the cutting margin is narrowed. It is difficult to reach a sufficient amount at a sufficient momentum. From this, the state that the water containing cutting waste is not easily removed from the escape groove has not been solved.

JP 2003-168659 A (page 2-4, Fig. 1-3)

  The problem to be solved by the present invention is that it is difficult to remove cutting waste in a groove provided in a jig of a cutting device.

  Hereinafter, reference numerals in parentheses in the descriptions of “means for solving the problems”, “effects of the invention”, and “best mode for carrying out the invention” are the terms in the description and the components shown in the drawings. It is described for the purpose of facilitating the comparison. Further, these symbols and the like do not mean that “the meaning of the terms in the description is limited to the components shown in the drawings”.

In order to solve the above-described problem, a cutting device according to the present invention includes a jig (6) for fixing a workpiece (1) having a plurality of regions (5) provided in a lattice shape to a fixed surface, A plurality of grooves (13, 14) provided so as to overlap the boundary lines (4) of the plurality of regions (5) on the fixed surface, and the workpiece (1) is cut along the boundary lines (4). A cutting device including a rotary blade (17) and used when manufacturing a plurality of articles each corresponding to a region (5), provided on a side of a jig (6), and having a plurality of grooves ( 13, 14), one groove (21) extends toward one groove (21) that overlaps the line to be cut (20) composed of one boundary line (4) cut by the rotary blade (17). Injecting means (22, 27, 28) for injecting the cleaning liquid (23, 29) in the direction, the injecting means (22, 27, 28) The cleaning liquid (23, 29) is caused to flow at high speed inside the one groove (21) by spraying the cleaning liquid (23, 29) toward the one groove (21), and is generated by the rotary blade (17). The cut scraps are removed from the groove (21) to the outside of the jig (6) by the cleaning liquid (23, 29) flowing at high speed inside the groove (21) , and the jetting means (22, 27). , 28) is provided horizontally or slightly downward along the direction in which the one groove (21) extends, and the cleaning liquid (23, 29) is supplied by the orientation of the ejection means (22, 27, 28) being horizontal. The cleaning liquid (directly spraying toward one groove (21) and flowing inside the one groove (21), or by slightly lowering the direction of the spraying means (22, 27, 28) ( 23, 29) is 1 That is flowing in the groove one groove after collide with the bottom surface (21) (21) of the features.

Moreover, the cutting device according to the present invention includes a jig (6) for fixing a workpiece (1) having a plurality of regions (5) provided in a lattice shape to a fixed surface, and a plurality of regions ( 5) a plurality of grooves (13, 14) provided so as to overlap the boundary line (4), and a rotary blade (17) for cutting the workpiece (1) along the boundary line (4). A cutting device for use in manufacturing a plurality of articles each corresponding to the region (5), which is provided on the side of the jig (6) and is already in the plurality of grooves (13, 14). Injecting means (24, 27, 28) for injecting the cleaning liquid (23) in the direction in which one groove (26) extends toward one groove (26) overlapping the boundary line (25) after being cut, The means (24, 27, 28) spray the cleaning liquid (23, 29) toward one groove (26). Therefore, the cleaning liquid (23, 29) is caused to flow at a high speed inside one groove (26), and the cutting waste generated by the rotary blade (17) flows at a high speed inside the one groove (26) ( 23, 29) is removed from one groove (26) to the outside of the jig (6), and the injection means (22, 27, 28) are horizontal or slightly along the direction in which the one groove (21) extends. The cleaning means (23, 29) is directly sprayed toward one groove (21) by the horizontal orientation of the spraying means (22, 27, 28), so that one groove (21) It is possible to cause the cleaning liquid (23, 29) to collide with the bottom surface of one groove (21) by flowing inside or by slightly lowering the direction of the injection means (22, 27, 28). Inside the groove (21) That is flowing, characterized.

  In the cutting device according to the present invention, in the above-described cutting device, the injection means (22, 24, 27, 28) includes one groove (21, 26) and is the same as one groove (21, 26). The cleaning liquid (23, 29) is sprayed toward the one or more grooves (14) extending in the direction, and at least one groove (26) of the one or more grooves (14) is cut into the line to be cut (20). The groove (26) overlaps the boundary line (25) cut before.

  Moreover, the cutting device according to the present invention is the above-described cutting device, wherein the injection means (28) includes one groove (21, 26) and a plurality of grooves extending in the same direction as the one groove (21, 26). The cleaning liquid (29) is jetted in a film shape toward (14).

