WO2012105367A1 - Soiウェーハの製造方法 - Google Patents
Soiウェーハの製造方法 Download PDFInfo
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- WO2012105367A1 WO2012105367A1 PCT/JP2012/051412 JP2012051412W WO2012105367A1 WO 2012105367 A1 WO2012105367 A1 WO 2012105367A1 JP 2012051412 W JP2012051412 W JP 2012051412W WO 2012105367 A1 WO2012105367 A1 WO 2012105367A1
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- crystal silicon
- single crystal
- silicon layer
- substrate
- silicon
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- 238000000034 method Methods 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 229910052594 sapphire Inorganic materials 0.000 claims description 13
- 239000010980 sapphire Substances 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 25
- 239000010410 layer Substances 0.000 description 39
- 235000012431 wafers Nutrition 0.000 description 35
- 230000000052 comparative effect Effects 0.000 description 14
- 238000005498 polishing Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 10
- 239000010408 film Substances 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 5
- 238000007654 immersion Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- -1 oxygen ions Chemical class 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
Definitions
- the present invention relates to a method for manufacturing an SOI wafer.
- Silicon on insulator (SOI) wafers have been widely used to reduce parasitic capacitance and measure device speed.
- SOI wafers a wafer having a handle wafer made of an insulating transparent wafer called Silicon on Quartz (SOQ) or Silicon on Sapphire (SOS) is attracting attention.
- SOQ is expected to be applied to optoelectronics utilizing the high transparency of quartz, or to high frequency devices utilizing low dielectric loss. Since SOS has a handle wafer made of sapphire, it has high thermal conductivity that cannot be obtained with quartz in addition to high transparency and low dielectric loss, so it is expected to be applied to high-frequency devices that generate heat. .
- the present invention has been made in view of the above situation, and an object of the present invention is to provide a method for reducing defects generated on the surface and inside of a single crystal silicon layer by a bonding method at a relatively low temperature in a short time.
- the method for producing a bonded substrate according to the present invention includes a step of obtaining a bonded substrate by forming a single crystal silicon layer by a bonding method on a handle substrate selected from materials having a heat-resistant temperature of 800 ° C. or higher, The method includes a step of depositing amorphous silicon on a single crystal silicon layer of the bonded substrate and a step of applying a heat treatment at 800 ° C. or higher.
- a bonded substrate of the present invention in particular, in a bonded substrate made of a material having a coefficient of thermal expansion greatly different from that of silicon such as SOQ and SOS, defects generated on the surface and inside of the single crystal silicon layer by the bonding method. Can be reduced by a relatively low-temperature and short-time treatment.
- bonded substrates 10 each having a single crystal silicon layer 5 formed on a handle substrate 3 selected from materials having a heat resistant temperature of 800 ° C. or higher, such as sapphire and quartz, are prepared by a bonding method (step a).
- the method for manufacturing the bonded substrate is not particularly limited. For example, after bonding the handle substrate and the single crystal silicon substrate, (1) heat treatment is performed at about 500 ° C. in an inert gas atmosphere, and the crystal rearrangement effect is achieved.
- a material having a heat resistant temperature of 800 ° C. or higher refers to a material that is not greatly deformed even after heat treatment at 800 ° C.
- An amorphous material such as quartz can be defined by a glass transition temperature or the like (the glass transition temperature of quartz is around 1050 ° C.).
- a crystalline material such as sapphire can be replaced with a melting point (the melting point of sapphire is around 2050 ° C.).
- the handle substrate 3 may be transparent or opaque in the visible light region (400 nm to 700 nm).
- silicon, silicon with an oxide film, silicon carbide, and aluminum nitride may be used. Can be adopted.
- a preferable layer thickness of the single crystal silicon layer 5 it can be set to, for example, 20 nm to 500 nm in consideration of a polishing allowance when the polishing process described later is performed, and 50 nm to 500 nm when the polishing process is not performed. It can be 600 nm.
