WO2011104861A1 - Structure d'étanchéité pour robinet-vanne - Google Patents

Structure d'étanchéité pour robinet-vanne Download PDF

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Publication number
WO2011104861A1
WO2011104861A1 PCT/JP2010/053079 JP2010053079W WO2011104861A1 WO 2011104861 A1 WO2011104861 A1 WO 2011104861A1 JP 2010053079 W JP2010053079 W JP 2010053079W WO 2011104861 A1 WO2011104861 A1 WO 2011104861A1
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WO
WIPO (PCT)
Prior art keywords
seal
pressing
receiving surface
gate
sheet
Prior art date
Application number
PCT/JP2010/053079
Other languages
English (en)
Japanese (ja)
Inventor
秀彦 吉田
Original Assignee
入江工研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 入江工研株式会社 filed Critical 入江工研株式会社
Priority to KR1020127019052A priority Critical patent/KR101458167B1/ko
Priority to PCT/JP2010/053079 priority patent/WO2011104861A1/fr
Priority to CN201080062432.5A priority patent/CN102762905B/zh
Priority to JP2012501590A priority patent/JP5514893B2/ja
Publication of WO2011104861A1 publication Critical patent/WO2011104861A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/12—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with wedge-shaped arrangements of sealing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details

Definitions

  • the present invention relates to a sealing structure of a gate valve for sealing a sheet material such as an electronic paper, an organic EL, a thin film solar cell, a color filter of a liquid crystal display and other sheet members. It is intended to improve the sealing performance of the valve.
  • the sheet-like member mentioned above is intermittently transferred into a vacuum chamber or a closed chamber (hereinafter both are referred to as a "chamber"), and the member surface of the sheet-like member stopped in the chamber is PVD or CVD or the like
  • a vacuum chamber or a closed chamber hereinafter both are referred to as a "chamber”
  • the member surface of the sheet-like member stopped in the chamber is PVD or CVD or the like
  • a gate valve is installed at an inlet and an outlet of a chamber evacuated by a vacuum pump.
  • the gate valve sandwiches the sheet-like member and seals the member surface, thereby separating the inside of the chamber from the outside thereof and maintaining the inside of the chamber in vacuum.
  • patent document 1 (refer FIG. 2 and FIG. 3 of the patent document 1), for example.
  • the gate valve (hereinafter referred to as "conventional gate valve”) disclosed in the same document 1 comprises an elastic cylindrical body (35) through which a sheet-like member is inserted and upper and lower pistons which elastically deform the elastic cylindrical body (35) in the radial direction. And (71A, 71B) (see FIGS. 2 and 3 of the same document).
  • the elastic cylinder (35) is bent inward by the upper and lower pistons (71A, 71B), and the sheet-like member (10) is sandwiched and held by the bent elastic cylinder (35).
  • the both surfaces of the sheet-like member (10) are sealed by the inner surface of the elastic cylinder (35).
  • the sheet-like member (10) when the sheet-like member (10) is sandwiched by the elastic cylinder (35), the sheet-like member may be deformed with no difference in hardness between the upper and lower sides of the elastic cylinder (35).
  • the elastic cylinder (35) must be connected to the upper piston (71A) and the lower piston (71B) respectively, and when it becomes necessary to replace the elastic cylinder (35) for maintenance etc. Very time-consuming.
  • a minute gap is always formed at both ends of the elastic cylindrical body (35) and the sheet-like member (10). It is difficult to evacuate the inside of the chamber with a table.
  • differential evacuation chamber, gate valve and vacuum pump may be added separately from the gate valve provided in the chamber, and differential evacuation may be considered. Has the disadvantage of becoming large.
  • the present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a sealing structure of a gate valve suitable for obtaining a gate valve having a good sealing property and maintainability in a compact configuration. It is.
  • the present invention is a seal structure of a gate valve for sandwiching and sealing a sheet-like member, and a pressing member having a pressing surface, and a receiving member having a receiving surface opposed to the pressing surface.
  • An annular first sealing member interposed between the receiving surface and the pressing surface and sealing the gap around the opening end of the gate; and the receiving surface receiving the pressing surface.
  • the second seal adjacent to the first seal in a pressed state, and the pressing surface, the receiving surface, the first and second seals, and the pressing when the pressing surface is pressed against the receiving surface
  • the first seal member is attached to the pressing surface
  • the second seal member is attached to the same pressing surface adjacent to the first seal member, or the first seal member is attached to the receiving surface, the second seal
  • the material may be configured to be attached to the same receiving surface adjacent to the first seal material.
  • the first seal member is attached to the pressing surface
  • the second seal member is attached to the receiving surface
  • the second seal on the receiving surface is the first seal of the pressing surface.
  • the first seal member is attached to the receiving surface
  • the second seal member is attached to the pressing surface
  • the second seal of the pressing surface is pressed when the pressing surface is pressed against the receiving surface. It is also possible to employ a configuration in which the material is disposed adjacent to the first seal on the receiving surface.