  Moreover, the cutting device according to the present invention includes the cutting mechanism (15) having the rotary blade (17) in the above-described cutting device, and the injection means (22, 24) are provided separately from the cutting mechanism (15). The jetting means (22, 24) is characterized by moving in a manner crossing the plurality of grooves (14) on the side of the jig (6) in synchronization with the cutting mechanism (15).

In addition, the cutting method according to the present invention is a method of cutting a workpiece (1) having a plurality of regions (5) provided in a lattice shape to form a plurality of articles each corresponding to the region (5). A plurality of grooves (13, 14) and a plurality of boundary lines provided on the fixed surface of the jig (6) corresponding to the plurality of boundary lines (4) dividing the plurality of regions (5), respectively. (4) and the step of aligning each of the above, the step of fixing the workpiece (1) to the fixed surface, and the rotating blade (17) from one boundary line (4) among the plurality of boundary lines (4). Cutting the object to be cut (1) along the cut line (20) to be cut and the cutting means (22, 27, 28) and cutting line ( 20) in a direction in which one groove (21) extends from the side of the jig (6) toward one groove (21) overlapping with the groove (21). And a step of injecting a washing liquid (23 and 29), in the step of injecting a washing liquid (23 and 29), the orientation of the injection means so as to be horizontal in the direction extending one groove (21) Directly injecting the cleaning liquid (23, 29) toward one groove (21) to cause the cleaning liquid (23, 29) to flow at high speed inside the one groove (21), or the direction of the injection means The cleaning liquid (23, 29) is sprayed toward the one groove (21) so that the cleaning liquid (23, 29) is slightly downward along the direction in which the one groove (21) extends . After colliding with the bottom surface of the groove (21), the cutting waste generated by the rotary blade (17) is caused to flow from one groove (21) to the jig (6) by flowing at a high speed inside the groove (21). It is characterized by removing outside .

In addition, the cutting method according to the present invention is a method of cutting a workpiece (1) having a plurality of regions (5) provided in a lattice shape to form a plurality of articles each corresponding to the region (5). A plurality of grooves (13, 14) and a plurality of boundary lines provided on the fixed surface of the jig (6) corresponding to the plurality of boundary lines (4) dividing the plurality of regions (5), respectively. (4) and the step of aligning each of the above, the step of fixing the workpiece (1) to the fixed surface, and the rotating blade (17) from one boundary line (4) among the plurality of boundary lines (4). Cutting the workpiece (1) along the cut line (20) and the injection means (22, 27, 28), and the plurality of grooves (13, 14) have already been cut. One groove (2 from the side of the jig (6) toward one groove (26) that overlaps the boundary line (25) ) And a step of injecting a washing liquid (23) in the direction in which extends, in the step of injecting a washing liquid (23 and 29), so that the orientation of the injection means is horizontally along the direction extending one groove (21) The cleaning liquid (23, 29) is directly sprayed toward one groove (21) and the cleaning liquid (23, 29) is allowed to flow at a high speed inside the one groove (21), or spraying means The cleaning liquid (23, 29) is sprayed toward the one groove (21) so that the direction of the head is slightly downward along the direction in which the one groove (21) extends. After making it collide with the bottom face of one groove | channel (21), it is made to flow at high speed inside one groove | channel (21), and the cutting waste generated by the rotary blade (17) is removed from one groove | channel (21) to a jig | tool ( 6) Remove outside The features.

  Further, the cutting method according to the present invention includes one groove (21, 26) and the same direction as one groove (21, 26) in the above-described cutting method in the step of spraying the cleaning liquid (23, 29). The cleaning liquid (23, 29) is sprayed toward the extending one or more grooves (14), and at least one groove (26) of the one or more grooves (14) is more than the line to be cut (20). It is characterized by a groove (26) that overlaps a previously cut boundary line (25).

  Moreover, the cutting method according to the present invention includes one groove (21, 26) and extends in the same direction as the one groove (21, 26) in the step of spraying the cleaning liquid (29) in the above-described cutting method. The cleaning liquid (29) is sprayed in a film shape toward the plurality of grooves (14).

  In the cutting method according to the present invention, in the above-described cutting method, in the step of spraying the cleaning liquid (23), the spraying means (22, 24) is synchronized with the cutting mechanism (15) having the rotary blade (17). The jig (6) is moved laterally across the plurality of grooves (14).