- the bonding method since a damaged layer of about 150 nm remains on the surface of the single crystal silicon layer 5, it is preferable to perform CMP polishing before laminating an amorphous silicon layer 7 described later. Removing all damaged layers by polishing increases the film thickness variation, so in the actual process, most of them are removed by chemical etching, and then the surface is mirror-finished by mirror finish polishing. The method is reasonable. It is important to remove the damage layer on the surface as much as possible, and it has been empirically found that the effectiveness of the present invention is not influenced by the damage layer removal method (CMP, etching, or a combination of both methods).
- CMP damage layer removal method
- CMP polishing is performed in order to make the surface a mirror surface, polishing of 30 nm or more is generally performed.
- cleaning by a wet process such as RCA cleaning or spin cleaning and / or cleaning by a dry process such as UV / ozone cleaning or HF vapor cleaning may be performed.
- an amorphous silicon 7 is deposited on the single crystal silicon layer 5 (step b).
- the method for depositing the amorphous silicon 7 is not particularly limited.
- the LPCVD method is considered advantageous in terms of cost because it can process 100 to 200 wafers at a time, but there is no problem even if a sputtering method (PVD) or PECVD method is adopted.
- PVD sputtering method
- PECVD method PECVD method
- the temperature condition during the deposition is preferably 600 ° C. or lower so that the polysilicon layer is not formed.
- a more preferred upper temperature limit is 580 ° C.
- a preferred lower temperature limit is 540 ° C.
- the thickness of the amorphous silicon to be deposited is preferably in the range of 20 nm to 500 nm.
- the gas type to be used is not particularly limited.
- SiLP 4 may be used in the LPCVD method or the PECVD method.
- a silicon target can be used.
- the deposition pressure depends on the gas type, but is about 200 mTorr in the case of LPCVD.
- the amorphous silicon layer 7 is crystallized to become the single crystal silicon covering layer 9 together with the single crystal silicon layer 5 (step c).
- defects such as pits and microcracks existing on the surface of the single crystal silicon layer 5 are filled (recovered), and the number of defects can be reduced.
- a preferable upper limit of the heat treatment temperature is determined in consideration of the heat resistance of the handle substrate, but may be less than about 1200 ° C. when the handle substrate is quartz and less than about 1300 ° C. when sapphire is used.
- the heat treatment time can be set to 0.5 to 6 hours, for example, from the viewpoint of suppressing migration of atoms contained in the handle substrate.
- the single crystal silicon layer 5 and the amorphous silicon layer 7 which are the base are clearly separated, so that the crystallization of the amorphous silicon layer 7 can be easily performed according to the orientation of the single crystal silicon layer 5 which is the base.
- a high quality single crystal silicon coating layer 9 can be obtained at a relatively low temperature (800 ° C. to 1200 ° C.).
- Comparative Example 2 An SOS substrate manufactured by a bonding method was prepared.
- the thickness of the single crystal silicon layer was 100 nm.
- the thickness of the BOX layer was 200 nm.
- the wafer has a diameter of 150 mm and a thickness of 600 ⁇ m. This wafer was immersed in 49% hydrogen fluoride (HF) for 5 minutes, then rinsed with pure water, and the number of defects was counted with an optical microscope, and averaged (13 spots in the plane were observed). 14.1 defects / cm 2 were observed.
- HF hydrogen fluoride
- Example 1 A plurality of SOQ wafers used in Comparative Example 1 were prepared. Mirror polishing (CMP) was performed so that the single crystal silicon film thickness was 60 nm. After cleaning and drying, 40 nm of amorphous silicon was deposited with SiH 4 gas at 560 ° C. under a pressure of 200 mTorr. Thereafter, heat treatment was applied at 700 ° C., 800 ° C., 900 ° C., 1000 ° C., 1100 ° C., and 1200 ° C. for 1 hour. These wafers were subjected to the same HF immersion treatment as in Comparative Example 1, and the number of defects was counted. The results are shown in FIG.