  • the pressing surface and the receiving surface have a surface substantially parallel to the member surface of the sheet-like member passed through the gate and a surface inclined with respect to the member surface, and the respective substantially parallel surfaces.
  • the first sealing material is attached to the pressing surface or the inclined surface of the receiving surface, and the second sealing material is on the pressing surface or the receiving surface, with the inclined surfaces facing each other.
  • a configuration of attaching to substantially parallel surfaces may be adopted.
  • the inclined surface may be flat.
  • an inexpensive commercially available O-ring is used as the first seal member according to the configuration in which the inclined surface is flat. What can be done, and if a seal groove such as a dovetail groove is used as a means for attaching the first seal member to such a plane, the seal groove may be processed into a plane, so that the seal groove can be formed easily and inexpensively, etc. Thus, the cost of the entire gate valve can be reduced.
  • the first seal member is disposed in a flat surface according to the configuration in which the inclined surface is flat.
  • the gate valve of FIG. 1 WHEREIN: Explanatory drawing of the space used as the differential pressure chamber of a differential exhaust seal
  • the top view of the press member which comprises the gate valve of FIG. The top view of the receiving member which comprises the gate valve of FIG.
  • the conceptual diagram of the vacuum processing apparatus which has a vacuum chamber with a gate valve.
  • FIG. 1 is a cross-sectional view of a gate valve (open state) to which the present invention is applied
  • FIG. 2 is a cross-sectional view when the gate valve of FIG. 1 is in a closed state
  • FIG. 4 is a plan view of a pressing member constituting the gate valve of FIG.
  • FIG. 6 is an explanatory view of the positional relationship between the first and second seal members, the differential exhaust passage, and the sheet-like member which constitute the gate valve of FIG.
  • the present gate valve GV shown in FIG. 1 is a gate valve which sandwiches and seals a sheet-like member W, and includes a pressing member 2 having a pressing surface 1 and a receiving member 4 having a receiving surface 3 opposed to the pressing surface 1.
  • An annular first seal member 6 which is interposed between the pressing surface 1 and the receiving surface 3 and seals the gap around the opening end of the gate 5, and the pressing surface 1
  • the second seal member 7 adjacent to the first seal member 6 when pressed against the receiving surface 3 (see FIG. 2), and the pressing surface 1 and the receiving surface 3 when the pressing surface 1 is pressed against the receiving surface 3
  • a space 8 see FIGS.
  • Both the pressing surface 1 of the pressing member 2 and the receiving surface 3 of the receiving member 4 are flat surfaces 1A and 3A substantially parallel to the member surface W1 or W2 of the sheet-like member W as shown in FIG. It has planes 1B and 3B inclined with respect to the member surface W1 or W2 of W, and the substantially parallel planes 1A and 3A face each other, and the inclined planes 1B and 3B face each other It is supposed to be.
  • the boundary 3C is a curved surface having a curvature radius larger than the curved surface of the tip of the first seal 6 It is formed to be
  • the boundary 3 ⁇ / b> C may be formed to be a curved surface having a radius of curvature equivalent to the curved surface at the tip of the first seal member 6.
  • a seal groove 10 (see FIG. 3) formed of a dovetail groove is formed annularly as an example of a mounting means of the first seal member 6. Since the forming process of the annular seal groove 10 is performed on the flat surface 1B, it is easy and inexpensive and greatly contributes to the cost reduction of the entire gate valve GV. Further, in the substantially parallel flat surface 1A of the pressing surface 1, a seal groove 11 formed of a dovetail groove is formed as an example of a mounting means of the second seal member 7. Since the forming process of the seal groove 11 is also performed on the flat surface 1A, it is easy and inexpensive.
  • the pressing member 2 is attached to the tip of the elevating shaft 12, and the pressing surface 1 of the pressing member 2 is pressed against the receiving surface 3 of the receiving member 4 by the upward movement of the elevating shaft 12. Further, the pressing surface 1 of the pressing member 2 is separated from the receiving surface 3 of the receiving member 4 by the lowering operation of the elevating shaft 12.
  • the gate 5 is a hole which is horizontally drilled from the rear surface of the receiving member 4 toward the inclined flat surface 3B of the receiving surface 3 and is like a low pressure chamber (for example, high vacuum chamber) and a high pressure chamber (for example, atmospheric pressure chamber) Function as a passage connecting two chambers with a pressure difference.
  • the sheet-like member W located in one chamber can advance to the other chamber by passing through the gate 5. The same is true when going from the other room to one room.
  • one end of the gate 5 opened in the receiving surface 3 is formed to be flat and continuous to the substantially parallel flat surface 3A of the receiving surface 3 without any step.
  • one end of the gate 5 opened in the receiving surface 3 communicates with the high vacuum chamber, and the other end of the gate 5 communicates with the atmospheric pressure chamber.
  • the chamber and the atmospheric pressure chamber are connected through the gate 5 and a configuration in which the sheet-like member W is transferred from the atmospheric pressure chamber to the high vacuum chamber through the gate 5 are adopted, these configurations are limited There is nothing to do.