  According to the present invention, the line to be cut is formed by one boundary line (4) provided on the side of the jig (6) and cut by the rotary blade (17) among the plurality of grooves (13, 14). The cleaning liquid in a direction in which the one groove (21, 26) extends toward one groove (21) overlapping with (20) or one groove (26) overlapping with the already cut boundary line (25). Injecting means (22, 24, 27, 28) for injecting (23, 29) is provided. Accordingly, one groove (21, 26) that overlaps one groove (21) that overlaps the line to be cut (20) or one groove (26) that overlaps the boundary line (25) that has already been cut. The cleaning liquid (23, 29) sprayed directly in the extending direction of the fluid flows in all the lengthwise portions of the one groove (21, 26). Accordingly, the liquid remaining in one groove (21, 26) is removed from the one groove (21, 26).

  Moreover, according to this invention, an injection means (22,24,27,28) is extended in the same direction with respect to one groove | channel (21) and the one groove | channel (21) which overlap with a to-be-cut line (20). The cleaning liquid (23, 29) is sprayed toward one or a plurality of grooves. In the one or the plurality of grooves (26), the boundary line (25) cut before the cutting line (20) cut at that time, that is, the boundary line that has already been cut. A groove (26) overlapping (25) is included. Accordingly, in addition to the groove (21) overlapping the line to be cut (20) cut at that time, the cleaning liquid (23, 29) is also applied to the groove (26) overlapping the previously cut boundary line (25). ) Can be injected directly. Therefore, in the groove (26) that overlaps the boundary line (25) that has been cut, when the workpiece (1) is cut at the boundary line (25) itself, another boundary line ( The cleaning liquid (23, 29) is directly sprayed at least twice from the time when the workpiece (1) is cut at the cutting line (20) which is 4). Accordingly, the effect of removing the liquid remaining in one groove (26) from the one groove (26) is increased.

  On the upper surface of the suction jig (6) to which the resin sealing body (1) as the object to be cut is adsorbed, boundaries between a plurality of grid-like regions (5) provided in the resin sealing body (1) A plurality of grooves (13, 14) each overlapping the line (4) are provided. When the rotary blade (17) cuts the resin sealing body (1) at the line to be cut (20), the cut groove (21) in which the peripheral end of the rotary blade (17) overlaps the line to be cut (20). ). From the washing water nozzle (22) provided in front of the suction jig (6), the cutting waste is discharged in the direction in which the cutting groove (21) extends toward the cutting groove (21). The cleaning liquid (23) is sprayed in the -Y direction that is the direction. Further, from another cleaning water nozzle (24) provided in front of the suction jig (6), a groove (26) overlapping the boundary line (25) cut immediately before the cutting line (20). The cleaning liquid (23) is jetted in the -Y direction.

  A cutting apparatus according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic perspective view showing a main part of the cutting apparatus according to the present embodiment. As shown in FIG. 1, the resin sealing body 1 is adsorbed and fixed to the adsorption jig 6 included in the cutting apparatus according to the present embodiment. The resin sealing body 1 is cut | disconnected by the rotary blade 17 in the to-be-cut line 20 which consists of the one boundary line 4 along a Y direction. The cut line 20 is overlapped with a cut portion groove 21 which is one of the grooves 14 extending in the Y direction when viewed in plan. The cut end groove 21 accommodates a peripheral end portion that is an outer edge of the rotary blade 17.

  A washing water nozzle 22 is provided integrally with the rotary blade 17 in the vicinity of the side (front in FIG. 1) of the suction jig 6. The cleaning water nozzle 22 is provided horizontally or slightly downward so that the central axis of the cleaning water nozzle 22 is substantially along the direction in which the cut groove 21 extends. The cleaning water nozzle 22 is provided in a direction (−Y direction) in which the generated cutting waste is discharged by the cutting water 19. Here, “the vicinity of the side” when referred to as “the vicinity of the side of the suction jig 6” means the vicinity of the four side surfaces (front, back, right side, left side) of the illustrated jig. Means.

  With these configurations, the cleaning water nozzle 22 directly injects the high-pressure cleaning water 23 toward the cutting portion groove 21 in the direction in which the cutting portion groove 21 extends and the cutting waste is discharged, thereby cleaning the high pressure. The water 23 can flow at a high speed inside the cut groove 21. Further, by providing the cleaning water nozzle 22 so that the central axis thereof is slightly downward, the cleaning water 23 is caused to flow at a high speed inside the cutting portion groove 21 after colliding with the bottom surface of the cutting portion groove 21. be able to.

  The cutting device shown in FIG. 1 cuts the resin sealing body 1 as follows. First, the rotary blade 17 is aligned in the X, Y, and Z directions with respect to the boundary line 4 along the Y direction to be cut.