- CMP Mirror polishing
- Example 2 A plurality of SOS wafers used in Comparative Example 2 were prepared. Mirror polishing (CMP) was performed so that the single crystal silicon film thickness was 60 nm. After cleaning and drying, 40 nm of amorphous silicon was deposited with SiH 4 gas at 560 ° C. under a pressure of 200 mTorr. Thereafter, heat treatment was applied at 700 ° C., 800 ° C., 900 ° C., 1000 ° C., 1100 ° C., 1200 ° C., and 1300 ° C. for 1 hour. These wafers were subjected to the same HF immersion treatment as in Comparative Example 2, and the number of defects was counted. The results are shown in FIG.
- CMP Mirror polishing
- Comparative Example 3 One SOQ wafer used in Comparative Example 1 was prepared. Mirror polishing (CMP) was performed so that the film thickness of the single crystal silicon was 60 nm. After cleaning and drying, 40 nm of polysilicon was deposited with SiH 4 gas at 620 ° C. under a pressure of 200 mTorr. Heat treatment was applied for 1 hour at a temperature of 1000 ° C. These wafers were subjected to the same HF immersion treatment as in Comparative Example 1, and the number of defects was counted. The results are shown in FIG. As a result, it was observed that the number of defects was higher than that of Example 1 treated at 1000 ° C. The deposited film was found to be unsuitable for polysilicon.
- CMP Mirror polishing
- Comparative Example 4 One SOS wafer used in Comparative Example 2 was prepared. Mirror polishing (CMP) is performed so that the single crystal silicon film thickness is 60 nm, and after cleaning and drying, polysilicon (average particle size: 0.1 ⁇ m or less) is formed with SiH 4 gas at a pressure of 200 mTorr at 620 ° C. to 40 nm. Deposited. Heat treatment was applied for 1 hour at a temperature of 1000 ° C. These wafers were subjected to the same HF immersion treatment as in Comparative Example 1, and the number of defects was counted. The results are shown in FIG. As a result, it was observed that the number of defects was higher than that of Example 2 treated at 1000 ° C. The deposited film was found to be unsuitable for polysilicon.
- CMP Mirror polishing