  • a configuration in which one end side of the gate 5 communicates with the high vacuum chamber and the other end side of the gate 5 communicates with the atmospheric pressure chamber may be employed.
  • the first seal member 6 is made of a commercially available O-ring (see FIG. 4) having a curved front end, and is attached to the inclined flat surface 1B of the pressing surface 1 by fitting into the seal groove 10 described above. is there. Thereby, the first seal member 6 is provided to be inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5. Then, in the present gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. 2, the upper portion of the first seal member 6 thus inclined is one member surface W1 of the sheet-like member W. It is configured to abut on.
  • the first seal material 6 can also be formed by a method of applying a seal material to the seal groove 10.
  • a sealing material other than a commercially available O-ring can be employed as the first sealing material 6 if it is an annular sealing material.
  • the second seal member 7 is made of an elastic member such as rubber or the like, and is fitted into the seal groove 11 described above, so that the second seal member 7 is adjacent to the first seal member 6 and substantially parallel flat 1A of the pressing surface 1. It is attached. Thereby, the second sealing material 7 is provided so as to be substantially parallel to the member surface W1 or W2 of the sheet-like member W. And in this gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. It is configured to abut on.
  • the second seal material 7 can also be formed by a method of applying a seal material to the seal groove 11.
  • the second sealing material 7 is formed so as to protrude sufficiently from both sides in the width direction of the sheet-like member W passed through the gate 5. Further, as shown in FIG. 4, the second seal member 7 is bent at both ends 7A and 7B and connected to the side surface of the first seal member 6 to form an elongated gap with the first seal member 6 (see FIG. Hereinafter, the “sealing material gap 13” is formed.
  • the upper surface of the sealing material gap 13 is closed by the receiving surface 3 and the member surface of the sheet-like member W when the pressing surface 1 is pressed against the receiving surface 3 through the sheet-like member W through the gate 5
  • the space 8 (see FIG. 3), that is, the space 8 surrounded by the pressing surface 1, the receiving surface 3, the first and second seals 6, 7 and the sheet-like member W passed through the gate 5 is formed.
  • the differential exhaust passage 9 is constituted by an exhaust groove 9A formed in the receiving member 4 and an exhaust hole 9B.
  • the exhaust groove 9A is formed in a substantially parallel flat surface 3A of the receiving surface 3 and has a length sufficiently protruding from both sides in the width direction of the sheet member W passed through the gate 5 as shown in FIG.
  • the exhaust groove 9A is provided to face the seal material gap 13 described above, and when the pressing surface 1 is pressed against the receiving surface 3, it communicates with the seal material gap 13 as shown in FIG. It is supposed to be.
  • One end of the exhaust hole 9B opens to the exhaust groove 9A, and the other end of the exhaust hole 9B is connected to an exhaust pump (not shown). Further, in the gate valve GV of FIG. 1, one end of the exhaust hole 9B is opened at the protruding portion of the exhaust groove 9A as described above (see FIG. 6), but the present invention is not limited to this opening position. One end of the exhaust hole 9B may be connected to the exhaust groove 9A by being opened at any position of the exhaust groove 9A.
  • the gate 5 of the gate valve GV shown in FIG. 1 is open.
  • the valve operation switch (not shown) is turned on.
  • the pressing member 2 approaches the receiving member 4 by the upward movement of the elevating shaft 12, and the pressing surface 1 is pressed against the receiving surface 3 with a predetermined pressure as shown in FIG.
  • the pressing surface 1 blocks the open end of the gate 5 and the gate 5 is closed.
  • the upper portion of the first seal member 6 which is inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5 and the member surface W1 or W2 are approximately parallel.
  • the space 8 is evacuated through the differential exhaust passage 9 to be lower in pressure than the pressure near the opening end of the gate 5 (approximately the same as the pressure in the atmospheric pressure chamber).
  • the first seal member 6 seals the gap around the opening end of the gate 5 and at the same time the minute gap around the sheet member W passed through the gate 5 (specific In particular, the minute gaps G on both sides in the width direction of the sheet-like member W, and the gap between the other member surface W2 of the sheet-like member W and the receiving surface 3 in direct contact therewith are differentially discharged.
  • the minute gaps G on both sides in the width direction of the sheet-like member W, and the gap between the other member surface W2 of the sheet-like member W and the receiving surface 3 in direct contact therewith are differentially discharged.
  • an inexpensive commercially available O-ring could be used as the first seal member 6 by adopting a configuration in which the annular first seal member 6 is attached to the flat surface 1B.
  • the seal groove 10 such as a dovetail groove is used as a means for attaching the first seal member 6 to the flat surface 1B
  • the seal groove 10 may be processed into the flat surface 1B. Cost reduction of the entire gate valve GV is achieved.