  Next, the cutting mechanism 15 is moved in the + Y direction toward the resin sealing body 1 while spraying the cutting water 19 and the cleaning water 23. Thereby, the resin sealing body 1 is cut along the line 20 to be cut. Here, the cleaning water nozzle 22 directly supplies the high-pressure cleaning water 23 in the direction in which the cutting portion groove 21 extends toward the cutting portion groove 21 and in the direction in which cutting waste is discharged (−Y direction). Spray. Therefore, cutting waste generated by the rotary blade 17 is removed from the cutting portion groove 21 to the outside of the suction jig 6 by the cleaning water 23 that flows at high speed in the −Y direction inside the cutting portion groove 21.

  Next, after cutting the resin sealing body 1 at all the boundary lines 4 along the Y direction, the base 7 (see FIG. 7) to which the suction jig 6 is attached is rotated by 90 ° in the θ direction. Thereafter, the resin sealing body 1 is cut at each of the boundary lines 4 that are newly along the Y direction. Injecting the cleaning water 23 is the same as in the first cutting in the Y direction. Through the steps so far, the resin encapsulant 1 can be cut and separated into electronic components corresponding to the respective regions 5.

  According to this embodiment, high-pressure washing water is formed in the direction in which the cut groove 21 extends toward the cut groove 21 that overlaps the line 20 to be cut and in the direction (−Y direction) in which cutting waste is discharged. 23 is jetted directly. As a result, the cleaning water 23 sprayed directly toward the cutting portion groove 21 flows at a high speed in the direction in which cutting waste is discharged in all the lengthwise portions inside the cutting portion groove 21. Therefore, the liquid that remains inside the cutting portion groove 21 and contains cutting waste is removed from the inside of the cutting portion groove 21 to the outside of the suction jig 6.

  A cutting apparatus according to a second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a schematic perspective view illustrating a main part of the cutting device according to the present embodiment. As shown in FIG. 2, two washing water nozzles 22 and 24 are provided integrally with the cutting mechanism 15 in the vicinity of the side (front in FIG. 1) of the suction jig 6. Yes. The cleaning water nozzle 24 is provided toward the groove 26 that overlaps the boundary line 25 that is cut immediately before the cutting line 20 that is being cut at that time. The cleaning water nozzle 24 directly injects the high-pressure cleaning water 23 in the direction in which the groove 26 extends and in the direction (−Y direction) in which cutting waste is discharged.

  According to the present embodiment, the high-pressure cleaning water 23 is directly jetted into the cut groove 21 that overlaps the line 20 to be cut at that time. In addition, the cleaning water 23 is directly jetted also into the groove 26 that overlaps the boundary line 25 cut immediately before. Therefore, in the groove 26 that overlaps the boundary line 25 cut immediately before, the workpiece 1 is cut at the boundary line 25 itself, and immediately after that at the cutting line 20 that is the adjacent boundary line. The washing water 23 is directly jetted twice when the object 1 is cut. As a result, the groove 26 that overlaps the boundary line 25 that has been cut immediately before, in other words, the liquid that contains cutting waste remaining inside the groove 26 that overlaps the boundary line 25 that has already been cut is removed from the one groove 26. Increased effect.

  The cleaning water nozzle 24 is provided toward a groove that overlaps a boundary line (not limited to the boundary line that was cut immediately before) that is cut before the cutting line 20 that is being cut at that time. It only has to be. Further, two or more cleaning water nozzles 24 may be provided toward a groove that overlaps a boundary line that has been cut before the cutting target line 20 that is cut at that time. In addition, at least one of the two or more cleaning water nozzles 24 is provided toward the groove that overlaps the boundary line that was cut before the cutting line 20 that is cut at that time. Just do it. Further, the two or more cleaning water nozzles 24 may include a nozzle provided toward a groove overlapping a boundary line to be cut.

  In addition, the cleaning water 23 is sprayed toward the groove 26 that overlaps the boundary line 25 that has already been cut without spraying the cleaning water 23 toward the groove 21 that overlaps the line 20 to be cut at that time. It is good as well. In other words, only one or a plurality of cleaning water nozzles 24 may be provided. Further, the cleaning water 23 may be jetted toward the groove 26 that overlaps the boundary line 25 that has already been cut and the groove 14 that overlaps the boundary line 4 that has not been cut yet.

  In the first and second embodiments described so far, the cleaning water nozzles 22 and 24 are provided integrally with the cutting mechanism 15. Not only this but the nozzles 22 and 24 for washing water can also be provided separately from the cutting mechanism 15. In this case, the cleaning water nozzles 22 and 24 may be moved in the X direction in synchronization with the cutting mechanism 15 and may be moved in the Y direction asynchronously with the cutting mechanism 15.

