WO2012114938A1 - ニオブ酸アルカリ系圧電材料及びニオブ酸アルカリ系圧電材料の製造方法 - Google Patents
ニオブ酸アルカリ系圧電材料及びニオブ酸アルカリ系圧電材料の製造方法 Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 157
- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 239000000203 mixture Substances 0.000 claims description 40
- 239000003513 alkali Substances 0.000 claims description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 17
- 238000010304 firing Methods 0.000 claims description 16
- 239000002994 raw material Substances 0.000 claims description 11
- 229910052788 barium Inorganic materials 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 2
- 229910010252 TiO3 Inorganic materials 0.000 abstract 1
- 239000002585 base Substances 0.000 description 27
- 239000000654 additive Substances 0.000 description 12
- 230000007423 decrease Effects 0.000 description 10
- 230000000996 additive effect Effects 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000012790 confirmation Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000004455 differential thermal analysis Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000002411 thermogravimetry Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000007630 basic procedure Methods 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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Definitions
- the method for manufacturing an alkali niobate-based piezoelectric material is characterized by comprising:
- Ba n TiO 3 is a lead-free piezoelectric material other than KNN constituting a part of the composition of the base metal.
- the baking temperature for sintering Ba n TiO 3 alone is as high as about 1300 ° C.
- the alkali component volatilizes and dissolves when the base material is sintered at a high temperature of 1300 ° C. If Ba n TiO 3 is used as a base material or a part of the composition of the base material, the firing temperature must be lower than 1300 ° C.
- the powder obtained by calcination is wet-mixed for 24 hours, and an aqueous PVA solution is added to the mixture as a binder, mixed, and pulverized to granulate the powder with an appropriate particle size (s4). . Further, the granulated powder is formed into a desired shape (s5). Then, the molded product is placed at a predetermined temperature (for example, about 300 ° C. to 500 ° C.) to remove the binder, and then fired in the atmosphere at a temperature of 900 ° C. to 1200 ° C. for 1 h (s7). obtain.
- a predetermined temperature for example, about 300 ° C. to 500 ° C.
- the optimal numerical range is obtained by complementing the discretely set values of x, y, a to d, and n.
- x No. 1-No.
- an approximate curve indicating the relationship between x and ⁇ r and Qm is obtained.
- optimum numerical ranges for y, a to d, and n were obtained.
- the optimal numerical range of y No. 3 and no. 20-No. What is necessary is just to obtain
- the optimum numerical range is obtained from an approximate curve showing the relationship between y and ⁇ r and Qm.
- FIG. 3 is a graph 101 showing the correspondence between y, ⁇ r, Qm, and Kp. From the approximate curves shown in FIG. 3 (101a to 101c, the conditions for surely ⁇ r ⁇ 800, Qm ⁇ 800, Kp ⁇ 25 were obtained. As a result, 1.0 ⁇ y ⁇ 3.0 was obtained. .
- Table 2 shows the measured values of ⁇ r, Kp (%), and Qm (%) of the sample prepared by the manufacturing method of the first example, and the manufacturing method of the second example.
- the characteristic increase / decrease rate ( ⁇ r, ⁇ K, ⁇ Qm) of each piezoelectric characteristic ( ⁇ r, K, Qm) for the prepared sample of the same composition is shown.
- “*” is given to compositions that are out of the range defined in the prior invention 3.
- FIGS. 10A and 10B are electron micrographs of a piezoelectric material A having a certain composition.
- FIGS. 10A and 10B respectively show the piezoelectric material A having a certain composition and the first material prepared by the method of the first embodiment.
- 2 shows a piezoelectric material A having the same composition manufactured by the manufacturing method of Example 2. From the photograph shown in FIG. 10, in the piezoelectric material A produced by the production method of the first embodiment, CuO (white spots in the photograph) is localized, whereas the production method of the second embodiment. It can be seen that CuO is uniformly dispersed in the piezoelectric material A manufactured in (1). As shown in FIG.