  • the first seal member 6 is disposed on the flat surface 1B by adopting the configuration in which the first seal member 6 is attached to the flat surface 1B, the first seal member 6 is removed. Maintenance work such as inspection and replacement is easy, and improvement of maintainability is also planned.
  • FIG. 8 shows another embodiment of the second seal member 7.
  • the second seal member 7 in the same figure has a structure in which a commercially available O-ring having a diameter slightly larger than that of the first seal member 6 is disposed outside the first seal member 6.
  • the second seal material 7 of this structure can form a space similar to the space 8 of FIG. 3 and functions as a differential pressure chamber of the differential exhaust seal by exhausting such a space by the differential exhaust passage 9. Therefore, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG.
  • the illustration is omitted, even if a commercially available O-ring slightly smaller in diameter than the first seal member 6 is disposed inside the first seal member 6 as the third seal member, the same space as the space 8 of FIG. It can be formed.
  • the first seal member 6 is attached to the pressing surface 1
  • the second seal member 7 is attached to the same pressing surface 1 adjacent to the first seal member 6, but the gate of FIG.
  • the first sealing member 6 may be attached to the receiving surface 3
  • the second sealing member 7 may be attached to the same receiving surface 3 adjacent to the first sealing member 6.
  • the first sealing member 6 is attached to the pressing surface 1
  • the second sealing member 7 is attached to the receiving surface 3
  • the pressing surface 1 is pressed against the receiving surface 3.
  • the second seal material 7 of the receiving surface 3 may be arranged adjacent to the first seal material 6 of the pressing surface 1.
  • the configuration in which both ends 7A and 7B (see FIG. 4) of the second sealing material 6 straddle the first sealing material 6 is adopted or the second sealing material 7 is not shown.
  • the first seal member 6 is attached to the receiving surface 3
  • the second seal member 7 is attached to the pressing surface 1, and the pressing surface 1 is pressed against the receiving surface 3
  • the second seal 7 of the pressing surface 1 may be disposed adjacent to the first seal 6 of the receiving surface 3.
  • a configuration in which both ends 7A and 7B (see FIG. 4) of the second sealing material 6 straddle the first sealing material 6 is adopted or the second seal
  • a space 8 similar to the space 8 of FIG. 3 is formed. Since the pressure sensor exhausts through the differential exhaust passage 9 and functions as a differential pressure chamber of the differential exhaust seal, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG.
  • the differential exhaust passage 9 including the exhaust groove 9A and the exhaust hole 9B is formed in the receiving member 4. It may be formed, and a configuration in which the differential exhaust passage 9 is provided in both the receiving member 4 and the pressing member 2 may be adopted.
  • the pressing member 2 is disposed below the sheet-like member W in FIGS. 1 to 3 and 9 to 11, the receiving member 4 and the pressing member 2 may be turned upside down.
  • the substantially parallel flat surface 1A or inclined flat surface 1B of the pressing surface 1, and the substantially parallel flat surface 3A or inclined flat surface 3B of the receiving surface 3 may be curved surfaces.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne une structure d'étanchéité pour un robinet-vanne, qui est adaptée à l'obtention d'un robinet-vanne composé d'éléments compacts et qui présente une excellente capacité d'étanchéité. Un robinet-vanne (GV) devant être fermé hermétiquement au moyen d'un élément en forme de feuille (W) est composé d'un élément de pression (2) comprenant une surface de pression (1) ; d'un élément de réception (4) comprenant une surface de réception (3) opposée à la surface de pression (1) ; d'une vanne (5) comprenant une extrémité ouverte en direction de la surface de réception (3) ; d'un premier élément d'étanchéité annulaire (6) qui assure l'étanchéité d'un espace libre autour de l'extrémité ouverte de la vanne (5) ; d'un second élément d'étanchéité (7) qui est adjacent au premier élément d'étanchéité (6) lorsque la surface de pression (1) est pressée sur la surface de réception (3) ; d'un espace (8) entouré par la surface de pression (1), la surface de réception (3), les premier et second éléments d'étanchéité (6, 7), et l'élément en forme de feuille (W) traversant la vanne (5) lorsque la surface de pression (1) est pressée sur la surface de réception (3) ; et d'un passage d'évacuation différentielle (9) qui est en communication avec l'espace (8). L'espace (8) est évacué par le biais du passage d'évacuation différentielle (9) et, par conséquent, fonctionne comme une chambre de pression différentielle pour un joint d'évacuation différentielle permettant d'assurer l'étanchéité d'un espace libre microscopique autour de l'élément en forme de feuille (W) au moyen d'une évacuation différentielle.
PCT/JP2010/053079 2010-02-26 2010-02-26 Structure d'étanchéité pour robinet-vanne WO2011104861A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020127019052A KR101458167B1 (ko) 2010-02-26 2010-02-26 게이트 밸브의 시일 구조
PCT/JP2010/053079 WO2011104861A1 (fr) 2010-02-26 2010-02-26 Structure d'étanchéité pour robinet-vanne
CN201080062432.5A CN102762905B (zh) 2010-02-26 2010-02-26 插板阀的密封结构
JP2012501590A JP5514893B2 (ja) 2010-02-26 2010-02-26 ゲートバルブのシール構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/053079 WO2011104861A1 (fr) 2010-02-26 2010-02-26 Structure d'étanchéité pour robinet-vanne