  Moreover, you may employ | adopt the structure which can vary the pitch (distance between centers) between the nozzles 22 and 24 for several washing water. Thereby, even when the size of the electronic component, in other words, the interval between the boundary lines 4 is changed, there is an effect that it is not necessary to change the plurality of cleaning water nozzles 22 and 24 themselves.

  A third embodiment of the cutting device according to the present invention will be described with reference to FIG. FIG. 3 is a schematic perspective view illustrating a main part of the cutting device according to the present embodiment. As shown in FIG. 3, in the vicinity of the side (front in FIG. 1) of the suction jig 6, the long cleaning water is separated from the rotary blade 17 and extends along the X direction. A nozzle 27 is provided. The cleaning water nozzle 27 has a plurality of injection ports (not shown) respectively facing all the grooves 14 along the direction to be cut (Y direction). The plurality of jets of the cleaning water nozzle 27 have high pressure in all the grooves 14 in the direction in which the grooves 14 extend and in the direction (−Y direction) in which cutting waste is discharged. The washing water 23 is sprayed directly.

  According to the present embodiment, the high-pressure washing water 23 is directly jetted to all the grooves 14 at all times. Accordingly, in addition to the groove 21 that overlaps the line 20 to be cut at that time, the groove (including the groove 26) that overlaps the boundary line that was cut before that (including the boundary line 25 that was cut immediately before). The high-pressure washing water 23 is also directly sprayed into the other grooves 14 including Therefore, even after the workpiece 1 is cut at the boundary line 4 that overlaps all the grooves 14, the cleaning water 23 is directly jetted toward all the grooves 14. Therefore, in all the grooves 14, the effect of removing the liquid remaining inside and including cutting waste is increased.

  In addition, you may prepare the several nozzle 27 for washing water from which the pitch (center distance between adjacent injection ports) from which all the injection ports differ. Thereby, even when the size of the electronic component, in other words, the interval between the boundary lines 4 is changed, an effect is obtained that it is possible to cope with the problem by replacing the nozzle itself.

  A cutting apparatus according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 4 is a schematic perspective view illustrating a main part of the cutting device according to the present embodiment. As shown in FIG. 4, in the vicinity of the side (front in FIG. 1) of the suction jig 6, the long cleaning water is separated from the rotary blade 17 and extends along the X direction. A nozzle 28 is provided. The washing water nozzle 28 has one slit-like injection port extending along the X direction so as to face all the grooves 14 along the direction to be cut (Y direction). The cleaning water nozzle 28 extends in the X direction and the Y direction with respect to all the grooves 14 in the direction in which the grooves 14 extend and in the direction (−Y direction) in which cutting waste is discharged. The high-pressure washing water 29 is directly jetted in a film shape (curtain shape) having a small thickness in the Z direction.

  According to the present embodiment, since the cleaning water 29 has a film shape, the high-pressure cleaning water 29 is always directly sprayed to all the grooves 14. Therefore, the same effect as in the third embodiment can be obtained. In addition, according to the present embodiment, there is an effect that it is not necessary to change the nozzle itself even when the size of the electronic component, in other words, the interval between the boundary lines 4 is changed.

  In the description of the present embodiment, the cleaning water nozzle 28 has one slit-shaped injection port. Not limited to this, the ejection port of the cleaning water nozzle 28 may be a plurality of slit-shaped ejection ports extending along the X direction. A plurality of cleaning water nozzles 28 may be provided along the X direction. Moreover, it is good also as providing one or several slit-shaped injection nozzles, and injecting the washing water which those injection nozzles expand in fan shape.

  Further, in the first to fourth embodiments described so far, the conditions necessary for the cleaning waters 23 and 29 are that the cleaning waters 23 and 29 are cut scraps in all the lengthwise portions inside the cutting groove 21 and the groove 26. Is to flow at high speed in the direction of discharge. Therefore, the pressure, the spray speed, the cross-sectional shape, the cross-sectional area, and the like of the cleaning water 23 and 29 sprayed toward the cut groove 21 and the groove 26 may be determined so as to satisfy the above-described conditions. What is necessary is just to determine so that the distance of the injection port of the nozzles 22,24,27,28 for washing water and the opening of the cutting part groove | channel 21 and the groove | channel 26 may satisfy | fill the above-mentioned conditions.