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Abstract
Description
但し、SOQ、SOSなどのウェーハを作製するためには、熱膨張率が大きく異なる異種材料を貼り合せることから、SOIウェーハ作製に広く用いられているSOITEC法を用いることが出来ないという問題がある。
SOITEC法においては、二枚のウェーハを貼り合わせた後に、結合強度を高めるために450℃~500℃の熱処理を加える必要があり、ハンドル基板としてシリコンを採用するSOIにおいては2枚のシリコンウェーハを貼り合わせるので問題は無いが、SOQ,SOSウェーハでは、熱処理を加える際に貼り合わせウェーハが割れてしまうという問題がある。シリコン、石英、サファイアの膨張係数は、それぞれ2.6x10-6/K,0.56x10-6/K,5.8x10-6/Kである。
一般にイオン注入などで生じたダメージを回復する為に熱処理を加えることはよく知られている。例えば、シリコンウェーハに酸素イオンを注入し、然る後に高温(1300℃)程度の熱を長時間加えるSIMOX法などである。しかしこの方法では、長時間(6時間~12時間)・高温のプロセスが必要であり、石英はその温度に耐えられない(ガラス転移温度は1050℃程度)。また、サファイアは耐熱性に優れるものの、900℃以上の熱処理を長時間加えることに起因してサファイアからのアルミの拡散が懸念される。
すなわち、本発明にかかる貼り合わせ基板の製造方法は、耐熱温度が800℃以上である材料から選択されるハンドル基板上に貼り合わせ法により単結晶シリコン層を形成し貼り合わせ基板を得る工程と、該貼り合わせ基板の単結晶シリコン層上にアモルファスシリコンを堆積する工程と、800℃以上の熱処理を加える工程とを含む方法である。
本発明の方法の一連の工程を図1に示す。
まず、貼り合わせ法により、サファイア、石英等の耐熱温度が800℃以上の材料から選択されるハンドル基板3上に単結晶シリコン層5が形成された貼り合わせ基板10をそれぞれ用意する(工程a)。
貼り合わせ基板の製造方法としては特に限定されないが、例えば、ハンドル基板と単結晶シリコン基板とを貼り合わせた後、(1)不活性ガス雰囲気下500℃程度で熱処理を行い、結晶の再配列効果と注入した水素の気泡の凝集効果により熱剥離を行う方法;(2)貼り合わせ基板の両面間で温度差をつけることにより、水素イオン注入界面で剥離を行う方法;(3)単結晶シリコンに水素イオン(H+)または水素分子イオン(H2 +)を注入したのち、該単結晶シリコンのイオン注入した表面またはハンドル基板の表面をオゾン水処理、UVオゾン処理、イオンビーム処理またはプラズマ処理によって活性化処理して貼り合わせ、イオン注入層界面にて機械的剥離および/または光照射剥離(好ましくは400nm以上700nm以下のレーザー光または該波長域に極大強度を有するハロゲンランプ光やキセノンランプ光)を行う方法等により得ることができる。
耐熱温度が800℃以上の材料とは、800℃の熱処理を経ても、大きな変形を伴わない状態である材料をいう。石英などの非晶質の材料ではガラス転移温度などで定義することも可能である(石英のガラス転移温度は1050℃付近である)。サファイアのような結晶材料は融点と置き換えることも可能である(サファイアの融点は2050℃付近である)。
ハンドル基板3は、可視光域(400nm以上700nm)において透明であっても不透明であってもよく、上述したサファイア、石英のほかにも例えば、シリコン、酸化膜付きシリコン、炭化ケイ素、窒化アルミニウムを採用することができる。
単結晶シリコン層5の好ましい層厚の目安としては、後述の研磨工程を経る場合は、研磨代を考慮して例えば、20nm~500nmとすることができ、研磨工程を経ない場合は、50nm~600nmとすることができる。
CMP研磨は、表面を鏡面化するために行うので、通常は30nm以上の研磨を行うのが一般的である。
上記CMP研磨および鏡面仕上げ研磨の後、RCA洗浄やスピン洗浄等のウェットプロセスによる洗浄、および/または、UV/オゾン洗浄やHFベーパー洗浄等のドライプロセスによる洗浄を施してもよい。
ここで重要なことは、下地となる層が貼り合わせ法で形成された単結晶シリコンであることと、その上に形成されるシリコン層は完全なアモルファス(非晶質)であることが望ましい点である。堆積されるシリコンにポリシリコン(多結晶)が含まれていると、堆積層はランダムな方位で微小な結晶が存在しているため、このプロセスは上手く働かない。堆積時の温度条件としては、ポリシリコン層が形成されないように600℃以下であることが好ましい。
より好ましい温度上限は、580℃であり、好ましい温度下限は、540℃である。堆積すべきアモルファスシリコンの厚みは好ましくは、20nm~500nmの範囲である。