- Table 4 shows the measured values of various piezoelectric properties ( ⁇ r, Kp, Qm) of the piezoelectric material manufactured by the manufacturing method of the first embodiment and the manufacturing method of the confirmation experiment for various piezoelectric materials using KNN as a base material.
- the characteristic increase / decrease rate ( ⁇ r, ⁇ K, ⁇ Qm) of each piezoelectric characteristic ( ⁇ r, K, Qm) of the manufactured piezoelectric material having the same composition is shown. From the results shown in Table 4, it was confirmed that the piezoelectric characteristics of the piezoelectric material using KNN as a base material were improved by firing in an oxygen atmosphere.
- the piezoelectric material using KNN as a base material can be provided at a lower cost than the piezoelectric material A described above. And in the device incorporating the piezoelectric element, if the price is prioritized over the performance, the performance may be more important, so according to the application of the device incorporating the piezoelectric element and the requirements for the device, As the piezoelectric material constituting the piezoelectric element, either KNN or the piezoelectric material A may be employed.
Abstract
Description
前記圧電材料となる化合物の原料と溶媒とを混合することと、
前記化合物の原料と前記溶媒との混合物を、焼結温度より低い所定の温度で仮焼成することと、
前記仮焼成した前記混合物にバインダーを添加したものを所定の形状に成形することと、
前記成形することにより得た成形物を酸素雰囲気中で焼結させるよう焼成することと、
を含むことを特徴とするニオブ酸アルカリ系圧電材料の製造方法としている。
上記先発明2,3には、一般式(K1-aNaa)1-bLib(Nb1-c-dTacSbd)O3で記載される化合物(以下、母材)にガラスとともに銅(Cu)酸化物を添加することで、より優れた特性を備えた圧電材料も含まれている。しかし、母材にCu酸化物を添加した場合でも、圧電性の起源となる物質がこの母材のみの圧電材料では、圧電特性における機械的品質係数Qmと比誘電率εrをともに向上させることが難しいことが判明した。そこで、母材や、母材の組成の一部を構成するKNN以外の非鉛圧電材料であるBanTiO3を用いることも考えた。しかし、BanTiO3は、単体で焼結させるための焼成温度が1300℃程度と高温であるのに対し、母材を1300℃の高温で焼結させるとアルカリ成分が揮発・溶解するので、もしBanTiO3を母材や、母材の組成の一部の構成として使用すると、焼成温度は1300℃よりも低くせざるを得ない。そうなれば、自ずと相対密度が低下して緻密な構造にならず、圧電特性の低下や、機械的な強度不足から加工する際に破損するという問題がある。また、BanTiO3はキュリー温度が低いため、BanTiO3を母材と同量程度含ませてしまうとキュリー温度が低下して、問題になる可能性がある。