  Embodiment 5 of a cutting device according to the present invention will be described with reference to FIG. FIG. 5 is a schematic perspective view showing a main part of the cutting apparatus according to the present embodiment. As shown in FIG. 5, a plurality of suction holes 30 are provided on the bottom surfaces of the grooves 13 and 14 in the suction jig 6. The plurality of suction holes 30 are sequentially connected to a suction source 32 such as a vacuum pump or a decompression tank through a suction pipe (not shown) provided in the suction jig 6 and the base 7 and a suction pipe 31. linked. And while the resin sealing body 1 is cut | disconnected by the rotary blade 17, the liquid collected in the inside of the groove | channels 13 and 14 is attracted | sucked as the waste_water | drain 33 by being attracted | sucked via the several suction hole 30. It is removed outside the jig 6.

  According to the present embodiment, the inside of the grooves 13 and 14 is sucked by the plurality of suction holes 30 provided on the bottom surfaces of the plurality of grooves 13 and 14 and connected to the suction source 32. As a result, the liquid remaining inside the plurality of grooves 13 and 14 and containing cutting waste is sucked and removed outside the adsorption jig 6 and thus outside the cutting device. Therefore, the inside of the plurality of grooves 13 and 14 is cleaned.

  By the way, the location and the number of the suction holes 30 provided in the grooves 13 and 14 are not particularly limited and can be arbitrarily determined. However, these locations are preferably the intersections of the grooves 13, 14 as shown in the figure. This enhances the effect of removing the accumulated liquid to the outside of the cutting device at the intersection where the liquid containing cutting waste tends to accumulate inside the plurality of grooves 13 and 14.

  A sixth embodiment of the cutting device according to the present invention will be described with reference to FIG. FIG. 6 is a schematic perspective view illustrating a main part of the cutting device according to the present embodiment. As shown in FIG. 6, a plurality of suction holes 30 and a plurality of supply holes 34 are provided adjacent to each other on the bottom surfaces of the grooves 13 and 14 in the suction jig 6. In FIG. 6, the suction holes 30 are indicated by “X” inside the ellipse, and the supply holes 34 are indicated by “·” inside the ellipse. The plurality of supply holes 34 are connected to a cleaning water supply source 36 via a supply pipe (not shown) provided in the suction jig 6 and the base 7 and a supply pipe 35 in order. .

  While the resin sealing body 1 is being cut by the rotary blade 17, the plurality of supply holes 34 supply the cleaning water 37 into the grooves 13 and 14. Then, the cleaning water 37 supplied from the plurality of supply holes 34 is sucked through the plurality of suction holes 30 to be removed as the drainage 38 to the outside of the suction jig 6 and thus to the outside of the cutting device. . Therefore, the liquid accumulated in the grooves 13 and 14 is mixed with the drainage 38 and removed to the outside of the adsorption jig 6.

  According to the present embodiment, the cleaning water 37 supplied from the plurality of supply holes 34 is sucked through the plurality of suction holes 30 and removed as the drainage 38 to the outside of the suction jig 6. As a result, the liquid remaining in the plurality of grooves 13 and 14 and containing cutting waste is sucked and mixed with the drainage 38 and removed outside the suction jig 6 and thus outside the cutting device. Therefore, the inside of the plurality of grooves 13 and 14 is effectively cleaned.

  By the way, inside the grooves 13 and 14, a plurality of suction holes 30 and a plurality of supply holes 34 are provided adjacent to each other. The location and number of the plurality of suction holes 30 and the plurality of supply holes 34 are not particularly limited and can be arbitrarily determined. However, these locations are preferably the intersections of the grooves 13, 14 as shown in the figure. This enhances the effect of removing the accumulated liquid to the outside of the cutting device at the intersection where the liquid containing cutting waste tends to accumulate inside the plurality of grooves 13 and 14.

  In each of the above-described embodiments, the resin sealing body 1 as an object to be cut is obtained when the resin sealing body 1 is cut to manufacture an optical element (optical electronic component) such as an LED package or a CCD. The resin sealing body containing translucent resin may be sufficient. Further, the object to be cut may be a resin molded body in the case of manufacturing an optical article such as an optical lens, an optical communication component, or a light guide plate by cutting a resin molded body containing a translucent resin. In particular, in the case of manufacturing an optical element or an optical article, the attachment of cutting waste causes a decrease in yield. And according to this invention, the yield at the time of manufacturing an optical element or an optical system article | item can be improved by preventing that a cutting waste adheres to an optical element or an optical system article | item.

  In addition to the resin sealing body, the object to be cut may be a wafer such as a silicon wafer or a compound semiconductor wafer, or a substrate such as a glass substrate or a ceramic substrate. In other words, the present invention can be applied to the case where it is desired to avoid the attachment of cutting waste when the workpiece is cut into pieces.