Publications (1)

Publication Number Publication Date
WO2011104861A1 true WO2011104861A1 (fr) 2011-09-01

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PCT/JP2010/053079 WO2011104861A1 (fr) 2010-02-26 2010-02-26 Structure d'étanchéité pour robinet-vanne

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Country Link
JP (1) JP5514893B2 (fr)
KR (1) KR101458167B1 (fr)
CN (1) CN102762905B (fr)
WO (1) WO2011104861A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2912359A4 (fr) * 2012-10-24 2016-06-29 Cameron Int Corp Garniture à coin pour soupape

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418149U (fr) * 1987-07-20 1989-01-30
JPH02369U (fr) * 1988-06-15 1990-01-05
JPH05251361A (ja) * 1992-03-05 1993-09-28 Canon Inc ゲート及び真空処理装置
JP2000216094A (ja) * 1999-01-27 2000-08-04 Fuji Electric Co Ltd 薄膜製造装置
JP2000232069A (ja) * 1999-02-09 2000-08-22 Fuji Electric Co Ltd 薄膜製造装置および薄膜製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3106172B2 (ja) * 1991-02-26 2000-11-06 東京エレクトロン株式会社 熱処理装置の封止構造
JP2708695B2 (ja) * 1993-06-29 1998-02-04 株式会社日本製鋼所 真空用ゲートバルブの防塵方法及び真空用ゲートバルブ
JP4714714B2 (ja) * 2007-07-30 2011-06-29 株式会社ブイテックス 気密を保持するゲートバルブ、このゲートバルブを使用したフィルム製造装置およびフィルム製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418149U (fr) * 1987-07-20 1989-01-30
JPH02369U (fr) * 1988-06-15 1990-01-05
JPH05251361A (ja) * 1992-03-05 1993-09-28 Canon Inc ゲート及び真空処理装置
JP2000216094A (ja) * 1999-01-27 2000-08-04 Fuji Electric Co Ltd 薄膜製造装置
JP2000232069A (ja) * 1999-02-09 2000-08-22 Fuji Electric Co Ltd 薄膜製造装置および薄膜製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2912359A4 (fr) * 2012-10-24 2016-06-29 Cameron Int Corp Garniture à coin pour soupape

Also Published As

Publication number Publication date
KR101458167B1 (ko) 2014-11-03
CN102762905B (zh) 2015-06-10
KR20120118847A (ko) 2012-10-29
CN102762905A (zh) 2012-10-31
JPWO2011104861A1 (ja) 2013-06-17
JP5514893B2 (ja) 2014-06-04

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