本発明の圧電材料は、組成式が{(K1-aNaa)1-bLib}(Nb1-c-dTacSbd)O3+xmol%BanTiO3+ymol%CuOで表され、かつ、0≦a≦0.9、0≦b≦0.3、0<c≦0.5、0≦d≦0.1、0.5≦x≦7.0、0.9≦n≦1.2、0.1≦y≦8.0となる圧電材料である。この圧電材料(以下、圧電材料A)は、各種圧電特性がバランス良く優れている、ということが確認されている。
本発明の実施例における圧電材料Aは、圧電性の発現起源となる母材とBanTiO3の原料に添加剤を加えた混合物を焼結することで得られる。そこで、本発明の実施例に係る圧電材料Aを含め、母材の組成比(上記一般式におけるa~dの値)、BanTiO3の量(xの値)、その他の添加物の添加量など、作製条件が異なる複数の圧電材料をサンプルとして作製した。なお、添加剤には、先発明2や3で実績のあるCuOを採用することにした。また、BanTiO3における上記焼結温度やキュリー温度の問題を鑑みると、圧電材料にBanTiO3を母材と同量程度に含ませてしまうと、機械的な強度が不足して、加工に際して圧電材料が破損するという問題や、キュリー温度が低下するという問題が懸念される。したがって、母材を主体とし、BanTiO3は、CuOと同様に、母材の特性を向上させるための添加剤(助剤)として含ませることが望ましい。
図1(A)に示した第1の実施例に係る製造方法では、まず、圧電材料Aの原料を所定量秤量して配合し(s1)、ボールミル中にその原料と溶媒となるアルコール(エタノールなど)を入れて湿式混合する(s2)。それによって、圧電材料Aの原料が混合されるとともに粉体状に粉砕される。そして、この混合物を大気中で950℃の温度で1時間(h)~10h仮焼成する(s3)。
一方、図1(B)に示した第2の実施例に係る製造方法では、焼成工程(s17)が、酸素雰囲気中で焼成している点が第1の実施例の製造方法と異なる。第1の実施例の製造方法では、焼成工程(s7)を大気中で行う。焼成工程(s17)以外の他の工程(s11)~(s16)、(s18)~(s20)については、第1の実施例の製造方法における工程(s1)~(s6)、(s8)~(s10)と同様である。そして、第1の実施例、および第2の実施例の各製造方法で組成(a~d,x,y,nの各値)を変えた各種圧電材料Aをサンプルとして作成した。なお、a~d,x,y,nの各値が先発明3にて規定した範囲から外れているサンプルも同時に作製した。
本発明の基本となる技術思想は、圧電物質である母材にCuOとBanTiO3の双方を助剤として添加することで、双方の欠点を補完し、各種圧電特性を総合的に向上させることにある。しかしながら、双方の含有割合やBanTiO3におけるnの値を注意深く設定しないと、双方の欠点が補完されないばかりか、双方の利点を相殺してしまう可能性もある。もちろん、母材の組成についても注意を払う必要がある。そこで、圧電材料の組成を一般式{(K1-aNaa)1-bLib}(Nb1-c-dTacSbd)O3+xmol%BanTiO3+ymol%CuOとして、当該圧電材料中のa~d、x、y、nの各値が異なる30種類のサンプル(No.1~No.30)を作製し、それぞれのサンプルにおける圧電特性を測定した。
表1に示したNo.1~No.29のサンプルについて、第1の実施例と第2の実施例のそれぞれの製造方法によって、組成が異なる合計58種類のサンプルを作製した。そして、作製した各サンプルを大気中で24h放置し、その後、各サンプルについて誘電率ε33 Tを測定するとともに、比誘電率εrをεr=ε33 T/ε0の式によって求め、さらに、電気機械結合係数Kp(%)、および機械的品質係数Qm(%)を測定した。そして、εr≧500,Kp≧25,Qm≧500を合格基準として合否を判定した。
表2に示した各サンプルの圧電特性について、さらに検討すると、εr≧800、Kp≧25、Qm≧800という、極めて優れた圧電特性を備えたサンプルが存在する(No.3,No.22)ことが確認できる。この程度の圧電特性であれば、超音波モーターなど、従来ではPZT以外では適用できなかった圧電応用機器への適用が可能となる。そこで、εr≧800、Kp≧25、Qm≧800となるx、y、a~d、nの条件(最適数値範囲)を求めることとした。