  Further, the nozzle for cleaning water may be made vertically long so that the nozzle for cutting water and the nozzle for cleaning water are made common. In this case, the cutting water / cleaning water combined nozzle jets water toward both the cutting place and the cut groove. Moreover, the nozzle for cutting water which has the same shape as the nozzle for washing water can also be provided along with the Z direction with respect to the nozzle for washing water.

  Moreover, the Example using the one rotary blade 17 was demonstrated. Not only this but the cutting device may be provided with a plurality of rotary blades 17.

  In addition, the “cutting water” in the description so far is a general term for liquids supplied for the purpose of reducing machining resistance (lubrication) and cooling and removing chips generated by cutting, that is, cutting fluid. “Washing water” is a generic term for liquids supplied mainly for the purpose of removing chips generated by cutting, that is, cleaning liquids. For both “cutting water” and “washing water”, city water or pure water is usually used. Further, as “cutting water” and “washing water”, a liquid obtained by adding an additive (detergent, lubricant, etc.) to city water or pure water may be used.

  Moreover, the resin sealing body 1 which is a to-be-cut object was adsorbed and fixed using the adsorption jig 6. However, the present invention is not limited to this, and the object to be cut may be fixed using a clamp or the like depending on the size and shape of the object to be cut or an article after being singulated.

  Moreover, in each Example mentioned above, "full cut" which cut | disconnects a to-be-cut object completely was demonstrated. However, the present invention is not limited to this, and the present invention can also be applied to so-called “half cut” in which a part to be cut is cut (partially cut) while leaving a part in the thickness direction of the part to be cut. Even in the case of half-cutting, the cutting water 19 including cutting waste may enter the grooves 13 and 14 of the suction jig 6 (see FIG. 1), so the present invention is effective.

  In addition, the present invention is not limited to the above-described embodiments, and may be arbitrarily combined, changed, or selected as necessary without departing from the spirit of the present invention. It can be done.

It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 1. FIG. It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 2. FIG. It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 3. FIG. It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 4. FIG. It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 5. FIG. It is a schematic perspective view which shows the principal part of the cutting device which concerns on Example 6. FIG. It is a schematic perspective view explaining the cutting method of the conventional to-be-cut object.

1 Resin sealing body (object to be cut)
2 Substrate 3 Cured resin 4 Boundary 5 Area 6 Suction jig (jig)
7 Base 8 Protrusion 9 Concave 10 Suction Hole 11 Suction Pipe 12 Suction Source 13, 14, 26 Groove 15 Cutting Mechanism 16 Rotating Shaft 17 Rotating Blade 18 Cutting Water Nozzle (Discharge Unit)
19 Cutting water 20 Line to be cut 21 Cut groove 22, 24, 27, 28 Nozzle for cleaning water 23, 29, 37 Cleaning water (cleaning liquid)
25 Borderline cut just before (boundary line that has already been cut)
30 Suction hole 31 Suction pipe 32 Suction source 33, 38 Drainage 34 Supply hole 35 Supply pipe 36 Supply source

Claims (10)