用いるガス種は、特に限定されないが、例えば、LPCVD法やPECVD法ではSiH4等が挙げられる。スパッタ(PVD)法ではシリコンターゲットを用いることが出来る。
成膜の圧力は、ガス種にもよるが、LPCVDの場合は200mTorr程度である。
熱処理温度の好ましい上限は、ハンドル基板の耐熱性を考慮して定められるが、ハンドル基板が石英の場合ではおよそ1200℃未満、サファイアの場合ではおよそ1300℃未満とすることができる。
熱処理時間としては、ハンドル基板に含まれる原子のマイグレーションを抑制する観点等から、例えば、0.5時間~6時間とすることができる。
貼り合わせ法により作製されたSOQ基板を用意した。単結晶シリコン層の厚さは100nmとした。ウェーハの口径は150mmで厚さは625umである。このウェーハを49%のフッ化水素(HF)に5分間浸漬し、然る後に純水でリンスを行い、光学顕微鏡(倍率50倍)で3.0mm×3.0mmの区画における欠陥数を目視計数したところ、平均して(面内13箇所を観察した)、6.5個/cm2の欠陥が観察された。
貼り合わせ法により作製されたSOS基板を用意した。単結晶シリコン層の厚さは100nmとした。BOX層の厚さを200nmとした。ウェーハの口径は150mmで厚さは600umである。このウェーハを49%のフッ化水素(HF)に5分間浸漬し、然る後に純水でリンスを行い、光学顕微鏡で欠陥数を数えたところ、平均して(面内13箇所を観察した)、14.1個/cm2の欠陥が観察された。
比較例1で用いたSOQウェーハを複数枚用意した。単結晶シリコン膜厚を60nmとなるように鏡面研磨(CMP)を行い、洗浄・乾燥の後、200mTorrの圧力で560℃でSiH4ガスによりアモルファスシリコンを40nm堆積した。然る後に700℃、800℃、900℃、1000℃、1100℃、1200℃の温度で熱処理を1時間加えた。これらのウェーハを比較例1と同様のHF浸漬処理を行い、欠陥数を数えた。結果を図2および表1に示す。
比較例2で用いたSOSウェーハを複数枚用意した。単結晶シリコン膜厚を60nmとなるように鏡面研磨(CMP)を行い、洗浄・乾燥の後、200mTorrの圧力で560℃でSiH4ガスによりアモルファスシリコンを40nm堆積した。然る後に700℃、800℃、900℃、1000℃、1100℃、1200℃、1300℃の温度で熱処理を1時間加えた。これらのウェーハを比較例2と同様のHF浸漬処理を行い、欠陥数を数えた。結果を図3および表2に示す。
比較例1で用いたSOQウェーハを1枚用意した。単結晶シリコン膜厚を60nmとなるように鏡面研磨(CMP)を行い、洗浄・乾燥の後、200mTorrの圧力で620℃でSiH4ガスによりポリシリコンを40nm堆積した。1000℃の温度で熱処理を1時間加えた。これらのウェーハを比較例1と同様のHF浸漬処理を行い、欠陥数を数えた。結果を図4に示す。結果として実施例1の1000℃処理のものと比較し、欠陥数が高いことが観察された。堆積する膜はポリシリコンでは不適であることが判明した。
比較例2で用いたSOSウェーハを1枚用意した。単結晶シリコン膜厚を60nmとなるように鏡面研磨(CMP)を行い、洗浄・乾燥の後、200mTorrの圧力で620℃でSiH4ガスによりポリシリコン(平均粒径:0.1μm以下)を40nm堆積した。1000℃の温度で熱処理を1時間加えた。これらのウェーハを比較例1と同様のHF浸漬処理を行い、欠陥数を数えた。結果を図5に示す。結果として実施例2の1000℃処理のものと比較し、欠陥数が高いことが観察された。堆積する膜はポリシリコンでは不適であることが判明した。
3 ハンドル基板
5 単結晶シリコン層
7 アモルファスシリコン
9 単結晶シリコン被覆層
10 貼り合わせ基板
Claims (5)
- 耐熱温度が800℃以上である材料から選択されるハンドル基板上に貼り合わせ法により単結晶シリコン層を形成し貼り合わせ基板を得る工程と、
該貼り合わせ基板の単結晶シリコン層上にアモルファスシリコンを堆積する工程と、
800℃以上の熱処理を加える工程とを含むSOIウェーハの製造方法。 - 前記ハンドル基板が、石英基板であり、前記熱処理温度が、1200℃未満であることを特徴とする請求項1に記載のSOIウェーハの製造方法。
- 前記ハンドル基板が、サファイア基板であり、前記熱処理温度が、1300℃未満であることを特徴とする請求項1に記載のSOIウェーハの製造方法。
- 前記ハンドル基板の材料が、シリコン、酸化膜付きシリコン、炭化ケイ素または窒化アルミニウムであることを特徴とする請求項1に記載のSOIウェーハの製造方法。
- 前記アモルファスシリコンの堆積が、低圧化学気相成長法、物理気相成長法またはプラズマ化学気相成長法により行われることを特徴とする請求項1ないし4のいずれかに記載のSOIウェーハの製造方法。
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