Δεr={(εr2-εr1)/εr1}×100
の式によって求められる数値であり、第1の実施例の製造方法に対して特性が劣化している場合は、εr2-εr1<0であるので、特性増減率は負の値となる。そして、表2に示した結果より、第2の実施例の製造方法で作製したサンプルは、第1の実施例の製造方法で作製したサンプルに対し、全ての組成で、全ての圧電特性が向上していることが分かる。
上記表2に示した結果より、酸素雰囲気中で焼成することで、圧電材料Aの特性を向上させることが確認できた。この特性向上のメカニズムとしては、まず、結晶化がより促進されている、ということが考えられる。そこで、図1における成形工程(s5,s15)後の圧電材料Aの原材料を所定の速度で昇温していきながら焼成し、その焼成過程で周知のTG/DTA(Thermo Gravimetry/Differential Thermal Analysis)を行い、当初の質量からの変化率重量変化率(%)と示差熱(基準物質と圧電材料Aとの温度差:℃)とを同時に測定した。図9に、当該TG/DTA分析の結果を示した。図中では、酸素雰囲気中での焼成したときの特性を示すグラフを実線で示し、大気中で焼成したときの特性を示すグラフ曲線を点線で示した。なお、焼成温度は、約1100℃としている。
上述したように、酸素雰囲気中で焼成した圧電材料Aは、大気中で焼成した圧電材料Aよりも圧電特性が優れている、ということが分かった。そこで、酸素雰囲気中で焼成することによる特性向上が他のニオブ酸アルカリ系圧電材料にも当てはまるか否かを確認することにした。そして、確認実験例に係る圧電材料の製造方法として、代表的なニオブ酸アルカリ系圧電材料であるKNNを母材とした各種圧電材料を酸素雰囲気中で焼成する例を挙げる。なお、確認実験例における製造方法は、原料が異なるだけで、製造手順自体は、図1(B)に示した手順と同様である。
100~106 圧電特性グラフ、
201,202 示差熱特性曲線、211,212 重量増加率曲線、
s1,s11 原料配合工程、s2,s12 混合粉砕工程、
s3,s13 仮焼成工程、s7,s17 焼成工程
Claims (5)
- 一般式{(K1-aNaa)1-bLib}(Nb1-c-dTacSbd)O3+xmol%BanTiO3+ymol%CuOで表されるニオブ酸アルカリ系圧電材料であって、0≦a≦0.9、0≦b≦0.3、0<c≦0.5、0≦d≦0.1、0.5≦x<10.0、0.1≦y≦8.0、0.9≦n≦1.2、であることを特徴とするニオブ酸アルカリ系圧電材料。
- 請求項1において、電気機械結合係数Kp、比誘電率εr、機械品質係数Qmがそれぞれ、Kp≧25%、εr≧500、Qm≧500であることを特徴とするニオブ酸アルカリ系圧電材料。
- 請求項2において、前記x、y、a、b、c、d、nが、それぞれ、2.0≦x≦4.0、1.0≦y≦3.0、0.35≦a≦0.65、0.03≦b≦0.15、0.05≦c≦0.25、0≦d≦0.01または0.03≦d≦0.06、0.95≦n≦1.05であって、前記εrと前記Qmがそれぞれ、εr≧800、Qm≧800であることを特徴とするニオブ酸アルカリ系圧電材料。
- 一般式{(K1-aNaa)1-bLib}(Nb1-c-dTacSbd)O3+xmol%BanTiO3+ymol%CuOで表され、0≦a≦0.9、0≦b≦0.3、0<c≦0.5、0≦d≦0.1、0.5≦x<10.0、0.1≦y≦8.0、0.9≦n≦1.2、であるニオブ酸アルカリ系圧電材料の製造方法であって、
前記圧電材料となる化合物の原料と溶媒とを混合することと、
前記化合物の原料と前記溶媒との混合物を、焼結温度より低い所定の温度で仮焼成することと、
前記仮焼成した前記混合物にバインダーを添加したものを所定の形状に成形することと、
前記成形することにより得た成形物を酸素雰囲気中で焼結させるよう焼成することと、
を含むことを特徴とするニオブ酸アルカリ系圧電材料の製造方法。 - 請求項4において、前記圧電材料は、一般式KxNa(1-x)NbO3で表される化合物を含んでいることを特徴とするニオブ酸アルカリ系圧電材料の製造方法。
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