A jig for fixing a workpiece having a plurality of regions provided in a lattice shape to a fixed surface, a plurality of grooves provided so as to overlap boundary lines of the plurality of regions on the fixed surface, and the boundary A cutting device for use in manufacturing a plurality of articles each corresponding to the region, comprising a rotary blade that cuts the workpiece along a line,
A cleaning liquid provided in a side of the jig and extending in a direction in which the one groove extends toward one groove that overlaps a cutting line that is formed by one boundary line cut by the rotary blade among the plurality of grooves. An injection means for injecting
The spraying means causes the cleaning liquid to flow at high speed inside the one groove by spraying the cleaning liquid toward the one groove,
Cutting waste generated by the rotary blade is removed from the one groove to the outside of the jig by the cleaning liquid flowing at high speed inside the one groove ,
The ejection means is provided horizontally or slightly downward along the direction in which the one groove extends,
When the direction of the jetting means is horizontal, the cleaning liquid is jetted directly toward the one groove to flow inside the one groove, or the direction of the jetting means is slightly downward. Thus, the cleaning liquid is caused to flow inside the one groove after colliding with the bottom surface of the one groove . A jig for fixing a workpiece having a plurality of regions provided in a lattice shape to a fixed surface, a plurality of grooves provided so as to overlap boundary lines of the plurality of regions on the fixed surface, and the boundary A cutting device for use in manufacturing a plurality of articles each corresponding to the region, comprising a rotary blade that cuts the workpiece along a line,
An ejection unit that is provided on a side of the jig and injects a cleaning liquid in a direction in which the one groove extends toward one groove that overlaps a boundary line that has already been cut among the plurality of grooves;
The spraying means causes the cleaning liquid to flow at high speed inside the one groove by spraying the cleaning liquid toward the one groove,
Cutting waste generated by the rotary blade is removed from the one groove to the outside of the jig by the cleaning liquid flowing at high speed inside the one groove ,
The ejection means is provided horizontally or slightly downward along the direction in which the one groove extends,
When the direction of the jetting means is horizontal, the cleaning liquid is jetted directly toward the one groove to flow inside the one groove, or the direction of the jetting means is slightly downward. Thus, the cleaning liquid is caused to flow inside the one groove after colliding with the bottom surface of the one groove . The cutting device according to claim 1 or 2,
The spraying means includes the one groove and sprays the cleaning liquid toward one or a plurality of grooves extending in the same direction as the one groove.
At least one groove among the one or more grooves is a groove that overlaps a boundary line cut before the cutting line. In the cutting device according to any one of claims 1 to 3 ,
The said spraying means sprays the said washing | cleaning liquid in a film | membrane shape toward the several groove | channel extended in the same direction as the said 1 groove | channel while containing the said 1 groove | channel. In the cutting device according to any one of claims 1 to 4 ,
A cutting mechanism having the rotary blade;
The injection means is provided separately from the cutting mechanism,
The cutting device is characterized in that the injection means moves so as to cross the plurality of grooves on the side of the jig in synchronization with the cutting mechanism. A cutting method of forming a plurality of articles each corresponding to the region by cutting a workpiece having a plurality of regions provided in a lattice shape,
Aligning the plurality of grooves with the plurality of grooves provided on the fixing surface of the jig corresponding to the plurality of boundary lines that divide the plurality of regions, respectively.
Fixing the workpiece to the fixing surface;
Cutting the workpiece along a cutting line consisting of one boundary line among the plurality of boundary lines by a rotary blade;
Spraying the cleaning liquid in a direction in which the one groove extends from the side of the jig toward one groove overlapping the line to be cut among the plurality of grooves using an injection unit,
In the step of spraying the cleaning liquid, the cleaning liquid is directly sprayed toward the one groove so that the direction of the spraying unit is horizontal along the direction in which the one groove extends, and the cleaning liquid is sprayed into the one groove. The cleaning liquid is sprayed toward the one groove by flowing at a high speed inside the groove, or in such a manner that the direction of the ejection means is slightly downward along the direction in which the one groove extends. By causing the cleaning liquid to collide with the bottom surface of the one groove and then flowing at a high speed inside the one groove, cutting waste generated by the rotary blade is removed from the one groove to the outside of the jig. The cutting method characterized by the above-mentioned. A cutting method of forming a plurality of articles each corresponding to the region by cutting a workpiece having a plurality of regions provided in a lattice shape,
Aligning the plurality of grooves with the plurality of grooves provided on the fixing surface of the jig corresponding to the plurality of boundary lines that divide the plurality of regions, respectively.
Fixing the workpiece to the fixing surface;
Cutting the workpiece along a cutting line consisting of one boundary line among the plurality of boundary lines by a rotary blade;
A step of spraying a cleaning liquid in a direction in which the one groove extends from a side of the jig toward one groove that overlaps a boundary line that has already been cut among the plurality of grooves using an injection unit; With
In the step of spraying the cleaning liquid, the cleaning liquid is directly sprayed toward the one groove so that the direction of the spraying unit is horizontal along the direction in which the one groove extends, and the cleaning liquid is sprayed into the one groove. The cleaning liquid is sprayed toward the one groove by flowing at a high speed inside the groove, or in such a manner that the direction of the ejection means is slightly downward along the direction in which the one groove extends. By causing the cleaning liquid to collide with the bottom surface of the one groove and then flowing at a high speed inside the one groove, cutting waste generated by the rotary blade is removed from the one groove to the outside of the jig. The cutting method characterized by the above-mentioned. The cutting method according to claim 6 or 7 ,
In the step of spraying the cleaning liquid, the cleaning liquid is sprayed toward one or a plurality of grooves including the one groove and extending in the same direction as the one groove,
The cutting method according to claim 1, wherein at least one of the one or more grooves is a groove that overlaps a boundary line cut before the line to be cut. In the cutting method according to any one of claims 6 to 8 ,
In the step of spraying the cleaning liquid, the cleaning liquid is sprayed in a film shape toward a plurality of grooves including the one groove and extending in the same direction as the one groove. In the cutting method according to any one of claims 6 to 9 ,
In the step of injecting the cleaning liquid, the injection means is moved so as to cross the plurality of grooves on the side of the jig in synchronization with a cutting mechanism having the rotary blade.

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